CN209689648U - A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor - Google Patents
A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor Download PDFInfo
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- CN209689648U CN209689648U CN201920480363.8U CN201920480363U CN209689648U CN 209689648 U CN209689648 U CN 209689648U CN 201920480363 U CN201920480363 U CN 201920480363U CN 209689648 U CN209689648 U CN 209689648U
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Abstract
The utility model relates to technical field of optical fiber sensing, refer in particular to a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor, including the first sapphire fiber, second sapphire fiber, sapphire wafer and both ends are equipped with the sapphire capillary of opening, the both ends open that the flat end face of the inclined end face of first sapphire fiber and the second sapphire fiber passes through sapphire capillary respectively is inserted into sapphire capillary cavity, sapphire wafer is set between the inclined end face of the first sapphire fiber and the flat end face of the second sapphire fiber, it the flat end face of sapphire wafer side and the flat end face parallel alignment of the second sapphire fiber and does not contact, the slanted end surface contacts of the sapphire wafer other side and the first sapphire fiber.It using such structure setting, it can be achieved that being measured from room temperature to 1400 DEG C of a wide range of temperature, the strain that is able to satisfy under superhigh temperature adverse circumstances, temperature while monitoring, measurement sensitivity is high, precision height.
Description
Technical field
The utility model relates to technical field of optical fiber sensing, and it is multiple to refer in particular to a kind of superhigh temperature sapphire fiber F-P temperature strain
Close sensor.
Background technique
Strain measurement under the hyperthermal environments such as aerospace, petrochemical industry always is the difficult point in sensor measuring field,
Severe hyperthermal environments will affect the performance of traditional electrical sensor and measuring instrumentss, fibre optical sensor have structure it is simple,
The features such as electromagnetism interference, measurement accuracy are high, measurement dynamic range is big has wide in the strain monitoring under hyperthermal environments
Application prospect.It is usually used in optics Fabry-Perot (Fabry-P é rot, the F-P) sensor and optical fiber Bradley of strain measurement at present
Lattice grating (Fiber Bragg Grating, FBG) sensor is there are temperature strain cross sensitivity, measuring range is limited and 1400
DEG C or more the problems such as mechanical strength declines under hyperthermal environments, largely constrain superhigh temperature field Fibre Optical Sensor skill
The development of art.
Due to sapphire single-crystal (Al2O3) fusion temperature is 2053 DEG C, have high-intensitive, high rigidity (for 7 times of quartz),
High wear resistance, high-fire resistance, high corrosion resistance, high chemical inertness, high thermal conductivity.The natural resistance to height of monocrystalline sapphire optical fiber
Temperature characteristics make its by centainly encapsulate increase mechanical strength after can prolonged application in 1400 DEG C or more of hyperthermal environments, be super
The splendid selection of high temperature strain measurement.Fibre optic temperature sensor based on sapphire wafer has from ultraviolet to far infrared region
Wide transparency is proved to be to monitor the ideal equipment of ultra-high temperature.
Currently, having the EFPI/FBG compound sensor based on silica fibre, structure is substantially EFPI strain transducer
With the multiplexing of high temperature resistant FBG sensor, monitoring while being only able to satisfy 600 DEG C of temperature below and strain.It can be suitably used for 1400
The fibre optical sensor that strain, temperature monitor simultaneously under DEG C hyperthermal environments still belongs to blank.
Summary of the invention
In view of the deficiencies of the prior art, it is multiple to provide a kind of superhigh temperature sapphire fiber F-P temperature strain for the utility model
Sensor is closed, the first sapphire fiber, the second sapphire fiber, sapphire wafer and sapphire capillary itself
Material selection Al2O3, itself has high temperature resistance, the second sapphire fiber flat end face and the smooth end of sapphire wafer
Air chamber between face forms extrinsic type optical fibre Fabry-perot interferometer structure, can strain and be carried out in fact to machine with wide range
When monitoring, it can be achieved that measured from room temperature to 1400 DEG C of a wide range of temperature, be able to satisfy strain under superhigh temperature adverse circumstances, temperature
It monitors simultaneously, measurement sensitivity is high, precision is high.
To achieve the goals above, the technical solution of the utility model application is as follows:
A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor, including the first sapphire fiber, second
Sapphire fiber, sapphire wafer and both ends are equipped with the sapphire capillary of opening, and the first sapphire fiber inclines
The both ends open that the flat end face of angled end-face and the second sapphire fiber passes through sapphire capillary respectively is inserted into blue treasured
In stone capillary cavity, sapphire wafer is set to the inclined end face and the second sapphire fiber of the first sapphire fiber
Flat end face between, the flat end face parallel alignment of the flat end face of sapphire wafer side and the second sapphire fiber
And it does not contact, the slanted end surface contacts of the sapphire wafer other side and the first sapphire fiber.
Furthermore, the inclined end face of first sapphire fiber use on former flat end face it is ground with
Optical fiber is formed radially 5 °~10 ° of inclination angle.
Furthermore, first sapphire fiber, the second sapphire fiber and sapphire wafer difference
Inner cavity with sapphire capillary is with CO2The mode of laser welding is connected or is connected by inorganic high-temperature resistant glue adhesive means, the
The other end of two sapphire fibers is provided with aperture by laser, and small aperture is less than 4 μm.
Furthermore, two end faces of the sapphire wafer are smooth, are 120 μm with a thickness of 0.5mm, outer diameter, Lan Bao
The side of stone chip is etched to define that diameter is 100 μm, depth is 200 μm, and the cavity that end face is smooth, and successively passes through RCA
Cleaning and deionized water ultrasonic cleaning.
Furthermore, the internal diameter of the sapphire capillary is 130~135 μm.
Furthermore, the outer diameter of first sapphire fiber and the second sapphire fiber is 125 μm,
The length of second sapphire fiber is 4~6mm.
The utility model the utility model has the advantages that
1) air chamber between the second sapphire fiber flat end face and sapphire wafer flat end face forms non-
Sign type optical fibre Fabry-perot interferometer structure can strain machine with wide range and carry out real-time monitoring；
2) between two end faces of sapphire wafer formed Intrinsical optical fibre Fabry-perot interferometer structure, it can be achieved that from
Room temperature to 1400 DEG C of a wide range of temperature measures；
3) it the stress that is able to satisfy under superhigh temperature adverse circumstances, temperature while monitoring, measurement sensitivity is high, precision is high, and has
There is the function of temperature self-compensation.
Detailed description of the invention
Fig. 1 is the utility model overall structure diagram.
1. the first sapphire fiber；2. the second sapphire fiber；3. sapphire wafer；4. sapphire capillary
Pipe.
Specific embodiment
The technical solution of the utility model is illustrated with embodiment with reference to the accompanying drawing.
As shown in Figure 1, a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor described in the utility model, packet
Include the sapphire hair that the first sapphire fiber 1, the second sapphire fiber 2, sapphire wafer 3 and both ends are equipped with opening
The flat end face of tubule 4, the inclined end face of the first sapphire fiber 1 and the second sapphire fiber 2 passes through indigo plant respectively
The both ends open of jewel capillary 4 is inserted into 4 cavity of sapphire capillary, and sapphire wafer 3 is set to the first sapphire single-crystal
Between the inclined end face of optical fiber 1 and the flat end face of the second sapphire fiber 2, the flat end face of 3 side of sapphire wafer
With the flat end face parallel alignment of the second sapphire fiber 2 and do not contact, 3 other side of sapphire wafer and the first sapphire
The slanted end surface contacts of single crystal fiber 1.
The utility model uses such structure setting, due to the first sapphire fiber 1, the second sapphire single-crystal light
The material selection Al of fibre 2, sapphire wafer 3 and sapphire capillary 4 itself2O3, inherently there is high temperature resistance, sapphire
It the flat end face of 3 side of chip and the flat end face parallel alignment of the second sapphire fiber 2 and does not contact, that is to say, that
Air chamber between 3 flat end face of two sapphire fibers, 2 flat end face and sapphire wafer forms extrinsic type Fiber Optic Sensor
Fabry-Perot interferometer structure can strain machine with wide range and carry out real-time monitoring, it can be achieved that from room temperature to 1400 DEG C of big model
It encloses temperature measurement, the strain that is able to satisfy under superhigh temperature adverse circumstances, temperature while monitoring, measurement sensitivity is high, precision height.
In practical application, the second sapphire fiber 2, sapphire are brilliant in 4 cavity of sapphire glass capillary
The internal diameter of piece 3 and sapphire capillary 4 matches flat between the second sapphire fiber 2 and sapphire wafer 3 to realize
Row alignment.
Preferably, the spacing of the flat end face of the flat end face of 3 side of sapphire wafer and the second sapphire fiber 2
It is 300 μm~400 μm.
In practical application, the slanted end surface contacts of 3 other side of sapphire wafer and the first sapphire fiber 1 can be kept away
Exempt to form new F-P cavity between the first sapphire fiber 1 and sapphire wafer 3.
More specifically, the inclined end face of first sapphire fiber 1 is using ground on former flat end face
5 °~10 ° of inclination angle is formed radially with optical fiber.
Preferably, the inclined end face of the first sapphire fiber of the utility model 1 uses on former flat end face through grinding
Mill is formed radially 8 ° of inclination angle with optical fiber.
More specifically, first sapphire fiber 1, the second sapphire fiber 2 and sapphire wafer 3 divide
Inner cavity not with sapphire capillary 4 is with CO2The mode of laser welding is connected or is connected by inorganic high-temperature resistant glue adhesive means,
The other end of second sapphire fiber 2 is provided with aperture by laser, and small aperture is less than 4 μm.Using such knot
Structure setting can avoid influence of the change of the intracavitary air pressure of sapphire capillary 4 under hyperthermal environments to measurement.
More specifically, two end faces of the sapphire wafer 3 are smooth, are 120 μm with a thickness of 0.5mm, outer diameter, Lan Bao
The side of stone chip 3 is etched to define that diameter is 100 μm, depth is 200 μm, and the cavity that end face is smooth, and successively passes through RCA
Cleaning and deionized water ultrasonic cleaning.
In practical application, sapphire wafer 3 described in the utility model is that the superhigh temperature sapphire fiber F-P temperature is answered
The temperature-sensing element (device) for becoming compound sensor, the superhigh temperature sapphire fiber is adjusted by changing the thickness of its effective coverage
The temperature sensitivity of F-P temperature strain compound sensor.
More specifically, the internal diameter of the sapphire capillary 4 is 130~135 μm.
In practical application, sapphire capillary 4 described in the utility model is that the superhigh temperature sapphire fiber F-P temperature is answered
It is multiple to adjust the superhigh temperature sapphire fiber F-P temperature strain by changing its length for the sensitive part for becoming compound sensor
Close the strain sensitivity of sensor.
More specifically, the outer diameter of first sapphire fiber 1 and the second sapphire fiber 2 is 125 μ
M, the length of the second sapphire fiber 2 are 4~6mm.
The technical scheme in the embodiment of the utility model is described above, but the utility model is not limited to
The specific embodiment stated, the above mentioned embodiment is only schematical, rather than restrictive, this field it is common
Technical staff is not departing from the utility model aims and scope of the claimed protection situation under the enlightenment of the utility model
Under, many forms can be also made, these are belonged within the protection scope of the utility model.
Claims (6)
1. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor, it is characterised in that: including the first sapphire single-crystal
Optical fiber (1), the second sapphire fiber (2), sapphire wafer (3) and both ends are equipped with the sapphire capillary (4) of opening, institute
The flat end face of the inclined end face and the second sapphire fiber (2) of stating the first sapphire fiber (1) passes through indigo plant respectively
The both ends open of jewel capillary (4) is inserted into sapphire capillary (4) cavity, and the sapphire wafer (3) is set to first
Between the inclined end face of sapphire fiber (1) and the flat end face of the second sapphire fiber (2), the sapphire is brilliant
It the flat end face of piece (3) side and the flat end face parallel alignment of the second sapphire fiber (2) and does not contact, it is described blue precious
The slanted end surface contacts of stone chip (3) other side and the first sapphire fiber (1).
2. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor according to claim 1, feature exist
In: the inclined end face of first sapphire fiber (1) is formed radially using ground on former flat end face with optical fiber
5 °~10 ° of inclination angle.
3. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor according to claim 1, feature exist
In: first sapphire fiber (1), the second sapphire fiber (2) and sapphire wafer (3) respectively with sapphire
The inner cavity of capillary (4) is with CO2The mode of laser welding is connected or is connected by inorganic high-temperature resistant glue adhesive means, described second
The other end of sapphire fiber (2) is provided with aperture by laser, and small aperture is less than 4 μm.
4. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor according to claim 1, feature exist
In: two end faces of the sapphire wafer (3) are smooth, are 120 μm with a thickness of 0.5mm, outer diameter, the sapphire wafer (3)
Side be etched to define that diameter is 100 μm, depth is 200 μm, and the cavity that end face is smooth, and successively by RCA cleaning and
Deionized water ultrasonic cleaning.
5. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor according to claim 1, feature exist
In: the internal diameter of the sapphire capillary (4) is 130~135 μm.
6. a kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor according to claim 1, feature exist
In: the outer diameter of first sapphire fiber (1) and the second sapphire fiber (2) is 125 μm, and described second is blue
The length of jewel single crystal fiber (2) is 4~6mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920480363.8U CN209689648U (en) | 2019-04-10 | 2019-04-10 | A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor |
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| CN201920480363.8U CN209689648U (en) | 2019-04-10 | 2019-04-10 | A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207732A (en) * | 2019-04-10 | 2019-09-06 | 武汉理工大学 | A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor |
| CN110823121A (en) * | 2019-12-13 | 2020-02-21 | 大连理工大学 | F-P cavity type high-temperature large-strain optical fiber sensor |
| CN114279353A (en) * | 2021-12-28 | 2022-04-05 | 中国人民解放军国防科技大学 | High-temperature strain sensor of sapphire optical fiber F-P cavity cascade SFBG |
| CN114322814A (en) * | 2021-12-28 | 2022-04-12 | 中国人民解放军国防科技大学 | Anti-scouring high-temperature strain sensor for metal casting of sapphire fiber grating |
-
2019
- 2019-04-10 CN CN201920480363.8U patent/CN209689648U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207732A (en) * | 2019-04-10 | 2019-09-06 | 武汉理工大学 | A kind of superhigh temperature sapphire fiber F-P temperature strain compound sensor |
| CN110823121A (en) * | 2019-12-13 | 2020-02-21 | 大连理工大学 | F-P cavity type high-temperature large-strain optical fiber sensor |
| CN114279353A (en) * | 2021-12-28 | 2022-04-05 | 中国人民解放军国防科技大学 | High-temperature strain sensor of sapphire optical fiber F-P cavity cascade SFBG |
| CN114322814A (en) * | 2021-12-28 | 2022-04-12 | 中国人民解放军国防科技大学 | Anti-scouring high-temperature strain sensor for metal casting of sapphire fiber grating |
| CN114279353B (en) * | 2021-12-28 | 2023-08-29 | 中国人民解放军国防科技大学 | High-temperature strain sensor of sapphire optical fiber F-P cavity cascade SFBG |
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