CN212031751U - Fluorescent target detector - Google Patents
Fluorescent target detector Download PDFInfo
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- CN212031751U CN212031751U CN202020305267.2U CN202020305267U CN212031751U CN 212031751 U CN212031751 U CN 212031751U CN 202020305267 U CN202020305267 U CN 202020305267U CN 212031751 U CN212031751 U CN 212031751U
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Abstract
The utility model relates to a fluorescence target detector, include the cross vacuum cavity with the vacuum pipe butt joint, vacuum cavity is along horizontal direction and observation window intercommunication, and this observation window is just to the camera, and this vacuum cavity is along vertical direction and the straight line gatherer intercommunication of vacuum, and there is the connecting rod at the straight line gatherer center of vacuum, and one end extends into in the vacuum cavity to connect fluorescence target core, and fluorescence target core includes fluorescence target piece, and this fluorescence target piece becomes 90 with the incident light and separates for demarcation district and measuring area along vertical direction top-down. The utility model discloses can measure the facula shape and the position of synchrotron radiation X-ray with high accuracy, can succinctly mark camera pixel on line in real time fast to solve the not high problem of quantitative fluorescence target image precision among the prior art.
Description
Technical Field
The utility model relates to a synchrotron radiation X ray position measurement field, more specifically say, relate to a fluorescence target detector for the image measurement of X ray's position measurement and facula shape.
Background
In the third generation of synchrotron radiation devices, the position of an X-ray beam is an important parameter for adjusting the beam of a storage ring, improving the stability of the beam, adjusting a beam line and developing experimental research by using a beam line station, and the most effective mode is to directly observe a light spot when measuring the position of the beam. At present, the X-ray position monitoring of domestic beam lines is mostly measured and processed in a wire scanning or fluorescence target mode, and a wire scanning detector scans a light beam by using one or more conductor wires and measures the center and distribution condition of the light beam according to the distribution of photoelectric current generated on a metal wire. The fluorescent target detector measures the position and spatial distribution of X-rays by utilizing the phenomenon that the X-rays hit on certain substances, such as crystals or fluorescent powder to emit visible light.
The wire scanning is greatly influenced by the thermal deformation of the scanning wire, the scanning speed is slow, and the real-time measurement cannot be realized. The existing fluorescent target detector uses a CVD diamond or YAG fluorescent target and a high-sensitivity black-and-white industrial video camera, can quickly provide spot image information in real time, but does not have a digital function and cannot accurately provide information such as spot size, stability and the like.
To realize the function of quantitative measurement of the fluorescence target, firstly, the pixels of the CCD camera are calibrated. The traditional calibration method is to separately perform off-line calibration on the CCD camera, i.e. to scale the pixels of the camera with a standard sample. However, the image of the X-ray beam on the fluorescence target includes a series of systematic errors (the dispersion of the fluorescence target, the photon conversion linearity of the target, the impulse response characteristic of the imaging system, the linearity of the imaging system, the depth of field error, etc.), and the standard sample cannot reproduce a series of physical processes in the fluorescence conversion, so that the influence of other physical quantities needs to be measured separately in addition to the error of the imaging system and finally included in the final calibration result. Because the parameters of light flux, energy and the like of each beam line are constantly changed according to experimental requirements, all the influencing factors under all working conditions are difficult to test in advance, and thus micrometer-scale high-precision measurement is difficult to perform.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a can succinct quick real-time fluorescence target detector of demarcating on line to the facula shape and the position of measurement synchrotron radiation x light of high accuracy, with accurate quantitative fluorescence target image.
A fluorescence target detector is installed on a light path vacuum pipeline and comprises a four-way vacuum cavity body butted with the vacuum pipeline, wherein the vacuum cavity body is communicated with an observation window along the horizontal direction, the observation window is right opposite to a camera, the vacuum cavity body is communicated with a vacuum linear introducer along the vertical direction, a connecting rod is arranged at the center of the vacuum linear introducer, one end of the connecting rod extends into the vacuum cavity body and is connected with a fluorescence target core body, the fluorescence target core body comprises a fluorescence target sheet, and the fluorescence target sheet and incident light form an angle of 90 degrees and is separated into a calibration area and a measurement area from top to bottom along the vertical direction.
The calibration area comprises an ion sputtered metal layer and a high-precision target pattern window formed on the metal layer through ultraviolet lithography, and can provide submicron precision dimensions in the horizontal direction and the vertical direction respectively, wherein the submicron precision dimensions can be periodic constants arranged periodically or dimensions on an independent pattern.
The fluorescent target core body also comprises a reflector, and the reflector and the fluorescent target sheet are arranged at an angle of 45 degrees.
The fluorescent target is fixed on a target fixing frame, the target fixing frame and the reflector are both fixed on a top fixing support plate, and the top fixing support plate is connected with the connecting rod.
The other end of the connecting rod, which extends out of the vacuum cavity, is connected with a motor.
And a plurality of target seats for measuring the postures of the equipment are arranged on the fluorescent target detector.
The thickness of the metal layer sputtered by the ions is 100nm, and Cr, Ti, Al or Au is selected as a material.
The effective luminescent layer thickness of the fluorescent target sheet is less than or equal to 0.2 mm.
The fluorescent target sheet is made of Ce-doped YAG thin sheet, polished polycrystalline CVD diamond sheet or LYSO.
The reflector adopts a polished silicon wafer with a metalized surface or a chemically polished stainless steel sheet.
The utility model discloses a fluorescence target detector is through the high accuracy target of making on the fluorescence target piece, can succinctly mark camera pixel on line in real time fast for fluorescence target detector can measure the facula shape and the position of synchrotron radiation X-ray with high accuracy, thereby solves the not high problem of quantitative fluorescence target image precision among the prior art. In addition, the structure of the fluorescent target detector is more compact and optimized, and the optical path difference from the light emitting surface of the target piece to the camera is eliminated through the reflector, so that no imaging error of 'big-end-up-down' exists.
Drawings
Fig. 1 is a schematic diagram of a fluorescent target detector according to the present invention.
Fig. 2 is a right side view of fig. 1.
Fig. 3 is a schematic structural view of a fluorescent target core according to the present invention.
FIG. 4 is a schematic view of a fluorescent target according to the present invention.
Fig. 5 is a schematic diagram of the X-ray path according to an embodiment of the present invention.
Fig. 6 is a schematic diagram of calibration region pixel calibration according to an embodiment of the present invention.
Fig. 7 is a schematic diagram of a measurement area light spot detection result according to an embodiment of the present invention.
Detailed Description
The following description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will provide a better understanding of the function and features of the fluorescence target detector and its detection method.
As shown in fig. 1 and 2, the fluorescence target detector of the present invention mainly includes: a vacuum cavity 1, a vacuum linear introducer 2, an observation window 6 and a CCD camera 11. The vacuum cavity 1 is a four-way structure, two ports are arranged along the z direction, namely the upstream and downstream of the light beam direction, and are respectively sealed by flanges, the vacuum linear importer 2 is communicated along the y direction, and the observation window 6 is communicated along the x direction.
The vacuum chamber 1 is butted with a vacuum pipe (not shown) and maintains a vacuum degree, has a main body inner diameter of 150mm, and has an inlet flange which is an upstream flange in an X-ray irradiation direction and an outlet flange which is a downstream flange in the X-ray irradiation direction. In this embodiment, the inlet flange and the outlet flange are both CF100 flanges, and the flange-flange end face distance can be adjusted according to the process requirements, and in a preferred embodiment is 100 mm. A fluorescent target core 3 is accommodated in the vacuum chamber 1.
The vacuum linear introducer 2 includes a connecting rod 21 at the center thereof, one end of the connecting rod 21 is connected to the fluorescent target core 3 to extend into the vacuum chamber 1, and the other end is connected to the motor 8, so that the fluorescent target core 3 is driven to move up and down by the motor 8. Guide rods 23 are further provided at both sides of the vacuum linear introducer 2 to ensure that the vacuum linear introducer 2 can move linearly.
The CCD camera 11 is opposite to the observation window 6, and both are fixed on the CCD camera bracket 7, so that the image on the fluorescent target core body 3 can be accurately observed.
The fluorescent target core 3 is constructed as shown in fig. 3, and includes a fluorescent target 31, a target holder 32, a reflector 33, and a top fixing stay 34. The target holder 32 and the reflector 33 are fixed on the top fixing support 34 through screws, the top fixing support 34 is connected with the connecting rod 21, and the fluorescent target 31 is fixed on the target holder 32 through a gland 35. Of course, in other embodiments, the fluorescent target 31 and the reflector 33 may be fixed to the top fixing plate 34 by other suitable connecting means. The fluorescent target 31 has a light-facing surface 311 and a backlight surface 312, the light-facing surface 311 forms an angle of 90 degrees with the incident light; the backlight surface 312 is at 45 to the polished surface of the mirror 33. The fluorescent target 31 is opposite to the end face of the inlet flange of the vacuum cavity 1 in parallel, and the parallelism error is less than 1 degree.
The fluorescent target 31 may be made of Ce-doped YAG thin plate, polished polycrystalline CVD diamond plate, LYSO, or the like, and its size is determined according to the range of the spot to be measured. Wherein the effective luminescent layer thickness of the fluorescent target 31 is not more than 0.2mm, and according to a preferred embodiment, is 0.15 mm. The effective luminescent layer refers to a material layer with a fluorescent effect, the luminescent layer is thinned to inhibit a dispersion effect, and a common fluorescent target for qualitative observation has no limitation.
The thickness of the fluorescent target 31 is 0.1-0.3mm, the length is less than 60mm, and the width is less than 40 mm. In this embodiment, the thickness of the fluorescent target 31 is 0.2mm, and the length x height is 34 x 24mm2. The reflector 33 can be a polished silicon wafer with a metalized surface, the surface flatness is better than 20 nanometers, and the thickness of the metal film is 50-200 nanometers; or a chemically polished stainless steel sheet with surface flatness better than 20 nm is adopted.
The fluorescence target 31 is divided into a calibration area 15 and a measurement area 16, the calibration area 15 and the measurement area 16 are sequentially arranged along a vertical downward direction, namely a y direction, the calibration area 15 does not exceed 1/3 of the area of the fluorescence target 31, in the embodiment, the calibration area occupies 1/3 of the area of the fluorescence target 31, and in other embodiments, the calibration area can also be 1/4 of the area of the fluorescence target 31. In this example, the upper 34X 8mm of the fluorescent target2The area of (1) is a calibration area. The formation method of the calibration area 15 is as follows: firstly, a metal layer is ion sputtered and is positioned on the backlight surface 312, and then a high-precision target pattern window is etched on the metal layer by using an ultraviolet lithography method, namely, the metal layer can provide submicron precision dimensions in the horizontal and vertical directions respectively, and the dimensions can be a periodic constant of periodic arrangement, such as the distance between the centers of two circles of the periodic arrangement, or individual pattern dimensions, such as the diameter of the circle. In this embodiment, the thickness of the metal layer is 100nm, and the material can be selected from Cr, Ti, Al, Au, etc.; in this embodiment, the high-precision target pattern is a cross-shaped window with a horizontal lineThe width is 1mm, the vertical line width is 0.2mm, and other shapes or sizes can be realized in specific implementation as long as the marking effect is achieved.
As shown in FIG. 4, the calibration region 15 has two calibration periodic patterns (i.e., two white circles of different sizes) with distinct contrast and accurate dimensions on the order of hundreds of nanometers. As can be seen from the figure, the area of the calibration area 15 of the fluorescent target 31 with the standard periodic pattern has a clear brightness difference from the light emission of the measurement area 16 without the standard periodic pattern.
Fig. 5 shows a schematic view of the X-ray path of a preferred embodiment of the present invention, and it can be seen from the figure that the detected X-ray beam 24 passes through the fluorescent target 31 to generate the visible light 26, and the visible light 26 is reflected by the reflector 33 to send the visible light 28 into the camera 11.
Referring to fig. 1 again, the fluorescent target detector of the present invention further includes a plurality of target seats 4 for measuring the posture of the apparatus during installation, and the fluorescent target sheet 31 is perpendicular to the light beam irradiation direction by adjusting the posture of the fluorescent target core body 3.
The utility model discloses a limit switch 10 about the fluorescence target detector still installs for inject motor 8's drive range. When the upper contact 41 touches the upper limit, the fluorescent target core body 3 is not lifted any more, and unnecessary collision in the vacuum cavity 1 is avoided; when the lower contact 42 touches the lower limit, the fluorescent target core body 3 does not descend any more, and the target holder 32 and the connecting rod 21 are prevented from being irradiated by X rays.
The utility model discloses a fluorescence target detector passes through motor 8 control fluorescence target core 3 for the motion accuracy of fluorescence target core 3 is less than 10 microns, because demarcation district 15 is periodically arranged by the figure of unidimensional, thereby can draw periodic dimension and figure size simultaneously as the standard value (what kind of precision is higher depending on algorithm and camera characteristic) in the optional position in demarcation district, through the region of accurately controlling fluorescence target piece 31 photic illumination, in order to select suitable demarcation position. In addition, the working position can all be regarded as in other places except that the fluorescence target core 3 is spacing from top to bottom, compares with only a work position and a non-work position of cylinder drive's fluorescence target among the prior art, the utility model discloses a fluorescence target detector has a plurality of working positions, can switch in real time according to demarcation and detection demand.
The following further describes the detection method of the fluorescence target detector of the present invention.
And step S1, installing the fluorescent target detector on the optical path vacuum pipeline, namely butting an inlet flange of the vacuum cavity 1 with an upstream pipeline flange and butting an outlet flange with a downstream pipeline, so that the fluorescent target detector is light-transmitting.
Step S2, the driving motor 8 lowers the fluorescent target core 3, and places the calibration area 15 of the fluorescent target 31 at the center of the light path, so that the X-ray is imaged in the calibration area 15 to emit visible light, and the visible light is emitted through the cross-shaped window of the calibration area 15 and transmitted to the camera 11 through the reflective surface of the reflector 33.
In step S3, the camera 11 focuses the image through remote control, and acquires the image of the calibration area 15 after the optical path is determined, and extracts the image information.
Step S4, calculating the horizontal pixel coefficient K under the measurement condition by the formula (1)xAnd a vertical pixel coefficient Ky：
Step S5, the driving motor 8 moves the measurement area 16 of the fluorescence target 31 to the center of the optical path for measurement, and obtains the spot size and position information according to the formula (2):
in the formula, SXAnd SYRespectively representing the horizontal and vertical dimensions of the spot, the spot position information passing through SX[ 2 ] and SYThe coordinates at/2 are determined.
When the fluorescent target 31 rises, the light beam is transmitted to downstream equipment through the vacuum cavity 1; when the fluorescent target 31 falls down, the fluorescent image of the X-ray spot can be seen on the fluorescent target 31, but at this time, the light beam is completely cut off and cannot be transmitted to the downstream equipment. Therefore, in step S5, the entire fluorescent target core 3 is moved out of the optical path by the motor 8 after the measurement is finished, and the X-rays are transmitted downstream without being blocked.
The signal output from the fluorescent target 31 is a video signal observed by the camera 11, so that the image can be observed by leading out the signal through a video cable and connecting the signal to an observation computer or a video display. Therefore, the utility model discloses a lift of motor drive fluorescence target core for X ray forms images on the demarcation district of fluorescence target piece, draws image information in real time, realizes succinctly demarcating camera pixel on line fast, then measures the facula shape and the position of synchrotron radiation X-ray at survey district high accuracy. Additionally, the utility model discloses a fluorescence target detector has eliminated the optical path difference of target piece light emitting area to camera department through the reflector, does not have the imaging error of "nearly big-end-up. The utility model discloses a fluorescence target detector can safe effectual operation, can provide clear bright image to X ray beam formation of image.
FIG. 6 shows the pixel calibration of the calibration area of an embodiment of the present invention, the original image 41 is processed by the algorithm to extract the edge to obtain the image 42, the image 42 is read out to have a width of 1mm corresponding to 355 pixels and a width of 0.2mm corresponding to 82 pixels, and K is calculated by the formula (1)x＝0.2mm/82＝0.0024mm，Ky＝1mm/355＝0.0028mm。
Fig. 7 shows the result of detecting the light spot in the measurement area according to an embodiment of the present invention, the original image 43 is processed by the algorithm to extract the edge to obtain the image 44, and N is read out from the image 34Horizontal direction light spot pixel number＝4378，NNumber of light spot pixels in vertical and horizontal directionsWhen 1431 is satisfied, S is calculated by formula (2)X＝4378×Kx＝4378×0.0024＝10.507mm，SY＝1431×Ky1431 × 0.0028 ═ 4.007 mm. The result is compared with the opening size of the X-ray beam outlet slit of 10X 4mm2The fit was good, and the error in the measurement was partly due to the error in the slit opening, since the movement error of the slit was ± 0.2 mm.
The utility model discloses a camera 11 need can the remote control focusing, both can adopt CCD camera also can adopt CMOS camera, for example s CMOS-C11440-36U camera.
What has been described above is only the preferred embodiment of the present invention, not for limiting the scope of the present invention, but various changes can be made to the above-mentioned embodiment of the present invention. All the simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention fall within the scope of the claims of the present invention. The present invention is not described in detail in the conventional technical content.
Claims (11)
1. A fluorescence target detector is arranged on a light path vacuum pipeline and comprises a four-way vacuum cavity body butted with the vacuum pipeline, wherein the vacuum cavity body is communicated with an observation window along the horizontal direction, the observation window is over against a camera, and the vacuum cavity body is communicated with a vacuum linear introducer along the vertical direction.
2. A fluorescent target detector according to claim 1, wherein the calibration zone comprises an ion sputtered metal layer and a target pattern window on the metal layer by uv lithography.
3. A fluorescent target detector according to claim 2, wherein the target pattern windows provide sub-micron precision dimensions in the horizontal and vertical directions, respectively, including periodic constants of the periodic arrangement or dimensions on the individual patterns.
4. A fluorescence target detector according to claim 1, characterized in that the fluorescence target core further comprises a mirror, which is arranged at 45 ° to the fluorescence target.
5. The fluorescence target detector of claim 4, wherein said fluorescence target is fixed to a target holder, said target holder and said reflector are fixed to a top fixing plate, and said top fixing plate is connected to said connecting rod.
6. A fluorescent target detector according to claim 1 or 5, wherein the other end of the connecting rod extending out of the vacuum chamber is connected to a motor.
7. A fluorescence target detector according to claim 1, characterized in that a plurality of target holders for measuring the attitude of the apparatus are mounted on the fluorescence target detector.
8. A fluorescent target detector according to claim 2, wherein the ion sputtered metal layer is 100nm thick and the material is Cr, Ti, Al or Au.
9. A fluorescent target detector according to claim 1, wherein the effective luminescent layer thickness of the fluorescent target is 0.2mm or less.
10. A fluorescent target detector according to claim 1 or 9, wherein the material of the fluorescent target sheet is Ce-doped YAG flake, polished polycrystalline CVD diamond sheet or LYSO.
11. A fluorescent target detector according to claim 4 or 5, wherein the mirror is a polished silicon wafer with a metallized surface or a chemically polished stainless steel sheet.
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|---|---|---|---|
| CN202020305267.2U CN212031751U (en) | 2020-03-12 | 2020-03-12 | Fluorescent target detector |
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| CN202020305267.2U CN212031751U (en) | 2020-03-12 | 2020-03-12 | Fluorescent target detector |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| CN113115506A (en) * | 2021-05-12 | 2021-07-13 | 中国科学院上海高等研究院 | High stability automatically regulated mechanism |
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2020
- 2020-03-12 CN CN202020305267.2U patent/CN212031751U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| CN111208553B (en) * | 2020-03-12 | 2024-07-12 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| CN113115506A (en) * | 2021-05-12 | 2021-07-13 | 中国科学院上海高等研究院 | High stability automatically regulated mechanism |
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