CN212207172U

CN212207172U - X-ray fluorescence micro-area scanning instrument with multiple detectors

Info

Publication number: CN212207172U
Application number: CN202020646943.2U
Authority: CN
Inventors: 刘明博; 赵雷; 胡学强; 杨博赞
Original assignee: Ncs Testing Technology Co ltd
Current assignee: Ncs Testing Technology Co ltd
Priority date: 2020-04-25
Filing date: 2020-04-25
Publication date: 2020-12-22
Anticipated expiration: 2030-04-25

Abstract

The utility model belongs to the technical field of X ray detection instrument's technique and specifically relates to an X ray fluorescence subregion scanning instrument of many detectors is related to. An X-ray fluorescence micro-area scanning instrument with multiple detectors comprises an X-ray generating device, an X-ray beam-collecting device, a detecting device, a moving device and a computer for analyzing and processing data information, wherein the detecting device comprises at least two detectors, and the distances between the detecting surfaces of all the detectors and the emitting focuses of the X-ray beam-collecting device are equal. The X-ray generating device generates X-rays, and the generated X-rays are converged by the X-ray beam converging device to form a small focal spot. The fluorescence data generated after the sample is irradiated by X-ray is collected by the detector and sent to the computer for analysis. The detection area and the counting rate are increased by arranging a plurality of detectors, the dead time of the detectors cannot be increased, and high-precision and high-efficiency scanning is realized.

Description

X-ray fluorescence micro-area scanning instrument with multiple detectors

Technical Field

The utility model belongs to the technical field of X ray detection instrument's technique and specifically relates to an X ray fluorescence subregion scanning instrument of many detectors is related to.

Background

The XRF technology has the advantages of no damage, rapidness, wide analysis range, high quantitative precision and the like, is widely applied to the fields of metallurgy, building materials, mineral development and the like, and has the advantages of trace quantity to constant quantity in the XRF quantitative range and no requirement on the form of a sample, so that the XRF scanning can be complementary with other types of scanning technologies such as direct-reading spectroscopy, electron microscope and the like. In recent years, with the upgrading of industries in the fields of metallurgy, new material research and development and the like and the continuous expansion of people's cognition to the microscopic field, the content detection of the macro element of a simple material no longer meets the requirement, and the concept of micro-area scanning XRF is generated along with the development of the micro-area scanning XRF.

The invention patent with application publication number CN109298004A discloses an X-ray fluorescence spectrometer. In the scheme, X-rays are emitted by an X-ray tube generating device to reach a sample position on a sample table. After the sample is irradiated, inner layer electrons of atoms constituting the sample are unbound from the atoms and become free electrons under the irradiation of X-rays. Other outer electrons then transit into this vacancy, and in the process, give off energy in the form of fluorescence (secondary X-rays). Since the atomic energy level structure of each element is specific, the energy/wavelength of the emitted fluorescence is also specific. The existence of the corresponding element can be determined by measuring the energy/wavelength of the fluorescence, and the intensity of the fluorescence corresponding to each element represents the content of the element.

The utility model with the publication number of CN20141256Y discloses a capillary X-ray lens confocal micro-area X-ray fluorescence spectrometer. In the scheme, X-rays generated by an X-ray generating device (an X-ray source) are guided through a capillary X-ray lens, the propagation direction of the X-rays is changed, the X-rays are converged into small points, micro areas of a sample are de-excited, and a detector detects the energy/wavelength information of fluorescence of the whole micro area to determine element information.

The above prior art solutions have the following drawbacks: because the generation efficiency of the X-ray is low, the luminous flux of the X-ray fluorescence signal is lower, and a detection result with higher precision can be obtained only when the detected fluorescence count reaches a certain number in actual detection. To increase the detection efficiency and save time, the detector area needs to be increased, thereby increasing the amount of fluorescence detected per unit time. However, the manufacturing technology of a single large-area high-resolution X-ray energy spectrum detector in the current market is not mature, the dead time formed by high-flux X-ray treatment is extremely remarkable, and indexes such as resolution cannot meet the requirements.

SUMMERY OF THE UTILITY MODEL

To the deficiency that prior art exists, the utility model aims at providing an X ray fluorescence subregion scanning instrument of many detectors, its advantage lies in can carrying out high accuracy and efficient scanning work.

The above object of the present invention can be achieved by the following technical solutions: an X-ray fluorescence micro-area scanning instrument with multiple detectors comprises an X-ray generating device, an X-ray beam-collecting device, a detecting device, a moving device and a computer for analyzing and processing data information, wherein the detecting device comprises at least two detectors, and the distances between the detecting surfaces of all the detectors and the emitting focuses of the X-ray beam-collecting device are equal.

By adopting the technical scheme, the X-ray generating device generates X-rays, and the generated X-rays are converged by the X-ray beam converging device to form a small focal spot. The sample is placed on the moving device and is driven by the moving device to move, so that the X-rays irradiate different positions on the sample. The fluorescence data generated after the sample is irradiated by the X-ray is collected by the detector and sent to the computer for analysis, and because the distances between the detector and the emitting focal point are equal, the data collected by the plurality of detectors simultaneously correspond to the same position on the sample. The detection area and the counting rate are increased by arranging the detectors, the dead time of the detectors cannot be increased, the scanning efficiency is effectively improved, the scanning precision cannot be reduced, and high-precision and high-efficiency scanning is realized.

The present invention may be further configured in a preferred embodiment as: the X-ray generating device comprises a small focal spot X-ray tube, and the X-ray beam collecting device is a multi-capillary X-ray lens for converging X-rays generated by the X-ray generating device.

By adopting the technical scheme, the small-size focal spot is generated by matching the small-focal-spot X-ray tube and the multi-capillary X-ray lens so as to meet the requirement of micro-area scanning.

The present invention may be further configured in a preferred embodiment as: the X-ray generating device is characterized in that a mounting frame is connected below the X-ray generating device, a cavity is formed in the middle of the lower end face of the mounting frame, and the multi-capillary X-ray lens vertically and downwards extends into the cavity.

Through adopting above-mentioned technical scheme, set up the mounting bracket and install detecting device in X ray generating device's below, many capillary X ray lens stretch into in the cavity for X ray irradiation sample can not influenced by the mounting bracket.

The present invention may be further configured in a preferred embodiment as: the outer side surface of the mounting frame is uniformly provided with first mounting surfaces, the number of the first mounting surfaces is the same as that of the detectors, the first mounting surfaces are inclined from top to bottom towards the direction far away from the cavity, each detector is independently and correspondingly mounted on one first mounting surface, and one end, provided with a detection surface, of each detector extends into the cavity.

By adopting the technical scheme, each detector is correspondingly installed by arranging the first installation surfaces, and the first installation surfaces are matched with the angle and the position of the detector in control. One end provided with a detection surface extends into the cavity to detect, and the distance between the detection surface and the emergent focus after being converged by the X-ray convergence device is controlled to be equal.

The present invention may be further configured in a preferred embodiment as: the outer side of mounting bracket is located the position shaping between two first installation faces and has the second installation face, install coaxial two cameras of looking on the second installation face, the objective end of coaxial two cameras of looking stretches into in the cavity, the focus of the objective of coaxial two cameras of looking and the focus of emiting of many capillary X ray lens focus on the same point.

Through adopting above-mentioned technical scheme, set up the second installation face and install coaxial two cameras of looking as image acquisition device, can carry out two different magnification's image information collection simultaneously to a target.

The present invention may be further configured in a preferred embodiment as: the mobile device adopts an XYZ three-axis numerical control platform, and the numerical control platform adopts a grating ruler displacement sensor to regulate and control the displacement of the numerical control platform in the XYZ three-axis directions.

By adopting the technical scheme, the sample is controlled to move randomly in the three-axis directions of XYZ by the numerical control platform, and the displacement of the numerical control platform in each direction is accurately controlled by the displacement sensor of the grating ruler, so that the accuracy of the element distribution map during generation is ensured.

To sum up, the utility model discloses a following at least one useful technological effect:

1. the detection area and the counting rate are increased by arranging a plurality of detectors, meanwhile, the dead time of the detectors cannot be increased, the scanning precision cannot be reduced while the scanning efficiency is effectively improved, and high-precision and high-efficiency scanning is realized;

2.2. as the image acquisition device, the coaxial double-eye camera can acquire image information of two different magnification factors simultaneously for one target.

Drawings

FIG. 1 is a schematic structural diagram of the first embodiment;

FIG. 2 is a schematic diagram illustrating a hidden mobile device according to an embodiment;

fig. 3 is a schematic diagram of a coaxial dual eye camera in the first embodiment.

Reference numerals: 1. an X-ray generating device; 2. an X-ray beam-collecting device; 3. an image acquisition device; 4. a detection device; 5. a mobile device; 6. a housing; 8. A mounting frame; 9. a cavity; 10. a first mounting surface; 11. a detector; 12. a second mounting surface; 13. an objective lens; 14. a beam splitter; 15. a first photosensitive element; 16. a second photosensitive element.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

The first embodiment is as follows:

as shown in fig. 1 and fig. 2, the multi-detector X-ray fluorescence micro-area scanning apparatus includes an X-ray generating device 1, an X-ray beam collecting device 2, an image collecting device 3 for collecting image information, a detecting device 4 for detecting fluorescence, a moving device 5 for moving a sample, and a computer for analyzing and processing data information.

As shown in fig. 2, the X-ray generating device 1 comprises a housing 6 and a small focal spot X-ray tube located within the housing 6. The X-ray beam-collecting device 2 is a multi-capillary X-ray lens which is arranged below the shell 6 and connected with the small focal spot X-ray tube, X-rays generated by the small focal spot X-rays are converged by the multi-capillary X-ray lens to form a minimum 5um focal spot to irradiate a sample, and the intensity of the rays received by the sample is more than 5000 times that of the rays received by the sample when the small-hole collimator is used.

As shown in fig. 2, a mounting frame 8 is connected to the lower part of the X-ray generating device 1, a cavity 9 is formed in the middle of the lower end face of the mounting frame 8, and the lower end of the polycapillary X-ray lens extends into the cavity 9. Four first mounting surfaces 10 are uniformly distributed and molded on the outer side surface of the mounting frame 8, and the first mounting surfaces 10 incline towards the direction far away from the cavity 9 from top to bottom. The detector device 4 comprises a detector 11 (which may be a FastSDD detector or any other element detector) mounted on each first mounting surface 10, the detection surface of the detector 11 extending into the cavity 9. The single detector 11 has a detection area of 25mm2, a dead time of less than 15% at a count rate of 200kcps, and a resolution of 125 eV. When the four detectors 11 are used in combination, the linear superposition of the detection area and the counting rate respectively reaches 100 mm2 and 800kcps, and the dead time is that the average value of the four detectors 11 is less than 15%. The four detectors 11 are uniformly distributed around the emergent focus of the multi-capillary X-ray lens, and the distances between the detection surface of the detectors 11 and the emergent focus are equal.

As shown in fig. 2 and 3, a second mounting surface 12 is formed on the outer side surface of the mounting frame 8 at a position between the two first mounting surfaces 10, and the image capturing device 3 is a coaxial dual-eye camera mounted on the second mounting surface 12. The coaxial two-focus camera has only one objective lens 13, and the focal point of the objective lens 13 and the exit focal point of the multi-capillary X-ray lens are focused at the same point. The coaxial double-eye camera is characterized in that a spectroscope 14 which forms an included angle of 45 degrees with the axis direction of an objective lens 13 is installed in the body of the coaxial double-eye camera, a first photosensitive element 15 is arranged at one end, coaxial with the objective lens 13, far away from the objective lens 13, of the coaxial double-eye camera, a second photosensitive element 16 is arranged at the position, opposite to the spectroscope 14, of the side face of the coaxial double-eye camera, part of light penetrates through the spectroscope 14 to be received by the first photosensitive element 15, and part of light is reflected by the spectroscope 14 to be received. The distances between the first and second

photosensitive elements

15 and 16 and the beam splitter 14 are different, so that the coaxial dual-eye camera can observe one object, but can simultaneously take two images with different magnifications.

As shown in fig. 1, the moving device 5 is an XYZ three-axis numerical control platform with high precision and large stroke, and a sample cavity is formed on the upper surface of the platform of the numerical control platform. The maximum displacement strokes of the numerical control platform in the XY axis direction reach 200mm, and the maximum stroke of the numerical control platform in the Z axis (height direction) direction is 150 mm. The numerical control platform adopts a grating ruler displacement sensor to regulate and control the displacement of the numerical control platform in the XYZ three-axis direction, and the positioning precision can reach 2.5 um. The numerical control platform has a function of eliminating jitter so as to maintain the stability of the numerical control platform when driving the sample to move.

The X-ray generating device 1, the image acquisition device 3, the detection device 4 and the mobile device 5 are all connected with a computer through USB or RS-232 interfaces, so that the synchronous coordination among all the components is controlled, and accurate fixed-point scanning can be ensured.

Example two:

a method of imaging a multi-detector X-ray fluorescence micro-area scanning instrument, comprising:

s1, the X-ray generating device 1 generates X-rays to irradiate the sample, the numerical control platform drives the sample to move at a set speed, and the numerical control platform simultaneously sends the moving coordinate information to the computer.

S2, the four detectors 11 collect fluorescence signals, count the fluorescence signals according to different energies/wavelengths respectively, and send the detected data to a computer.

S3, the computer records the data measured by the four detectors 11, adjusts the peak data of the four detectors 11 based on any characteristic peak, and sums the adjusted data together (automatically by the computer or manually).

And S4, calculating the content of each element of the sample at the position of the emission focus according to the collected data, and combining the measured different elements on the corresponding coordinate positions in different colors (the higher the content of a certain element corresponding to the emission focus is, the brighter the color corresponding to the element is), so as to generate the content distribution diagram of each element of the sample.

And S5, shooting the sample image by the coaxial double-eye camera (synchronously with S2), sending the sample image to the computer, carrying out inclination correction on the image shot by the coaxial double-eye camera by the computer, and comparing and analyzing the corrected object image with the content distribution diagram of each element.

Wherein S5 is only a generation display diagram, and is not a necessary step in the imaging process.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. An X-ray fluorescence micro-area scanning instrument with multiple detectors comprises an X-ray generating device (1), an X-ray beam-collecting device (2), a detecting device (4), a moving device (5) and a computer for analyzing and processing data information, and is characterized in that: the detection device (4) comprises at least two detectors (11), and the distances between the detection surfaces of all the detectors (11) and the emergent focal points of the X-ray beam-collecting device (2) are equal.

2. The multi-detector X-ray fluorescence micro-area scanning instrument according to claim 1, wherein: the X-ray generating device (1) comprises a small focal spot X-ray tube, and the X-ray beam converging device (2) is a multi-capillary X-ray lens for converging X-rays generated by the X-ray generating device (1).

3. The multi-detector X-ray fluorescence micro-area scanning instrument according to claim 2, wherein: the X-ray generating device is characterized in that a mounting rack (8) is connected to the lower portion of the X-ray generating device (1), a cavity (9) is formed in the middle of the lower end face of the mounting rack (8), and the multi-capillary X-ray lens vertically extends downwards into the cavity (9).

4. A multi-detector X-ray fluorescence micro-area scanning instrument according to claim 3, wherein: the utility model discloses a cavity (9) of installing, including mounting bracket (8), the lateral surface equipartition shaping of mounting bracket (8) has first installation face (10) that quantity and detector (11) quantity are the same, and first installation face (10) are from last down all to the direction slope of keeping away from cavity (9), and every detector (11) correspond alone and install on a first installation face (10), the one end that is provided with the detection face on detector (11) stretches into in cavity (9).

5. The multi-detector X-ray fluorescence micro-area scanning instrument according to claim 4, wherein: the lateral surface of mounting bracket (8) is located the position shaping between two first installation face (10) and has second installation face (12), install coaxial two cameras of looking on second installation face (12), in objective (13) end of coaxial two cameras stretched into cavity (9), the focus of objective (13) of coaxial two cameras and the focus of emiting of many tubule X ray lens focus at the same point.

6. The multi-detector X-ray fluorescence micro-area scanning instrument according to claim 5, wherein: the mobile device (5) adopts an XYZ three-axis numerical control platform, and the numerical control platform adopts a grating ruler displacement sensor to regulate and control the displacement of the numerical control platform in the XYZ three-axis direction.