CN211957601U - Liquid supply system for semiconductor industry - Google Patents
Liquid supply system for semiconductor industry Download PDFInfo
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- CN211957601U CN211957601U CN202020487570.9U CN202020487570U CN211957601U CN 211957601 U CN211957601 U CN 211957601U CN 202020487570 U CN202020487570 U CN 202020487570U CN 211957601 U CN211957601 U CN 211957601U
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Abstract
A liquid supply system for the semiconductor industry, comprising: the input end of the front end three-way valve is used for connecting a front section liquid supply pipeline; the input end of the main buffer container is connected with the first output end of the front end three-way valve; the input end of the auxiliary buffer container is connected with the second output end of the front end three-way valve; the first input end of the rear-end three-way valve is connected with the output end of the main buffer container, and the second input end of the rear-end three-way valve is connected with the output end of the auxiliary buffer container; a use-side control valve; a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container; the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container; the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container; and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container. The liquid supply system in the semiconductor industry improves the safety guarantee effect of the system under the condition of ensuring that the liquid supply does not stop.
Description
Technical Field
The utility model relates to a semiconductor manufacturing field especially relates to a liquid supply system of semiconductor industry.
Background
At present, wafer wet processing equipment in the semiconductor industry relates to the supply of chemical liquid, and as the automation degree and the function of the equipment are more and more perfect, corresponding chemical liquid supply systems are more and more large and complex. Meanwhile, in the chemical solution using process of the semiconductor manufacturing apparatus, for example, in order to apply a predetermined amount of a chemical solution such as a photoresist to a semiconductor wafer, a corresponding liquid supply system is required to be able to supply the predetermined amount of the chemical solution to a specific use position and occasion.
In the liquid medicine supply system, many liquid medicines themselves have been generally expensive, and the corresponding liquid supply device is not only expensive but also complicated in structure. Therefore, how to ensure that the liquid supply system accurately supplies liquid without wasting liquid medicine and simultaneously avoid damage to other devices by the liquid becomes a common concern in the industry.
SUMMERY OF THE UTILITY MODEL
The utility model provides a problem be, provide a chemical liquid feed system to realize better confession liquid function.
In order to solve the above problem, the utility model provides a liquid supply system of semiconductor industry, include: the input end of the front end three-way valve is used for connecting a front section liquid supply pipeline; the input end of the main buffer container is connected with the first output end of the front end three-way valve; the input end of the auxiliary buffer container is connected with the second output end of the front end three-way valve; a first input end of the rear end three-way valve is connected with the output end of the main buffer container, and a second input end of the rear end three-way valve is connected with the output end of the auxiliary buffer container; the input end of the using end control valve is connected with the output end of the rear end three-way valve; a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container; the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container; the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container; and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
In order to solve the above problem, the present invention further provides a liquid supply system for semiconductor industry, comprising: the input end of the front end three-way valve is used for connecting a front section liquid supply pipeline; the input end of the main buffer container is connected with the first output end of the front end three-way valve; the input end of the auxiliary buffer container is connected with the second output end of the front end three-way valve; the input end of the main rear end control valve is connected with the output end of the main buffer container; the input end of the auxiliary rear end control valve is connected with the output end of the auxiliary buffer container; the input end of the using end control valve is connected with the output end of the main rear end control valve and the output end of the auxiliary rear end control valve; a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container; the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container; the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container; and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
In order to solve the above problem, the present invention further provides a liquid supply system for semiconductor industry, comprising: the input end of the main front end control valve is used for connecting a first front-section liquid supply pipeline; the input end of the auxiliary front end control valve is used for connecting a second front-section liquid supply pipeline; the input end of the main buffer container is connected with the output end of the main front-end control valve; the input end of the auxiliary buffer container is connected with the output end of the auxiliary front end control valve; a first input end of the rear end three-way valve is connected with the output end of the main buffer container, and a second input end of the rear end three-way valve is connected with the output end of the auxiliary buffer container; the input end of the using end control valve is connected with the output end of the rear end three-way valve; a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container; the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container; the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container; and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
In order to solve the above problem, the present invention further provides a liquid supply system for semiconductor industry, comprising: the input end of the main front end control valve is used for connecting a first front-section liquid supply pipeline; the input end of the auxiliary front end control valve is used for connecting a second front-section liquid supply pipeline; the input end of the main buffer container is connected with the output end of the main front-end control valve; the input end of the auxiliary buffer container is connected with the output end of the auxiliary front end control valve; the input end of the main rear end control valve is connected with the output end of the main buffer container; the input end of the auxiliary rear end control valve is connected with the output end of the auxiliary buffer container; the input end of the using end control valve is connected with the output end of the main rear end control valve and the output end of the auxiliary rear end control valve; a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container; the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container; the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container; and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
Optionally, each system further includes: the main exhaust device is connected to the top of the main buffer container; and the auxiliary exhaust device is connected to the top of the auxiliary buffer container.
Optionally, each system further includes: a third main liquid sensor disposed above a top liquid level line of the main buffer container; and the third auxiliary liquid sensor is arranged above the liquid level line at the top of the auxiliary buffer container.
Optionally, each system further includes: a fourth main liquid sensor disposed below a bottom liquid level line of the main buffer container; and the fourth auxiliary liquid sensor is arranged below the liquid level line at the bottom of the auxiliary buffer container.
Optionally, each system further includes: a protective container accommodating the main buffer container and the auxiliary buffer container in an inner space thereof.
Optionally, each system further includes: and the protection sensor is arranged at the bottom of the inner space of the protection container.
Optionally, the main exhaust has two exhaust outlets; the auxiliary exhaust device has two exhaust outlets.
The utility model discloses in one of them aspect of technical scheme, the liquid supply system of semiconductor industry sets up main buffer container and assists buffer container for whole liquid supply system is balanced the confession liquid in succession without shutting down, simultaneously, sets up corresponding level sensor, in order to guarantee the security and the reliability of system, prevents that the liquid medicine from overflowing extravagantly, prevents more that the liquid medicine from overflowing to harm system itself or other devices.
Further, through further other level sensor's special setting, the utility model discloses further improve the security and the reliability of system.
Drawings
FIG. 1 is a schematic view of a liquid supply system for the semiconductor industry according to an embodiment of the present invention;
FIG. 2 is a schematic view of another liquid supply system for the semiconductor industry according to another embodiment of the present invention;
FIG. 3 is a schematic view of another liquid supply system for the semiconductor industry according to another embodiment of the present invention;
fig. 4 is a schematic view of another liquid supply system in the semiconductor industry according to another embodiment of the present invention.
Detailed Description
In the existing liquid supply system, the design of non-stop liquid supply is complex, and the corresponding protection and guarantee design is not ideal enough.
Therefore, the utility model provides a new liquid supply system in the semiconductor industry to solve the defects.
For a clearer illustration, the present invention will be described in detail with reference to the accompanying drawings.
An embodiment of the present invention provides a liquid supply system in semiconductor industry, please refer to fig. 1, the system includes:
a front end three-way valve 150, an input end of the front end three-way valve 150 being used for connecting a front section liquid supply pipeline;
a main buffer vessel 110, an input end of the main buffer vessel 110 being connected to a first output end of the front end three-way valve 150;
an input end of auxiliary buffer container 120 is connected to a second output end of front end three-way valve 150;
a first input end of the rear three-way valve 160 is connected to the output end of the main buffer container 110, and a second input end of the rear three-way valve 160 is connected to the output end of the auxiliary buffer container 120;
a use end control valve 170, wherein the input end of the use end control valve 170 is connected with the output end of the rear end three-way valve 160;
a first main liquid sensor 111 disposed at a lower edge of a top liquid level line (shown by a dotted line in fig. 1, not labeled) of the main buffer container 110;
a second main liquid sensor 112 disposed at an upper edge of a bottom liquid level line (shown by a dotted line in fig. 1, not labeled) of the main buffer container 110;
a first auxiliary liquid sensor 121 disposed at a lower edge of a top liquid level line (shown by a dotted line in fig. 1, not labeled) of the auxiliary buffer container 120;
the second auxiliary liquid sensor 122 is disposed at an upper edge of a bottom liquid level line (shown by a dotted line in fig. 1, not labeled) of the auxiliary buffer container 120.
In this embodiment, the three-way valve is a valve having two inputs and one output, or two outputs and one input. The three-way valve can switch the same input to different outputs or can switch different inputs to the same output by switching.
In this embodiment, the front-stage liquid supply pipeline may supply various liquids in the semiconductor industry, such as photoresist (photoresist liquid, photoresist etchant), acid solution, etc., and the corresponding acid may be hydrofluoric acid, hydrochloric acid, sulfuric acid, hydrofluoric acid, phosphoric acid, etc. commonly used in the semiconductor industry.
In the main buffer container 110 and the auxiliary buffer container 120, the input ends are generally arranged from top to bottom, that is, the input ends are mostly arranged at the top of the buffer; the output is typically located at the bottom of the buffer as shown in fig. 1.
The buffers are typically provided with respective fluid levels, one being a top fluid level and one being a bottom fluid level. The liquid fed into the buffer must normally not exceed the top liquid level, otherwise there is a risk of escape. The liquid in the buffer, after initial use, must normally not be below the bottom liquid level, otherwise there is a risk of interruption of the liquid supply.
In this embodiment, the main buffer tank 110 and the sub buffer tank 120 connected by the front end three-way valve 150 are provided, so that the liquid (chemical liquid) supplied from the front stage liquid supply line can be supplied to the main buffer tank 110 and the sub buffer tank 120 in time series. The main buffer container 110 and the auxiliary buffer container 120 are arranged so that the liquid supply system can continuously balance liquid supply without stopping.
The principle process can comprise:
liquid can be output through the first output end of front-end three-way valve 150, so that enough liquid is input into main buffer container 110; then, the main buffer container 110 can be used for supplying liquid to the use-end control valve 170 through a rear-end tee joint, and the use-end control valve 170 further supplies the liquid to a required use occasion; after the main buffer container 110 finishes inputting enough liquid, no matter whether the main buffer container 110 supplies liquid to the rear end three-way valve 160, the front end three-way valve 150 can be switched to another liquid supply process, namely, the liquid is supplied to the auxiliary buffer container 120 through the second output end, so that the auxiliary buffer container 120 is firstly prepared with the corresponding enough liquid; thereafter, when the liquid in any one of the main buffer container 110 and the auxiliary buffer container 120 is lower than the preset value, the liquid can be supplemented through the front-end three-way valve 150, so as to ensure that the corresponding buffer container can be immediately and timely supplied when the liquid supply of the corresponding buffer container is needed, and thus a time window is provided for preparing the liquid (namely, filling enough liquid) for the other buffer container.
In the above principle, it is also important that the control part is implemented by using corresponding liquid sensors, that is, the liquid sensors are used to monitor the amount of liquid in the main buffer container 110 and the auxiliary buffer container 120, so as to feed back information to corresponding valves, so as to enable the valves to perform corresponding opening and closing actions.
Specifically, the liquid sensors provided in the present embodiment include the first main liquid sensor 111, the second main liquid sensor 112, the first auxiliary liquid sensor 121, and the second auxiliary liquid sensor 122 described above.
The first main liquid sensor 111 is disposed at a lower edge of a top liquid level line of the main buffer container 110 to ensure that liquid inside the main buffer container 110 does not exceed a safety line (top liquid level line); in the same manner, a second main liquid sensor 112 is provided at the upper edge of the bottom level line of the main buffer container 110 to ensure that the liquid inside the main buffer window does not fall below the minimum safety line (bottom level line).
The first auxiliary liquid sensor 121 is disposed at the lower edge of the top liquid level line of the auxiliary buffer container 120, and the second auxiliary liquid sensor 122 is disposed at the upper edge of the bottom liquid level line of the auxiliary buffer container 120, and the first main liquid sensor 111 and the main buffer container 110 can be referred to.
By such a system, it is possible to ensure real-time, accurate and non-stop of the corresponding liquid supply procedure and to prevent situations in which too much liquid is present in the buffer (resulting in liquid escaping) or too little liquid is present in the buffer (resulting in liquid discontinuity at the use end). Thus, such a system can prevent the escape of medical fluid from being wasted, and further prevent the escape of medical fluid from damaging the system itself or other devices.
It should be noted that, during the design of the buffer container, in order to ensure the input and output of the liquid, the corresponding exhaust outlet is required, so as described above, the safety hazard of the buffer container includes the situation of excessive escape of the liquid, and the design of the exhaust outlet is the reason why the buffer container always has the escape hazard.
In this embodiment, the main buffer container 110 and the auxiliary buffer container 120 can be replaced with each other, but the present invention is not limited to the particularity that the two buffers are equal, and only the names are different.
In this embodiment, the system further comprises a main vent 130, the main vent 130 being connected to the top of the main surge tank 110.
In this embodiment, the system further comprises an auxiliary vent 140, and the auxiliary vent 140 is connected to the top of the auxiliary buffer container 120.
The exhaust device is used for exhausting corresponding gas in the use process of the buffer.
In this embodiment, the main exhaust 130 has two exhaust outlets (not labeled). The secondary exhaust 140 has two exhaust outlets (not labeled).
The arrangement of two exhaust outlets can make the application range of the whole system wider, for example, one of the exhaust outlets can be used for discharging nitrogen in the liquid medicine (for example, nitrogen is generally used for pressure feeding in photoresist), and the other exhaust outlet can be used for discharging ammonia in the liquid, etc. The two exhaust ports exhaust different gases, which can make the system more safe. Meanwhile, it is also shown that, in the present embodiment, both the exhaust devices have the function of switching the exhaust ports.
In this embodiment, the system further includes a third main liquid sensor 113 disposed above the top liquid level line of the main buffer container 110. The provision of the third main liquid sensor 113 can further prevent an excessive amount of liquid from being input during the liquid input into the main buffer container 110, thereby further preventing the liquid from escaping. In particular, when the first main liquid sensor 111 malfunctions, the third main liquid sensor 113 further ensures the safety of the system. Meanwhile, when the third main liquid sensor 113 sends out corresponding feedback information, it is described that the first main liquid sensor 111 is abnormal, and the worker is also reminded to maintain the first main liquid sensor 111 in time.
In this embodiment, the system further includes a third auxiliary liquid sensor 123 disposed above the top liquid level line of the auxiliary buffer container 120. The third auxiliary liquid sensor 123 can further prevent the liquid input amount from being too large in the process of inputting the liquid into the auxiliary buffer container 120, thereby further preventing the liquid from escaping. In particular, when the first auxiliary liquid sensor 121 malfunctions, the third auxiliary liquid sensor 123 further ensures the safety of the system. Meanwhile, when the third auxiliary liquid sensor 123 sends out corresponding feedback information, it is described that the first auxiliary liquid sensor 121 is abnormal, and the worker is also reminded to maintain the first auxiliary liquid sensor 121 in time.
In this embodiment, the system further includes a fourth main liquid sensor 114 disposed below the bottom liquid level of the main buffer container 110. The provision of the fourth main liquid sensor 114 can further prevent the remaining amount of liquid from being excessively small during the liquid output from the main buffer tank 110, thereby further preventing the interruption of the liquid supply from occurring. In particular, when the second main liquid sensor 112 malfunctions, the fourth main liquid sensor 114 further ensures the safety of the system without stopping the power. Meanwhile, when the fourth main liquid sensor 114 sends out corresponding feedback information, it is described that the second main liquid sensor 112 is abnormal, and the worker is also reminded to maintain the second main liquid sensor 112 in time.
In this embodiment, the system further includes a fourth auxiliary liquid sensor 124 disposed below the bottom liquid level line of the auxiliary buffer container 120. The provision of the fourth auxiliary liquid sensor 124 can further prevent the remaining amount of the liquid from being excessively small during the discharge of the liquid from the auxiliary buffer container 120, thereby further preventing the interruption of the liquid supply from occurring. In particular, the fourth auxiliary liquid sensor 124 further ensures the safety of the system without stopping when the second auxiliary liquid sensor 122 malfunctions. Meanwhile, when the fourth auxiliary liquid sensor 124 sends out corresponding feedback information, it is described that the second auxiliary liquid sensor 122 is abnormal, and the staff is also reminded to maintain the second auxiliary liquid sensor 122 in time.
In this embodiment, the system further includes a protective container 100, and the protective container 100 accommodates a main buffer container 110 and an auxiliary buffer container 120 in an inner space thereof. The protective container 100 can directly protect the main buffer container 110 and the auxiliary buffer container 120, and can also make the system more integrated and stable, thereby being suitable for more use occasions.
In this embodiment, the system further comprises a protection sensor 101, and the protection sensor 101 is disposed at the bottom of the inner space of the protection container 100. The provision of the protection sensor 101 enables the liquid supply system to further effectively cope with the occurrence of liquid escape from the main buffer container 110 and the sub-buffer container 120. Because, if any one of the main buffer container 110 and the auxiliary buffer container 120 escapes, the liquid falls on the bottom of the protective container 100 and is sensed by the protective sensor 101 installed at the bottom, and at this time, the protective sensor 101 can feed back information to the control center of the liquid supply system, so that relevant personnel can know the corresponding condition in time and take measures in time. The protective container 100 can protect other devices and equipment from the escaping liquid, and the protective sensor 101 can further feed back corresponding conditions, so that the whole liquid supply system has high reliability, safety and stability.
Meanwhile, once the protection sensor 101 sends out feedback information (alarm information), it is described that some or all of the first main liquid sensor 111, the third main liquid sensor 113, the first auxiliary liquid sensor 121, and the third auxiliary liquid sensor 123 are likely to malfunction, and therefore, a worker can also be reminded to repair the corresponding liquid sensors in time.
The system of this embodiment is particularly suitable for small liquid supply applications where the volumes of the main 110 and auxiliary 120 buffer vessels may be in the range of several liters. The small-sized liquid supply occasions need a particularly accurate liquid supply system, the safety and the reliability of the system are high while the liquid supply is not stopped, and therefore, the system is particularly suitable for adopting the system structure design shown in the figure 1.
Another embodiment of the present invention provides another liquid supply system in semiconductor industry, please refer to fig. 2, the system is substantially the same as the system of the previous embodiment, and refer to fig. 1 and the corresponding content of the previous embodiment.
The present embodiment differs from the foregoing embodiments in that, in the present embodiment, the rear-end three-way valve is not present, but is replaced with a main rear-end control valve 161 and an auxiliary rear-end control valve 162. The input end of the main back-end control valve 161 is connected to the output end of the main buffer tank 110, and the input end of the sub back-end control valve 162 is connected to the output end of the sub buffer tank 120.
On the different basis, in the present embodiment, the input end of the use-end control valve 170 is connected to the output end of the main back-end control valve 161 and the output end of the auxiliary back-end control valve 162.
The system of this embodiment uses substantially the same principles as the previous embodiments, except that the present embodiment improves the flexibility of the system by controlling the output of two buffer vessels through two different back end control valves, respectively.
Another embodiment of the present invention provides another liquid supply system in semiconductor industry, please refer to fig. 3, the system is substantially the same as the system of the previous embodiment, and refer to fig. 1 and the corresponding contents of the previous embodiment.
The present embodiment differs from the foregoing embodiments in that, in the present embodiment, the front-end three-way valve is not present, but is replaced with a main front-end control valve 151 and an auxiliary front-end control valve 152. The input of the main front end control valve 151 is used to connect to a first front end liquid supply line, and the input of the auxiliary front end control valve 152 is used to connect to a second front end liquid supply line.
In addition to the above difference, the input end of the main buffer tank 110 is connected to the output end of the main front end control valve 151, and the input end of the sub buffer tank 120 is connected to the output end of the sub front end control valve 152.
The system of this embodiment uses substantially the same principles as the previous embodiments, except that the present embodiment connects the first front-end liquid and the second front-end liquid through two different front-end control valves, which further provides flexibility to the system.
Another embodiment of the present invention provides another liquid supply system in semiconductor industry, please refer to fig. 4, the system is substantially the same as the system of the previous embodiment, and the system can refer to fig. 1 and the corresponding content of the previous embodiment.
This embodiment differs from the previous embodiments in two ways.
In the first aspect, the front-end three-way valve is not present, but the main front-end control valve 151 and the sub front-end control valve 152 are replaced. The input of the main front end control valve 151 is used to connect to a first front end liquid supply line, and the input of the auxiliary front end control valve 152 is used to connect to a second front end liquid supply line. In addition to the above difference, the input end of the main buffer tank 110 is connected to the output end of the main front end control valve 151, and the input end of the sub buffer tank 120 is connected to the output end of the sub front end control valve 152.
In the second aspect, the backend three-way valve is not present, but is replaced with the main backend control valve 161 and the auxiliary backend control valve 162. The input end of the main back-end control valve 161 is connected to the output end of the main buffer tank 110, and the input end of the sub back-end control valve 162 is connected to the output end of the sub buffer tank 120. On the different basis, in the present embodiment, the input end of the use-end control valve 170 is connected to the output end of the main back-end control valve 161 and the output end of the auxiliary back-end control valve 162.
From the difference between the above two aspects, the system of the present embodiment adopts the same principle as the previous embodiment, except that: in the embodiment, the output of the two buffer containers is respectively controlled by two different rear end control valves, so that the flexibility of the system is improved; this embodiment connects first anterior segment liquid and second anterior segment liquid respectively through two different front end control valves, has further provided the flexibility of system.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one of ordinary skill in the pertinent art without departing from the scope or spirit of the present invention, and the scope of the present invention is defined by the appended claims.
Claims (10)
1. A liquid supply system for the semiconductor industry, comprising:
the input end of the front end three-way valve is used for connecting a front section liquid supply pipeline;
the input end of the main buffer container is connected with the first output end of the front end three-way valve;
the input end of the auxiliary buffer container is connected with the second output end of the front end three-way valve;
a first input end of the rear end three-way valve is connected with the output end of the main buffer container, and a second input end of the rear end three-way valve is connected with the output end of the auxiliary buffer container;
the input end of the using end control valve is connected with the output end of the rear end three-way valve;
a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container;
the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container;
the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container;
and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
2. A liquid supply system for the semiconductor industry, comprising:
the input end of the front end three-way valve is used for connecting a front section liquid supply pipeline;
the input end of the main buffer container is connected with the first output end of the front end three-way valve;
the input end of the auxiliary buffer container is connected with the second output end of the front end three-way valve;
the input end of the main rear end control valve is connected with the output end of the main buffer container;
the input end of the auxiliary rear end control valve is connected with the output end of the auxiliary buffer container;
the input end of the using end control valve is connected with the output end of the main rear end control valve and the output end of the auxiliary rear end control valve;
a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container;
the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container;
the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container;
and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
3. A liquid supply system for the semiconductor industry, comprising:
the input end of the main front end control valve is used for connecting a first front-section liquid supply pipeline;
the input end of the auxiliary front end control valve is used for connecting a second front-section liquid supply pipeline;
the input end of the main buffer container is connected with the output end of the main front-end control valve;
the input end of the auxiliary buffer container is connected with the output end of the auxiliary front end control valve;
a first input end of the rear end three-way valve is connected with the output end of the main buffer container, and a second input end of the rear end three-way valve is connected with the output end of the auxiliary buffer container;
the input end of the using end control valve is connected with the output end of the rear end three-way valve;
a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container;
the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container;
the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container;
and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
4. A liquid supply system for the semiconductor industry, comprising:
the input end of the main front end control valve is used for connecting a first front-section liquid supply pipeline;
the input end of the auxiliary front end control valve is used for connecting a second front-section liquid supply pipeline;
the input end of the main buffer container is connected with the output end of the main front-end control valve;
the input end of the auxiliary buffer container is connected with the output end of the auxiliary front end control valve;
the input end of the main rear end control valve is connected with the output end of the main buffer container;
the input end of the auxiliary rear end control valve is connected with the output end of the auxiliary buffer container;
the input end of the using end control valve is connected with the output end of the main rear end control valve and the output end of the auxiliary rear end control valve;
a first main liquid sensor disposed at a lower edge of a top liquid level line of the main buffer container;
the second main liquid sensor is arranged at the upper edge of a bottom liquid level line of the main buffer container;
the first auxiliary liquid sensor is arranged at the lower edge of a liquid level line at the top of the auxiliary buffer container;
and the second auxiliary liquid sensor is arranged at the upper edge of the liquid level line at the bottom of the auxiliary buffer container.
5. A liquid supply system for the semiconductor industry as claimed in any one of claims 1 to 4, further comprising:
the main exhaust device is connected to the top of the main buffer container;
and the auxiliary exhaust device is connected to the top of the auxiliary buffer container.
6. The liquid supply system of the semiconductor industry as set forth in claim 5, further comprising:
a third main liquid sensor disposed above a top liquid level line of the main buffer container;
and the third auxiliary liquid sensor is arranged above the liquid level line at the top of the auxiliary buffer container.
7. The liquid supply system of the semiconductor industry as set forth in claim 6, further comprising:
a fourth main liquid sensor disposed below a bottom liquid level line of the main buffer container;
and the fourth auxiliary liquid sensor is arranged below the liquid level line at the bottom of the auxiliary buffer container.
8. The liquid supply system of the semiconductor industry of claim 7, further comprising: a protective container accommodating the main buffer container and the auxiliary buffer container in an inner space thereof.
9. The liquid supply system of the semiconductor industry of claim 8, further comprising: and the protection sensor is arranged at the bottom of the inner space of the protection container.
10. The liquid supply system for the semiconductor industry of claim 5, wherein the main exhaust has two exhaust outlets; the auxiliary exhaust device has two exhaust outlets.
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| CN202020487570.9U CN211957601U (en) | 2020-04-07 | 2020-04-07 | Liquid supply system for semiconductor industry |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111415888A (en) * | 2020-04-07 | 2020-07-14 | 芯米(厦门)半导体设备有限公司 | Liquid supply system for semiconductor industry |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111415888A (en) * | 2020-04-07 | 2020-07-14 | 芯米(厦门)半导体设备有限公司 | Liquid supply system for semiconductor industry |
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