CN221111623U - Dismounting device for dismounting clamp - Google Patents

Abstract

The utility model provides a dismounting device for a dismounting clamp, and relates to the technical field of wafer clamps. According to the utility model, at least one abutting part is arranged on the rotating part, so that when the rotating part is stressed to rotate relative to the first bracket, the abutting part on the rotating part is driven to rotate to abut against the matching part of the heat sink, the rotating part continues to rotate, and can apply downward acting force to the matching part, so that the heat sink moves downwards, and the PCB is fixed in position, so that the heat sink and the PCB are separated.

Description

Dismounting device for dismounting clamp

Technical Field

The utility model relates to the technical field of wafer clamps, in particular to a dismounting device for dismounting a clamp.

Background

The existing wafer clamp comprises a heat sink and a PCB, wherein the heat sink and the PCB jointly define a sealing cavity for placing a wafer. When the wafer is subjected to relevant test, the protection gas needs to be filled in the sealing cavity to protect the wafer from being damaged. After the wafer test is finished, the heat sink and the PCB are difficult to separate by manpower only because the protective gas in the sealing cavity has larger pressure.

Disclosure of utility model

The utility model aims to provide a dismounting device for a dismounting clamp, which solves the technical problem that a heat sink and a PCB (printed circuit board) in the clamp are difficult to separate.

A further object of the utility model is to protect the clamp from slipping damage.

According to an object of the present utility model, there is provided a dismounting device for dismounting a jig, the jig including a heat sink and a PCB board arranged from bottom to top, the heat sink and the PCB board defining together a sealed cavity for placing a wafer, at least one fitting portion protruding being provided at a side wall of the heat sink, the dismounting device comprising:

A base for supporting the jig;

The PCB comprises a base, at least one operating component, a heat sink and a PCB board, wherein the operating component is arranged at the base and positioned at the bottom of the PCB board, the operating component is provided with a first bracket connected with the base and a rotating piece penetrating through the first bracket, at least one abutting part is arranged on the rotating piece, and the rotating piece is arranged to rotate to a position where the abutting part abuts against the matching part under the stress and continuously rotate so as to drive the heat sink to move downwards, so that the heat sink is separated from the PCB board.

Optionally, the rotating member includes:

The rotating shaft penetrates through the first bracket and is arranged to rotate relative to the first bracket;

At least one mounting piece is sleeved on the rotating shaft and connected with the rotating shaft, and at least one abutting part extending outwards is arranged at the edge of each mounting piece.

Optionally, the lower surface of the PCB board is provided with at least one first limiting portion, a rotation space is defined between the first limiting portion and the mating portion of the heat sink, and the mounting member is configured to rotate in the rotation space.

Optionally, the mounting piece is square, and the abutting part is arranged at one corner of the mounting piece;

One corner of the mounting piece opposite to the abutting part is arc-shaped and is used for abutting against the first limiting part, so that the mounting piece is limited.

Optionally, the number of the first limiting parts is two, the two first limiting parts are located at two opposite sides of the heat sink, and the matching parts are arranged at two opposite sides of the heat sink.

Optionally, the operation component further includes:

And the rocker is arranged at one end of the rotating shaft and used for driving the rotating shaft to rotate under the stress.

Optionally, each mounting piece corresponds to one matching part, and each mounting piece is provided with one abutting part.

Optionally, the base includes:

The first bracket is arranged on the bottom plate;

The plurality of second brackets are arranged at the edge of the bottom plate, and the top of each second bracket is provided with a second limiting part for limiting the PCB.

Optionally, the base further comprises:

The base is arranged at the center of the bottom plate, the height of the base is smaller than that of the second support, and a gap exists between the bottom of the heat sink and the base when the clamp is positioned on the second support.

Optionally, the base station includes:

A support post disposed on the base plate;

The support table is arranged at the top of the support column, and a third limiting part is arranged at the edge of the top of the support table so as to support and limit the heat sink when the heat sink is separated from the PCB.

According to the dismounting device disclosed by the utility model, at least one abutting part is arranged on the rotating part, so that when the rotating part is stressed to rotate relative to the first bracket, the abutting part on the rotating part is driven to rotate to abut against the matching part of the heat sink, the rotating part continues to rotate, and downward acting force can be applied to the matching part, so that the heat sink moves downwards, and the PCB is fixed in position, so that the heat sink is separated from the PCB.

Further, the second limiting part is arranged at the top of the second bracket to support and limit the PCB, and the third limiting part is arranged at the top of the supporting table to support and limit the disassembled heat sink, so that the positions of the PCB and the heat sink contacted with the supporting table after the disassembly are fixed, the PCB and the heat sink are prevented from sliding off the base, and the clamp is prevented from being damaged.

The above, as well as additional objectives, advantages, and features of the present utility model will become apparent to those skilled in the art from the following detailed description of a specific embodiment of the present utility model when read in conjunction with the accompanying drawings.

Drawings

Some specific embodiments of the utility model will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:

FIG. 1 is a schematic position diagram of a dismounting device and a clamp according to an embodiment of the utility model;

FIG. 2 is a schematic block diagram of the dismounting device shown in FIG. 1;

FIG. 3 is a schematic bottom view of the clamp of FIG. 1;

FIG. 4 is a schematic position diagram of a mounting member and a first spacing portion according to one embodiment of the present utility model;

FIG. 5 is a schematic block diagram of the mounting member of the dismounting device shown in FIG. 2;

Fig. 6 is a schematic structural view of a second stopper portion of the base in the dismounting device shown in fig. 1.

Reference numerals illustrate:

100-dismounting device, 10-base, 11-bottom plate, 12-second support, 13-second spacing portion, 14-base, 141-pillar, 142-brace, 143-third spacing portion, 20-operating component, 21-first support, 22-rotating piece, 221-pivot, 222-mounting piece, 23-abutting portion, 24-rocker, 200-fixture, 210-heat sink, 220-PCB board, 230-mating portion, 240-first spacing portion.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature, i.e. one or more such features. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. When a feature "comprises or includes" a feature or some of its coverage, this indicates that other features are not excluded and may further include other features, unless expressly stated otherwise.

Unless specifically stated and limited otherwise, the term "coupled" and the like are to be construed broadly and may be, for example, fixedly coupled, detachably coupled, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. Those of ordinary skill in the art will understand the specific meaning of the terms described above in the present utility model as the case may be.

Unless otherwise defined, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

Fig. 1 is a schematic position view of a dismounting device and a jig according to an embodiment of the utility model, fig. 2 is a schematic structural view of the dismounting device shown in fig. 1, and fig. 3 is a schematic bottom view of the jig shown in fig. 1. As shown in fig. 1, 2 and 3, the dismounting device 100 is used for dismounting the fixture 200, the fixture 200 includes a heat sink 210 and a PCB 220 arranged from bottom to top, the heat sink 210 and the PCB 220 together define a sealed cavity for placing a wafer, and at least one protruding mating portion 230 is provided at a side wall of the heat sink 210. The dismounting device 100 comprises a base 10 and at least one operating member 20. Wherein the base 10 is used to support the jig 200. At least one operation part 20 is installed at the base 10 and is located at the bottom of the PCB 220, the operation part 20 has a first bracket 21 connected with the base 10 and a rotating part 22 penetrating through the first bracket 21, at least one abutting part 23 is provided on the rotating part 22, and the rotating part 22 is configured to rotate under force to a position where the abutting part 23 abuts against the matching part 230 and to drive the heat sink 210 to move downwards when continuing to rotate, so that the heat sink 210 is separated from the PCB 220.

Here, it may be understood that the rotating member 22 is disposed on the first bracket 21 in a penetrating manner, so that the first bracket 21 supports the rotating member 22, at least one abutting portion 23 is fixedly connected with the rotating member 22, and the rotating member 22 can drive the abutting portion 23 to rotate when being forced to rotate relative to the first bracket 21. When the abutting portion 23 rotates to abut against the fitting portion 230, the abutting portion 23 is located above the fitting portion 230.

In this embodiment, by arranging at least one abutting portion 23 on the rotating member 22, when the rotating member 22 is forced to rotate relative to the first bracket 21, the abutting portion 23 on the rotating member 22 is driven to rotate to abut against the matching portion 230 of the heat sink 210, the rotating member 22 continues to rotate to apply a downward acting force to the matching portion 230, so that the heat sink 210 moves downward, and the PCB 220 is fixed in position, so that the heat sink 210 and the PCB 220 are separated.

In this embodiment, the rotating member 22 includes a rotating shaft 221 and at least one mounting member 222. The rotating shaft 221 is disposed through the first bracket 21 and configured to rotate relative to the first bracket 21. At least one mounting piece 222 is sleeved on the rotating shaft 221 and is connected with the rotating shaft 221, and at least one abutting part 23 extending outwards is arranged at the edge of each mounting piece 222. Here, the first bracket 21 supports the rotating shaft 221 and the at least one mounting member 222, and when the rotating shaft 221 is forced to rotate, the mounting member 222 and the at least one abutting portion 23 are driven to rotate relative to the first bracket 21, so that the abutting portion 23 can have a downward force on the mating portion 230, and the heat sink 210 moves downward relative to the PCB 220 until the two are separated.

The abutting portion 23 is arranged at the edge of the mounting piece 222, the mounting piece 222 is sleeved on the rotating shaft 221, the existence of the mounting piece 222 and the rotating shaft 221 is convenient for applying force to the abutting portion 23 to enable the abutting portion 23 to rotate, the abutting portion 23 can rotate without directly applying force to the abutting portion 23 with a smaller size, the force arm of force application is increased, and labor can be saved. In the present embodiment, the number of the mounting pieces 222 is set to two. In other embodiments, the number of mounting members 222 may be set according to actual needs, such as 3, 4, 5, 6.

Fig. 4 is a schematic position diagram of the mounting member and the first limiting portion according to an embodiment of the present utility model, and fig. 5 is a schematic structural diagram of the mounting member in the dismounting device shown in fig. 2. As shown in fig. 4 and 5, in this embodiment, the lower surface of the PCB 220 is provided with at least one first limiting part 240, a rotation space is defined between the first limiting part 240 and the mating part 230 of the heat sink 210, and the mounting 222 is disposed to rotate in the rotation space. Here, the first limiting part 240 is fixed on the lower surface of the PCB 220, the mating part 230 is fixed after the heat sink 210 is separated from the PCB 220, and the mounting piece 222 is located between the first limiting part 240 and the mating part 230 and can only rotate in a rotation space defined between the first limiting part 240 and the mating part 230.

When the rotational space of the mounting member 222 is not limited, the rotatable angle of the mounting member 222 is too large, and it is troublesome to bring the abutment portion 23 of the mounting member 222 into abutment with the fitting portion 230, and frequent adjustment of the position of the mounting member 222 is required. At least one first limiting part 240 is disposed on the lower surface of the PCB 220, and can limit the rotatable angle of the mounting member 222, thereby saving time for adjusting the disassembling device 100 and improving the efficiency of the disassembling jig 200.

In this embodiment, the mount 222 has a square shape, and the abutment 23 is provided at one corner of the mount 222. One corner of the mounting piece 222 opposite to the abutting portion 23 is arc-shaped and abuts against the first limiting portion 240, so that the mounting piece 222 is limited. Here, the mounting piece 222 is provided in a square shape, so that the abutting portion 23 extending outward with respect to the corner of the mounting piece 222 is provided on the mounting piece 222. The mounting piece 222 is sleeved on the rotating shaft 221, and one corner of the mounting piece 222 opposite to the abutting portion 23 is arc-shaped, so that the corner can rotate circumferentially in the rotating space by taking the rotating shaft 221 as a rotating center. The mounting member 222 rotates to a position where the corner abuts against the first limiting portion 240, and reaches a limit position of the rotation space of the mounting member 222.

In this embodiment, the number of the first limiting parts 240 is two, and the two first limiting parts 240 are located at opposite sides of the heat sink 210, and the mating parts 230 are disposed at opposite sides of the heat sink 210, so that the fixture 200 is placed on the dismounting device 100. Here, the jig 200 is placed into the dismounting device 100 from two opposite directions to be dismounted, so that the placement and dismounting of the jig 200 are facilitated, the relative position of the fitting portion 230 of the jig 200 and the abutting portion 23 of the dismounting device 100 is easy to adjust, and frequent movement and easy damage of wafers in the jig 200 are avoided.

In this embodiment, the operating member 20 further includes a rocker 24, where the rocker 24 is disposed at one end of the rotating shaft 221, and is used to rotate the rotating shaft 221 under the force. Here, the rocker 24 is fixedly connected with the rotating shaft 221, and the rotating shaft 221 can be driven to rotate by applying force to the rocker 24 without directly applying force to the rotating shaft 221. The lever principle is skillfully utilized, the position where the rotating shaft 221 is connected with the rocker 24 is taken as a fulcrum, the distance from the force application point on the rocker 24 to the fulcrum is taken as a power arm, and the power arm for rotating the rotating shaft 221 is increased, so that the power required by rotating the rotating shaft 221 is reduced. Thus, the structure is simple, the operation is simple and convenient, and the labor is saved, so that the efficiency of disassembling the clamp 200 is improved. In other embodiments, the rocker 24 and the shaft 221 may be integrally formed with the rotatable member 22.

In this embodiment, each mounting member 222 corresponds to one mating portion 230, and each mounting member 222 is provided with one abutment portion 23. Here, the abutting portions 23 are in one-to-one corresponding fit with the fitting portions 230 on the heat sink 210, so that the abutting portions 23 drive the heat sink 210 to move downward when being stressed. The abutment portions 23 are fitted with the mounting pieces 222 in a one-to-one correspondence so that the abutment portions 23 exert a downward force on the fitting portions 230.

Fig. 6 is a schematic structural view of a second stopper portion of the base in the dismounting device shown in fig. 1, and as shown in fig. 6, the base 10 includes a bottom plate 11 and a plurality of second brackets 12 in this embodiment. The first bracket 21 is mounted on the base plate 11. The plurality of second brackets 12 are arranged at the edge of the bottom plate 11, and a second limiting part 13 for limiting the PCB 220 is arranged at the top of the second brackets 12. Here, the base plate 11 fixes and supports the first bracket 21 and the second bracket 12. The second limiting part 13 is opposite to the top angle of the bottom of the PCB 220 to limit the movement of the PCB 220 in the horizontal direction. In this embodiment, the number of the second brackets 12 and the second limiting portions 13 is four, and the two brackets are disposed corresponding to four top corners of the PCB 220. In other embodiments, two second brackets 12 may be disposed on the PCB 220 corresponding to two corners that are diagonal.

In this embodiment, the base 10 further includes a base 14, the base 14 is disposed at a central position of the bottom plate 11, the height of the base 14 is smaller than the height of the second bracket 12, and a gap exists between the bottom of the heat sink 210 and the base 14 when the fixture 200 is located on the second bracket 12, so as to reserve a movable space for downward movement of the heat sink 210 when the dismounting device 100 is operated. Here, the base 14 is located at a central position of the bottom plate 11 opposite to a position of the heat sink 210 to support the heat sink 210 separated from the PCB 220.

In this embodiment, the base 14 includes a post 141 and a support stand 142. The support post 141 is disposed on the base plate 11, the support stand 142 is disposed at the top of the support post 141, and a third limiting part 143 is disposed at an edge of the top of the support stand 142 to support and limit the heat sink 210 when the heat sink 210 is separated from the PCB 220. Here, after the heat sink 210 is separated from the PCB 220, the support posts 141 and the support stand 142 support the heat sink 210. The third limiting portion 143 protrudes upward from the support table 142 to limit the movement of the heat sink 210 in the horizontal direction, so as to avoid the heat sink 210 from sliding off the support table 142 and being damaged.

By now it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the utility model have been shown and described herein in detail, many other variations or modifications of the utility model consistent with the principles of the utility model may be directly ascertained or inferred from the present disclosure without departing from the spirit and scope of the utility model. Accordingly, the scope of the present utility model should be understood and deemed to cover all such other variations or modifications.

Claims (10)

1. A dismounting device for dismounting anchor clamps, characterized in that, anchor clamps include by supreme heat sink and the PCB board of arranging down, the heat sink with the PCB board is injectd jointly and is used for placing the sealed chamber of wafer, the lateral wall department of heat sink is equipped with convex at least one cooperation portion, dismounting device includes:

A base for supporting the jig;

The PCB comprises a base, at least one operating component, a heat sink and a PCB board, wherein the operating component is arranged at the base and positioned at the bottom of the PCB board, the operating component is provided with a first bracket connected with the base and a rotating piece penetrating through the first bracket, at least one abutting part is arranged on the rotating piece, and the rotating piece is arranged to rotate to a position where the abutting part abuts against the matching part under the stress and continuously rotate so as to drive the heat sink to move downwards, so that the heat sink is separated from the PCB board.

2. The dismounting device of claim 1, wherein the rotating member includes:

The rotating shaft penetrates through the first bracket and is arranged to rotate relative to the first bracket;

At least one mounting piece is sleeved on the rotating shaft and connected with the rotating shaft, and at least one abutting part extending outwards is arranged at the edge of each mounting piece.

3. The dismounting device as claimed in claim 2, wherein,

The lower surface of the PCB is provided with at least one first limiting part, a rotating space is defined between the first limiting part and the matching part of the heat sink, and the mounting piece is arranged to rotate in the rotating space.

4. A dismounting device as claimed in claim 3, characterized in that,

The mounting piece is square, and the abutting part is arranged at one corner of the mounting piece;

One corner of the mounting piece opposite to the abutting part is arc-shaped and is used for abutting against the first limiting part, so that the mounting piece is limited.

5. The dismounting device as claimed in claim 4, wherein,

The number of the first limiting parts is two, the two first limiting parts are positioned on two opposite sides of the heat sink, and the matching parts are arranged on two opposite sides of the heat sink.

6. The dismounting device of claim 5, wherein the operation member further includes:

And the rocker is arranged at one end of the rotating shaft and used for driving the rotating shaft to rotate under the stress.

7. The dismounting device as claimed in any one of claims 1-6, wherein,

Each mounting piece corresponds to one matching part, and each mounting piece is provided with one abutting part.

8. The dismounting device of any one of claims 1-6, wherein the base comprises:

The first bracket is arranged on the bottom plate;

The plurality of second brackets are arranged at the edge of the bottom plate, and the top of each second bracket is provided with a second limiting part for limiting the PCB.

9. The dismounting device of claim 8, wherein the base further comprises:

The base is arranged at the center of the bottom plate, the height of the base is smaller than that of the second support, and a gap exists between the bottom of the heat sink and the base when the clamp is positioned on the second support.

10. The dismounting device of claim 9, wherein the base station comprises:

A support post disposed on the base plate;

The support table is arranged at the top of the support column, and a third limiting part is arranged at the edge of the top of the support table so as to support and limit the heat sink when the heat sink is separated from the PCB.