CN213546274U

CN213546274U - Nitrogen heater

Info

Publication number: CN213546274U
Application number: CN202023292110.XU
Authority: CN
Inventors: 钱诚; 李刚; 吴清
Original assignee: Jiangsu Asia Electronics Technology Co Ltd
Current assignee: Jiangsu Asia Electronics Technology Co Ltd
Priority date: 2020-12-30
Filing date: 2020-12-30
Publication date: 2021-06-25
Anticipated expiration: 2030-12-30

Abstract

The application relates to a nitrogen heater, which is provided with a nitrogen passing pipe, wherein the head end and the tail end of the nitrogen passing pipe are respectively provided with an inlet joint and an outlet joint; heating intracavity is provided with the heating pipe, the winding of heating pipe with spiral winding's mode is in outside nitrogen gas passes through the pipe, and the electric pole that connects at heating pipe both ends is located keep apart the cavity. The heating pipe is wound in a double-strand winding mode, and the heating pipe is a resistance heating pipe. The application discloses nitrogen heater sets up and keeps apart cavity and heating cavity and forms two independent cavities, and electrified joint is located and keeps apart the cavity, and is safer. Meanwhile, the heating pipe is wound outside the nitrogen passing pipe in a spiral winding mode, so that the heat exchange effect can be improved, and the nitrogen can be heated to the required temperature in a shorter time.

Description

Nitrogen heater

Technical Field

The application belongs to the technical field of wafer cleaning equipment, and particularly relates to a nitrogen heater.

Background

During the wafer preparation process, a cleaning operation is required. After wafer cleaning, in order to avoid water stains on the wafer, the wafer surface is generally dried by purging the wafer surface with gaseous isopropyl alcohol (IPA) concentrated with a large amount of nitrogen. In order to ensure the atomization of the isopropyl alcohol, the nitrogen also needs to be heated, and the consumption of the nitrogen is huge during drying, so that the nitrogen needs to be rapidly heated.

Chinese patent document CN 209819883U discloses a high purity nitrogen heater for use in a wafer drying process, comprising: an integrally welded quartz housing having an inlet tube and an outlet tube; the quartz spiral gas pipe is arranged in the quartz shell, one end of the quartz spiral gas pipe is connected with the gas inlet pipe, and the other end of the quartz spiral gas pipe is positioned in the quartz shell; the carbon heater is arranged in the quartz shell and used for heating high-purity nitrogen, and a quartz tube for sealing and coating the heating wire is arranged on the periphery of the carbon heater.

However, the prior art does not consider the problem that electric sparks often occur at the joint of the live equipment, which results in unsafe use, and in addition, although the gas channel spiral for circulating nitrogen increases the time for gas heat exchange, the gas circulation is not smooth, and a nitrogen storage device is usually required to be arranged.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is: in order to solve the defects in the prior art, the nitrogen heater is provided.

The utility model provides a technical scheme that its technical problem adopted is:

a nitrogen heater is provided with a nitrogen passing pipe, the head end and the tail end of the nitrogen passing pipe are respectively provided with an inlet joint and an outlet joint, the nitrogen passing pipe is externally provided with a cylinder wall, and the cylinder wall respectively forms an isolation cavity and a heating cavity along the axial direction of the nitrogen passing pipe;

heating intracavity is provided with the heating pipe, the winding of heating pipe with spiral winding's mode is in outside nitrogen gas passes through the pipe, and the electric pole that connects at heating pipe both ends is located keep apart the cavity.

Preferably, the nitrogen heater of the present invention, the isolation cavity and the heating cavity are cylindrical.

Preferably, the utility model discloses a nitrogen gas heater, keep apart cavity top apron and comprise two semi-circular apron.

Preferably, the utility model discloses a nitrogen heater, still be equipped with temperature sensor in the isolation cavity, temperature sensor's temperature measurement end stretches into within the heating cavity.

Preferably, the utility model discloses a nitrogen gas heater, the lateral wall of keeping apart the cavity has the lead wire via hole for electric wire and temperature sensor's communication cable is drawn forth.

Preferably, the heating cavity of the nitrogen heater of the utility model is filled with heat-preservation cotton.

Preferably, the nitrogen heater of the present invention, the heating chamber inner wall is coated with a mirror material to reflect radiation.

Preferably, the utility model discloses a nitrogen gas heater keeps apart through flange joint between cavity and the heating cavity.

The utility model has the advantages that:

drawings

The technical solution of the present application is further explained below with reference to the drawings and the embodiments.

FIG. 1 is a schematic diagram of a nitrogen heater according to an embodiment of the present disclosure;

FIG. 2 is a schematic view of the structure of FIG. 1 after the wall of the isolation chamber is hidden;

FIG. 3 is a schematic view of the heating chamber shown in FIG. 1 with the wall of the heating chamber hidden;

fig. 4 is a partially enlarged view of fig. 3.

The reference numbers in the figures are:

1 isolating a cavity;

2 heating the cavity;

3 passing nitrogen through the tube;

4, heating a pipe;

8 an inlet connection;

9 an outlet connection;

10 lead vias.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, unless otherwise specified, "a plurality" means two or more.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Examples

The embodiment provides a nitrogen heater, as shown in fig. 1, which is cylindrical, and has a nitrogen passing pipe 3, and the head and tail ends of the nitrogen passing pipe 3 are respectively an inlet joint 8 and an outlet joint 9, the nitrogen passing pipe 3 has a cylinder wall, and the cylinder wall forms an isolation cavity 1 and a heating cavity 2 along the axial direction of the nitrogen passing pipe 3, and the isolation cavity 1 and the heating cavity 2 are connected by a flange for easy assembly and disassembly;

a heating pipe 4 is arranged in the heating cavity 2, the heating pipe 4 is wound outside the nitrogen passing pipe 3 in a spiral winding mode, and electric connecting posts at two ends of the heating pipe 4 are located in the isolation cavity 1. The heating pipe 4 is wound in a double-strand winding mode, and the heating pipe 4 is a resistance heating pipe.

The nitrogen heater of this embodiment sets up isolation cavity 1 and heating cavity 2 and forms two independent cavitys, and electrified joint is located isolation cavity 1, and is safer. Meanwhile, the heating pipe 4 is wound outside the nitrogen passing pipe 3 in a spiral winding manner to improve a heat exchange effect, so that the nitrogen can be heated to a desired temperature in a shorter time. The nitrogen gas can be ensured to flow smoothly even if the nitrogen gas passing pipe 3 is a straight pipe.

The top cover plate of the isolation cavity 1 consists of two semicircular cover plates and is fixed on the wall of the isolation cavity 1 through screws.

A temperature measuring sensor is also arranged in the isolation cavity 1, and the temperature measuring end of the temperature measuring sensor extends into the heating cavity 2.

The side wall of the isolation cavity 1 is provided with a lead wire through hole 10 for leading out an electric wire and a communication cable of the temperature measuring sensor.

The heating cavity 2 is filled with heat insulation cotton.

As a further improvement, the inner wall of the heating chamber 2 is coated with a specular material to reflect the radiation.

In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.

Claims

1. A nitrogen heater is characterized in that a nitrogen passing pipe (3) is arranged, an inlet joint (8) and an outlet joint (9) are respectively arranged at the head end and the tail end of the nitrogen passing pipe (3), a cylinder wall is arranged outside the nitrogen passing pipe (3), and an isolation cavity (1) and a heating cavity (2) are respectively formed on the cylinder wall along the axial direction of the nitrogen passing pipe (3);

heating pipe (4) are arranged in the heating cavity (2), the heating pipe (4) is wound in a spiral winding mode outside the nitrogen passing pipe (3), and the electric connecting columns at the two ends of the heating pipe (4) are located in the isolation cavity (1).

2. A nitrogen heater according to claim 1, characterised in that the insulating chamber (1) and the heating chamber (2) are both cylindrical.

3. The nitrogen heater according to claim 1, characterized in that the top cover plate of the insulating chamber (1) consists of two semicircular cover plates.

4. The nitrogen heater according to claim 1, characterized in that a temperature sensor is arranged in the isolation chamber (1), and the temperature measuring end of the temperature sensor extends into the heating chamber (2).

5. The nitrogen heater according to claim 1, characterized in that the side wall of the insulating chamber (1) has lead through holes (10) for the outgoing of the wires and the communication cables of the thermometric sensors.

6. The nitrogen heater according to claim 1, characterized in that the heating chamber (2) is filled with insulating cotton.

7. Nitrogen heater according to claim 6, characterised in that the heating chamber (2) inner walls are coated with a specular material to reflect radiation.

8. A nitrogen heater according to claim 1, characterised in that the insulating chamber (1) and the heating chamber (2) are flanged.