CN212161777U - Double-station horizontal quartz boat overturning and positioning mechanism - Google Patents
Double-station horizontal quartz boat overturning and positioning mechanism Download PDFInfo
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- CN212161777U CN212161777U CN202021189733.1U CN202021189733U CN212161777U CN 212161777 U CN212161777 U CN 212161777U CN 202021189733 U CN202021189733 U CN 202021189733U CN 212161777 U CN212161777 U CN 212161777U
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- quartz boat
- positioning mechanism
- overturning
- double
- station horizontal
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Abstract
The utility model discloses a horizontal quartz boat upset positioning mechanism in duplex position, the on-line screen storage device comprises a base, the symmetry is provided with the bearing frame on the base, all be connected with the pivot in the bearing frame, pivot one side transmission is connected with the motor, all be provided with the upset anchor clamps in the pivot, the upset anchor clamps include the mount pad of being connected with the pivot, be provided with the backup pad through the support column on the mount pad, the symmetry is provided with first cylinder on the mount pad, the output of first cylinder all is provided with the connecting plate, all be provided with the second cylinder on the connecting plate lateral surface, the output of second cylinder all is provided with the layer board, all be provided with the locating piece of symmetry on the connecting plate medial surface, all be provided with the quartz. The utility model has the advantages of reasonable and simple structure, the simple operation is placed the silicon chip in the quartz boat, through layer board and locating piece to the fixed of quartz boat to make the silicon chip in the quartz boat realize the upset fast and stably, the efficiency of great improvement production.
Description
Technical Field
The utility model relates to a tipping arrangement field, concretely relates to horizontal quartz boat upset positioning mechanism in duplex position.
Background
The chip made of silicon chip has remarkable calculation ability and is widely applied to microelectronic technology. The silicon wafer is often required to be turned during production and manufacturing, and the production efficiency can be improved by quickly and effectively turning the silicon wafer. Therefore, how to rapidly and effectively turn over the silicon wafer becomes an important technical difficulty for improving the production efficiency.
The above problems are problems that the art needs to solve.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide horizontal quartz boat upset positioning mechanism in duplex position, can carry out quick effectual upset to the silicon chip to improve the efficiency of production.
In order to solve the technical problem, the utility model provides a scheme is: horizontal quartz boat upset positioning mechanism of duplex position, the on-line screen storage device comprises a base, the symmetry is provided with the bearing frame on the base, all be connected with the pivot in the bearing frame, pivot one side transmission is connected with the motor, all be provided with the upset anchor clamps in the pivot, the upset anchor clamps include the mount pad of being connected with the pivot, be provided with the backup pad through the support column on the mount pad, the symmetry is provided with first cylinder on the mount pad, the output of first cylinder all is provided with the connecting plate, all be provided with the second cylinder on the connecting plate lateral surface, the output of second cylinder all is provided with the layer board, all be provided with the locating piece of symmetry on the connecting plate medial surface, all be provided with the quartz.
As a further improvement, the bearing seat is provided with a sensor, and a rotating shaft end face is provided with an induction sheet matched with the sensor.
As a further improvement of the utility model, pivot one side is provided with the limiting plate.
As a further improvement of the utility model, the base is provided with damping cylinder, the damping cylinder output is provided with the fixed plate, be provided with the snubber block on the fixed plate.
As a further improvement of the utility model, the quartz boat comprises a quartz frame, the stand of symmetry is arranged on the quartz frame, and the stand is provided with a placing groove.
As a further improvement of the utility model, a micro switch is further arranged on the mounting seat.
As a further improvement, the supporting plate is provided with a groove corresponding to the placing groove, and the positioning block is provided with a fixing block corresponding to the stand and being in a V shape.
The utility model has the advantages that:
the utility model has the advantages of reasonable and simple structure, the simple operation is placed the silicon chip in the quartz boat, rotates through the motor drive pivot, can drive the upset anchor clamps and rotate, through layer board and locating piece fixed to the quartz boat to make the silicon chip in the quartz boat can realize the upset fast and stably, the efficiency of great improvement production.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of the utility model after turning.
Fig. 3 is a schematic structural view of the turning clamp of the present invention.
FIG. 4 is a schematic view of the quartz boat of the present invention.
The reference numbers in the figures illustrate: 1. turning over the clamp; 101. a mounting seat; 102. a first cylinder; 103. a connecting plate; 104. a second cylinder; 105. a support plate; 106. positioning blocks; 1061. a fixed block; 107. a support plate; 108. a microswitch; 109. a support pillar; 2. a motor; 3. a limiting plate; 4. a rotating shaft; 5. an induction sheet; 6. a bearing seat; 7. a sensor; 8. a base; 9. a damping cylinder; 10. a fixing plate; 11. a damper block; 12. a quartz boat; 1201. a placement groove; 1202. a column; 1203. and a quartz frame.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Referring to fig. 1, an embodiment of the present invention comprises a base 8, bearing seats 6 are symmetrically arranged on the base 8, a rotating shaft 4 is connected in each bearing seat 6, a motor 2 is connected to one side of the rotating shaft 4 in a transmission manner, the motor 2 can drive the rotating shaft 4 to rotate, turning fixtures 1 are arranged on the rotating shaft 4, each turning fixture 1 comprises a mounting seat 101 connected with the rotating shaft 4, a supporting plate 107 is arranged on each mounting seat 101 through a supporting column 109, first cylinders 102 are symmetrically arranged on the mounting seats 101, connecting plates 103 are arranged at output ends of the first cylinders 102, symmetrical positioning blocks 106 are arranged on inner side surfaces of the connecting plates 103, the first cylinders 102 can control the positioning blocks 106 to clamp a quartz boat 12, second cylinders 104 are arranged on outer side surfaces of the connecting plates 103, supporting plates 105 are arranged at output ends of the second cylinders 104, the second cylinders 104 control the supporting plates 105 to clamp the quartz boat 12, quartz boats 12 are arranged in the overturning clamp 1, and the quartz boats 12 can be used for placing silicon wafers.
In this embodiment, the bearing seat 6 is provided with the sensor 7, and the rotating shaft 4 is provided with the sensing piece 5 matched with the sensor 7 on one end face, and when the overturning fixture 1 overturns to a specified position, the sensor 7 senses the sensing piece 5, so as to control the motor 2 to stop working.
In this embodiment, a limiting plate 3 is disposed on one side of the rotating shaft 4, and can support the turning fixture 1 after turning.
In this embodiment, the base 8 is provided with a damping cylinder 9, the output end of the damping cylinder 9 is provided with a fixing plate 10, a damping block 11 is arranged on the fixing plate 10, the damping cylinder 9 can control the position of the damping block 11, and the overturning fixture 1 can be damped.
In this embodiment, the quartz boat 12 includes a quartz frame 1203, symmetrical columns 1202 are disposed on the quartz frame 1203, placing slots 1201 are disposed on the columns 1202, and silicon wafers can be stored in the placing slots 1201.
In this embodiment, the installation seat 101 is further provided with a micro switch 108, which can be right to protect the whole body and improve the safety.
In this embodiment, the tray 105 is provided with a groove corresponding to the placing groove 1201, when the turning clamp 1 is at the initial position, the silicon wafer in the quartz boat 12 is clamped in the groove for fixing, and the positioning block 106 is provided with a fixing block 1061 corresponding to the vertical column 1202 and having a V-shape, so that the vertical column 1202 can be firmly clamped, and the silicon wafer can be stably turned over in the turning process.
In the actual use process, the silicon wafer is placed in the quartz boat 12 through the placing groove 1201, the quartz boat 12 is placed on the supporting plate 107, the first cylinder 102 controls the positioning block 106 to fix the quartz boat 12, the second cylinder 104 controls the supporting plate 105 to fix the quartz boat 12, the motor 2 drives the overturning fixture 1 to overturn, and when the quartz boat is overturned to a specified position, the sensor 7 controls the motor 2 to stop working. The utility model discloses rational in infrastructure, simple, the simple operation for the upset can be realized to the silicon chip fast and stable, the efficiency of great improvement production.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (7)
1. The double-station horizontal quartz boat overturning and positioning mechanism is characterized by comprising a base (8), wherein bearing seats (6) are symmetrically arranged on the base (8), rotating shafts (4) are connected in the bearing seats (6), a motor (2) is in transmission connection with one side of each rotating shaft (4), overturning clamps (1) are arranged on the rotating shafts (4), each overturning clamp (1) comprises a mounting seat (101) connected with the corresponding rotating shaft (4), a supporting plate (107) is arranged on each mounting seat (101) through a supporting column (109), first air cylinders (102) are symmetrically arranged on each mounting seat (101), connecting plates (103) are arranged at output ends of the first air cylinders (102), second air cylinders (104) are arranged on outer side faces of the connecting plates (103), and supporting plates (105) are arranged at output ends of the second air cylinders (104), symmetrical positioning blocks (106) are arranged on the inner side faces of the connecting plates (103), and quartz boats (12) are arranged in the overturning clamps (1).
2. The double-station horizontal quartz boat overturning and positioning mechanism according to claim 1, wherein a sensor (7) is arranged on the bearing seat (6), and an induction sheet (5) matched with the sensor (7) is arranged on one end face of the rotating shaft (4).
3. The double-station horizontal quartz boat overturning and positioning mechanism according to claim 1, wherein a limiting plate (3) is arranged on one side of the rotating shaft (4).
4. The double-station horizontal quartz boat overturning and positioning mechanism according to claim 1, wherein the base (8) is provided with a damping cylinder (9), the output end of the damping cylinder (9) is provided with a fixed plate (10), and the fixed plate (10) is provided with a damping block (11).
5. The double-station horizontal quartz boat overturning and positioning mechanism as claimed in claim 1, wherein the quartz boat (12) comprises a quartz frame (1203), symmetrical upright posts (1202) are arranged on the quartz frame (1203), and placing grooves (1201) are respectively formed on the upright posts (1202).
6. The double-station horizontal quartz boat turnover positioning mechanism of claim 1, characterized in that a microswitch (108) is further arranged on the mounting seat (101).
7. The double-station horizontal quartz boat overturning and positioning mechanism of claim 1 or 5, wherein the supporting plate (105) is provided with a groove corresponding to the placing groove (1201), and the positioning block (106) is provided with a V-shaped fixing block (1061) corresponding to the upright column (1202).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021189733.1U CN212161777U (en) | 2020-06-23 | 2020-06-23 | Double-station horizontal quartz boat overturning and positioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021189733.1U CN212161777U (en) | 2020-06-23 | 2020-06-23 | Double-station horizontal quartz boat overturning and positioning mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212161777U true CN212161777U (en) | 2020-12-15 |
Family
ID=73699907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021189733.1U Active CN212161777U (en) | 2020-06-23 | 2020-06-23 | Double-station horizontal quartz boat overturning and positioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212161777U (en) |
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2020
- 2020-06-23 CN CN202021189733.1U patent/CN212161777U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.208 Changjiang East Road, Shuofang, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Jiangsong Technology Co.,Ltd. Address before: 214000 plot c20-2, phase V, Shuofang industrial concentration area, New District, Wuxi City, Jiangsu Province Patentee before: WUXI JIANGSONG SCIENCE AND TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address |