CN212227718U

CN212227718U - Tube furnace

Info

Publication number: CN212227718U
Application number: CN202020081130.3U
Authority: CN
Inventors: 陈涛; 尹奕炜; 马誉原; 朱长飞
Original assignee: University of Science and Technology of China USTC
Current assignee: University of Science and Technology of China USTC
Priority date: 2020-01-13
Filing date: 2020-01-13
Publication date: 2020-12-25
Anticipated expiration: 2030-01-13

Abstract

The utility model discloses a tube furnace, including quartz capsule and be used for heating the heating element of quartz capsule, the quartz capsule includes outlet duct and two at least intake pipes, and the end of giving vent to anger of all intake pipes all links up with the inlet end of outlet duct is sealed. When the tube furnace works, the heating element is used for heating the quartz tube, and the material to be thermally deposited can be introduced into one or at least two gas inlet pipes according to the requirement, so that the universality of the tube furnace is improved.

Description

Tube furnace

Technical Field

The utility model relates to an experimental apparatus technical field, in particular to tube furnace.

Background

The tube furnace is a heating device, and is mostly applied to laboratories of various scientific research institutions as experimental equipment. Can be used in the experiments of sintering, heat treatment, thermal steaming and the like. The furnace has the advantages of simple furnace type, safety, reliability, high temperature control precision, good heat preservation effect, large temperature range, high furnace temperature uniformity and the like.

The tube furnace has been mature in process after years of development, and makes great contribution to various scientific researches. Wherein, in the application as the thermal evaporation experimental equipment, the tube furnace can obtain high-quality deposited films by adjusting the carrier gas and the position of the deposited substrate.

The use of a straight tube in a tube furnace results in the simultaneous deposition of only one material during the thermal deposition process, which results in a less versatile tube furnace

Therefore, how to improve the versatility of the tube furnace is a technical problem to be solved urgently by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a tube furnace, this tube furnace's commonality improves.

In order to achieve the above object, the present invention provides a tube furnace, including quartz capsule and being used for heating the heating element of quartz capsule, the quartz capsule includes outlet duct and two at least intake pipes, all the end of giving vent to anger of intake pipe all with the sealed linking of inlet end of outlet duct.

Preferably, the air outlet pipe and the single air inlet pipe are respectively provided with the heating elements which are in one-to-one correspondence with the air outlet pipe and the single air inlet pipe, and each heating element is heated by an independently arranged heating control device.

Preferably, a thermal insulation layer or a thermal insulation gap is arranged between two adjacent heating elements.

Preferably, the heating element for heating the air inlet pipe is an air inlet heating element, the heating element for heating the air outlet pipe is an air outlet heating element, and the distances between the air outlet heating element and all the air inlet heating elements are equal.

Preferably, the heating element is provided with a protrusion for clamping the wall of the quartz tube.

Preferably, a plurality of the protrusions are arranged on the heating element, and the plurality of the protrusions are symmetrically arranged on two opposite sides of the wall of the quartz tube.

Preferably, the number of the air inlet pipes is two, the two air inlet pipes form a U-shaped pipe, and the two air inlet pipes and the air outlet pipe form a Y-shaped pipe.

Preferably, the inner walls of the air inlet pipe and the air outlet pipe are in smooth transition.

Preferably, a support table for supporting the quartz tube and the heating element is further included.

Preferably, the gas inlet and the gas outlet of the quartz tube are arranged to protrude outwards from the support platform

In the technical solution, the utility model provides a tubular furnace includes the quartz capsule and is used for heating the heating element of quartz capsule, and the quartz capsule includes outlet duct and two at least intake pipes, and the end of giving vent to anger of all intake pipes all links up with the inlet end of outlet duct is sealed. When the tube furnace works, the heating element is used for heating the quartz tube, and thermal deposition materials can be introduced into one or at least two gas inlet tubes according to requirements.

As can be seen from the above description, in the tube furnace provided in the present application, since the quartz tube includes at least two gas inlet tubes, the staff can introduce one or at least two materials to be thermally deposited through the gas inlet tubes as required, thereby improving the versatility of the tube furnace.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a three-dimensional structural view of a tube furnace according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of a tube furnace according to an embodiment of the present invention;

FIG. 3 is a right side view of the tube furnace of FIG. 2;

FIG. 4 is a top plan view of the tube furnace shown in FIG. 3;

FIG. 5 is a view showing the internal structure of the tube furnace shown in FIG. 3;

FIG. 6 is a right side view of the tube furnace shown in FIG. 5.

Wherein in FIGS. 1-6: 1. a quartz tube; 1-1, an air inlet pipe; 1-2, an air outlet pipe; 2. an outlet heating element; 2-1, clamping the air outlet protrusion; 3. a first support table; 4. a second support table; 5. a heating control device; 6. an air intake heating element; 6-1, clamping and protruding the air inlet; 7. a first air inlet; 8. a second air inlet; 9. and an air outlet.

Detailed Description

The core of the utility model is to provide a tube furnace, the commonality of this tube furnace improves.

In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and embodiments.

Please refer to fig. 1 to fig. 6.

In one embodiment, the tube furnace provided by the embodiment of the present invention includes a quartz tube 1 and a heating element for heating the quartz tube 1, the quartz tube 1 includes an outlet tube 1-2 and at least two inlet tubes 1-1, and the outlet ends of all the inlet tubes 1-1 are hermetically connected to the inlet ends of the outlet tubes 1-2. In particular, the heating element may heat the furnace.

Preferably, the inner walls of the air inlet pipe 1-1 and the air outlet pipe 1-2 are in smooth transition, so that the stress concentration at the joint of the air inlet pipe 1-1 and the air outlet pipe 1-2 is reduced.

Preferably, the quartz tube 1 and the heating element are supported by a support table. Specifically, the supporting table comprises a first supporting table 3 and a second supporting table 4, the air inlet pipe 1-1 is supported through the first supporting table 3, the air outlet pipe 1-2 is supported through the second supporting table 4, and preferably, the supporting tables are of an integrally formed structure. The supporting platform is provided with a supporting groove which is attached to the bottom of the quartz tube 1.

When the tube furnace works, the heating element is used for heating the quartz tube 1, and thermal deposition materials can be introduced into one gas inlet tube 1-1 or at least two gas inlet tubes 1-1 according to requirements.

As can be seen from the above description, in the tube furnace provided in the embodiments of the present application, since the quartz tube 1 includes at least two gas inlet tubes 1-1, the worker can introduce one or at least two materials to be thermally deposited through the gas inlet tubes 1-1 as needed, so that the versatility of the tube furnace is improved.

Preferably, the air outlet pipe 1-2 and the single air inlet pipe 1-1 are respectively provided with heating elements which are in one-to-one correspondence with the air outlet pipe and the single air inlet pipe. The problem of one of the heating elements is avoided, and the work of the whole tube furnace is influenced.

In one embodiment, each heating element is heated by an independently provided heating control means 5. By the arrangement, the heating temperature of the air outlet pipe 1-2 and each air inlet pipe 1-1 can be independently set, and the universality is further improved.

Specifically, the heating element for heating the air inlet pipe 1-1 is an air inlet heating element 6, the heating element for heating the air outlet pipe 1-2 is an air outlet heating element 2, and the distances between the air outlet heating element 2 and all the air inlet heating elements 6 are equal.

In one embodiment, the heating element is provided with a protrusion for clamping the wall of the quartz tube 1. Specifically, the protrusion on the air outlet heating element 2 is an air outlet clamping protrusion 2-1, and the protrusion on the air inlet heating element 6 is an air inlet clamping protrusion 6-1.

Preferably, the heating element is provided with a plurality of protrusions which are symmetrically arranged on two opposite sides of the tube wall of the quartz tube 1.

In a specific embodiment, the number of the inlet pipes 1-1 is two, the two inlet pipes 1-1 form a U-shaped pipe, the two inlet pipes 1-1 and the outlet pipe 1-2 form a Y-shaped pipe, and a first inlet 7 and a second inlet 8 are respectively formed at two ends of the U-shaped pipe. As shown in figure 1, the air inlet heating element 6 is changed into two hearths which are parallel to each other, the heating zone length of the specific hearth is 240mm-320mm, wherein the hearth length can be designed to be 280mm, so that a sufficiently long constant temperature zone is ensured in the center of the hearth. An insulating layer or an insulating gap is used between the two inlet heating elements 6 to prevent the two adjacent hearths from interfering with each other during the heating process. Enough clearance and a heat insulating layer are left between the inlet heating element 6 and the outlet heating element 2 to reduce the temperature interference between the left hearth and the right hearth.

The quartz tube 1 adopts a Y-shaped structure in order to meet the design, and the left and right joints of the quartz tube adopt a U-shaped structure to reduce the influence of thermal stress on the quartz tube 1 and reduce the possibility of generating cracks and fractures. In practical application, two different precursors can be evaporated and transmitted by adjusting the gas carrying amount of the two quartz tubes 1 on the left side, and finally the two different precursors are mixed in the tube on the right side and deposited to form a film.

Specifically, the air inlet pipes 1-1 are arranged in parallel. Preferably, the air inlet pipe 1-1 and the air outlet pipe 1-2 are both horizontally arranged.

On the basis of the above solutions, preferably, the gas inlet and the gas outlet 9 of the quartz tube 1 are arranged to protrude from the heating element. The external structure is convenient to be connected with the air inlet and the air outlet 9 of the quartz tube 1.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The tube furnace is characterized by comprising a quartz tube (1) and a heating element for heating the quartz tube (1), wherein the quartz tube (1) comprises an air outlet tube (1-2) and at least two air inlet tubes (1-1), and the air outlet ends of the air inlet tubes (1-1) are hermetically connected with the air inlet ends of the air outlet tubes (1-2).

2. The tube furnace according to claim 1, characterized in that the outlet tube (1-2) and the single inlet tube (1-1) are provided with one-to-one corresponding heating elements, each heating element being heated by an independently provided heating control device (5).

3. The tube furnace according to claim 2, wherein a thermal insulation layer or a thermal insulation gap is provided between two adjacent heating elements.

4. Tube furnace according to claim 2, characterized in that the heating elements for heating the inlet tube (1-1) are inlet heating elements (6) and the heating elements for heating the outlet tube (1-2) are outlet heating elements (2), the outlet heating elements (2) being equidistant from all the inlet heating elements (6).

5. The tube furnace according to claim 1, characterized in that the heating element is provided with protrusions for clamping the wall of the quartz tube (1).

6. The tube furnace according to claim 5, characterized in that the heating element is provided with a plurality of protrusions symmetrically arranged on opposite sides of the wall of the quartz tube (1).

7. The tube furnace as claimed in claim 1, wherein the number of the inlet tubes (1-1) is two, the two inlet tubes (1-1) form a U-shaped tube, the two inlet tubes (1-1) and the outlet tube (1-2) form a Y-shaped tube, and the inner walls of the inlet tubes (1-1) and the outlet tube (1-2) are in smooth transition.

8. The tube furnace of claim 1, wherein the heating element is a hearth and the heating zone of the hearth has a length of 240mm to 320 mm.

9. Tube furnace according to any of claims 1-8, further comprising a support table for supporting the quartz tube (1) and the heating element.

10. The tube furnace according to claim 9, wherein the gas inlet and the gas outlet (9) of the quartz tube are arranged convexly to the support table.