CN212206125U - Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor - Google Patents

Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor Download PDF

Info

Publication number
CN212206125U
CN212206125U CN202021369387.5U CN202021369387U CN212206125U CN 212206125 U CN212206125 U CN 212206125U CN 202021369387 U CN202021369387 U CN 202021369387U CN 212206125 U CN212206125 U CN 212206125U
Authority
CN
China
Prior art keywords
optical fiber
high temperature
outer diameter
corundum tube
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202021369387.5U
Other languages
Chinese (zh)
Inventor
杨杭洲
朱加杰
辛国国
田琴
韩钊
刘继
刘鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwestern University
Original Assignee
Northwestern University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwestern University filed Critical Northwestern University
Priority to CN202021369387.5U priority Critical patent/CN212206125U/en
Application granted granted Critical
Publication of CN212206125U publication Critical patent/CN212206125U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

一种温度补偿式光纤法布里珀罗高温压力传感器,单模光纤的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第二圆柱外径与圆台大端外径相同,单模光纤第一圆柱段的纤芯上刻有热再生光栅,单模光纤第一圆柱段从刚玉管的一端伸入到刚玉管内并用耐高温胶固定,使热再生光栅位于刚玉管内,空心光纤的一端从刚玉管的另一端伸入到刚玉管内并用耐高温胶固定,空心光纤的端面与单模光纤第一圆柱段端面之间留有间隙形成法布里珀罗干涉腔,空心光纤另一端面加工为斜面。本实用新型具有低成本、制作简单、耐高温等优点,解决了高温环境中的温度‑压力的区分测量的问题,可应用于高温环境中的压力监测。

Figure 202021369387

A temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor, the geometry of the single-mode optical fiber is a combination of a first cylinder, a truncated cone and a second cylinder, the outer diameter of the first cylinder is the same as the outer diameter of the small end of the truncated cone, and the second The outer diameter of the cylinder is the same as the outer diameter of the big end of the truncated cone. The core of the first cylindrical section of the single-mode fiber is engraved with a thermal regeneration grating. The first cylindrical section of the single-mode fiber extends from one end of the corundum tube into the corundum tube and is fixed with high temperature resistant glue , so that the thermal regeneration grating is located in the corundum tube, one end of the hollow fiber extends into the corundum tube from the other end of the corundum tube and is fixed with high temperature resistant glue, and there is a gap between the end face of the hollow fiber and the end face of the first cylindrical section of the single mode fiber. Brie-Perot interference cavity, the other end face of the hollow fiber is processed into a bevel. The utility model has the advantages of low cost, simple manufacture, high temperature resistance, etc., solves the problem of differential measurement of temperature and pressure in a high temperature environment, and can be applied to pressure monitoring in a high temperature environment.

Figure 202021369387

Description

温度补偿式光纤法布里珀罗高温压力传感器Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor

技术领域technical field

本实用新型属于光纤传感器技术领域,具体涉及到一种温度补偿式光纤法布里珀罗高温压力传感器。The utility model belongs to the technical field of optical fiber sensors, in particular to a temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor.

背景技术Background technique

航空发动机是一种将化学能转化为机械能,形成高速射流排出而产生推力的机器,既适用于动力发生装置,也可指包括动力装置的整个机器,航空发动机作为现代工业“皇冠上的明珠”,是一个国家国防科技工业的重要标志。航空发动机工作时,内部通常包括高温、高压、并伴随着高负荷、高转速剧烈振动,是涉及多学科的综合性系统工程人类有史以来最复杂最精密的工业产品,因此造成了巨大的设计与制造难度。航空发发动机在实际运行过程中各部件的运行情况的实时监测,往往是判断发动机安全性、可靠性和实际工作性能的重要依据。光纤高温压力传感器作为压力监测传感器的后起之秀,与其他技术相比,光纤传感器有不可比拟的优点。光纤是非电导体,适合电磁干扰的环境;光纤是二氧化硅制成,适合高温环境;光纤测量可实现非接触测量,适合在结构表面安装或内嵌到结构体内部,对被测结构的影响小,对测量结果的反映更加真实;光纤体积小、质量轻,便于安装;光纤传感器具有温度压力响应速度快、温度和压力测量线性度好等特点。近几年来,随着光纤技术的发展,针对航空发动机对传感器测量精度、响应速度等要求较高的特点,将光纤高温压力传感器应用于航空发动机温度、压力的监测对航空发动机发展具有深远意义。Aero-engine is a machine that converts chemical energy into mechanical energy and forms high-speed jet discharge to generate thrust. It is not only suitable for power generation devices, but also refers to the entire machine including power devices. Aero-engines are the "jewel in the crown" of modern industry. , is an important symbol of a country's national defense technology industry. When aero-engines work, the interior usually includes high temperature, high pressure, and violent vibrations accompanied by high load and high speed. It is the most complex and sophisticated industrial product in human history involving multidisciplinary comprehensive systems engineering. Manufacturing difficulty. The real-time monitoring of the operation of each component of the aeroengine during the actual operation is often an important basis for judging the safety, reliability and actual working performance of the engine. Optical fiber high temperature pressure sensor is a rising star of pressure monitoring sensor. Compared with other technologies, optical fiber sensor has incomparable advantages. Optical fiber is a non-electric conductor, suitable for electromagnetic interference environment; optical fiber is made of silica, suitable for high temperature environment; optical fiber measurement can realize non-contact measurement, suitable for installation on the surface of the structure or embedded in the structure body, the impact on the measured structure Small, more realistic reflection of the measurement results; small size, light weight, easy installation; optical fiber sensor has the characteristics of fast response to temperature and pressure, and good linearity of temperature and pressure measurement. In recent years, with the development of optical fiber technology, in view of the high requirements of aero-engine for sensor measurement accuracy and response speed, the application of optical fiber high-temperature pressure sensor to the monitoring of aero-engine temperature and pressure has far-reaching significance for the development of aero-engine.

实用新型内容Utility model content

本实用新型所要解决的技术问题在于提供一种设计合理、制作简单、成本低、对高温环境中的温度和压力区分测量的温度补偿式光纤法布里珀罗高温压力传感器。The technical problem to be solved by the utility model is to provide a temperature-compensated optical fiber Fabry-Perot high-temperature pressure sensor with reasonable design, simple manufacture, low cost, and differential measurement of temperature and pressure in a high-temperature environment.

解决上述技术问题所采用的技术方案是:单模光纤的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第二圆柱外径与圆台大端外径相同,单模光纤第一圆柱段的纤芯上刻有热再生光栅,单模光纤第一圆柱段从刚玉管的一端伸入到刚玉管内并用耐高温胶固定,使热再生光栅位于刚玉管内,空心光纤的一端从刚玉管的另一端伸入到刚玉管内并用耐高温胶固定,空心光纤的端面与单模光纤第一圆柱段端面之间留有间隙形成法布里珀罗干涉腔,空心光纤另一端面加工为斜面。The technical solution adopted to solve the above technical problems is: the geometric shape of the single-mode optical fiber is a combination of a first cylinder, a truncated cone and a second cylinder, the outer diameter of the first cylinder is the same as the outer diameter of the small end of the truncated cone, and the outer diameter of the second cylinder is the same as the outer diameter of the small end of the truncated cone. The outer diameter of the big end of the round table is the same, and the core of the first cylindrical section of the single-mode fiber is engraved with a thermal regeneration grating. The grating is located in the corundum tube. One end of the hollow fiber extends from the other end of the corundum tube into the corundum tube and is fixed with high temperature resistant glue. There is a gap between the end face of the hollow fiber and the end face of the first cylindrical section of the single mode fiber to form a Fabry Perot Interference cavity, the other end face of the hollow fiber is processed into a bevel.

作为一种优选的技术方案,所述的空心光纤的端面与单模光纤第一圆柱段端面之间间隙宽度为15μm~80μm。As a preferred technical solution, the width of the gap between the end face of the hollow-core optical fiber and the end face of the first cylindrical section of the single-mode optical fiber is 15 μm˜80 μm.

作为一种优选的技术方案,所述的单模光纤纤芯直径为8.2μm、第一圆柱外径为80μm~100μm。As a preferred technical solution, the core diameter of the single-mode optical fiber is 8.2 μm, and the outer diameter of the first cylinder is 80 μm˜100 μm.

作为一种优选的技术方案,所述的空心光纤内径为5μm~40μm、外径为110μm~130μm。As a preferred technical solution, the hollow fiber has an inner diameter of 5 μm to 40 μm and an outer diameter of 110 μm to 130 μm.

作为一种优选的技术方案,所述的热再生光栅的栅区长度为5~15mm,中心波长为1553nm。As a preferred technical solution, the length of the grid region of the thermally regenerated grating is 5-15 mm, and the center wavelength is 1553 nm.

作为一种优选的技术方案,所述的刚玉管的内径为150μm~200μm、外径为300μm~500μm。As a preferred technical solution, the inner diameter of the corundum tube is 150 μm˜200 μm, and the outer diameter is 300 μm˜500 μm.

作为一种优选的技术方案,所述的刚玉管还可以是蓝宝石管。As a preferred technical solution, the corundum tube can also be a sapphire tube.

本实用新型的有益效果如下:The beneficial effects of the present utility model are as follows:

本实用新型将单模光纤第一圆柱段通过高温胶封装在刚玉管内,刚玉管一端与空心光纤通过高温胶粘接,嵌套在刚玉管内部的空心光纤端面与单模光纤第一圆柱段端面之间留有一定的间距,从而形成布里珀罗干涉腔;在单模光纤第一圆柱段纤芯上刻写热再生光栅,本实用新型具有低成本、制作简单、耐高温等优点,解决了高温环境中的温度-压力的区分测量的问题,可应用于高温环境中的压力监测。The utility model encapsulates the first cylindrical section of the single-mode optical fiber in the corundum tube through high-temperature glue, one end of the corundum tube and the hollow optical fiber are bonded by the high-temperature glue, and the end face of the hollow optical fiber nested inside the corundum tube and the end face of the first cylindrical section of the single-mode optical fiber There is a certain distance between them, so as to form a Bri-Perot interference cavity; the thermal regeneration grating is written on the core of the first cylindrical section of the single-mode fiber. The utility model has the advantages of low cost, simple production, high temperature resistance, etc. The problem of differential measurement of temperature and pressure in high temperature environment can be applied to pressure monitoring in high temperature environment.

附图说明Description of drawings

图1是本实用新型的结构示意图。Figure 1 is a schematic structural diagram of the present invention.

具体实施方式Detailed ways

下面结合附图和实施例对本实用新型进一步详细说明,但本实用新型不限于下述的实施方式。The present utility model will be further described in detail below with reference to the accompanying drawings and examples, but the present utility model is not limited to the following embodiments.

实施例1Example 1

在图1中,本实施例的温度补偿式光纤法布里珀罗高温压力传感器由空心光纤1、刚玉管2、单模光纤3连接构成。In FIG. 1 , the temperature-compensated optical fiber Fabry-Perot high-temperature pressure sensor of this embodiment is formed by connecting a hollow-core optical fiber 1 , a corundum tube 2 , and a single-mode optical fiber 3 .

单模光纤3的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第一圆柱外径为90μm,圆台大端外径与第二圆柱外径相同,第二圆柱段为标准单模光纤,单模光纤3纤芯直径为8.2μm,单模光纤3第一圆柱段从刚玉管2的一端伸入到刚玉管2内并用高温陶瓷胶密封固定,位于刚玉管2内单模光纤3第一圆柱段的纤芯上刻有热再生光栅4,栅区长度为10mm,中心波长为1553nm,刚玉管2的内径为180μm、外径为400μm,空心光纤1的一端从刚玉管2的另一端伸入到刚玉管2内并用高温陶瓷胶密封固定,空心光纤1的端面与单模光纤3第一圆柱段端面之间留有宽度为45μm的间隙,形成法布里珀罗干涉腔,法布里珀罗干涉腔同时隔绝热再生光栅4受到压力的影响,空心光纤1内径为25μm、外径为120μm,空心光纤1的另一端面为斜面,防止经过该端面反射的光原路返回。The geometric shape of the single-mode optical fiber 3 is a combination of a first cylinder, a truncated cone, and a second cylinder. The outer diameter of the cylinder is the same, the second cylindrical section is a standard single-mode optical fiber, the core diameter of the single-mode optical fiber 3 is 8.2 μm, and the first cylindrical section of the single-mode optical fiber 3 extends from one end of the corundum tube 2 into the corundum tube 2 and uses high temperature ceramics. It is sealed and fixed by glue. The core of the first cylindrical section of the single-mode fiber 3 located in the corundum tube 2 is engraved with a thermal regeneration grating 4. The length of the grating area is 10mm, and the center wavelength is 1553nm. The inner diameter of the corundum tube 2 is 180μm and the outer diameter is 400μm, one end of the hollow fiber 1 extends from the other end of the corundum tube 2 into the corundum tube 2 and is sealed and fixed with high temperature ceramic glue. , forming a Fabry-Perot interference cavity. The Fabry-Perot interference cavity also isolates the thermal regeneration grating 4 from the influence of pressure. The inner diameter of the hollow fiber 1 is 25 μm and the outer diameter is 120 μm. The other end face of the hollow fiber 1 is The inclined surface prevents the light reflected from the end surface from returning to the original path.

实施例2Example 2

在本实施例中单模光纤3的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第一圆柱外径为80μm,圆台大端外径与第二圆柱外径相同,第二圆柱段为标准单模光纤,单模光纤3纤芯直径为8.2μm,单模光纤3第一圆柱段从刚玉管2的一端伸入到刚玉管2内并用高温陶瓷胶密封固定,位于刚玉管2内单模光纤3第一圆柱段的纤芯上刻有热再生光栅4,栅区长度为5mm,中心波长为1553nm,刚玉管2的内径为150μm、外径为300μm,空心光纤1的一端从刚玉管2的另一端伸入到刚玉管2内并用高温陶瓷胶密封固定,空心光纤1的端面与单模光纤3第一圆柱段端面之间留有宽度为45μm的间隙,形成法布里珀罗干涉腔,空心光纤1内径为5μm、外径为110μm,空心光纤1的另一端面为斜面,防止经过该端面反射的光原路返回。In this embodiment, the geometry of the single-mode optical fiber 3 is a combination of a first cylinder, a truncated cone, and a second cylinder. The outer diameter of the first cylinder is the same as the outer diameter of the small end of the truncated cone, the outer diameter of the first cylinder is 80 μm, and the large end of the truncated cone is 80 μm The outer diameter is the same as the outer diameter of the second cylinder. The second cylindrical section is a standard single-mode fiber. The core diameter of the single-mode fiber 3 is 8.2 μm. The first cylindrical section of the single-mode fiber 3 extends from one end of the corundum tube 2 to the corundum tube. 2 is sealed and fixed with high-temperature ceramic glue. The core of the first cylindrical section of the single-mode fiber 3 in the corundum tube 2 is engraved with a thermal regeneration grating 4. The length of the grating area is 5mm, the center wavelength is 1553nm, and the inner diameter of the corundum tube 2 is 150μm, the outer diameter is 300μm, one end of the hollow fiber 1 extends from the other end of the corundum tube 2 into the corundum tube 2 and is sealed and fixed with high temperature ceramic glue, between the end face of the hollow fiber 1 and the end face of the first cylindrical section of the single mode fiber 3 A gap with a width of 45 μm is left to form a Fabry-Perot interference cavity. The inner diameter of the hollow fiber 1 is 5 μm and the outer diameter is 110 μm. The other end face of the hollow fiber 1 is inclined to prevent the light reflected from the end face from returning to the original path.

实施例3Example 3

在本实施例中单模光纤3的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第一圆柱外径为100μm,圆台大端外径与第二圆柱外径相同,第二圆柱段为标准单模光纤,单模光纤3纤芯直径为8.2μm,单模光纤3第一圆柱段从刚玉管2的一端伸入到刚玉管2内并用高温陶瓷胶密封固定,位于刚玉管2内单模光纤3第一圆柱段的纤芯上刻有热再生光栅4,栅区长度为15mm,中心波长为1553nm,刚玉管2的内径为200μm、外径为500μm,空心光纤1的一端从刚玉管2的另一端伸入到刚玉管2内并用高温陶瓷胶密封固定,空心光纤1的端面与单模光纤3第一圆柱段端面之间留有宽度为45μm的间隙,形成法布里珀罗干涉腔,空心光纤1内径为40μm、外径为130μm,空心光纤1的另一端面为斜面,防止经过该端面反射的光原路返回。In this embodiment, the geometry of the single-mode optical fiber 3 is a combination of a first cylinder, a truncated cone, and a second cylinder. The outer diameter of the first cylinder is the same as the outer diameter of the small end of the circular truncated cone, the outer diameter of the first cylinder is 100 μm, and the large end of the circular truncated cone is 100 μm. The outer diameter is the same as the outer diameter of the second cylinder. The second cylindrical section is a standard single-mode fiber. The core diameter of the single-mode fiber 3 is 8.2 μm. The first cylindrical section of the single-mode fiber 3 extends from one end of the corundum tube 2 to the corundum tube. 2 is sealed and fixed with high-temperature ceramic glue. The core of the first cylindrical section of the single-mode fiber 3 in the corundum tube 2 is engraved with a thermal regeneration grating 4. The length of the grating area is 15mm, the center wavelength is 1553nm, and the inner diameter of the corundum tube 2 is 200μm, the outer diameter is 500μm, one end of the hollow fiber 1 extends from the other end of the corundum tube 2 into the corundum tube 2 and is sealed and fixed with high temperature ceramic glue, between the end face of the hollow fiber 1 and the end face of the first cylindrical section of the single mode fiber 3 A gap with a width of 45 μm is left to form a Fabry-Perot interference cavity. The inner diameter of the hollow fiber 1 is 40 μm and the outer diameter is 130 μm. The other end face of the hollow fiber 1 is inclined to prevent the light reflected from the end face from returning to the original path.

实施例4Example 4

在上述实施例1~3中,刚玉管2替换为蓝宝石管,其他零部件及零部件的连接关系与相应的实施例相同。In the above-mentioned Embodiments 1 to 3, the corundum tube 2 is replaced with a sapphire tube, and the connection relationships of other components and components are the same as those of the corresponding embodiments.

本实用新型的工作原理如下:The working principle of the present utility model is as follows:

光由单模光纤第二圆柱端面进入,经过热再生光栅、空心光纤左右端面、单模光纤第一圆柱端面反射,入射光一部分通过热再生光栅反射原路返回、另一部分经过热再生光栅透射在法布里珀罗干涉腔和空心光纤左端面,由于空心光纤左端面斜切,因此该端面的反射光不会反射回热再生光栅,对干涉光谱无影响,而透射在法布里珀罗干涉腔的光经空心光纤左端面和单模光纤第一圆柱端面反射形成两束反射光相互干涉并返回热再生光栅,根据热再生光栅的干涉光谱和透射光谱波长的漂移反演得到压力和温度的参数。The light enters from the second cylindrical end face of the single-mode fiber, and is reflected by the thermal regeneration grating, the left and right end faces of the hollow fiber, and the first cylindrical end face of the single-mode fiber. Part of the incident light is reflected back through the thermal regeneration grating, and the other part is transmitted through the thermal regeneration grating. The Fabry-Perot interference cavity and the left end face of the hollow fiber, because the left end face of the hollow fiber is chamfered, the reflected light from the end face will not be reflected back to the thermal regeneration grating, which has no effect on the interference spectrum, while the transmitted light in the Fabry-Perot interference The light from the cavity is reflected by the left end face of the hollow fiber and the first cylindrical end face of the single-mode fiber to form two beams of reflected light that interfere with each other and return to the thermal regeneration grating. parameter.

在实用新型的法布里珀罗干涉光谱中,第m阶干涉峰中心波长λm为:In the Fabry-Perot interference spectrum of the utility model, the central wavelength λ m of the m-th order interference peak is:

Figure BDA0002581331490000051
Figure BDA0002581331490000051

式中,n为干涉微腔的折射率,L3为刚玉管内封闭腔长度,L2为刚玉管内单模光纤第一圆柱段长度;where n is the refractive index of the interference microcavity, L3 is the length of the closed cavity in the corundum tube, and L2 is the length of the first cylindrical section of the single - mode fiber in the corundum tube;

当压力作用于法布里珀罗干涉腔时,第m阶干涉峰波长漂移的压力灵敏度Sp为:When the pressure acts on the Fabry-Perot interference cavity, the pressure sensitivity Sp of the wavelength shift of the m-th order interference peak is:

Figure BDA0002581331490000052
Figure BDA0002581331490000052

式中,P为微腔所受压力,A为光纤横截面积,L1为法布里珀罗实际干涉腔的长度;由此可见压力灵敏度Sp与法布里珀罗实际干涉腔长度L1成反比。In the formula, P is the pressure on the microcavity, A is the cross-sectional area of the optical fiber, and L 1 is the length of the actual Fabry-Perot interference cavity; it can be seen that the pressure sensitivity Sp and the actual Fabry -Perot interference cavity length L 1 is inversely proportional.

当外界环境的温度变化时,法布里珀罗干涉腔长度L1与温度变化的关系为:When the temperature of the external environment changes, the relationship between the length L 1 of the Fabry-Perot interference cavity and the temperature change is:

ΔL1=[αc(L2+L1)-αfL2]·ΔTΔL 1 =[α c (L 2 +L 1 )-α f L 2 ]·ΔT

式中,ΔL1为法布里珀罗干涉腔长度改变量,αc为刚玉管的热膨胀系数,αf为单模光纤第一圆柱段的锥度,ΔT为温度变化量;where ΔL 1 is the change in the length of the Fabry-Perot interference cavity, α c is the thermal expansion coefficient of the corundum tube, α f is the taper of the first cylindrical section of the single-mode fiber, and ΔT is the temperature change;

法布里珀罗干涉微腔波长随温度变化表示为:The wavelength variation of the Fabry-Perot interference microcavity with temperature is expressed as:

Figure BDA0002581331490000061
Figure BDA0002581331490000061

Figure BDA0002581331490000062
Figure BDA0002581331490000062

式中Δλ为法布里珀罗干涉腔波长变化量,λ0为初始波长,ST为法布里珀罗干涉腔的温度灵敏度;where Δλ is the wavelength variation of the Fabry-Perot interference cavity, λ0 is the initial wavelength, and S T is the temperature sensitivity of the Fabry-Perot interference cavity;

由于热再生光栅的压力灵敏度是温度的函数,因此,本实用新型的波长随温度和压力的变化表示如下Since the pressure sensitivity of thermally regenerated gratings is a function of temperature, the change of wavelength with temperature and pressure in the present invention is expressed as follows

Figure BDA0002581331490000063
Figure BDA0002581331490000063

式中,Δλi(i=1,2)为热再生光栅谐振波长位移,αi是热再生光栅温度灵敏度,kPTi是热再生光栅在不同温度下的压力灵敏度,bPi是热再生光栅压力灵敏度,T0是初始温度,ΔT为温度变化量、ΔP为压力变化量。where Δλ i (i=1, 2) is the resonant wavelength shift of the thermal regeneration grating, α i is the temperature sensitivity of the thermal regeneration grating, k PTi is the pressure sensitivity of the thermal regeneration grating at different temperatures, b Pi is the thermal regeneration grating pressure Sensitivity, T 0 is the initial temperature, ΔT is the temperature change, and ΔP is the pressure change.

由于法布里珀罗干涉腔对温度、压力敏感,而封装到刚玉管的热再生光栅对温度响应度较高,对压力响应度较低,因此本实用新型结构可以利用灵敏度系数矩阵实现高灵敏度压力测量和温度补偿。Since the Fabry-Perot interference cavity is sensitive to temperature and pressure, and the thermal regeneration grating encapsulated in the corundum tube has high response to temperature and low response to pressure, the structure of the present invention can utilize the sensitivity coefficient matrix to achieve high sensitivity Pressure measurement and temperature compensation.

当外界环境的压力和温度同时变化时,法布里珀罗干涉腔和热再生光栅的波长漂移分别为:When the pressure and temperature of the external environment change at the same time, the wavelength shifts of the Fabry-Perot interference cavity and thermal regeneration grating are:

ΔλFP=SP·ΔP′+ST·ΔT′Δλ FP =S P ·ΔP′+S T ·ΔT′

Δλi=bPi·ΔP′+αi·ΔT′Δλ i =b Pi ·ΔP′+α i ·ΔT′

式中,ΔP′为压力实际总的变化量,ΔT′为温度实际总的变化量,ΔλFP为法布里珀罗干涉腔的波长飘移,Δλ′i为热再生光栅的波长漂移,SP和bPi分别为F-P腔和RFBG的压力灵敏度,ST和αi分别为F-P腔和RFBG的温度灵敏度。In the formula, ΔP′ is the actual total change of pressure, ΔT′ is the actual total change of temperature, Δλ FP is the wavelength shift of the Fabry-Perot interference cavity, Δλ′ i is the wavelength shift of the thermal regeneration grating, S P and b Pi are the pressure sensitivities of the FP cavity and RFBG, respectively, and S T and α i are the temperature sensitivities of the FP cavity and RFBG, respectively.

温度补偿的系数矩阵为:The coefficient matrix for temperature compensation is:

Figure BDA0002581331490000064
Figure BDA0002581331490000064

本实用新型实现在1100℃以上温度下同时区分测量温度压力参量。The utility model realizes the simultaneous distinction and measurement of temperature and pressure parameters at a temperature above 1100°C.

Claims (7)

1.一种温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:单模光纤(3)的几何形状为第一圆柱和圆台及第二圆柱的组合体,第一圆柱外径与圆台小端外径相同,第二圆柱外径与圆台大端外径相同,单模光纤(3)第一圆柱段的纤芯上刻有热再生光栅,单模光纤(3)第一圆柱段从刚玉管(2)的一端伸入到刚玉管(2)内并用耐高温胶固定,使热再生光栅位于刚玉管(2)内,空心光纤(1)的一端从刚玉管(2)的另一端伸入到刚玉管(2)内并用耐高温胶固定,空心光纤(1)的端面与单模光纤(3)第一圆柱段端面之间留有间隙形成法布里珀罗干涉腔,空心光纤(1)另一端面加工为斜面。1. a temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor, characterized in that: the geometry of the single-mode optical fiber (3) is the combination of the first cylinder, the truncated cone and the second cylinder, and the first cylinder outer diameter is the same as the second cylinder. The outer diameter of the small end of the truncated cone is the same, the outer diameter of the second cylinder is the same as the outer diameter of the large end of the truncated cone, the core of the first cylindrical section of the single-mode optical fiber (3) is engraved with a thermal regeneration grating, and the first cylindrical section of the single-mode optical fiber (3) is engraved with a thermal regeneration grating. Extend from one end of the corundum tube (2) into the corundum tube (2) and fix it with high temperature resistant glue, so that the thermal regeneration grating is located in the corundum tube (2), and one end of the hollow fiber (1) extends from the other end of the corundum tube (2). One end extends into the corundum tube (2) and is fixed with high temperature resistant glue. There is a gap between the end face of the hollow fiber (1) and the end face of the first cylindrical section of the single-mode fiber (3) to form a Fabry-Perot interference cavity. The other end face of the optical fiber (1) is processed into an inclined face. 2.根据权利要求1所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的空心光纤(1)的端面与单模光纤(3)第一圆柱段端面之间间隙宽度为15μm~80μm。2. The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1, characterized in that: between the end face of the hollow-core optical fiber (1) and the end face of the first cylindrical section of the single-mode optical fiber (3) The gap width is 15 μm to 80 μm. 3.根据权利要求1所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的单模光纤(3)纤芯直径为8.2μm、第一圆柱外径为80μm~100μm。3. The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1, wherein the core diameter of the single-mode optical fiber (3) is 8.2 μm, and the outer diameter of the first cylinder is 80 μm~ 100μm. 4.根据权利要求1或2所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的空心光纤(1)内径为5μm~40μm、外径为110μm~130μm。4. The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1 or 2, wherein the hollow fiber (1) has an inner diameter of 5 μm to 40 μm and an outer diameter of 110 μm to 130 μm. 5.根据权利要求1所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的热再生光栅的栅区长度为5~15mm,中心波长为1553nm。5 . The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1 , wherein the grid region length of the thermally regenerated grating is 5-15 mm, and the center wavelength is 1553 nm. 6 . 6.根据权利要求1所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的刚玉管(2)的内径为150μm~200μm、外径为300μm~500μm。6 . The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1 , wherein the corundum tube ( 2 ) has an inner diameter of 150 μm to 200 μm and an outer diameter of 300 μm to 500 μm. 7 . 7.根据权利要求1或6所述的温度补偿式光纤法布里珀罗高温压力传感器,其特征在于:所述的刚玉管(2)还可以是蓝宝石管。7. The temperature-compensated optical fiber Fabry-Perot high temperature pressure sensor according to claim 1 or 6, characterized in that: the corundum tube (2) can also be a sapphire tube.
CN202021369387.5U 2020-07-13 2020-07-13 Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor Expired - Fee Related CN212206125U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021369387.5U CN212206125U (en) 2020-07-13 2020-07-13 Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021369387.5U CN212206125U (en) 2020-07-13 2020-07-13 Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor

Publications (1)

Publication Number Publication Date
CN212206125U true CN212206125U (en) 2020-12-22

Family

ID=73818744

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021369387.5U Expired - Fee Related CN212206125U (en) 2020-07-13 2020-07-13 Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor

Country Status (1)

Country Link
CN (1) CN212206125U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114279353A (en) * 2021-12-28 2022-04-05 中国人民解放军国防科技大学 A high temperature strain sensor with sapphire fiber F-P cavity cascaded SFBG
CN114322814A (en) * 2021-12-28 2022-04-12 中国人民解放军国防科技大学 Anti-scouring high-temperature strain sensor for metal casting of sapphire fiber grating
CN114384450A (en) * 2021-11-12 2022-04-22 西安交通大学 Reflection-type optical fiber magnetic field sensor based on Faraday effect
CN115507883A (en) * 2022-10-13 2022-12-23 新密市常维耐火材料有限公司 Extrinsic optical fiber Fabry-Perot temperature and pressure sensor and its preparation method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114384450A (en) * 2021-11-12 2022-04-22 西安交通大学 Reflection-type optical fiber magnetic field sensor based on Faraday effect
CN114279353A (en) * 2021-12-28 2022-04-05 中国人民解放军国防科技大学 A high temperature strain sensor with sapphire fiber F-P cavity cascaded SFBG
CN114322814A (en) * 2021-12-28 2022-04-12 中国人民解放军国防科技大学 Anti-scouring high-temperature strain sensor for metal casting of sapphire fiber grating
CN114279353B (en) * 2021-12-28 2023-08-29 中国人民解放军国防科技大学 High-temperature strain sensor of sapphire optical fiber F-P cavity cascade SFBG
CN114322814B (en) * 2021-12-28 2024-06-07 中国人民解放军国防科技大学 Anti-scouring high-temperature strain sensor cast by sapphire fiber grating metal
CN115507883A (en) * 2022-10-13 2022-12-23 新密市常维耐火材料有限公司 Extrinsic optical fiber Fabry-Perot temperature and pressure sensor and its preparation method

Similar Documents

Publication Publication Date Title
CN212206125U (en) Temperature compensated fiber optic Fabry-Perot high temperature pressure sensor
CN205426410U (en) Reflective FP chamber fiber grating atmospheric pressure temperature sensor
CN105043588B (en) A kind of high-temperature temperature and pressure optical fiber Fabry Perot composite micro-nano sensor
CN102889901B (en) Fabry-Perot optical fiber sensor and fabrication method of sensor
CN104501729B (en) A kind of fiber F-P strain gauge and forming method based on MEMS technology
CN103411727B (en) For the tonometric fibre optic compression sensor of pneumatic plant and measuring method thereof
CN104596435B (en) A cavity-length adjustable optical fiber F-P strain gauge based on MEMS technology and its forming method
CN103411643B (en) Fibre Optical Sensor and measuring method for air compressor fluid measuring multiple parameters
CN110823121B (en) A F-P cavity type high temperature and large strain optical fiber sensor
Ma et al. Miniature all-fiber extrinsic Fabry–Pérot interferometric sensor for high-pressure sensing under high-temperature conditions
CN108692751B (en) Strain sensor based on optical fiber Fabry-Borot cavity and manufacturing method thereof
CN111595256A (en) High temperature fiber optic strain sensor
CN205785609U (en) A kind of optical fiber optical grating stress sensor based on carbon fiber encapsulation
CN209689648U (en) An ultra-high temperature sapphire fiber F-P temperature-strain composite sensor
CN113155163A (en) Optical fiber temperature and pressure sensor based on double-capillary packaging
CN213902404U (en) Double-sleeve packaged optical fiber high-temperature pressure sensor
CN218601155U (en) Multimode interference hydrogen concentration sensor based on capillary
CN106546354B (en) A kind of superelevation temperature sensor based on FBG
CN212721825U (en) Optical fiber temperature sensor based on temperature sensitive material modulation FP cavity
CN212206124U (en) Ultra-high temperature strain test device for sapphire fiber grating
CN112378429A (en) Fiber bragg grating temperature and pressure sensor based on capillary tube packaging
CN209689810U (en) A kind of Mach-Zehnder interferometer type baroceptor based on photonic crystal fiber
CN203455033U (en) Optical fiber sensor for gas compressor fluid multi-parameter measurement
CN210741396U (en) An F-P cavity type high temperature and large strain fiber optic sensor
US11359977B2 (en) High-sensitivity high-temperature sensor based on dislocation welding of suspended optical fiber

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20201222