CN212229092U - Equipment and key structure for detecting semiconductor - Google Patents
Equipment and key structure for detecting semiconductor Download PDFInfo
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- CN212229092U CN212229092U CN202020673887.1U CN202020673887U CN212229092U CN 212229092 U CN212229092 U CN 212229092U CN 202020673887 U CN202020673887 U CN 202020673887U CN 212229092 U CN212229092 U CN 212229092U
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Abstract
The utility model discloses a device and a key structure for detecting semiconductors, wherein the device comprises a detection table, a conveying belt, an appearance detector, a turnover device, a steering roller, a belt, a steering roller, a turnover wheel, a bracket, a brush, an electrical detector, an electromagnet, an armature, a reset spring, a connecting rod, a probe card, a buffer spring, a pressure rod, a guide plate, a steering plate, a motor I and a collection frame; the key structure comprises a conveying mechanism, a detection mechanism and a collection mechanism. The utility model has simple structure and rapid detection, can turn the semiconductor through the arrangement of the turning device, can inspect the two sides of the semiconductor, avoids the incomplete detection of the semiconductor and improves the comprehensiveness of the solid detection; through the setting of electro-magnet and probe card, carry out electrical test to the semiconductor, improve the convenience that detects, the collection frame of rear side can be convenient classify, makes things convenient for operation on next step.
Description
Technical Field
The utility model relates to a check out test set specifically is an equipment for detecting semiconductor, belongs to semiconductor detection application technical field.
Background
Semiconductor refers to a material with conductivity between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement.
In the production of semiconductor devices, from a semiconductor single crystal wafer to a final product, several tens or even hundreds of processes are required. In order to ensure that the product performance is qualified, stable and reliable, and has high yield, strict specific requirements are required for all process steps according to the production conditions of various products, such as the detection of the appearance integrity of the semiconductor single chip and the detection of the electrical performance of the semiconductor single chip. Therefore, the existing detection device can only detect a single surface, and the back surface is lack of a detection means and an automatic classification and collection device after detection. Accordingly, an apparatus for inspecting a semiconductor is proposed to address the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide an apparatus for inspecting a semiconductor in order to solve the above-mentioned problems.
The utility model discloses a following technical scheme realizes above-mentioned purpose, an equipment for detecting semiconductor, including transport mechanism, detection mechanism and the collection mechanism who detects the platform upside.
The conveying mechanism comprises a conveying belt, a steering roller and a turnover device, the conveying belt is positioned on the upper side of the detection table, the left end of the conveying belt is connected with a motor, the steering roller is positioned in the middle of the conveying belt, the steering roller is connected with the turnover device through a belt, the turnover device comprises the steering roller and a turnover wheel on the outer side, and the turnover wheel consists of a support and a brush on the outer end;
the detection mechanism comprises an appearance detector, an electrical detector and an electromagnet, the appearance detector is positioned on the left side and the right side of the turnover device, the appearance detector receives signals through a camera and is electrically connected with a control device, the control device comprises a comparison unit for judging, an armature is arranged below the electromagnet and fixed at the upper end of a connecting rod, a reset spring is arranged between the connecting rod and the electromagnet, the lower end of the connecting rod is connected with a plurality of buffer springs, the lower ends of the buffer springs are connected with a probe card, the right side of the connecting rod is connected with a pressure lever, the pressure lever comprises a spring in the middle and a roller at the lower end, and the left;
the collecting mechanism comprises a guide plate, a steering plate and two collecting frames, the guide plate is fixedly connected to the right side of the detection table, the steering plate is located below the guide plate, the axis of the steering plate is connected to a rotating shaft of a first motor, the first motor is fixed to the stand column, and the two collecting frames are located on the right lower side of the steering plate.
Preferably, the upper side of the conveyer belt is lower than the upper side of the detection table, that is, the front side and the rear side of the conveyer belt are positioned in the table top of the detection table, so that the limiting effect is achieved.
Preferably, the turning roll is provided with three, the middle turning roll is positioned on the upper side of the conveying belt, the turning roll is rotatably connected above the detection table through the upright posts on the front side and the rear side, the support is plate-shaped, and the brush sweeps over the upper sides of the conveying belt and the turning roll to drive the semiconductor to rotate so as to turn over and facilitate later-stage testing.
Preferably, fixing lugs are arranged on the lower sides of the left end and the right end of the base of the electromagnet, and the upper end of the connecting rod is connected below the base in a sliding mode through a convex block to provide a space for the movement of the return spring.
Preferably, a top block is arranged below the probe card, the top block is positioned below the conveying belt and plays a supporting role, and the probe card is electrically connected with the control device and compares the test results.
Preferably, the lower end of the pressure lever is lower than the lower end of the probe card to intercept the semiconductor, and the middle part of the upper side of the steering plate is provided with a bulge to play a guiding role.
The utility model provides a key mechanism for equipment for detecting semiconductor, key structure is transport mechanism, takes, turns to roller and turning device including the transportation, the transportation is taken and is located the upside that detects the platform, and the left end is connected with the motor, turns to the roller and is located the middle part in transportation area, turns to the roller and passes through the belt and connect turning device, turning device is including the trip wheel that changes roller and outside, and the trip wheel comprises the brush of support and outer end.
The utility model provides a key mechanism for equipment for detecting semiconductor, key structure is detection mechanism, including outward appearance detector, electrical detection appearance and electro-magnet, the outward appearance detector is located turning device's the left and right sides, and the outward appearance detector passes through camera received signal, and rethread electric connection controlling means contains the contrast unit among the controlling means, judges, the below of electro-magnet is equipped with armature, and armature is fixed in the connecting rod upper end, is equipped with reset spring between connecting rod and the electro-magnet, and the lower extreme of connecting rod is connected with a plurality of buffer spring, and buffer spring's lower extreme is connected with the probe card, and the right side of connecting rod is connected with the depression bar, the depression bar includes the spring at middle part and the gyro.
The utility model provides a key mechanism for equipment for detecting semiconductor, key structure is collection mechanism, includes guide plate, deflector and collection frame, and guide plate fixed connection is on the right side of examining test table, and the deflector is located the below of guide plate, and the axle center department of deflector connects on the pivot of motor one, and motor one is fixed on the stand, collects the frame and is located the right side below of deflector and is equipped with two.
The utility model has the advantages that:
1. the utility model has simple structure and rapid detection, can turn the semiconductor through the arrangement of the turning device, can inspect the two sides of the semiconductor, avoids the incomplete detection of the semiconductor and improves the comprehensiveness of the solid detection;
2. the utility model discloses a setting of electro-magnet and probe card carries out electrical test to the semiconductor, improves the convenience that detects, and the collection frame of rear side can be convenient classify, convenient operation on next step.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is an enlarged schematic view of A of FIG. 1;
fig. 3 is a schematic perspective view of the middle steering plate of the present invention.
In the figure: 1. a detection table; 2. a conveyor belt; 3. an appearance detector; 4. a turning device; 5. a turning roll; 6. a belt; 7. rotating the roller; 8. a turnover wheel; 9. a support; 10. a brush; 11. an electrical detector; 12. an electromagnet; 13. an armature; 14. a return spring; 15. a connecting rod; 16. a probe card; 17. a buffer spring; 18. a pressure lever; 19. a guide plate; 20. a steering plate; 21. a first motor; 22. and (5) collecting the frame.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Detailed description of the preferred embodiment
The present embodiment is an embodiment of an apparatus for inspecting semiconductors.
Referring to fig. 1 to 3, an apparatus for inspecting a semiconductor includes a transportation mechanism, an inspection mechanism and a collection mechanism on an upper side of an inspection stage 1.
The conveying mechanism comprises a conveying belt 2, a steering roller 5 and a turnover device 4, wherein the conveying belt 2 is positioned on the upper side of the detection table 1, the left end of the conveying belt 2 is connected with a motor, the steering roller 5 is positioned in the middle of the conveying belt 2, the steering roller 5 is connected with the turnover device 4 through a belt 6, the turnover device 4 comprises a steering roller 7 and a turnover wheel 8 on the outer side, and the turnover wheel 8 consists of a support 9 and a brush 10 at the outer end;
the detection mechanism comprises an appearance detector 3, an electrical detector 11 and an electromagnet 12, the appearance detector 3 is positioned on the left side and the right side of the turnover device 4, the appearance detector 3 receives signals through a camera and is electrically connected with a control device, the control device comprises a comparison unit for judging, an armature 13 is arranged below the electromagnet 12, the armature 13 is fixed at the upper end of a connecting rod 15, a reset spring 14 is arranged between the connecting rod 15 and the electromagnet 12, the lower end of the connecting rod 15 is connected with a plurality of buffer springs 17, the lower end of each buffer spring 17 is connected with a probe card 16, the right side of the connecting rod 15 is connected with a pressure lever 18, the pressure lever 18 comprises a spring in the middle and a roller at the lower end, and;
the collecting mechanism comprises a guide plate 19, a steering plate 20 and two collecting frames 22, the guide plate 19 is fixedly connected to the right side of the detection table 1, the steering plate 20 is located below the guide plate 19, the axle center of the steering plate 20 is connected to a rotating shaft of a motor 21, the motor 21 is fixed on the upright post, and the two collecting frames 22 are located at the right lower side of the steering plate 20.
The upside of the conveyer belt 2 is lower than the upside of the detection table 1, namely the front side and the rear side of the conveyer belt 2 are positioned in the table top of the detection table 1 to play a limiting role, three steering rollers 5 are arranged, the middle steering roller 5 is positioned on the upside of the conveyer belt 2, the steering rollers 5 are rotatably connected above the detection table 1 through the upright posts on the front side and the rear side, the support 9 is plate-shaped, the brush 10 sweeps over the upside of the conveyer belt 2 and the steering rollers 5 to drive the semiconductor to rotate and turn over so as to facilitate later-stage testing, fixing lugs are arranged on the lower sides of the left end and the right end of the base of the electromagnet 12, the upper end of the connecting rod 15 is slidably connected below the base through a lug to provide a movable space for a reset spring 14, an ejector block is arranged below the probe card 16 and positioned below the conveyer belt 2 to play a supporting role, the probe card 16 is electrically connected, the lower end of the pressure lever 18 is lower than the lower end of the probe card 16 to intercept the semiconductor, and the middle part of the upper side of the steering plate 20 is provided with a protrusion to guide.
When the utility model is used, semiconductors are placed on the left side of a conveying belt 2 one by one, the conveying belt 2 moves rightwards, the belt 6 drives a turnover device 4 to rotate, the left semiconductors are turned over and conveyed to the right side, the semiconductors are detected through an appearance detection 3, after comparison by a control device, whether the semiconductors are qualified or not is judged, if the semiconductors are unqualified, the semiconductors are directly conveyed to the right side, the steering plate 20 turns to an unqualified collecting frame 22 through the falling of a guide plate 19, after the semiconductors are qualified, an electric telescopic rod extends, a pressure rod 18 abuts against the conveying belt 2, a baffle abuts against the semiconductors, the power-off time of the conveying belt 2 is judged by a right-side appearance detector, meanwhile, an electromagnet 12 is powered off, a connecting rod 15 moves downwards under the action of a reset spring 14, a probe card 16 is driven to be clamped on the semiconductors, if the rotation is qualified, the first motor 21 drives the steering plate 20 to rotate to one side of the qualified collection frame 22, and if the rotation is not qualified, the first motor rotates to one side of the unqualified collection frame 22.
Detailed description of the invention
The present embodiment is an embodiment of an apparatus transporting mechanism for inspecting semiconductors.
Transport mechanism includes transport zone 2, steering roll 5 and turning device 4, transport zone 2 is located the upside that detects platform 1, and the left end is connected with the motor, and steering roll 5 is located transport zone 2's middle part, and steering roll 5 passes through belt 6 and connects turning device 4, turning device 4 is including the turning wheel 8 who changes roller 7 and the outside, and turning wheel 8 comprises the brush 10 of support 9 and outer end.
Detailed description of the preferred embodiment
The present embodiment is an embodiment of an apparatus inspection mechanism for inspecting semiconductors.
The detection mechanism comprises an appearance detector 3, an electrical detector 11 and an electromagnet 12, the appearance detector 3 is located on the left side and the right side of the turnover device 4, the appearance detector 3 receives signals through a camera, the signals are electrically connected with a control device, the control device comprises a comparison unit for judgment, an armature 13 is arranged below the electromagnet 12, the armature 13 is fixed at the upper end of a connecting rod 15, a reset spring 14 is arranged between the connecting rod 15 and the electromagnet 12, the lower end of the connecting rod 15 is connected with a plurality of buffer springs 17, the lower end of each buffer spring 17 is connected with a probe card 16, the right side of the connecting rod 15 is connected with a pressure lever 18, the pressure lever 18 comprises a spring at the middle part and a roller at the lower.
Detailed description of the invention
The present embodiment is an embodiment of an apparatus collecting mechanism for inspecting semiconductors.
The collecting mechanism comprises a guide plate 19, a steering plate 20 and two collecting frames 22, the guide plate 19 is fixedly connected to the right side of the detection table 1, the steering plate 20 is located below the guide plate 19, the axle center of the steering plate 20 is connected to a rotating shaft of a motor 21, the motor 21 is fixed on the upright post, and the two collecting frames 22 are located at the right lower side of the steering plate 20.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (8)
1. An apparatus for inspecting semiconductors, characterized by: comprises a conveying mechanism, a detection mechanism and a collection mechanism which are arranged on the upper side of a detection table (1);
the conveying mechanism comprises a conveying belt (2), a steering roller (5) and a turnover device (4), the conveying belt (2) is located on the upper side of the detection table (1), the left end of the conveying belt is connected with a motor, the steering roller (5) is located in the middle of the conveying belt (2), the steering roller (5) is connected with the turnover device (4) through a belt (6), the turnover device (4) comprises a steering roller (7) and a turnover wheel (8) on the outer side, and the turnover wheel (8) consists of a support (9) and a brush (10) on the outer end;
the detection mechanism comprises an appearance detector (3), an electrical detector (11) and an electromagnet (12), the appearance detector (3) is positioned on the left side and the right side of the turnover device (4), the appearance detector (3) receives signals through a camera and is electrically connected with a control device, the control device comprises a comparison unit, an armature (13) is arranged below the electromagnet (12), the armature (13) is fixed at the upper end of a connecting rod (15), a reset spring (14) is arranged between the connecting rod (15) and the electromagnet (12), the lower end of the connecting rod (15) is connected with a plurality of buffer springs (17), the lower end of each buffer spring (17) is connected with a probe card (16), the right side of the connecting rod (15) is connected with a pressing rod (18), each pressing rod (18) comprises a spring in the middle and a roller at the lower;
the collecting mechanism comprises a guide plate (19), a steering plate (20) and collecting frames (22), the guide plate (19) is fixedly connected to the right side of the detection table (1), the steering plate (20) is located below the guide plate (19), the axis of the steering plate (20) is connected to a rotating shaft of a first motor (21), the first motor (21) is fixed to an upright post, and the collecting frames (22) are located on the right lower side of the steering plate (20) and are provided with two.
2. The apparatus for inspecting semiconductors according to claim 1, wherein: the upper side of the conveying belt (2) is lower than the upper side of the detection table (1), namely the front side and the rear side of the conveying belt (2) are positioned in the table surface of the detection table (1).
3. The apparatus for inspecting semiconductors according to claim 1, wherein: the three steering rollers (5) are arranged, the middle steering roller (5) is positioned on the upper side of the conveying belt (2), the steering rollers (5) are rotatably connected above the detection platform (1) through upright posts on the front side and the rear side, the support (9) is plate-shaped, and the brushes (10) sweep over the upper sides of the conveying belt (2) and the steering rollers (5).
4. The apparatus for inspecting semiconductors according to claim 1, wherein: fixing lugs are arranged on the lower sides of the left end and the right end of a base of the electromagnet (12), and the upper end of the connecting rod (15) is connected below the base in a sliding mode through a convex block.
5. The apparatus for inspecting semiconductors according to claim 1, wherein: and a top block is arranged below the probe card (16), the top block is positioned below the conveying belt (2), and the probe card (16) is electrically connected with the control device.
6. The apparatus for inspecting semiconductors according to claim 1, wherein: the lower end of the pressure lever (18) is lower than the lower end of the probe card (16), and the middle part of the upper side of the steering plate (20) is provided with a bulge.
7. A critical structure for a device for testing semiconductors, characterized by: the key structure is transport mechanism, including transport area (2), turn to roller (5) and turning device (4), transport area (2) are located the upside that detects platform (1), and the left end is connected with the motor, turn to roller (5) and are located the middle part of transport area (2), turn to roller (5) and connect turning device (4) through belt (6), turning device (4) are including turning over upset wheel (8) in roller (7) and the outside, and upset wheel (8) comprise brush (10) of support (9) and outer end.
8. A critical structure for a device for testing semiconductors, characterized by: the key structure is detection mechanism, including appearance detector (3), electrical detection appearance (11) and electro-magnet (12), appearance detector (3) are located the left and right sides of turning device (4), and appearance detector (3) are through camera received signal, rethread electric connection controlling means, contain the contrast unit among the controlling means, the below of electro-magnet (12) is equipped with armature (13), and armature (13) are fixed in connecting rod (15) upper end, is equipped with reset spring (14) between connecting rod (15) and electro-magnet (12), and the lower extreme of connecting rod (15) is connected with a plurality of buffer spring (17), and the lower extreme of buffer spring (17) is connected with probe card (16), and the right side of connecting rod (15) is connected with depression bar (18), depression bar (18) include the spring and the gyro wheel of lower extreme in middle part, and the left side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020673887.1U CN212229092U (en) | 2020-04-28 | 2020-04-28 | Equipment and key structure for detecting semiconductor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020673887.1U CN212229092U (en) | 2020-04-28 | 2020-04-28 | Equipment and key structure for detecting semiconductor |
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| CN212229092U true CN212229092U (en) | 2020-12-25 |
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| CN202020673887.1U Active CN212229092U (en) | 2020-04-28 | 2020-04-28 | Equipment and key structure for detecting semiconductor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112763835A (en) * | 2021-01-07 | 2021-05-07 | 广州高慧网络科技有限公司 | Transistor PN junction forward resistance detection device |
| CN113608148A (en) * | 2021-10-09 | 2021-11-05 | 南通腾颢电子有限公司 | Aluminum foil testing device for aluminum electrolytic capacitor |
| CN113640639A (en) * | 2021-08-26 | 2021-11-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
-
2020
- 2020-04-28 CN CN202020673887.1U patent/CN212229092U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112763835A (en) * | 2021-01-07 | 2021-05-07 | 广州高慧网络科技有限公司 | Transistor PN junction forward resistance detection device |
| CN113640639A (en) * | 2021-08-26 | 2021-11-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
| CN113640639B (en) * | 2021-08-26 | 2024-03-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
| CN113608148A (en) * | 2021-10-09 | 2021-11-05 | 南通腾颢电子有限公司 | Aluminum foil testing device for aluminum electrolytic capacitor |
| CN113608148B (en) * | 2021-10-09 | 2021-12-07 | 南通腾颢电子有限公司 | Aluminum foil testing device for aluminum electrolytic capacitor |
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Address after: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee after: Strong Half Conductor (Suzhou) Co.,Ltd. Address before: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee before: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd. |