CN111668146B - Automatic working line for loading and unloading horizontal silicon wafer quartz boat - Google Patents
Automatic working line for loading and unloading horizontal silicon wafer quartz boat Download PDFInfo
- Publication number
- CN111668146B CN111668146B CN202010582113.2A CN202010582113A CN111668146B CN 111668146 B CN111668146 B CN 111668146B CN 202010582113 A CN202010582113 A CN 202010582113A CN 111668146 B CN111668146 B CN 111668146B
- Authority
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- China
- Prior art keywords
- loading
- unloading
- silicon wafer
- conveying line
- quartz boat
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 44
- 239000010703 silicon Substances 0.000 title claims abstract description 44
- 239000010453 quartz Substances 0.000 title claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 230000007306 turnover Effects 0.000 claims abstract description 20
- 210000001503 joint Anatomy 0.000 claims abstract description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- 230000001360 synchronised effect Effects 0.000 claims description 15
- 238000013016 damping Methods 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000003032 molecular docking Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a horizontal silicon wafer quartz boat loading and unloading piece automatic working line which comprises a loading conveying line and a unloading conveying line which are arranged in parallel, wherein loading and unloading robots are arranged on one sides of the loading conveying line and one side of the unloading conveying line, symmetrical screw rods are arranged on two sides of the loading and unloading robots, turnover devices are arranged on the screw rods in a sliding mode, a portal frame is arranged above the screw rods, a moving frame is arranged on the portal frame in a sliding mode, a carrying device is arranged on the moving frame, a butt joint alternate track is arranged below the portal frame, and a silicon wafer reaction device is arranged on one side of the butt joint alternate track. The invention has reasonable and simple structure and convenient operation, and can rapidly and effectively transport and process the silicon wafer.
Description
Technical Field
The invention relates to the technical field of quartz boat carrying, in particular to an automatic working line for loading and unloading a horizontal silicon wafer quartz boat.
Background
Chips made of silicon chips have remarkable operational capabilities and are widely used in microelectronics. In the production and manufacture of silicon wafers, the transportation of the silicon wafers is an important link in the production and manufacture of the silicon wafers, the silicon wafers need to be processed in the production of the silicon wafers, the silicon wafers need to be turned over in the processing, and how to effectively and quickly transport and turn over the silicon wafers becomes a key for improving the efficiency of producing the silicon wafers.
The above-described problems are a need in the art for a solution.
Disclosure of Invention
The invention aims to solve the technical problem of providing a horizontal type silicon wafer quartz boat loading and unloading piece automatic working line, so that silicon wafers can be transported and processed rapidly and effectively.
In order to solve the technical problems, the scheme provided by the invention is as follows: the utility model provides a horizontal silicon chip quartz boat loading and unloading piece automation line, includes parallel arrangement's material loading transfer chain and unloading transfer chain, the material loading transfer chain with unloading transfer chain one side is provided with loading and unloading robot, loading and unloading robot both sides are provided with symmetrical lead screw, all slide on the lead screw and be provided with turning device, the lead screw top is provided with the portal frame, slide on the portal frame and be provided with the removal frame, be provided with handling device on the removal frame, the portal frame below is provided with the alternate track of butt joint, alternate track one side of butt joint is provided with silicon chip reaction unit.
As a further improvement of the invention, the turnover device comprises a base, bearing seats are symmetrically arranged on the base, rotating shafts are connected in the bearing seats, one side of each rotating shaft is in transmission connection with a rotating motor, turnover jigs are arranged on each rotating shaft, each turnover jig comprises a mounting seat connected with each rotating shaft, a supporting plate is arranged on each mounting seat through a supporting column, first air cylinders are symmetrically arranged on each mounting seat, connecting plates are arranged at output ends of the first air cylinders, symmetrical positioning plates are arranged on inner side surfaces of the connecting plates, second air cylinders are arranged on outer side surfaces of the connecting plates, supporting plates are arranged at output ends of the second air cylinders, and quartz boats are arranged in the turnover jigs
As a further improvement of the invention, a sensor is arranged on the bearing seat, an induction piece matched with the sensor is arranged on one side of the rotating shaft, and a limiting plate is also arranged on one side of the rotating shaft.
As a further improvement of the invention, the base is provided with a damping cylinder, and the output end of the damping cylinder is provided with a damping block.
As a further improvement of the invention, the mounting seat is also provided with a micro switch.
As a further improvement of the invention, the carrying device comprises a frame arranged on a movable frame, parallel tracks are paved in the frame, a movable plate is slidably arranged on the tracks, a synchronous belt pressing plate is arranged on the movable plate, a driving motor is arranged on the frame and connected with a synchronous belt, the synchronous belt pressing plate is in meshed connection with the synchronous belt, a fixed plate is further arranged on the frame, telescopic cylinders are symmetrically arranged on the movable plate and the fixed plate, side plates are symmetrically arranged at the output ends of the telescopic cylinders, positioning blocks are symmetrically arranged on the side plates, and cushion blocks are arranged at the bottoms of the side plates.
As a further improvement of the invention, the quartz boat comprises a quartz frame, wherein symmetrical upright posts are arranged on the quartz frame, and the upright posts are provided with placing grooves.
As a further improvement of the invention, the feeding conveying line and the discharging conveying line both comprise interface tracks, and the interface tracks are connected with an upper layer buffer, a lower layer buffer, a basket lifting machine, a buffer box and a variable-pitch buffer device at one time.
The invention has the beneficial effects that:
The invention has reasonable and simple structure and convenient operation, the silicon wafers are conveyed to the loading and unloading robot through the loading and unloading conveyor line, the silicon wafers on the loading and unloading conveyor line are grabbed and conveyed into the quartz boat in the overturning device through the loading and unloading robot, the overturning device can overturn the quartz boat, the quartz boat is moved to the bottom of the portal frame through the screw rod after overturning, the quartz boat is conveyed to the butt joint alternate track through the conveying device on the portal frame, the quartz boat is conveyed to the silicon wafer reaction device through the butt joint alternate track, the silicon wafers in the quartz boat are conveyed to the butt joint alternate track after reaction, the quartz boat is conveyed to the overturning device on the other side through the conveying device, the silicon wafers are conveyed to the loading and unloading robot through the screw rod, and the silicon wafers are conveyed to the unloading conveyor line through the loading and unloading robot to the appointed position, so that the silicon wafers are quickly connected and effectively transported and treated.
Drawings
Fig. 1 is a top view of the present invention.
Fig. 2 is a top view of the mobile carriage of the present invention.
Fig. 3 is a schematic structural view of the turning device of the present invention.
Fig. 4 is a schematic structural view of the flip jig of the present invention.
FIG. 5 is a schematic view of the structure of the quartz boat of the present invention.
Fig. 6 is a schematic structural view of the carrying device of the present invention.
The reference numerals in the figures illustrate: 1. a feeding conveying line; 101. an interface track; 102. an upper layer buffer memory; 103. a lower layer buffer memory; 104. basket loading elevator; 105. a cache box; 106. a variable-pitch buffer device; 2. a loading and unloading robot; 3. a turnover device; 301. a rotating electric machine; 302. turning over the clamp; 3021. a mounting base; 3022. a first cylinder; 3023. a connecting plate; 3024. a second cylinder; 3025. a supporting plate; 3026. a positioning plate; 3027. a support plate; 3028. a micro-switch; 3029. a support column; 303. a quartz boat; 3031. a placement groove; 3032. a column; 3033. a quartz frame; 304. a limiting plate; 305. a rotating shaft; 306. an induction piece; 307. a bearing seat; 308. a sensor; 309. a base; 310. a damping cylinder; 311. a damper block; 4. a moving rack; 5. a carrying device; 501. a synchronous belt pressing plate; 502. a moving plate; 503. a track; 504. a frame; 505. a synchronous belt; 506. a driving motor; 507. a fixing plate; 508. a telescopic cylinder; 509. a positioning block; 510. a side plate; 511. a cushion block; 6. a screw rod; 7. a silicon wafer reaction device; 8. a portal frame; 9. butting alternate tracks; 10. and (5) a blanking conveying line.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
Referring to fig. 1, an embodiment of the present invention includes a loading conveyor line 1 and a discharging conveyor line 10 that are disposed in parallel, and capable of conveying silicon wafers to a designated position, wherein a loading and unloading robot 2 is disposed on one side of the loading conveyor line 1 and one side of the discharging conveyor line 10, and capable of clamping and moving the silicon wafers, symmetrical screw rods 6 are disposed on both sides of the loading and unloading robot 2, a turning device 3 is slidably disposed on each screw rod 6, so that the turning device 3 can move, a gantry 8 is disposed above the screw rods 6, a moving frame 4 is slidably disposed on the gantry 8, a handling device 5 is disposed on the moving frame 4, so that the handling device 5 can move, a docking alternate track 9 is disposed below the gantry 8, the silicon wafers to be reacted after being turned are placed on the docking alternate track 9, and a silicon wafer reaction device 7 is disposed on one side of the docking alternate track 9, and capable of reacting the silicon wafers.
In this embodiment, the turning device 3 includes a base 309, a bearing seat 307 is symmetrically disposed on the base 309, a rotating shaft 305 is connected in the bearing seat 307, a rotating motor 301 is connected to one side of the rotating shaft 305 in a transmission manner, a turning clamp 302 is disposed on the rotating shaft 305, the turning clamp 302 includes a mounting seat 3021 connected to the rotating shaft 305, a supporting plate 3027 is disposed on the mounting seat 3021 through a supporting column 3029, a first air cylinder 3022 is symmetrically disposed on the mounting seat 3021, a connecting plate 3023 is disposed at an output end of the first air cylinder 3022, a symmetrical positioning plate 3026 is disposed on an inner side of the connecting plate 3023, a second air cylinder 3024 is disposed at an outer side of the connecting plate 3023, a supporting plate 3025 is disposed at an output end of the second air cylinder 3024, a quartz boat 303 is disposed in the turning clamp 302, the quartz boat 303 is placed in the quartz boat 303, the first air cylinder 3022 controls the positioning plate 3026 to fixedly clamp the quartz boat 303, and at the same time, the second air cylinder 3024 controls the turning clamp 302 to turn over the quartz boat 303, so that the silicon wafer 303 is turned over.
In this embodiment, a sensor 308 is disposed on the bearing seat 307, a sensing piece 306 matched with the sensor 308 is disposed on one side of the rotating shaft 305, a limiting plate 304 is disposed on one side of the rotating shaft 305, and when the overturning fixture 302 is overturned to a designated position, the sensing piece 306 senses the sensor 308, so as to control the rotating motor 301 to stop working.
In this embodiment, the base 309 is provided with a damper cylinder 310, and the output end of the damper cylinder 310 is provided with a damper block 311, and the damper cylinder 310 controls the damper block 311 to damp the overturning jig 302.
In this embodiment, the mounting base 3021 is further provided with a micro switch 3028, which can protect the turning device 3 and can stably and safely operate.
In this embodiment, the handling device 5 includes a rack 504 installed on the moving frame 4, parallel tracks 503 are laid in the rack 504, a moving plate 502 is slidably disposed on the tracks 503, a synchronous belt pressing plate 501 is disposed on the moving plate 502, a driving motor 506 is disposed on the rack 504, the driving motor 506 is connected with a synchronous belt 505, the synchronous belt pressing plate 501 is engaged with the synchronous belt 505, a fixing plate 507 is further disposed on the rack 504, telescopic cylinders 508 are symmetrically disposed on the moving plate 502 and the fixing plate 507, side plates 510 are symmetrically disposed at the output ends of the telescopic cylinders 508, positioning blocks 509 are symmetrically disposed on the side plates 510, cushion blocks 511 are disposed at the bottoms of the side plates 510, and the driving motor 506 drives the synchronous belt 505 to rotate, so that the moving plate 502 moves to a designated position, and the telescopic cylinders 508 control the positioning blocks 509 to clamp and grasp the quartz frames 303.
In this embodiment, the quartz boat 303 includes a quartz frame 3033, symmetric columns 3032 are disposed on the quartz frame 3033, and placing grooves 3031 are formed on the columns 3032, so that a plurality of silicon wafers can be fixedly placed through the placing grooves 3031.
In this embodiment, the feeding conveyor line 1 and the discharging conveyor line 10 each include an interface track 101, and the interface track 101 is connected with an upper layer buffer 102, a lower layer buffer 103, a basket lift 104, a buffer box 105, and a variable-pitch buffer 106 at a time.
In the actual use process, the silicon chip is conveyed to the position of the loading and unloading robot 2 through the loading conveying line 1, the loading and unloading robot 2 grabs the silicon chip and moves the silicon chip into the quartz boat 303 in the turnover device 3, the quartz boat 303 is turned over through the turnover device 3, the turnover device 3 moves to the lower part of the portal frame 8 through the screw rod 6, the conveying device 5 moves to the upper part of the turnover device 3 through the moving frame 4, the conveying device 5 grabs and moves the quartz boat 303 in the turnover device 3 onto the butt joint alternate track 9, the quartz boat 303 is conveyed into the silicon chip reaction device 7 through the alternate track 9, the reacted silicon chip is conveyed onto the turnover device 3 at the other side through the conveying device 5, the turnover device 3 moves to the position of the loading and unloading robot 2 through the screw rod 6, and the loading and unloading robot 2 clamps and moves the silicon chip onto the unloading conveying line 10. The invention has simple structure and convenient operation, thereby being capable of carrying out quick and effective transportation and treatment on the silicon wafer.
The above-described embodiments are merely preferred embodiments for fully explaining the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present invention, and are intended to be within the scope of the present invention. The protection scope of the invention is subject to the claims.
Claims (3)
1. The automatic working line for loading and unloading the horizontal silicon wafer quartz boat is characterized by comprising a loading conveying line (1) and a unloading conveying line (10) which are arranged in parallel, wherein loading and unloading robots (2) are arranged on one side of the loading and unloading conveying line (1) and one side of the unloading conveying line (10), symmetrical screw rods (6) are arranged on two sides of each loading and unloading robot (2), turnover devices (3) are arranged on the screw rods (6) in a sliding mode, a portal frame (8) is arranged above each screw rod (6), a movable frame (4) is arranged on each portal frame (8) in a sliding mode, a carrying device (5) is arranged on each movable frame (4), a butt joint alternate track (9) is arranged below each portal frame (8), and a silicon wafer reaction device (7) is arranged on one side of each butt joint alternate track (9);
The turnover device (3) comprises a base (309), bearing seats (307) are symmetrically arranged on the base (309), rotating shafts (305) are connected in the bearing seats (307), rotating motors (301) are connected to one side of the rotating shafts (305) in a transmission mode, turnover clamps (302) are arranged on the rotating shafts (305), the turnover clamps (302) comprise mounting seats (3021) connected with the rotating shafts (305), supporting plates (3027) are arranged on the mounting seats (3021) through supporting columns (3029), first cylinders (3022) are symmetrically arranged on the mounting seats (3021), connecting plates (3023) are arranged at output ends of the first cylinders (3022), symmetrical positioning plates (3026) are arranged at inner sides of the connecting plates (3023), second cylinders (3024) are arranged at outer sides of the connecting plates, quartz boats (3025) are arranged at output ends of the second cylinders (3024), and quartz boats (303) are arranged in the turnover clamps (302).
The base (309) is provided with a damping cylinder (310), and the output end of the damping cylinder (310) is provided with a damping block (311);
A sensor (308) is arranged on the bearing seat (307), an induction piece (306) matched with the sensor (308) is arranged on one side of the rotating shaft (305), and a limiting plate (304) is also arranged on one side of the rotating shaft (305); a micro switch (3028) is further arranged on the mounting seat (3021);
the feeding conveying line (1) and the discharging conveying line (10) comprise an interface track (101), and the interface track (101) is connected with an upper layer buffer storage machine (102), a lower layer buffer storage machine (103), a basket lifting machine (104), a buffer storage box (105) and a variable-pitch buffer storage device (106) at one time.
2. The automatic working line for loading and unloading the horizontal silicon wafer quartz boat according to claim 1, wherein the carrying device (5) comprises a rack (504) arranged on a movable frame (4), parallel tracks (503) are paved in the rack (504), a movable plate (502) is arranged on the tracks (503) in a sliding mode, a synchronous belt pressing plate (501) is arranged on the movable plate (502), a driving motor (506) is arranged on the rack (504), the driving motor (506) is connected with a synchronous belt (505), the synchronous belt pressing plate (501) is meshed with the synchronous belt (505), a fixed plate (507) is further arranged on the rack (504), side plates (510) are arranged at the output ends of the telescopic cylinders (508), positioning blocks (509) are symmetrically arranged on the side plates (510), and cushion blocks (511) are arranged at the bottoms of the side plates (510).
3. The horizontal silicon wafer quartz boat handling sheet automation line of claim 1, wherein the quartz boat (303) comprises a quartz frame (3033), symmetrical upright posts (3032) are arranged on the quartz frame (3033), and the upright posts (3032) are provided with placing grooves (3031).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010582113.2A CN111668146B (en) | 2020-06-23 | 2020-06-23 | Automatic working line for loading and unloading horizontal silicon wafer quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010582113.2A CN111668146B (en) | 2020-06-23 | 2020-06-23 | Automatic working line for loading and unloading horizontal silicon wafer quartz boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111668146A CN111668146A (en) | 2020-09-15 |
| CN111668146B true CN111668146B (en) | 2024-08-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010582113.2A Active CN111668146B (en) | 2020-06-23 | 2020-06-23 | Automatic working line for loading and unloading horizontal silicon wafer quartz boat |
Country Status (1)
| Country | Link |
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| CN (1) | CN111668146B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112435948B (en) * | 2020-12-03 | 2024-08-02 | 无锡江松科技股份有限公司 | Self-purification silicon wafer conveying device |
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| CN107934584A (en) * | 2017-11-14 | 2018-04-20 | 湖南艾博特机器人系统有限公司 | A kind of cell piece gaily decorated basket automatic material taking feeding machanism |
| CN208307817U (en) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | A kind of silicon wafer basket turnover device |
| CN111128826A (en) * | 2020-02-19 | 2020-05-08 | 无锡市江松科技有限公司 | LPCVD front silicon wafer operation device |
| CN212161776U (en) * | 2020-06-23 | 2020-12-15 | 无锡市江松科技有限公司 | Automatic working line for loading and unloading wafers of horizontal silicon wafer quartz boat |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104377154B (en) * | 2014-11-03 | 2017-11-10 | 江阴方艾机器人有限公司 | Tubular type PECVD graphite boat loading-unloading plates system and its technique |
| CN105185736B (en) * | 2015-08-20 | 2018-01-23 | 东莞市启天自动化设备有限公司 | A kind of full-automatic quartz boat charging ＆ discharging machine |
| CN206244011U (en) * | 2016-10-14 | 2017-06-13 | 宜都长江机械设备有限公司 | A kind of carrier and the streamline for shunting carrier |
| CN106252266B (en) * | 2016-10-26 | 2019-11-01 | 河北晶龙阳光设备有限公司 | It is a kind of for loading and unloading the handler of solar battery sheet in quartz boat |
| CN208157379U (en) * | 2017-12-29 | 2018-11-27 | 无锡市江松科技有限公司 | Silicon wafer diffusing quartz boat charging crane |
| CN207909900U (en) * | 2017-12-29 | 2018-09-25 | 无锡市江松科技有限公司 | Online groove type etching feeder |
-
2020
- 2020-06-23 CN CN202010582113.2A patent/CN111668146B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107934584A (en) * | 2017-11-14 | 2018-04-20 | 湖南艾博特机器人系统有限公司 | A kind of cell piece gaily decorated basket automatic material taking feeding machanism |
| CN208307817U (en) * | 2018-05-30 | 2019-01-01 | 天津环博科技有限责任公司 | A kind of silicon wafer basket turnover device |
| CN111128826A (en) * | 2020-02-19 | 2020-05-08 | 无锡市江松科技有限公司 | LPCVD front silicon wafer operation device |
| CN212161776U (en) * | 2020-06-23 | 2020-12-15 | 无锡市江松科技有限公司 | Automatic working line for loading and unloading wafers of horizontal silicon wafer quartz boat |
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| CN111668146A (en) | 2020-09-15 |
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Address after: No.208 Changjiang East Road, Shuofang, Xinwu District, Wuxi City, Jiangsu Province, 214000 Applicant after: Wuxi Jiangsong Technology Co.,Ltd. Address before: 214000 plot c20-2, phase V, Shuofang industrial concentration area, New District, Wuxi City, Jiangsu Province Applicant before: WUXI JIANGSONG SCIENCE AND TECHNOLOGY Co.,Ltd. |
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