CN212205089U

CN212205089U - Heating device

Info

Publication number: CN212205089U
Application number: CN202020888741.9U
Authority: CN
Inventors: 王新征; 黎微明; 李翔; 许所昌; 李勇; 左敏
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2020-05-23
Filing date: 2020-05-23
Publication date: 2020-12-22
Anticipated expiration: 2030-05-23

Abstract

A heating device comprises an inner shell, an outer shell and a heat insulation layer positioned between the inner shell and the outer shell, wherein the inner shell is provided with an inner space for containing water; the heating device comprises a water inlet and a water outlet which are communicated with the inner space; the heating device also comprises a plurality of heating components which are positioned in the inner space and are arranged at intervals, wherein each heating component comprises a supporting rod and a heating element which is fixed on the supporting rod. The utility model discloses a set up a plurality of heating element of interval arrangement, can heat the water in different regions simultaneously, improved the efficiency of heating.

Description

Heating device

Technical Field

The utility model relates to a heating device especially relates to an instant heating type ultrapure water heating device, can be applied to semiconductor technology field.

Background

Generally, wafers in semiconductor wet processes need to be cleaned, and different processes need to be performed under different temperatures of deionized water to achieve the required cleaning and reaction conditions. The main purpose of cleaning is to improve the ability to remove chemical residues and particulate matter. In addition, how to reduce the usage amount of ultrapure water and reduce the emission of hazardous chemicals, reduce bacterial pollution, improve yield, reduce thermal shock, improve productivity, and the like is also a technical problem faced by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a heating device that heating efficiency is higher.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a heating device comprises an inner shell, an outer shell and a heat insulation layer positioned between the inner shell and the outer shell, wherein the inner shell is provided with an inner space for containing water; the heating device comprises a water inlet and a water outlet which are communicated with the inner space; the heating device also comprises a plurality of heating components which are positioned in the inner space and are arranged at intervals, wherein each heating component comprises a supporting rod and a heating element which is fixed on the supporting rod.

As a further improved technical solution of the present invention, the inner shell is provided with a top wall and a bottom wall, and the inner space is located between the top wall and the bottom wall; the heating device comprises a first partition plate positioned at the bottom of the inner space, and the first partition plate is higher than the bottom wall; the inner space comprises an inlet cavity which is positioned between the first partition plate and the bottom wall and communicated with the water inlet, and a heating cavity which is positioned above the first partition plate; the first partition plate is provided with a plurality of first diversion holes which are communicated with the inlet cavity and the heating cavity.

As a further improved technical solution of the present invention, the heating device includes a second partition plate located at the top of the inner space, the second partition plate being lower than the top wall; the inner space comprises an outlet cavity which is positioned between the second partition plate and the top wall and is communicated with the water outlet, and the heating cavity is positioned below the second partition plate; the second partition plate is provided with a plurality of second diversion holes which are communicated with the heating cavity and the outlet cavity.

As the utility model discloses further modified technical scheme, heating device is including being located oral siphon on the axis of inner space, the oral siphon is equipped with into the water passageway, the top of going into the water passageway with the water inlet is linked together, the bottom of going into the water passageway with the entrance cavity body communicates mutually, the oral siphon be equipped with a plurality of first wall holes that the entrance cavity body is linked together.

As a further improved technical scheme of the utility model, the bottom surface welded fastening of oral siphon is in on the diapire, the top of oral siphon runs through the export cavity.

As a further improved technical scheme of the utility model, the bottom surface welded fastening of bracing piece is in on the diapire, the top surface welded fastening of bracing piece is in on the second baffle.

As a further improved technical scheme of the utility model, heating device is equipped with into water swivel, relief valve and electrode extraction joint, go into the water swivel the relief valve and the electrode extraction joint is all installed heating device's top, wherein the water inlet sets up on the water swivel, the delivery port sets up on the water swivel, the relief valve with the export cavity is linked together, the electrode extraction joint with heating element is connected.

As a further improved technical solution of the present invention, the inner space is cylindrical, and the support rod is disposed along at least one circumference of the inner space.

As a further improved technical solution of the present invention, the support rod is hollow and includes a middle channel passing through the support rod from top to bottom and a plurality of second wall holes communicating the middle channel with the inner space; the heating elements are heating wires wound on the corresponding supporting rods, and the heating wires are provided with heating leads used for being connected with a power supply.

As a further improved technical solution of the present invention, the outer shell is made of a metal material; the heating device also comprises a thermocouple which is positioned in the inner space and is connected with the heating element, and the thermocouple is used for adjusting the temperature of the heating element.

Compared with the prior art, the utility model discloses a set up a plurality of heating element of interval arrangement, can heat the water in different regions simultaneously, improved the efficiency of heating.

Drawings

Fig. 1 is a schematic perspective view of the heating device of the present invention.

Fig. 2 is a right side view of fig. 1.

Fig. 3 is a schematic sectional view taken along line a-a in fig. 1.

Fig. 4 is a top view of fig. 1.

Fig. 5 is a schematic sectional view taken along line B-B in fig. 2.

Fig. 6 is a partially enlarged view of a drawing portion C in fig. 5.

Detailed Description

Exemplary embodiments of the present invention will be described in detail below with reference to the accompanying drawings. If several embodiments exist, the features of these embodiments may be combined with each other without conflict. When the description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The description set forth below in the exemplary detailed description does not represent all embodiments consistent with the present invention; rather, they are merely examples of apparatus, products, and/or methods consistent with certain aspects of the invention, as recited in the claims of the invention.

The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in the specification and claims of this application, the singular form of "a", "an", or "the" is intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the terms "first," "second," and the like as used in the description and in the claims of the present invention do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Also, the use of the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. Unless otherwise indicated, the appearances of the phrases "in an" or "in an" embodiment "or the like are not necessarily limited to the particular position or orientation. The word "comprise" or "comprises", and the like, is an open-ended expression meaning that an element that precedes "includes" or "comprising" includes "that the element that follows" includes "or" comprises "and its equivalents, that do not preclude the element that precedes" includes "or" comprising "from also including other elements. If the utility model discloses in appear "a plurality of", its meaning indicates two and more than two.

Referring to fig. 1 to 6, the present invention discloses a heating apparatus 100, which can be applied to the semiconductor technology field for cleaning a wafer. In one embodiment of the present invention, the heating device 100 is an instant ultrapure water heating device; of course, the term "instant heating" as used in the present invention is intended to indicate that the heating device 100 of the present invention can efficiently heat water, and realize the functions of cold water inlet and hot water outlet, i.e. cold water can be heated into hot water in a short time. The water referred to in the present invention is "ultrapure water", and means water from which all atoms other than oxygen and hydrogen are removed. Ultrapure water (UPW) has a certain "corrosiveness" due to its high purity, and various ions, molecules, and organic molecules have a certain solubility in water. In order to avoid contamination of ultrapure water, fluoroplastics (e.g., PFA, PVDF, PTFE, etc.) and quartz are mainly used for storage and transportation of ultrapure water.

Referring to fig. 1 to 3, in the illustrated embodiment of the present invention, the heating device 100 includes a housing 10, a bracket 20 fixed on the housing 10, a plurality of heating assemblies 30 located in the housing 10, and a water inlet connector 40, a water outlet connector 50, a pressure relief valve 60 and an electrode lead-out connector 70 mounted on the housing 10.

Referring to fig. 3, in the illustrated embodiment of the present invention, the housing 10 is substantially cylindrical, and includes an inner housing 1, an outer housing 2, and an insulating layer 3 between the inner housing 1 and the outer housing 2. The inner housing 1 is made of fluoroplastic (e.g., at least one of PFA, PVDF, PTFE) or quartz so as not to contaminate ultrapure water. Structurally, the inner housing 1 is provided with a top wall 11, a bottom wall 12, a cylinder 13 connected to both the top wall 11 and the bottom wall 12, and an inner space 14 between the top wall and the bottom wall for containing water. In the illustrated embodiment of the present invention, the inner space 14 is defined by the top wall 11, the bottom wall 12 and the cylinder 13, and the inner space 14 is cylindrical. The top wall 11, the bottom wall 12 and the barrel 13 may be separately manufactured elements which are then joined together as a single unit, for example by welding.

The insulating layer 3 is wrapped on the outer side of the whole inner shell 1. By the arrangement, on one hand, a higher heat preservation function can be achieved; on the one hand, the operator can be prevented from being scalded when touching the heating device 100.

The outer shell 2 is made of a metal material, and is wrapped on the outer side of the whole insulating layer 3 to serve as a protective shell of the pressure container. So set up, can make heating device 100 bear relatively great pressure, avoid the water in heating device 100 to destroy equipment and cause the personal risk because of heating expansion, bursting.

In the illustrated embodiment of the present invention, the brackets 20 include two spaced apart upper and lower portions, wherein each bracket 20 includes a ring portion 201 sleeved on the outer housing 2 and an installation portion 202 integrally extending from the ring portion 201. The circumferential wall of the circular ring part 201 is closed, so that the pressure bearing capacity of the outer shell 2 can be further improved, and the explosion risk of the shell 10 is reduced. The mounting portion 202 is provided with a mounting hole 203 for mounting the heating apparatus 100 to another component.

Referring to fig. 3, in the illustrated embodiment of the present invention, the plurality of heating assemblies 30 are disposed in the inner space 14 and spaced apart from each other, wherein each heating assembly 30 includes a supporting rod 301 and a heating element 302 fixed to the supporting rod 301. The utility model discloses a set up a plurality of heating element 30, can heat the water in different regions simultaneously, improved the efficiency of heating.

In the illustrated embodiment of the present invention, the water inlet joint 40, the water outlet joint 50, the pressure relief valve 60 and the electrode lead-out joint 70 are all installed on the top of the heating device 100, i.e., the top surface of the outer casing 2. The water inlet joint 40 and the water outlet joint 50 can adopt a bead-entering PFA welding joint, wherein the water inlet joint 40 is provided with a water inlet 401 communicated with the inner space 14, and the water outlet joint 50 is provided with a water outlet 501 communicated with the inner space 14. After the temperature of the ultrapure water is out of control and the ultrapure water is gasified and expands in volume, the pressure can be relieved by opening the pressure relief valve 60, so that the equipment and the personal safety are protected. The electrode lead contacts 70 are connected to the heating element 302 to provide the power required to operate the heating element 302. The electrode lead-out terminal 70 is insulated from the outer case 2 and hermetically disposed.

Specifically, referring to fig. 3, the heating device 100 of the present invention further includes a first partition 15 located at the bottom of the inner space 14, a second partition 16 located at the top of the inner space 14, and a water inlet pipe 17 located on the axis of the inner space 14. Wherein the first partition 15 is higher than the bottom wall 12, and the second partition 16 is lower than the top wall 11; the inner space 14 includes an inlet chamber 141 between the first partition 15 and the bottom wall 12 and communicating with the water inlet 401, an outlet chamber 142 between the second partition 16 and the top wall 11 and communicating with the water outlet 501, and a heating chamber 143 between the first partition 15 and the second partition 16. The first partition 15 is provided with a plurality of first flow-dividing holes 151 communicating the inlet chamber 141 and the heating chamber 143. Preferably, the plurality of first distributing holes 151 are uniformly distributed on the first partition plate 15. The second partition 16 is provided with a plurality of second flow dividing holes 161 communicating the heating chamber 143 and the outlet chamber 142. Preferably, the plurality of second distribution holes 161 are uniformly distributed on the second partition plate 16.

The water inlet pipe 17 is provided with a water inlet passage 171. The top of the water inlet passage 171 is in communication with the water inlet 401, and the bottom of the water inlet passage 171 is in communication with the inlet chamber 141. The water inlet pipe 17 is further provided with a plurality of first wall holes 172 communicated with the inlet cavity 141. Preferably, the plurality of first wall holes 172 are uniformly distributed on the wall of the water inlet pipe 17, so as to uniformly disperse the water in the water inlet passage 171 into the inlet cavity 141. The water inlet pipe 17 is made of fluoroplastic or quartz, the bottom surface of the water inlet pipe 17 is welded and fixed on the bottom wall 12, and the top of the water inlet pipe 17 penetrates through the outlet cavity 142 to be connected with the water inlet connector 40. In the illustrated embodiment of the present invention, the pressure relief valve 60 is in communication with the outlet chamber 142 to relieve pressure when necessary by opening the pressure relief valve 60.

Referring to fig. 5, the support rods 301 are uniformly distributed along two circumferences C1, C2 of the inner space 14. So configured, the temperature uniformity of the heating element 302 when heating water is improved. Referring to fig. 3, the supporting rod 301 is hollow and includes a middle channel 3011 passing through from top to bottom, and the middle channel 3011 is communicated with the inner space 14. Preferably, the support rod 301 is made of fluoroplastic or quartz. The bottom surface of the support rod 301 is welded and fixed on the bottom wall 12, and the top surface of the support rod 301 is welded and fixed on the second partition board 16. The support rod 301 is provided with a plurality of second wall holes 3012 communicated with the inlet cavity 141, so that water in the inlet cavity 141 can enter the intermediate channel 3011 through the second wall holes 3012.

In the illustrated embodiment of the present invention, the heating element 302 is a heating wire wound around the corresponding support rod 301. The heating wire is provided with a heating lead wire 3021 for connecting a power supply, and the heating lead wire 3021 passes through the support rod 301 and the middle channel 3011 from bottom to top to be connected to the electrode lead-out connector 70.

The surface of the heating wire which is in contact with water is provided with at least one of the following materials: PFA, PVDF, PTFE, quartz. The design ensures that the heating wire has no pollution to water. In addition, the heating device 100 includes a thermocouple (not shown) located within the interior space 14 and coupled to the heating element 302, the thermocouple being connectable to an external PID system to regulate the temperature of the heating element 302 and, thus, the desired water temperature.

The working principle of the utility model is as follows: first, water having a relatively low temperature flows in from the water inlet 401 located at the top and flows down along the water inlet passage 171 of the water inlet pipe 17; then, the water is branched into the inlet chamber 141 through the first wall hole 172 of the water inlet pipe 17; then, a portion of the water passes through the second wall hole 3012 and enters the middle channel 3011 of the supporting bar 301; another part of the water enters the heating chamber 143 through the first diverging hole 151 of the first partition 15; the two portions of water then flow further upwards, during which the heating element 302 releases heat to heat the water; then, the heated water enters the outlet chamber 142 from the second branch holes 161 of the second partition plate 16 and the top of the intermediate passage 3011, respectively; finally, the water with higher temperature flows out of the heating device 100 from the water outlet 501.

In the illustrated embodiment of the present invention, the water inlet 401 is located at the top of the heating device 100 and guides water to the inlet chamber 141 located at the bottom through the water inlet pipe 17. Of course, in other embodiments, the water inlet 401 may be located at the bottom of the heating device 100, and in this case, the water inlet pipe 17 may be omitted or the length of the water inlet pipe 17 may be reduced.

In the illustrated embodiment of the present invention, the number of the partitions (the first partition 15 and the second partition 16) is two. Of course, in other embodiments, the number of the baffles may be three or more and the baffles are arranged at intervals along the vertical direction to further improve the uniformity of the water temperature.

The above embodiments are only used for illustrating the present invention and not for limiting the technical solutions described in the present invention, and the understanding of the present invention should be based on the technical personnel in the technical field, although the present specification has been described in detail with reference to the above embodiments, however, the skilled in the art should understand that the technical personnel in the technical field can still modify the present invention or substitute the same, and all technical solutions and modifications thereof that do not depart from the spirit and scope of the present invention should be covered within the scope of the claims of the present invention.

Claims

1. A heating device (100) comprising an inner shell (1), an outer shell (2) and an insulating layer (3) between the inner shell (1) and the outer shell (2), the inner shell (1) being provided with an inner space (14) for containing water; the heating device (100) comprises a water inlet (401) and a water outlet (501) which are communicated with the inner space (14); the method is characterized in that: the heating device (100) further comprises a plurality of heating assemblies (30) which are positioned in the inner space (14) and are arranged at intervals, wherein each heating assembly (30) comprises a supporting rod (301) and a heating element (302) fixed on the supporting rod (301).

2. The heating device (100) according to claim 1, wherein: the inner shell (1) is provided with a top wall (11) and a bottom wall (12), and the inner space (14) is positioned between the top wall (11) and the bottom wall (12); the heating device (100) comprises a first partition (15) located at the bottom of the inner space (14), the first partition (15) being higher than the bottom wall (12); the inner space (14) comprising an inlet cavity (141) located between the first partition (15) and the bottom wall (12) and communicating with the water inlet (401), and a heating cavity (143) located above the first partition (15); the first partition plate (15) is provided with a plurality of first flow dividing holes (151) which are communicated with the inlet cavity (141) and the heating cavity (143).

3. The heating device (100) according to claim 2, wherein: -the heating device (100) comprises a second partition (16) located at the top of the inner space (14), the second partition (16) being lower than the top wall (11); the inner space (14) comprises an outlet cavity (142) located between the second partition (16) and the top wall (11) and communicating with the water outlet (501), the heating cavity (143) being located below the second partition (16); the second partition plate (16) is provided with a plurality of second branch flow holes (161) which are communicated with the heating cavity (143) and the outlet cavity (142).

4. A heating device (100) according to claim 3, wherein: the heating device (100) comprises a water inlet pipe (17) located on the axis of the inner space (14), the water inlet pipe (17) is provided with a water inlet channel (171), the top of the water inlet channel (171) is communicated with the water inlet (401), the bottom of the water inlet channel (171) is communicated with the inlet cavity (141), and the water inlet pipe (17) is provided with a plurality of first wall holes (172) communicated with the inlet cavity (141).

5. The heating device (100) according to claim 4, wherein: the bottom surface of the water inlet pipe (17) is welded and fixed on the bottom wall (12), and the top of the water inlet pipe (17) penetrates through the outlet cavity (142).

6. A heating device (100) according to claim 3, wherein: the bottom surface of the supporting rod (301) is welded and fixed on the bottom wall (12), and the top surface of the supporting rod (301) is welded and fixed on the second partition plate (16).

7. A heating device (100) according to claim 3, wherein: heating device (100) is equipped with into water swivel (40), water swivel (50), relief valve (60) and electrode extraction joint (70), go into water swivel (40), go out water swivel (50), relief valve (60) and electrode extraction joint (70) are all installed heating device (100)'s top, wherein water inlet (401) set up go into on water swivel (40), delivery port (501) set up go out on water swivel (50), relief valve (60) with export cavity (142) are linked together, electrode extraction joint (70) with heating element (302) are connected.

8. The heating device (100) according to any one of claims 1 to 7, wherein: the inner space (14) is cylindrical, the support bars (301) being evenly distributed along at least one circumference (C1, C2) of the inner space (14).

9. The heating device (100) according to any one of claims 1 to 7, wherein: the supporting rod (301) is hollow and comprises a middle channel (3011) which penetrates through the supporting rod up and down and a plurality of second wall holes (3012) which are used for communicating the middle channel (3011) with the inner space (14); the heating elements (302) are heating wires wound on the corresponding support rods (301), and the heating wires are provided with heating leads (3021) for connecting a power supply.

10. The heating device (100) according to claim 1, wherein: the outer shell (2) is made of a metal material; the heating device (100) further includes a thermocouple located within the interior space (14) and coupled to the heating element (302) to regulate a temperature of the heating element (302).