CN211740177U - Multifunctional silicon wafer detection platform - Google Patents
Multifunctional silicon wafer detection platform Download PDFInfo
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- CN211740177U CN211740177U CN202020811133.8U CN202020811133U CN211740177U CN 211740177 U CN211740177 U CN 211740177U CN 202020811133 U CN202020811133 U CN 202020811133U CN 211740177 U CN211740177 U CN 211740177U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 110
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 110
- 239000010703 silicon Substances 0.000 title claims abstract description 110
- 238000001514 detection method Methods 0.000 title claims abstract description 92
- 239000004065 semiconductor Substances 0.000 claims abstract description 31
- 238000009434 installation Methods 0.000 claims abstract description 7
- 230000001360 synchronised effect Effects 0.000 claims description 23
- 238000012546 transfer Methods 0.000 claims description 12
- 210000000078 claw Anatomy 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 3
- 238000012827 research and development Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 71
- 238000005452 bending Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model relates to a multi-functional silicon chip testing platform, including the installation base, be equipped with detection module on the installation base, the other photovoltaic silicon chip that is equipped with of detection module moves and carries module and semiconductor silicon chip and move and carry the module. The detection module comprises a bracket, a first linear guide rail fixed on the bracket and a detection sensor arranged on the first linear guide rail in a sliding manner; the photovoltaic silicon wafer transferring module comprises a first linear module and a photovoltaic silicon wafer conveying assembly arranged on the first linear module in a sliding mode; the semiconductor silicon wafer transferring module comprises a second linear module, a rotating platform arranged on the second linear module and an adjustable grabbing disc arranged at the top of the rotating platform. The utility model discloses a photovoltaic silicon chip moves and carries module and semiconductor silicon chip and move the supporting design of module, and compatible photovoltaic and semiconductor silicon chip's detection realizes thickness, TTV, warpage, the crooked detection of photovoltaic and semiconductor silicon chip simultaneously, has improved research and development personnel's silicon chip detection efficiency greatly.
Description
Technical Field
The utility model belongs to the technical field of the silicon chip detects, specifically speaking relates to a multi-functional silicon chip testing platform.
Background
At present, silicon wafer detection in the photovoltaic industry and the semiconductor industry has respective detection equipment, but in the photovoltaic industry and the semiconductor industry, the detection equipment mainly faces to a production end, focuses on continuous and rapid detection of certain silicon wafers with fixed sizes, and the detection positions of the silicon wafers are fixed and unchangeable.
However, when the wafer is used for a development end, the cutting conditions of different positions of the silicon wafer are often required to be detected in detail, and the cutting process is optimized by analyzing a large number of detection points of a single silicon wafer. Moreover, the silicon wafers are different in size, detection points of the existing equipment are not comprehensive enough, and the silicon wafers are difficult to be compatible with various types of silicon wafers.
SUMMERY OF THE UTILITY MODEL
Aiming at various defects in the prior art, the inventor researches and designs a multifunctional silicon wafer detection platform in long-term practice.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a multi-functional silicon chip testing platform, includes the installation base, be equipped with detection module on the installation base, the other photovoltaic silicon chip that is equipped with of detection module moves and carries module and semiconductor silicon chip and move and carry the module. The detection module comprises a bracket, a first linear guide rail fixed on the bracket and a detection sensor arranged on the first linear guide rail in a sliding manner; the photovoltaic silicon wafer transferring module comprises a first linear module and a photovoltaic silicon wafer conveying assembly arranged on the first linear module in a sliding mode; the semiconductor silicon wafer transferring module comprises a second linear module, a rotating platform arranged on the second linear module and an adjustable grabbing disc arranged at the top of the rotating platform.
Furthermore, the bracket comprises an upper cross beam and a lower cross beam, and the upper cross beam and the lower cross beam are both provided with the first linear guide rail; the detection sensor is connected with a first sliding block on the first linear guide rail through a mounting seat; one end of the mounting seat, which is far away from the first sliding block, is provided with a clamping jaw.
Further, two of the detection sensors are coaxially arranged; two mechanical limits are arranged on the first linear guide rail.
Furthermore, second linear guide rails are arranged on two sides of the first linear module in the length direction, and second sliding blocks are arranged on the second linear guide rails; the two second linear guide rails are respectively arranged on two sides of the bracket.
Further, the photovoltaic silicon wafer conveying assembly comprises a connecting bottom plate and vertical plates fixed on two sides of the connecting bottom plate in the length direction; two ends of the two vertical plates are respectively connected with a driving shaft and a driven shaft through driving shafts, the driving shaft is fixed between the two vertical plates through bearing seats at the two ends of the driving shaft, and the driven shaft is fixed between the two vertical plates through first idle wheels at the two ends of the driven shaft; two ends of the connecting bottom plate are respectively fixed with the two second sliding blocks (35).
Furthermore, the middle parts of the two vertical plates are provided with grooves; and a plurality of second idle wheels are uniformly arranged on the inner sides of the two vertical plates and are fixed on the vertical plates through idle wheel shafts.
Furthermore, the inner side of the bearing seat is connected with a first synchronous belt wheel through a key, and the first synchronous belt wheel is arranged on the inner side of the vertical plate; and a second synchronous belt wheel is arranged on the outer side of the vertical plate, and the second synchronous belt wheel and the first synchronous belt wheel are coaxially arranged.
Furthermore, a first servo motor is arranged at the bottom of one end, close to the driving shaft, of the connecting bottom plate; the output shaft of the first servo motor is connected with a third synchronous belt pulley through a key; the second synchronous pulley and the third synchronous pulley are driven to run through a transmission belt.
Further, the rotating platform is fixed on the second linear module through a connecting plate; and a second servo motor is arranged on one side of the rotating platform and connected with the driving input end of the rotating platform.
Furthermore, the adjustable grabbing plate is fixed on a rotary table of the rotary platform through a bolt and is provided with three telescopic clamping jaws.
The utility model has the advantages that:
through the design of the photovoltaic silicon wafer transfer module and the semiconductor silicon wafer transfer module, the detection of photovoltaic and semiconductor silicon wafers is compatible, and the detection of the photovoltaic and semiconductor silicon wafers is compatible with various silicon wafer specifications and covers more detection areas, so that the detection of the thickness, TTV, warpage and bending of the photovoltaic and semiconductor silicon wafers is realized; additionally, the utility model discloses testing platform simple structure, with low costs, detect reliable and stable, improved research and development personnel's silicon chip detection efficiency greatly.
Drawings
Fig. 1 is an overall schematic view of the present invention;
fig. 2 is a schematic diagram of a detection module of the present invention;
fig. 3 is a schematic view of a photovoltaic silicon wafer transfer module of the present invention;
FIG. 4 is a schematic view of the drive shaft of the present invention;
fig. 5 is a schematic diagram of the semiconductor silicon wafer transfer module of the present invention.
In the drawings:
10-mounting a base and 11-a foot cup;
20-a detection module, 21-a bracket, 22-an upper beam, 23-a lower beam, 24-a first linear guide rail, 25-a first sliding block, 26-a mounting seat and 27-a detection sensor;
30-photovoltaic silicon wafer transfer module, 31-first linear module, 32-second linear guide rail, 33-connecting bottom plate, 34-vertical plate, 341-second idle wheel, 35-second slide block, 36-first servo motor, 37-driving shaft, 371-bearing seat, 372-first synchronous pulley, 38-second synchronous pulley, 381-driving belt, 382-third synchronous pulley and 39-driven shaft;
40-a semiconductor silicon wafer transfer module, 41-a second linear module, 42-a connecting plate, 43-a rotating platform, 44-a second servo motor, 45-an adjustable grabbing disc and 46-a clamping jaw;
50-an electric cabinet.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the following description is given with reference to the accompanying drawings of the present invention for clear and complete description of the technical solution of the present invention. Based on the embodiments in the present application, other similar embodiments obtained by persons of ordinary skill in the art without any creative effort shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for the purpose of illustrating the present invention and not for the purpose of limiting the same.
The present invention will be further described with reference to the accompanying drawings and preferred embodiments.
Referring to fig. 1, the utility model discloses a multifunctional silicon wafer testing platform, including installation base 10, provides the support for all subassemblies on it. The mounting base 10 is provided with a detection module 20 for detecting various performances of the silicon wafer. A photovoltaic silicon wafer transferring module 30 and a semiconductor silicon wafer transferring module 40 are arranged beside the detection module 20; the photovoltaic silicon wafer transferring module 30 is used for conveying silicon wafers when detecting the photovoltaic silicon wafers; the semiconductor wafer transfer module 40 is used for transferring a semiconductor wafer during the inspection of the semiconductor wafer.
An electric cabinet 50 is further arranged on one side of the mounting base 10, an electric control system is arranged in the electric cabinet 50, and a control button is arranged on the electric cabinet 50 and used for controlling the start and stop of equipment on the mounting base 10. An operator can manually switch the detection modes through buttons on the electric cabinet 50, and the detection modes include two types, one type is a photovoltaic silicon wafer detection mode, and the other type is a semiconductor silicon wafer detection mode.
At the bottom of the mounting base 10, there are 4 foot cups 11 for supporting the whole mounting base 10 and adjusting the levelness of the mounting base 10.
Referring to fig. 1 and 2, the detection module 20 includes a bracket 21, a first linear guide 24 fixed on the bracket 21, and a detection sensor 27 slidably disposed on the first linear guide 24. Specifically, the bracket 21 includes an upper beam 22 and a lower beam 23, and a first linear guide 24 is provided on each of the upper beam 22 and the lower beam 23. The detection sensor 27 is connected to the first slider 25 on the first linear guide 24 via the mount 26. The mounting base 26 is provided with a clamping jaw at an end remote from the first slider 25 for clamping the detection sensor 27.
In this embodiment, the two detection sensors 27 are coaxially arranged, and the silicon wafer is located between the two sensors during detection; the first linear guide rail 24 is provided with a left mechanical limit and a right mechanical limit (not shown in the figure), wherein the left limit corresponds to a photovoltaic silicon wafer detection mode, and the right limit corresponds to a semiconductor silicon wafer detection mode.
Referring to fig. 1, 3 and 4, the photovoltaic silicon wafer transfer module 30 includes a first linear module 31 and a photovoltaic silicon wafer conveying assembly slidably disposed on the first linear module 31. The first linear module 31 is fixed to the mounting base 10 by bolts. And second linear guide rails 32 are arranged on two sides of the first linear module 31 in the length direction, and second sliding blocks 35 are arranged on the second linear guide rails 32. The second linear guide 32 of this embodiment is fixed on the mounting base 10 by bolts, and the two second linear guides 32 are respectively disposed on two sides of the bracket 21 of the detection module 20.
The photovoltaic silicon wafer conveying assembly comprises a connecting bottom plate 33 and vertical plates 34 fixed on two sides of the connecting bottom plate 33 in the length direction. The middle parts of the two vertical plates 34 are provided with grooves, so that the detection sensor 27 on the lower beam 23 of the detection module 20 can conveniently pass through the grooves. Two ends of the two vertical plates 34 are respectively connected through a driving shaft 37 and a driven shaft 39, the driving shaft 37 is fixed between the two vertical plates 34 through bearing seats 371 at two ends, and the driven shaft 39 is fixed between the two vertical plates 34 through first idle wheels at two ends. A plurality of second idle wheels 341 are further uniformly disposed inside the two vertical plates 34 for supporting a conveyor belt (not shown) between the two vertical plates 34, and the second idle wheels 341 are fixed on the vertical plates 34 through idle wheel shafts.
The inner side of the bearing seat 371 is connected with a first synchronous belt pulley 372 through a key, the first synchronous belt pulley 372 is arranged on the inner side of the vertical plate 34, a second synchronous belt pulley 38 is arranged on the outer side of the vertical plate 34 corresponding to the first synchronous belt pulley 372, and the second synchronous belt pulley 38 and the first synchronous belt pulley 372 are coaxial. A first servomotor 36 is provided at the bottom of the connecting bottom plate 33 near one end of the drive shaft 37, and the output shaft of the first servomotor 36 is connected to a third timing pulley 382 by a spline. The second timing pulley 38 and the third timing pulley 382 are driven to run by a belt 381.
The two ends of the connecting bottom plate 33 are fixed with the two second sliding blocks 35, the middle of the connecting bottom plate 33 is fixed with the sliding blocks on the first linear module 31, and the 3 sliding blocks can slide left and right to drive each component on the connecting bottom plate to move left and right.
Referring to fig. 1 and 5, the semiconductor wafer transfer module 40 includes a second linear module 41, a rotary platform 43 disposed on the second linear module 41, and an adjustable gripping disk 45 disposed on top of the rotary platform 43. The second linear module 41 is fixed to the mounting base 10 by bolts, and the rotary platform 43 is fixed to the second linear module 41 by a connecting plate 42. A second servo motor 44 is provided on one side of the rotary platform 43, and the second servo motor 44 is connected to a driving input end of the rotary platform 43. The adjustable gripping disk 45 is fixed on a turntable of the rotating platform 43 through bolts, and the adjustable gripping disk 45 is provided with three telescopic clamping jaws 46 for being compatible with semiconductor silicon wafers with different diameters.
The utility model discloses a silicon chip testing platform use as follows:
photovoltaic silicon wafer detection
(1) Selecting a photovoltaic silicon wafer detection function on the electric cabinet 50;
(2) the silicon wafer is placed on the left side of the conveyer belt of the photovoltaic silicon wafer transfer module 30 in the center, the first servo motor 36 drives the conveyer belt to start to convey the silicon wafer to the right side, the silicon wafer penetrates through the middle of the upper detection sensor 27 and the lower detection sensor 27 of the detection module 20, and the sensors start to continuously detect the distance between the surfaces of the silicon wafers;
(3) after the silicon chip completely passes through the detection sensor 27, the conveyer belt stops to complete the detection of the left line of the silicon chip;
(4) the first linear module 31 is started to drive the photovoltaic silicon wafer conveying assembly to move leftwards for a certain distance, so that the detection point of the detection sensor 27 is aligned to the middle of the silicon wafer;
(5) the conveyer belt is reversely started to drive the silicon chip to be conveyed leftwards, and the detection sensor 27 completes the continuous detection on the central line of the silicon chip;
(6) after the silicon wafer center line detection is finished, the conveyor belt is stopped, the first linear module 31 is started to drive the photovoltaic silicon wafer conveying assembly to continuously move leftwards for a certain distance, and the detection point of the detection sensor 27 is aligned with the silicon wafer right line;
(7) the conveyer belt is started to drive the silicon chip to be conveyed to the right side, the detection sensor 27 finishes continuous detection on the right line of the silicon chip, and the silicon chip is continuously conveyed to the right side of the conveyer belt to be stopped after the detection is finished;
(8) the detection sensor 27 transmits the acquired data to an electric control system in the electric control box 50, and outputs detection values of the thickness, TTV, warpage, bending and the like of the silicon wafer after calculation processing.
(II) semiconductor silicon wafer inspection
(1) Selecting a semiconductor silicon wafer detection function on the electric cabinet 50;
(2) adjusting the size of the semiconductor silicon wafer to be 4 inches, 6 inches, 8 inches and 12 inches;
(3) placing a semiconductor silicon wafer on an adjustable grabbing disc 45, and slightly clamping the main silicon wafer by a clamping claw 46 on the grabbing disc;
(4) moving the detection module 20 to the right limit of the first linear guide rail 24 and fixing;
(5) the second linear module 41 of the semiconductor silicon wafer transferring module 40 drives the silicon wafer to move to the right side until the detection sensor 27 is aligned with the center of the silicon wafer and detects the silicon wafer;
(6) after the detection is finished, the second linear module 41 drives the silicon wafer to move a certain distance leftwards and stop, the rotating platform 43 is started to drive the silicon wafer to rotate stably, the detection sensor 27 finishes continuous detection along the circumference of the silicon wafer in the rotating process, and the rotating platform 43 stops;
(7) the second linear module 41 continuously moves a certain distance leftwards and stops, the rotary platform 43 continuously starts to drive the silicon wafer to rotate stably, the detection sensor 27 finishes continuous detection on the other circumference of the silicon wafer in the rotating process, and the rotary platform 43 stops;
(8) and repeating the above actions to complete the continuous detection of the center of the semiconductor silicon chip and the circumferences on different radii.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, i.e. the present invention is intended to cover all equivalent variations and modifications within the scope of the present invention.
Claims (10)
1. A multifunctional silicon wafer detection platform comprises an installation base (10), and is characterized in that a detection module (20) is arranged on the installation base (10), and a photovoltaic silicon wafer transfer module (30) and a semiconductor silicon wafer transfer module (40) are arranged beside the detection module (20); the detection module (20) comprises a bracket (21), a first linear guide rail (24) fixed on the bracket (21) and a detection sensor (27) arranged on the first linear guide rail (24) in a sliding manner; the photovoltaic silicon wafer transferring module (30) comprises a first linear module (31) and a photovoltaic silicon wafer conveying assembly arranged on the first linear module (31) in a sliding mode; the semiconductor silicon wafer transferring module (40) comprises a second linear module (41), a rotating platform (43) arranged on the second linear module (41) and an adjustable grabbing disc (45) arranged at the top of the rotating platform (43).
2. The multifunctional silicon wafer detection platform as claimed in claim 1, wherein the support (21) comprises an upper beam (22) and a lower beam (23), and the first linear guide rail (24) is arranged on each of the upper beam (22) and the lower beam (23); the detection sensor (27) is connected with a first sliding block (25) on the first linear guide rail (24) through a mounting seat (26); and a clamping jaw is arranged at one end, far away from the first sliding block (25), of the mounting seat (26).
3. The multifunctional silicon wafer detection platform according to claim 2, characterized in that two detection sensors (27) are coaxially arranged; two mechanical limits are arranged on the first linear guide rail (24).
4. The multifunctional silicon wafer detection platform as claimed in claim 1, wherein second linear guide rails (32) are arranged on two sides of the first linear module (31) in the length direction, and second sliders (35) are arranged on the second linear guide rails (32); the two second linear guide rails (32) are respectively arranged on two sides of the bracket (21).
5. The multifunctional silicon wafer detection platform according to claim 4, wherein the photovoltaic silicon wafer conveying assembly comprises a connecting bottom plate (33) and vertical plates (34) fixed on two sides of the connecting bottom plate (33) in the length direction; two ends of the two vertical plates (34) are respectively connected through a driving shaft (37) and a driven shaft (39), the driving shaft (37) is fixed between the two vertical plates (34) through bearing seats (371) at two ends of the driving shaft, and the driven shaft (39) is fixed between the two vertical plates (34) through first idle wheels at two ends of the driven shaft; two ends of the connecting bottom plate (33) are respectively fixed with the two second sliding blocks (35).
6. The multifunctional silicon wafer detection platform according to claim 5, wherein the middle parts of the two vertical plates (34) are provided with grooves; a plurality of second idle wheels (341) are uniformly arranged on the inner sides of the two vertical plates (34), and the second idle wheels (341) are fixed on the vertical plates (34) through idle wheel shafts.
7. The multifunctional silicon wafer detection platform as claimed in claim 5, wherein the inner side of the bearing seat (371) is connected with a first synchronous pulley (372) through a key, and the first synchronous pulley (372) is arranged on the inner side of the vertical plate (34); and a second synchronous belt wheel (38) is arranged on the outer side of the vertical plate (34), and the second synchronous belt wheel (38) and the first synchronous belt wheel (372) are coaxially arranged.
8. The multifunctional silicon wafer detection platform according to claim 7, wherein a first servo motor (36) is arranged at the bottom of one end of the connecting bottom plate (33) close to the driving shaft (37); the output shaft of the first servo motor (36) is connected with a third synchronous pulley (382) through a key; the second timing pulley (38) and the third timing pulley (382) are driven by a belt (381).
9. The multifunctional silicon wafer detection platform according to claim 1, characterized in that the rotary platform (43) is fixed on the second linear module (41) through a connecting plate (42); and a second servo motor (44) is arranged on one side of the rotating platform (43), and the second servo motor (44) is connected with the driving input end of the rotating platform (43).
10. The multifunctional silicon wafer detection platform according to claim 9, wherein the adjustable gripping disk (45) is fixed on a turntable of the rotary platform (43) through bolts, and the adjustable gripping disk (45) is provided with three telescopic claws (46).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020811133.8U CN211740177U (en) | 2020-05-15 | 2020-05-15 | Multifunctional silicon wafer detection platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020811133.8U CN211740177U (en) | 2020-05-15 | 2020-05-15 | Multifunctional silicon wafer detection platform |
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| Publication Number | Publication Date |
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| CN211740177U true CN211740177U (en) | 2020-10-23 |
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| CN202020811133.8U Active CN211740177U (en) | 2020-05-15 | 2020-05-15 | Multifunctional silicon wafer detection platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457878A (en) * | 2020-05-15 | 2020-07-28 | 长治高测新材料科技有限公司 | Multifunctional silicon wafer detection platform |
| CN113432523A (en) * | 2021-06-24 | 2021-09-24 | 博众精工科技股份有限公司 | Silicon wafer measuring device |
-
2020
- 2020-05-15 CN CN202020811133.8U patent/CN211740177U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457878A (en) * | 2020-05-15 | 2020-07-28 | 长治高测新材料科技有限公司 | Multifunctional silicon wafer detection platform |
| CN113432523A (en) * | 2021-06-24 | 2021-09-24 | 博众精工科技股份有限公司 | Silicon wafer measuring device |
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Effective date of registration: 20240611 Address after: No. 49 Hangkong Road, High tech Zone, Jianhu County, Yancheng City, Jiangsu Province, 224700 Patentee after: Gaoce (Yancheng) Technology Co.,Ltd. Country or region after: China Address before: 046000 Xiwang village, huangnian Town, Luzhou District, Changzhi City, Shanxi Province Patentee before: CHANGZHI GAOCE NEW MATERIAL TECHNOLOGY CO.,LTD. Country or region before: China |