CN212694304U - Temperature and flow control device - Google Patents

Abstract

A temperature and flow control device comprises a heating pipeline, a cold water pipeline connected in parallel with the heating pipeline, a power element used for conveying water and a mixer. The heating pipeline comprises a first heating pipeline and a second heating pipeline which are arranged in parallel, and a first heating element and a first flow control valve are arranged in the first heating pipeline; the second heating pipeline is provided with a second heating element and a second flow control valve. A third flow control valve is arranged in the cold water pipeline. The mixer is provided with a first pipeline, a second pipeline, a mixing cavity and a third pipeline, the outlet of the first heating pipeline is mixed with the outlet of the second heating pipeline and then communicated with the first pipeline, and the outlet of the cold water pipeline is communicated with the second pipeline. The utility model discloses can realize the meticulous control to the temperature of water and flow.

Description

Temperature and flow control device

Technical Field

The utility model relates to a temperature flow control device can be applied to semiconductor technology field.

Background

Generally, wafers in semiconductor wet processes need to be cleaned, and different processes need to be performed under different temperatures of deionized water to achieve the required cleaning and reaction conditions. The main purpose of cleaning is to improve the ability to remove chemical residues and particulate matter.

In the related art, an online deionized water heater is mainly adopted to meet the requirement of a semiconductor wet process on temperature control of deionized water. However, the online deionized water heating control system in the semiconductor industry has high requirements for temperature control and flow control (for example, the temperature needs to be controlled within ± 0.5 ℃, the flow error is ± 1%, the temperature response speed reaches a steady state within 300s, etc.), and the heater and the control system thereof in the related art cannot meet the requirements. Specifically, the heater in the related art has a low heating efficiency, generally less than 75%, and the heating efficiency is lower under the condition of a large control flow. The heater in the related art has a slow heating response speed, so that the system control has serious hysteresis in the heating control process, and the temperature control precision of the system is greatly influenced. In addition, the heating temperature of the heater is uneven, high-precision large-flow control cannot be realized, the outlet temperature fluctuation is large, and the control is unstable.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can realize the temperature flow control device of meticulous control.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a temperature and flow control device comprises a heating pipeline for heating water, a cold water pipeline arranged in parallel with the heating pipeline, a power element for conveying water to the heating pipeline and/or the cold water pipeline, and a mixer connected with both an outlet of the heating pipeline and an outlet of the cold water pipeline; the heating pipeline comprises a first heating pipeline and a second heating pipeline which are arranged in parallel, a first heating element for heating water and a first flow control valve for adjusting the flow of the water are arranged in the first heating pipeline, and a second heating element for heating the water and a second flow control valve for adjusting the flow of the water are arranged in the second heating pipeline; a third flow control valve for adjusting the flow of water is arranged in the cold water pipeline; the mixer is provided with a first pipeline, a second pipeline, a mixing cavity and a third pipeline, wherein the first pipeline, the second pipeline and the third pipeline are all communicated with the mixing cavity, the first pipeline and the second pipeline are inlet pipelines, and the third pipeline is an outlet pipeline; the outlet of the first heating pipeline is communicated with the outlet of the second heating pipeline after being mixed, and the outlet of the cold water pipeline is communicated with the second pipeline.

As a further improved technical solution of the present invention, the first heating element and the second heating element are respectively a heater; or

The first heating element and the second heating element are two parts of a heater respectively.

As a further improved technical solution of the present invention, the heater includes at least a first heating section and a second heating section, wherein the first heating section and the second heating section can be independently controlled to heat water.

As a further improved technical solution of the present invention, the first pipeline and the second pipeline are located at two sides of the mixing chamber, and the third pipeline is located at the top of the mixing chamber; the mixer is also provided with a conical body positioned in the mixing cavity, and the conical body is gradually reduced from bottom to top.

As a further improved technical solution of the present invention, a first flowmeter is further disposed in the first heating pipeline, and the first flow control valve is connected between the first heating element and the first flowmeter; and a second flow meter is arranged in the second heating pipeline, and the second flow control valve is connected between the second heating element and the second flow meter.

As a further improved technical scheme of the utility model, still be equipped with in the cold water pipeline and connect in the third flow meter of the low reaches of third flow control valve.

As a further improved technical solution of the present invention, the temperature and flow control device further includes a fourth flow meter connected downstream of the mixer.

As a technical scheme of the utility model further improved, temperature flow control device include with the export of power component link to each other first pressure sensor, with the first temperature sensor that the first pipeline of blender links to each other, with the export of blender links to each other second temperature sensor and connects the second pressure sensor in the low reaches of fourth flowmeter, wherein first pressure sensor is used for detecting the inlet pressure of water, first temperature sensor is used for detecting the outflow first heating pipeline with flow the mixed temperature of the water after second heating pipeline and the looks mixture, second temperature sensor is used for detecting the outlet temperature of water, second pressure sensor is used for detecting the outlet pressure of water.

As the utility model discloses further modified technical scheme, the heater includes interior casing, shell body and is located interior casing with heat preservation between the shell body, interior casing is equipped with the inner space that is used for holding water, the heater is still including being located a plurality of heating element of interval arrangement in the inner space, wherein each heating element includes the bracing piece and fixes heater strip on the bracing piece.

As a further improved technical solution of the present invention, the inner shell is provided with a top wall and a bottom wall, and the inner space is located between the top wall and the bottom wall; the heater is including being located the first baffle of inner space's bottom and being located the second baffle at inner space's top, first baffle is higher than the diapire, the second baffle is less than the roof, first baffle is equipped with a plurality of first reposition of redundant personnel holes, the second baffle is equipped with a plurality of second reposition of redundant personnel holes.

Compared with the prior art, the utility model has the advantages that the first heating element and the second heating element are arranged, so that the heating power of the heating element to water can be better adjusted; the outlet of the first heating pipeline is mixed with the outlet of the second heating pipeline and then communicated with the first pipeline, so that the temperature uniformity of hot water is better, and the fine control of the temperature can be realized; through setting up the blender, make the hot water in the first pipeline and the cold water in the second pipeline can realize the homogeneous mixing in the hybrid chamber, improved the accuracy nature of mixed back temperature. In addition, the flow of the corresponding pipeline is adjusted by arranging the flow control valve, so that better flow adjustment can be realized, and the fine control of the flow is realized. Through the control of the temperature and the flow, the fine control of the water at the outlet is realized.

Drawings

Fig. 1 is a schematic diagram of the temperature flow control device of the present invention.

Fig. 2 is a partial perspective view of the heater of fig. 1.

Fig. 3 is a right side view of fig. 2.

Fig. 4 is a schematic sectional view taken along line a-a in fig. 2.

Fig. 5 is a top view of fig. 2.

Fig. 6 is a schematic sectional view taken along line B-B in fig. 3.

Fig. 7 is a partially enlarged view of the drawing portion C in fig. 6.

Fig. 8 is a perspective view of the mixer of fig. 1.

Fig. 9 is a cross-sectional view of fig. 8.

FIG. 10 is a cross-sectional view of the tank and cone of the mixer.

FIG. 11 is a cross-sectional view of the mixer with the third conduit and cover removed.

Fig. 12 is a graph of outlet temperature obtained by the control method according to the present invention.

Fig. 13 is a graph of flow control when two-way control of hot water is used.

Detailed Description

Exemplary embodiments of the present invention will be described in detail below with reference to the accompanying drawings. If several embodiments exist, the features of these embodiments may be combined with each other without conflict. When the description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The description set forth below in the exemplary detailed description does not represent all embodiments consistent with the present invention; rather, they are merely examples of apparatus, products, and/or methods consistent with certain aspects of the invention, as recited in the claims of the invention.

The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in the specification and claims of this application, the singular form of "a", "an", or "the" is intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the terms "first," "second," and the like as used in the description and in the claims of the present invention do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Also, the use of the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. Unless otherwise indicated, the appearances of the phrases "in an" or "in an" embodiment "or the like are not necessarily limited to the particular position or orientation. The word "comprise" or "comprises", and the like, is an open-ended expression meaning that an element that precedes "includes" or "comprising" includes "that the element that follows" includes "or" comprises "and its equivalents, that do not preclude the element that precedes" includes "or" comprising "from also including other elements. If the utility model discloses in appear "a plurality of", its meaning indicates two and more than two.

Referring to fig. 1, the present invention discloses a temperature flow control device, which can be applied to the semiconductor technology field for cleaning a wafer. The temperature and flow control device comprises a heating pipeline 6 for heating water, a cold water pipeline 7 arranged in parallel with the heating pipeline 6, a power element 8 for delivering water to the heating pipeline 6 and/or the cold water pipeline 7, a mixer 4 connected with an outlet 610 of the heating pipeline 6 and an outlet 710 of the cold water pipeline 7, and a controller (not shown) for controlling the temperature and flow control device. In one embodiment of the present invention, the water is "ultrapure water", which means water from which almost all atoms except oxygen and hydrogen are removed. Ultrapure water (UPW) has a certain "corrosiveness" due to its high purity, and various ions, molecules, and organic molecules have a certain solubility in water. In order to avoid contamination of ultrapure water, fluoroplastics (e.g., PFA, PVDF, PTFE, etc.) and quartz are mainly used for storage and transportation of ultrapure water.

In an embodiment of the present invention, the power element 8 is a water pump. Preferably, the water pump is a circulating water pump to deliver water.

The heating duct 6 includes a first heating duct 61 and a second heating duct 62 arranged in parallel. The first heating pipe 61 is provided therein with a first heating element 611 for heating water, a first flow control valve 612 for adjusting the flow rate of water, and a first flow meter 613 located downstream of the first flow control valve 612. The first flow control valve 612 is connected between the first heating element 611 and the first flow meter 613. In one embodiment of the present invention, the first flow control valve 612 is a diaphragm valve. The first flow meter 613 is used for measuring the flow rate of water. The first flow control valve 612 is used to control the flow of water flowing out of the first heating pipe 61.

The second heating pipe 62 is provided therein with a second heating element 621 for heating water, a second flow control valve 622 for regulating the flow rate of water, and a second flow meter 623 located downstream of the second flow control valve 622. The second flow control valve 622 is connected between the second heating element 621 and the second flow meter 623. In an embodiment of the present invention, the second flow control valve 622 is a diaphragm valve. The second flow meter 623 is used to measure the flow rate of water. The second flow control valve 622 is used to control the flow of water out of the second heating conduit 62.

The cold water pipe 7 is provided with a third flow rate control valve 71 for adjusting the flow rate of water and a third flow meter 72 connected downstream of the third flow rate control valve 71. The third flow meter 72 is used to measure the flow of water. The third flow control valve 71 is used to control the flow rate of water flowing out from the cold water pipe 2.

The first heating element 611 and the second heating element 621 are separate heaters 5, respectively; or the first heating element 611 and the second heating element 621 are two parts of one heater 5, respectively, for example, the first heating element 611 is the lower half part of the heater 5, and the second heating element 621 is the upper half part of the heater 5. Of course, in other embodiments, the first heating element 611 may be the upper half of the heater 5, and the second heating element 621 may be the lower half of the heater 5.

Referring to fig. 2, in an embodiment of the present invention, the heater 5 has a cartridge heater structure, and water is supplied from the upper portion and discharged from the upper portion. Preferably, the heater 5 is an instant ultrapure water heater; of course, the term "instant heating type" used in the present invention is intended to indicate that the heater 5 of the present invention can heat water efficiently, and realize the functions of cold water inlet and hot water outlet, i.e. cold water can be heated into hot water in a short time.

Specifically, referring to fig. 2 to 7, in the illustrated embodiment of the present invention, the heater 5 includes a housing 10, a bracket 20 fixed on the housing 10, a plurality of heating assemblies 30 located in the housing 10, and a water inlet connector 40, a water outlet connector 50, a pressure relief valve 60 and an electrode lead-out connector 70 mounted on the housing 10.

Referring to fig. 4, in the illustrated embodiment of the present invention, the housing 10 is substantially cylindrical, and includes an inner housing 1, an outer housing 2, and an insulating layer 3 between the inner housing 1 and the outer housing 2. The inner housing 1 is made of fluoroplastic (e.g., at least one of PFA, PVDF, PTFE) or quartz, and has no metal ions, so as not to contaminate ultrapure water. Structurally, the inner housing 1 is provided with a top wall 11, a bottom wall 12, a cylinder 13 connected to both the top wall 11 and the bottom wall 12, and an inner space 14 between the top wall 11 and the bottom wall 12 for containing water. In the illustrated embodiment of the present invention, the inner space 14 is defined by the top wall 11, the bottom wall 12 and the cylinder 13, and the inner space 14 is cylindrical. The top wall 11, the bottom wall 12 and the barrel 13 may be separately manufactured elements which are then joined together as a single unit, for example by welding.

The insulating layer 3 is wrapped on the outer side of the whole inner shell 1. By the arrangement, on one hand, a higher heat preservation function can be achieved; on the one hand, scalding of the operator contacting the heater 5 can be avoided.

The outer shell 2 is made of a metal material, and is wrapped on the outer side of the whole insulating layer 3 to serve as a protective shell of the pressure container. So set up, can make heater 5 bear great pressure relatively, avoid the water in heater 5 to destroy equipment and cause the personal risk because of heating inflation, bursting.

In the illustrated embodiment of the present invention, the brackets 20 include two spaced apart upper and lower portions, wherein each bracket 20 includes a ring portion 201 sleeved on the outer housing 2 and an installation portion 202 integrally extending from the ring portion 201. The circumferential wall of the circular ring part 201 is closed, so that the pressure bearing capacity of the outer shell 2 can be further improved, and the explosion risk of the shell 10 is reduced. The mounting portion 202 is provided with a mounting hole 203 for mounting the heater 5 to another component.

Referring to fig. 4, in the illustrated embodiment of the present invention, the plurality of heating assemblies 30 are disposed in the inner space 14 and spaced apart from each other, wherein each heating assembly 30 includes a supporting rod 301 and a heating element 302 fixed to the supporting rod 301. The utility model discloses a set up a plurality of heating element 30, can heat the water in different regions simultaneously, improved the efficiency of heating.

In the illustrated embodiment of the present invention, the water inlet joint 40, the water outlet joint 50, the pressure release valve 60 and the electrode lead-out joint 70 are all installed on the top of the heater 5, i.e., the top surface of the outer shell 2. The water inlet joint 40 and the water outlet joint 50 can adopt a bead-entering PFA welding joint, wherein the water inlet joint 40 is provided with a water inlet 401 communicated with the inner space 14, and the water outlet joint 50 is provided with a water outlet 501 communicated with the inner space 14. After the temperature of the ultrapure water is out of control and the ultrapure water is gasified and expands in volume, the pressure can be relieved by opening the pressure relief valve 60, so that the equipment and the personal safety are protected. The electrode lead contacts 70 are connected to the heating element 302 to provide the power required to operate the heating element 302. The electrode lead-out terminal 70 is insulated from the outer case 2 and hermetically disposed.

Specifically, referring to fig. 4, the heater 5 of the present invention further includes a first partition 15 located at the bottom of the inner space 14, a second partition 16 located at the top of the inner space 14, and a water inlet pipe 17 located on the axis of the inner space 14. Wherein the first partition 15 is higher than the bottom wall 12, and the second partition 16 is lower than the top wall 11; the inner space 14 includes an inlet chamber 141 between the first partition 15 and the bottom wall 12 and communicating with the water inlet 401, an outlet chamber 142 between the second partition 16 and the top wall 11 and communicating with the water outlet 501, and a heating chamber 143 between the first partition 15 and the second partition 16. The first partition 15 is provided with a plurality of first flow-dividing holes 151 communicating the inlet chamber 141 and the heating chamber 143. Preferably, the plurality of first distributing holes 151 are uniformly distributed on the first partition plate 15. The second partition 16 is provided with a plurality of second flow dividing holes 161 communicating the heating chamber 143 and the outlet chamber 142. Preferably, the plurality of second distribution holes 161 are uniformly distributed on the second partition plate 16.

The water inlet pipe 17 is provided with a water inlet passage 171. The top of the water inlet passage 171 is in communication with the water inlet 401, and the bottom of the water inlet passage 171 is in communication with the inlet chamber 141. The water inlet pipe 17 is further provided with a plurality of first wall holes 172 communicated with the inlet cavity 141. Preferably, the plurality of first wall holes 172 are uniformly distributed on the wall of the water inlet pipe 17, so as to uniformly disperse the water in the water inlet passage 171 into the inlet cavity 141. The water inlet pipe 17 is made of fluoroplastic, the bottom surface of the water inlet pipe 17 is welded and fixed on the bottom wall 12, and the top of the water inlet pipe 17 penetrates through the outlet cavity 142 to be connected with the water inlet connector 40. In the illustrated embodiment of the present invention, the pressure relief valve 60 is in communication with the outlet chamber 142 to relieve pressure when necessary by opening the pressure relief valve 60.

Referring to fig. 6, the support rods 301 are uniformly distributed along two circumferences C1, C2 of the inner space 14. So configured, the temperature uniformity of the heating element 302 when heating water is improved. Referring to fig. 4, the supporting rod 301 is hollow and includes a middle channel 3011 passing through from top to bottom, and the middle channel 3011 is communicated with the inner space 14. Preferably, the support bar 301 is made of fluoroplastic, and is free from metal ion contamination. The bottom surface of the support rod 301 is welded and fixed on the bottom wall 12, and the top surface of the support rod 301 is welded and fixed on the second partition board 16. The support rod 301 is provided with a plurality of second wall holes 3012 communicated with the inlet cavity 141, so that water in the inlet cavity 141 can enter the intermediate channel 3011 through the second wall holes 3012.

In the illustrated embodiment of the present invention, the heating element 302 is a heating wire wound around the corresponding support rod 301. The heating wire is provided with a heating lead wire 3021 for connecting a power supply, and the heating lead wire 3021 passes through the support rod 301 and the middle channel 3011 from bottom to top to be connected to the electrode lead-out connector 70.

The surface of the heating wire which is in contact with water is provided with at least one of the following materials: PFA, PVDF, PTFE, quartz. The design ensures that the heating wire has no metal ion pollution to water. In addition, the heater 5 includes a thermocouple (not shown) located within the interior space 14 and connected to the heating element 302, the thermocouple being connectable to an external PID system for adjusting the temperature of the heating element 302 and thus the desired water temperature. Of course, in other embodiments, the heating wire may also be heated by a quartz resistance thin film, that is, a resistance metal film is covered outside the semiconductor-grade quartz tube, and water in the quartz tube is heated by heat conduction, so that the heating efficiency is higher, the response speed is faster, and the control precision is higher. In an embodiment of the present invention, the support rod 301 is a quartz tube, and the heating element 302 is a heating wire wound around the quartz tube. The elements of the heater 5 that come into contact with water are mainly quartz tubes and fittings. In an embodiment of the present invention, the quartz tube is formed by connecting a plurality of sections in series, so that the overall height of the heater 5 can be reduced.

The working principle of the heater 5 in the illustrated embodiment of the present invention is as follows: first, water having a relatively low temperature flows in from the water inlet 401 located at the top and flows down along the water inlet passage 171 of the water inlet pipe 17; then, the water is branched into the inlet chamber 141 through the first wall hole 172 of the water inlet pipe 17; then, a portion of the water passes through the second wall hole 3012 and enters the middle channel 3011 of the supporting bar 301; another part of the water enters the heating chamber 143 through the first diverging hole 151 of the first partition 15; the two portions of water then flow further upwards, during which the heating element 302 releases heat to heat the water; then, the heated water enters the outlet chamber 142 from the second branch holes 161 of the second partition plate 16 and the top of the intermediate passage 3011, respectively; finally, the water with higher temperature flows out of the heater 5 from the water outlet 501 and flows to the mixer 4.

In the illustrated embodiment of the present invention, the water inlet 401 is located at the top of the heater 5 and guides water to the inlet chamber 141 located at the bottom through the water inlet pipe 17. Of course, in other embodiments, the water inlet 401 may be located at the bottom of the heater 5, and in this case, the water inlet pipe 17 may be omitted or the length of the water inlet pipe 17 may be reduced.

In the illustrated embodiment of the present invention, the number of the partitions (the first partition 15 and the second partition 16) is two. Of course, in other embodiments, the number of the baffles may be three or more and the baffles are arranged at intervals along the vertical direction to further improve the uniformity of the water temperature.

In other embodiments of the present invention, the heater 5 may also be a segmented heater, i.e. the heater 5 comprises at least a first heating segment and a second heating segment, wherein the first heating segment and the second heating segment can be independently controlled to heat water. Of course, in some embodiments, the heater 5 may also include an upper heating part, a middle heating part, and a lower heating part, which respectively perform temperature control on the upper area, the middle area, and the lower area, so as to realize gradual temperature control and improve the accuracy of temperature control. When water enters the bottom of the heater 5, the heating part at the lower section is started; in the process that water flows from the bottom to the top, the heating parts of the middle section and the upper section are respectively controlled, and the temperature is gradually increased from the bottom to the top. When the water temperature is basically stable, only the heating part of the top section is slightly regulated and controlled so as to realize micro regulation and control of the temperature. Compared with the integral heater 5, under the condition of high-power heating regulation, the sectional heater has a smaller fluctuation range of temperature, can better improve the stability and the precision of temperature control, and avoids the temperature at the outlet from being suddenly changed. In an embodiment of the present invention, the heating element 302 may also be a heating wire in the shape of a spiral disk. The heating wires can be in multiple groups to improve the heating power and the stability of temperature control. In an embodiment of the present invention, there may be two water outlets 501 respectively located on two sides of the water inlet pipe 17; in this case, the heater 5 further includes a mixing pipe (not shown) for mixing the two water outlets 501 to improve uniformity of the water temperature.

Referring to fig. 8 to 11, an embodiment of the present invention discloses a mixer 4 for precisely adjusting the temperature of water discharged from the heating pipe 6 and/or the cold water pipe 7. The mixer 4 includes a tank 401 having a mixing chamber 400, a first pipe 41 connected between the heating pipe 6 and the tank 401 to transfer hot water discharged from the heating pipe 6 into the mixing chamber 400, a second pipe 42 for transferring cold water into the mixing chamber 400 of the tank 401, a third pipe 43 for discharging water in the mixing chamber 400 out of the tank 401, a first detecting member (not shown) for detecting a temperature of water in the first pipe 41, and a second detecting member (not shown) for detecting a temperature of water in the third pipe 43. The first pipe 41 and the second pipe 42 are inlet pipes and are disposed at a lower portion of the tank 401, and the third pipe 43 is an outlet pipe and is disposed at a top portion of the tank 401.

As shown in fig. 9 and 10, the tank 401 further includes a first opening 411 for installing the first pipe 41, a second opening 421 for installing the second pipe 42, and a third opening 431 for installing the third pipe 43, the first opening 411, the second opening 421, and the third opening 431 are all communicated with the mixing chamber 400, the first opening 411, the second opening 421 are located at the lower portion of the tank 401, and the third opening 431 is located at the top of the tank 401. The hot water discharged from the heating pipe 6 is transferred into the mixing chamber 400 of the tank 401 through the first pipe 41, the cold water discharged from the cold water pipe 7 is transferred into the mixing chamber 400 through the second pipe 42, and the cold water and the hot water are mixed in the mixing chamber 400 and then discharged from the third pipe 43. In order to ensure that the temperature of the water discharged from the third pipe 43 is within a preset range, the first and second detecting members detect the temperature of the water in the first pipe 41 and the third pipe 43, respectively, in real time. When the temperature of the water in the third pipe 43 exceeds a preset value, the controller adjusts the flow rate of the water in the second pipe 42 according to the temperatures of the water detected by the first and second detecting members until the temperature of the water in the third pipe 43 detected by the second detecting member is within a preset range. The first detecting member and the second detecting member are temperature sensors.

Referring to fig. 9, the tank 401 includes a body 44 and a cover 45, and the mixing chamber 400 is enclosed by the body 44 and the cover 45. The body portion 44 and the cover body 45 are made of fluorine material or quartz to avoid metal ion contamination. After the two are molded, they are assembled together by a welding process, for example, a fluororesin joint is selected for welding. The first opening 411 and the second opening 421 are disposed at the lower portion of the main body 44, and the third opening 431 is disposed on the cover 45.

Referring to fig. 9, a direction parallel to the center line of the first duct 41 is defined as a left-right direction, a direction parallel to the center line of the third duct 43 is defined as a vertical direction, and a direction orthogonal to both the left-right direction and the vertical direction is defined as a front-rear direction. In the following description, upper, lower, left, right, front, and rear are used to describe the positional relationship between the relevant elements, so that the explanation for describing the positional relationship of one element with another element becomes simple, but the description in these orientations does not have any limiting meaning to the technique itself.

Referring to fig. 11, in the embodiment of the present invention, the tank 401 is a square shape as a whole, and the mixing chamber 400 is a cylinder shape. The center line of the mixing chamber 400 is parallel to the vertical direction, the center lines of the first and second pipes 41 and 42 are parallel to each other and to the left-right direction, the center line of the third pipe 43 is parallel to the vertical direction, that is, the center line of the mixing chamber 400 is perpendicular to the center lines of the first and second pipes 41 and 42, and the center line of the mixing chamber 400 is parallel to the center line of the third pipe 43. In the front-rear direction, there is a distance between the center line of the first duct 41 and the center line of the second duct 42. The center line of the first pipe 41 and the center line of the second pipe 42 do not intersect with the center line of the mixing chamber 400, and the center line of the first pipe 41 and the center line of the second pipe 42 are respectively located at both sides of the center line of the mixing chamber 400, so that the water entering the mixing chamber 400 from the first pipe 41 and the second pipe 42 is better mixed together.

In other embodiments, the centerline of the first conduit 41 and the centerline of the second conduit 42 may not be parallel to each other, as long as they do not coincide. The design is such that the water entering the mixing chamber 400 from the first pipe 41 and the second pipe 42 can be mixed together more quickly and uniformly.

Referring to fig. 9, a cone 46 is further disposed in the mixing chamber 400, and the cone 46 is located between the first opening 411 and the second opening 421. The cone 46 is a structure whose outer contour gradually decreases along a certain direction, and the contour line of the outer contour parallel to the certain direction may be a line segment, such as the contour line corresponding to the cone, or an arc, such as the corresponding contour line of the spherical body, and the entire surface of the outer contour may be smoothly transited, or non-smoothly transited, such as making a plurality of protrusions and grooves on the surface of the cone or the spherical body.

In the embodiment disclosed in the present invention, the cone 46 is a cone, and the overall profile of the cone 46 is gradually reduced in the direction close to the third pipe 43, that is, the diameter of the cone 46 is gradually reduced in the direction close to the third pipe 43. The center line of the cone 46, the center line of the mixing chamber 400, and the center line of the third duct 43 coincide with each other.

Since the middle portion of the mixing chamber 400 is provided with the cone 46 having a diameter gradually decreasing in a direction approaching the third pipe 43, and the center line of the first pipe 41 and the center line of the second pipe 42 are respectively located at both sides of the center line of the mixing chamber 400 in the front-rear direction, the two water flows flowing into the mixing chamber 400 from the first pipe 41 and the second pipe 42 are uniformly mixed and then rotationally ascended, thereby being discharged from the third pipe 43. In the illustrated embodiment of the present invention, the cone 46 and the can 401 are separately formed and then assembled together by welding. Of course, in other embodiments, the two may be integrally formed.

The mixer 4 of the present invention is configured such that the first pipeline 41 and the second pipeline 42 input cold water and hot water into the mixing chamber 400 of the tank 401, and the center line of the first pipeline 41 and the center line of the second pipeline 42 are not overlapped, so that the water energy entering the mixing chamber 400 from the first pipeline 41 and the second pipeline 42 can be mixed together more quickly and uniformly; the conical body 46 is arranged in the mixing cavity 400, so that two water flows flowing into the mixing cavity 400 from the first pipeline 41 and the second pipeline 42 are swirled and then rise in a rotating manner, and then are discharged from the third pipeline 43, and the water flows are swirled in the mixing cavity 400, so that the water is rapidly and uniformly mixed in a short time, and the accuracy of the water temperature after mixing is improved; the body portion 44 and the cover body 45 are made of a fluorine material or quartz to avoid metal ion contamination; in addition, the first and second detecting members are provided to monitor the temperatures of the water in the first and third pipes 41 and 43, respectively, in real time, and the control member is provided to adjust the flow rate of the water in the second pipe 42 in conjunction with the temperatures of the water detected by the first and second detecting members, thereby precisely controlling the temperature of the water flowing out of the third pipe 43 within a preset range. The mixer 4 of the utility model has simple structure, lower production and manufacturing cost and higher temperature control precision; meanwhile, the mixer 4 adjusts the temperature of the finally discharged water, so that the requirement on the precision of the temperature control of the heater is lowered, and the research and development and manufacturing costs are reduced.

Referring to fig. 1, the temperature and flow control apparatus according to the illustrated embodiment of the present invention further includes a first pressure sensor 81 connected to the outlet of the power element 8, a first temperature sensor 82 connected to the first pipe 41 of the mixer 4, a second temperature sensor 83 connected to the outlet of the mixer 4, a fourth flow meter 84 connected downstream of the mixer 4, and a second pressure sensor 85 connected downstream of the fourth flow meter 84, wherein the first pressure sensor 81 is used for detecting the inlet pressure of the water, the first temperature sensor 82 is used for detecting the mixed temperature of the water flowing out of the first heating pipeline 61 and the water flowing out of the second heating pipeline 62 and mixed with each other, the second temperature sensor 83 is used for detecting the outlet temperature of the water, and the second pressure sensor 85 is used for detecting the outlet pressure of the water.

The utility model discloses a temperature flow control device's theory of operation as follows:

first, water is pumped into the first heating element 611 and the second heating element 621 by the power element 8; then, the first heating element 611 and the second heating element 621 heat the water according to the temperature set by the process; finally, the heated water is mixed by the mixer 4 and flows out to the next process. Because the heating element is heated simultaneously in two paths, the heating speed of the equipment and the large-flow processing capacity of the equipment can be greatly improved. The cold water pipeline 7 is used for feeding cold water and is selectively opened or closed according to the outlet temperature and the flow rate. For example, when the outlet temperature is high, the first heating pipeline 61 and the second heating pipeline 62 are closed, so that the temperature of the outlet water can be quickly controlled, and the temperature response speed of the system is increased.

The utility model discloses still relate to above-mentioned temperature flow control device's control method, it includes following step:

s1: when the outlet temperature of the third pipe 43 of the mixer 4 is lower than a first temperature set value T1, the cold water pipe 7 is closed, the first heating pipe 61 and the second heating pipe 62 are opened, and the water is heated by the full power of the first heating element 611 and the second heating element 621;

s2: when the outlet temperature of the third pipe 43 of the mixer 4 reaches the first temperature set point T1, the first heating element 611 and the second heating element 621 are PID-regulated within a limited output power range to adjust the heating temperature of the water;

s3: when the temperature and flow control device reaches a steady state, the limited output power ranges of the first heating element 611 and the second heating element 621 in the step S2 are released, and PID automatic adjustment is performed to control the temperature of the water within a required range;

s4: when the outlet temperature of the third pipe 43 of the mixer 4 is higher than the second temperature set value T2, the cold water pipe 7 is opened to adjust the temperature of the water.

In step S4, when the cold water pipe 7 is opened, the flow rate of the outlet 614 of the first heating pipe 61 and/or the outlet 624 of the second heating pipe 62 is simultaneously reduced such that the reduced flow rate and the increased flow rate coincide. In one embodiment of the present invention, the cold water pipe 7 directly uses unheated cold water and the first heating pipe 61 and the hot water in the second heating pipe 62 are heat-exchanged inside the mixer 4. In the control stage, the water outlet flow of the first heating pipeline 61 and the water outlet flow of the second heating pipeline 62 need to be reduced at the same time, so that the reduced flow of the heating branch is consistent with the increased flow of the cold water pipeline 7, the outlet flow is ensured to be stable, and the outlet temperature can be quickly reduced after heat exchange.

Conventional PID control will slowly increase the PID output from zero based on the set temperature. Accordingly, the heating output power of the heater 5 is slowly output. However, this can lead to problems of temperature overshoot and extended system steady-state time after full power heating of the heater 5 due to heating hysteresis. Referring to fig. 12, the temperature control method of the present invention employs an improved PID control, and the response speed and the time to reach the steady state are shortened compared to the conventional PID control. Particularly, the utility model discloses a temperature control method adopts quick PID control scheme, and the heater adopts the full power heating in earlier stage, reaches first temperature setting value T1 (according to system outlet temperature rising curve come actual regulation and set up) when outlet temperature, switches to and adjusts (PID blind spot control) to PID output power limiting range, can avoid PID output fluctuation great. And switching to PID steady-state heating control after the system tends to be stable, so as to realize rapid temperature stabilization. Compare in traditional PID control method, the utility model discloses a temperature control method can improve the system temperature quick response, shorten the stability time, reduce the volatility of system temperature.

The PID dead zone control is PID control for controlling the output range of the heating output power of the heater 5. According to the inlet water temperature t0 (DEG C), the outlet water temperature t (DEG C), the water flow (L/min), the power (Kw) of the heater 5, the specific heat capacity c of water and the efficiency n (%) of the heater 5, and according to Q ═ cm Delta t, the power of the heater 5 required currently can be calculated in real time through the PLC. Wherein: q represents heat, c represents specific heat capacity, m represents mass of the object, Δ t: representing the varying temperature of the object, i.e., t-t 0. And setting a margin (for example, 10 percent) in a theoretical control output range, wherein the margin can be flexibly adjusted according to actual conditions, and finally, one output range of the PID can be controlled. And when the system is finally in a steady state, switching to PID automatic control.

The utility model discloses flow control method in the embodiment that the figure illustrates adopts two way deionized water control methods, and figure 13 is the flow control curve graph that obtains when 20L/min is set for in the one way, can see out the stability and the precision of its flow better from the figure.

Compared with the prior art, the utility model has the advantages that the first heating element 611 and the second heating element 621 are arranged, so that the heating power of the heating element to water can be better adjusted; the outlet 614 of the first heating pipeline 61 is mixed with the outlet 624 of the second heating pipeline 621 and then communicated with the mixer 4, so that the temperature uniformity of the hot water is better, and the fine control of the temperature can be realized; in addition, the flow of water in the corresponding pipeline is adjusted by arranging the flow control valve, so that better flow adjustment can be realized, and the fine control of the water flow is realized.

Claims (10)

1. A temperature flow control device characterized by: the device comprises a heating pipeline (6) used for heating water, a cold water pipeline (7) connected with the heating pipeline (6) in parallel, a power element (8) used for conveying water to the heating pipeline (6) and/or the cold water pipeline (7), and a mixer (4) connected with the outlet of the heating pipeline (6) and the outlet of the cold water pipeline (7); the heating pipeline (6) comprises a first heating pipeline (61) and a second heating pipeline (62) which are arranged in parallel, a first heating element (611) used for heating water and a first flow control valve (612) used for adjusting the flow of the water are arranged in the first heating pipeline (61), and a second heating element (621) used for heating the water and a second flow control valve (622) used for adjusting the flow of the water are arranged in the second heating pipeline (62); a third flow control valve (71) for adjusting the flow of water is arranged in the cold water pipeline (7); the mixer (4) is provided with a first pipeline (41), a second pipeline (42), a mixing cavity (400) and a third pipeline (43), wherein the first pipeline (41), the second pipeline (42) and the third pipeline (43) are all communicated with the mixing cavity (400), the first pipeline (41) and the second pipeline (42) are inlet pipelines, and the third pipeline (43) is an outlet pipeline; an outlet (614) of the first heating pipeline (61) is mixed with an outlet (624) of the second heating pipeline (62) and then communicated with the first pipeline (41), and an outlet of the cold water pipeline (7) is communicated with the second pipeline (42).

2. A temperature flow control device according to claim 1, wherein: the first heating element (611) and the second heating element (621) are each separate heaters (5); or

The first heating element (611) and the second heating element (621) are two parts of one heater (5), respectively.

3. A temperature flow control device according to claim 2, wherein: the heater (5) comprises at least a first heating section and a second heating section, wherein the first heating section and the second heating section can be independently controlled to heat water.

4. A temperature flow control device according to claim 1, wherein: the first duct (41) and the second duct (42) are located on both sides of the mixing chamber (400), the third duct (43) is located at the top of the mixing chamber (400); the mixer (4) is further provided with a conical body (46) positioned in the mixing cavity (400), and the conical body (46) is gradually reduced from bottom to top.

5. A temperature flow control device according to claim 1, wherein: a first flow meter (613) is further arranged in the first heating pipeline (61), and the first flow control valve (612) is connected between the first heating element (611) and the first flow meter (613); a second flow meter (623) is further arranged in the second heating pipeline (62), and the second flow control valve (622) is connected between the second heating element (621) and the second flow meter (623).

6. A temperature flow control device according to claim 5, wherein: and a third flow meter (72) connected to the downstream of the third flow control valve (71) is also arranged in the cold water pipeline (7).

7. A temperature flow control device according to claim 6, wherein: the temperature flow control device further comprises a fourth flow meter (84) connected downstream of the mixer (4).

8. A temperature flow control device according to claim 7, wherein: the temperature and flow control device comprises a first pressure sensor (81) connected with an outlet of the power element (8), a first temperature sensor (82) connected with a first pipeline (41) of the mixer (4), a second temperature sensor (83) connected with an outlet of the mixer (4), and a second pressure sensor (85) connected with the downstream of the fourth flow meter (84), wherein the first pressure sensor (81) is used for detecting the inlet pressure of water, the first temperature sensor (82) is used for detecting the mixed temperature of the water flowing out of the first heating pipeline (61) and the water flowing out of the second heating pipeline (62) and mixed, the second temperature sensor (83) is used for detecting the outlet temperature of the water, and the second pressure sensor (85) is used for detecting the outlet pressure of the water.

9. A temperature flow control device according to claim 2, wherein: heater (5) include interior casing (1), shell body (2) and be located interior casing (1) with heat preservation (3) between shell body (2), interior casing (1) is equipped with inner space (14) that are used for holding water, heater (5) are still including being located a plurality of heating element (30) of interior space (14) and interval arrangement, wherein each heating element (30) include bracing piece (301) and fix heater strip on bracing piece (301).

10. A temperature flow control device according to claim 9, wherein: the inner shell (1) is provided with a top wall (11) and a bottom wall (12), and the inner space (14) is positioned between the top wall (11) and the bottom wall (12); the heater (5) comprises a first partition plate (15) located at the bottom of the inner space (14) and a second partition plate (16) located at the top of the inner space (14), the first partition plate (15) is higher than the bottom wall (12), the second partition plate (16) is lower than the top wall (11), the first partition plate (15) is provided with a plurality of first diversion holes (151), and the second partition plate (16) is provided with a plurality of second diversion holes (161).

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