CN212173571U - Sputtering coating production control track system - Google Patents
Sputtering coating production control track system Download PDFInfo
- Publication number
- CN212173571U CN212173571U CN202020636324.5U CN202020636324U CN212173571U CN 212173571 U CN212173571 U CN 212173571U CN 202020636324 U CN202020636324 U CN 202020636324U CN 212173571 U CN212173571 U CN 212173571U
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- Prior art keywords
- track
- transported
- loading
- translation
- frame
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000004544 sputter deposition Methods 0.000 title claims description 26
- 238000000576 coating method Methods 0.000 title claims description 24
- 239000011248 coating agent Substances 0.000 title claims description 22
- 230000005540 biological transmission Effects 0.000 claims abstract description 38
- 238000001771 vacuum deposition Methods 0.000 claims description 24
- 229910000831 Steel Inorganic materials 0.000 claims description 13
- 239000010959 steel Substances 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000007888 film coating Substances 0.000 abstract description 6
- 238000009501 film coating Methods 0.000 abstract description 6
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 238000009504 vacuum film coating Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Images
Abstract
In order to solve the problems that the film coating of the film coating substrate is finished and then the film frame is transported to the unloading chamber for unloading, and then the unloaded film frame is transported to a clean chamber with high cleanliness, and the pasting process of the film coating substrate is finished in the clean chamber, so that a large amount of manpower and time are consumed, the utility model provides a sputter film coating production control track system, wherein the film frame is transported to an inner track inside a vacuum film coating machine after being loaded by a loading system for vacuum sputter film coating, and is transported to a first transmission track of an unloading system of the unloading chamber after being coated, and is transported to a designated place for unloading by a first translation track, and is transported to a transmission track after being unloaded, and is transported to a second transmission track of a loading system of the loading chamber by the transmission track, and is used for next loading of the film frame, and is then transported to the inner track inside the vacuum film coating machine by the second translation track for next loading, the automation degree is high, the labor and the time are greatly saved, and the production efficiency is greatly improved.
Description
Technical Field
The utility model relates to a sputter coating technical field, it is comparatively specific, involve a sputter coating production control track system.
Background
At present, a vacuum magnetron sputtering coating machine is special equipment for coating metal, glass and plastic surfaces, and is suitable for coating wear-resistant coatings. The vacuum magnetron sputtering film plating machine in the prior art comprises a vacuum pumping system, a vacuum chamber, a feeding hole of the vacuum chamber, a workpiece rotating frame arranged in the vacuum chamber and a magnetron sputtering device arranged on a vacuum chamber body, and a metal layer with the thickness of several microns can be deposited on the surface of a workpiece by utilizing a physical vapor deposition (hereinafter referred to as PVD) technology. With the improvement of living standard, people have more and more demands on coatings with wider application and performance.
At present, after the film coating of the film-coated substrate is finished, the film-coated substrate is transported to an unloading chamber 1 for unloading, then a machine frame after unloading is transported to a clean chamber with high cleanliness, and the process of pasting the film-coated substrate in the clean chamber needs to consume a large amount of manpower and time.
SUMMERY OF THE UTILITY MODEL
In view of the above, in order to solve the problems that after the coating of the coated substrate is completed, the substrate is transported to the unloading chamber for unloading, and then the unloaded substrate rack is transported to a clean room with high cleanliness, and the pasting process of the coated substrate is completed in the clean room, which needs to consume a large amount of manpower and time, the utility model provides a sputter coating production control track system, wherein the substrate rack is transported to the built-in track inside the vacuum coating machine after being loaded by the loading system for vacuum sputter coating, and is transported to the first transmission track of the unloading system of the unloading chamber after being coated, and is transported to a designated place for unloading by the first translation track, and is transported to the transmission track after being unloaded, and is transported to the second transmission track of the loading system of the loading chamber by the transmission track, and is used for the next loading of the substrate rack, and is transported to the built-in track inside the vacuum coating machine by the second translation track for the next loading, the automation degree is high, the labor and the time are greatly saved, and the production efficiency is greatly improved.
The utility model provides a sputter coating production control track system, includes unloading room 1, material loading room 2, vacuum coating machine 3, frame 5 and delivery track 4, its characterized in that: the vacuum coating machine 3 is internally provided with an internal track 31, one side of the unloading chamber 1 is provided with a discharging port 11 and a coating machine output port 12, the loading chamber 2 is provided with a feeding port 21 and a discharging rack port 22, the coating machine output port 12 and the feeding port 21 are connected through the internal track 31 of the vacuum coating machine 3, the discharging rack port 22 and the discharging port 11 are connected through a conveying track 4, the unloading chamber 1 is internally provided with an unloading system 13, the unloading system 13 comprises a first translation track 131 and a first translation rack 133 which are parallel to each other, the first translation rack 133 is provided with a first transmission track 132, the loading chamber 2 is internally provided with a loading system 23, the loading system 23 comprises a second translation track 231 and a second translation rack 232 which are parallel to each other, the second translation rack 232 is provided with a second transmission track 233, the loading system 23 is transported to the internal track 31 inside the vacuum coating machine 3 after loading, the vacuum sputtering coating is carried to the first transmission track 132 of the unloading system 13 of the unloading chamber 1 after the coating, the sheet frame is transported to a designated place through the first translation track 131 for unloading, transported to the conveying track 4 after unloading, transported to the second transmission track 233 of the feeding system 23 of the feeding chamber 2 through the conveying track 4 for next feeding of the sheet frame 5, and then transported to the inner track 31 in the vacuum coating machine 3 through the second translation track 231 for next feeding.
Further, a transmission rail 51 and a rack 52 are arranged on the sheet frame 5, and the transmission rail 51 is connected with the first transmission rail 132 and the second transmission rail 233 in a matching manner.
Further, the upper frames of the first and second translation frames 133 and 232 are both hollow structures, and when the sheet rack 5 is used in cooperation with the first translation frame 133 or the second translation frame 232, the hollow structures of the upper frames can unload or load the sheet rack 5 on both sides, so that a lot of time is saved.
Furthermore, sidewalks are arranged on the upper surfaces of the bottom plate frame of the first translation frame 133 and the bottom plate frame of the second translation frame 232, and raised lines are arranged on the surfaces of the sidewalks to increase friction between the upper surfaces and soles of operators.
Further, the conveying track 4 includes two parallel rails 41 and a control cabinet 42 disposed below the rails 41.
Further, the steel rail 41 is formed by connecting a plurality of rectangular steel bars end to end, and the end openings of the two opposite steel bars are provided with support rods.
Furthermore, the outer side wall of the steel bar far away from the vacuum coating machine 3 is provided with a plurality of photoelectric sensors 43, the photoelectric sensors 43 are electrically connected with the controller in the control cabinet 42, and the photoelectric sensors 43 transmit the transportation information between the machine slice frames 5 to the controller in the control cabinet 42, so that the distance between the machine slice frames 5 is effectively controlled, and the collision of the adjacent machine slice frames 5 is prevented.
Further, the conveying gear 44 is arranged at an interval inside the conveying track 4, and the conveying gear 44 moves in cooperation with the rack 52 of the sheet rack 5.
The utility model has the advantages that: the utility model provides a sputter coating production control track system, on the built-in track 31 of vacuum coating machine 3 inside is transported to after the frame 5 passes through the material loading of feeding system 23, carry out the vacuum sputtering coating, transport on the first transmission track 132 of the unloading system 13 of unloading room 1 after the coating film, transport the appointed place through first translation track 131 and unload, transport on delivery track 4 after unloading, carry the second transmission track 233 of the material loading system 23 of feeding room 2 through delivery track 4, carry out the material loading of next time to frame 5, the built-in track 31 of transporting in the vacuum coating machine 3 through second translation track 231 carries out the material loading of next time afterwards, degree of automation is high, manpower and time have been saved greatly, production efficiency has been improved greatly.
Drawings
Fig. 1 is a schematic structural view of the sputter coating production control track system of the present invention.
Fig. 2 is a schematic structural view of the sheet frame of the present invention.
Fig. 3 is a schematic structural view of the conveying track of the present invention.
Fig. 4 is a schematic structural diagram of the first translation frame of the present invention.
Fig. 5 is a schematic structural diagram of the second translation frame of the present invention.
Description of the main elements
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
As shown in fig. 1, it is a schematic structural diagram of a sputter coating production control track system of the present invention; as shown in fig. 2, it is a schematic structural view of the film frame of the present invention; as shown in fig. 3, it is a schematic structural diagram of the conveying track of the present invention; as shown in fig. 4, it is a schematic structural diagram of the first translation frame 133 of the present invention; as shown in fig. 5, is a schematic structural diagram of the second translation frame of the present invention.
The utility model provides a sputter coating production control track system, includes unloading room 1, material loading room 2, vacuum coating machine 3, frame 5 and delivery track 4, its characterized in that: the vacuum coating machine 3 is internally provided with an internal track 31, one side of the unloading chamber 1 is provided with a discharging port 11 and a coating machine output port 12, the loading chamber 2 is provided with a feeding port 21 and a discharging rack port 22, the coating machine output port 12 and the feeding port 21 are connected through the internal track 31 of the vacuum coating machine 3, the discharging rack port 22 and the discharging port 11 are connected through a conveying track 4, the unloading chamber 1 is internally provided with an unloading system 13, the unloading system 13 comprises a first translation track 131 and a first translation rack 133 which are parallel to each other, the first translation rack 133 is provided with a first transmission track 132, the loading chamber 2 is internally provided with a loading system 23, the loading system 23 comprises a second translation track 231 and a second translation rack 232 which are parallel to each other, the second translation rack 232 is provided with a second transmission track 233, the loading system 23 is transported to the internal track 31 inside the vacuum coating machine 3 after loading, the vacuum sputtering coating is carried to the first transmission track 132 of the unloading system 13 of the unloading chamber 1 after the coating, the sheet frame is transported to a designated place through the first translation track 131 for unloading, transported to the conveying track 4 after unloading, transported to the second transmission track 233 of the feeding system 23 of the feeding chamber 2 through the conveying track 4 for next feeding of the sheet frame 5, and then transported to the inner track 31 in the vacuum coating machine 3 through the second translation track 231 for next feeding.
The machine piece frame 5 is provided with a transmission rail 51 and a rack 52, and the transmission rail 51 is connected with the first transmission rail 132 and the second transmission rail 233 in a matching way.
The upper frames of the first and second translation frames 133 and 232 are both hollow structures, and when the sheet rack 5 is used in cooperation with the first translation frame 133 or the second translation frame 232, the hollow structures of the upper frames can unload or load the sheet rack 5 on both sides, so that a large amount of time is saved.
The upper surfaces of the bottom plate frame of the first translation frame 133 and the bottom plate frame of the second translation frame 232 are both provided with sidewalks, and the surfaces of the sidewalks are provided with raised grains to increase the friction between the upper surfaces and the soles of the operators.
The conveying track 4 comprises two parallel rails 41 and a control cabinet 42 arranged below the rails 41.
The steel rail 41 is formed by connecting a plurality of rectangular steel bars end to end, and support rods are arranged at the end ports of the two opposite steel bars.
The lateral wall of keeping away from vacuum coating machine 3's billet is equipped with several photoelectric sensor 43, and photoelectric sensor 43 and the controller electric connection in the switch board 42 transmit the transportation information between the rack 5 to the controller in the switch board 42 through photoelectric sensor 43 to the distance between effectual control rack 5 prevents the collision of adjacent rack 5.
The conveying gear 44 is arranged at an interval inside the conveying track 4, and the conveying gear 44 is matched with the rack 52 of the sheet frame 5 for movement.
The utility model has the advantages that: the utility model provides a sputter coating production control track system, on the built-in track 31 of vacuum coating machine 3 inside is transported to after the frame 5 passes through the material loading of feeding system 23, carry out the vacuum sputtering coating, transport on the first transmission track 132 of the unloading system 13 of unloading room 1 after the coating film, transport the appointed place through first translation track 131 and unload, transport on delivery track 4 after unloading, carry the second transmission track 233 of the material loading system 23 of feeding room 2 through delivery track 4, carry out the material loading of next time to frame 5, the built-in track 31 of transporting in the vacuum coating machine 3 through second translation track 231 carries out the material loading of next time afterwards, degree of automation is high, manpower and time have been saved greatly, production efficiency has been improved greatly.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (8)
1. The utility model provides a sputter coating production control track system, includes unloading room (1), material loading room (2), vacuum coating machine (3), rack (5) and delivery track (4), its characterized in that: an inner track (31) is arranged inside the vacuum coating machine (3), one side of the unloading chamber (1) is provided with a discharge port (11) and a coating machine output port (12), the loading chamber (2) is provided with a loading port (21) and a discharge port (22), the coating machine output port (12) is connected with the loading port (21) through the inner track (31) of the vacuum coating machine (3), the discharge port (22) is connected with the discharge port (11) through a conveying track (4), an unloading system (13) is arranged in the unloading chamber (1), the unloading system (13) comprises a first translation track (131) and a first translation frame (133) which are parallel to each other, a first transmission track (132) is arranged on the first translation frame (133), a loading system (23) is arranged in the loading chamber (2), the loading system (23) comprises a second translation track (231) and a second translation frame (232) which are parallel to each other, and a second transmission track (233) is arranged on the second translation frame (232), the vacuum sputtering coating machine is characterized by comprising a loading system (23), then being transported to an inner track (31) in the vacuum coating machine (3) for vacuum sputtering coating, being transported to a first transmission track (132) of a discharging system (13) of a discharging chamber (1) after being coated, being transported to a designated place for discharging through a first translation track (131), being transported to a transmission track (4) after being discharged, being transported to a second transmission track (233) of the loading system (23) of a loading chamber (2) through the transmission track (4), carrying out next loading on a rack (5), and then being transported to the inner track (31) in the vacuum coating machine (3) through a second translation track (231) for carrying out next loading.
2. The sputter coating production control track system of claim 1, wherein: the machine frame (5) is provided with a transmission rail (51) and a rack (52), and the transmission rail (51) is connected with the first transmission rail (132) and the second transmission rail (233) in a matching way.
3. The sputter coating production control track system of claim 1, wherein: the upper frames of the first translation frame (133) and the second translation frame (232) are both hollow structures, and when the sheet rack (5) is matched with the first translation frame (133) or the second translation frame (232) for use, the hollow structures of the upper frames can unload or load the sheet rack (5) on two sides simultaneously.
4. The sputter coating production control track system of claim 1, wherein: sidewalks are arranged on the upper surfaces of the bottom plate frame of the first translation frame (133) and the bottom plate frame of the second translation frame (232), and raised grains are arranged on the surfaces of the sidewalks.
5. The sputter coating production control track system of claim 1, wherein: the conveying track (4) comprises two parallel steel rails (41) and a control cabinet (42) arranged below the steel rails (41).
6. The sputter coating production control track system of claim 5, wherein: the steel rail (41) is formed by connecting a plurality of rectangular steel bars end to end, and supporting rods are arranged at the end ports of the two opposite steel bars.
7. The sputter coating production control track system of claim 1, wherein: the outer side wall of the steel bar far away from the vacuum coating machine (3) is provided with a plurality of photoelectric sensors (43), the photoelectric sensors (43) are electrically connected with the controller in the control cabinet (42), and the photoelectric sensors (43) are used for transmitting the transportation information between the machine frame (5) to the controller in the control cabinet (42).
8. The sputter coating production control track system of claim 1, wherein: conveying gears (44) are arranged in the conveying track (4) at intervals, and the conveying gears (44) move in a matched mode with racks (52) of the machine frame (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020636324.5U CN212173571U (en) | 2020-04-24 | 2020-04-24 | Sputtering coating production control track system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020636324.5U CN212173571U (en) | 2020-04-24 | 2020-04-24 | Sputtering coating production control track system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212173571U true CN212173571U (en) | 2020-12-18 |
Family
ID=73768361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020636324.5U Expired - Fee Related CN212173571U (en) | 2020-04-24 | 2020-04-24 | Sputtering coating production control track system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212173571U (en) |
-
2020
- 2020-04-24 CN CN202020636324.5U patent/CN212173571U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201218 |