CN211726765U - Probe card cleaning device - Google Patents

Probe card cleaning device Download PDF

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Publication number
CN211726765U
CN211726765U CN201922207817.7U CN201922207817U CN211726765U CN 211726765 U CN211726765 U CN 211726765U CN 201922207817 U CN201922207817 U CN 201922207817U CN 211726765 U CN211726765 U CN 211726765U
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China
Prior art keywords
motor
probe card
slider
lead screw
support column
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CN201922207817.7U
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Chinese (zh)
Inventor
李芳�
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Shenzhen Haosheng Precision Co ltd
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Shenzhen Haosheng Precision Co ltd
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Priority to CN201922207817.7U priority Critical patent/CN211726765U/en
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Abstract

The utility model discloses a probe card belt cleaning device relates to probe card washing field, comprises a workbench, the internally mounted of workstation has the second motor, and the output of second motor is connected with the revolving stage, the top of revolving stage is connected with the support column, and the top of support column installs first motor, the output of first motor is connected with the lead screw, and the outside of lead screw is provided with the slider. The utility model discloses a washing case that sets up, first motor, the lead screw, the slider, the lifter plate, spring and splint, the application motor drives the lead screw and rotates, make the slider move on the lead screw, the lift of lifter plate has been realized, make the probe card can get into to wash the case and wash, and application splint and spring, the staff of being convenient for fixes the probe card in the lifter plate below, make the staff need not contact with the washing liquid when wasing the probe card, the harm that the staff caused to the human body with the washing liquid contact has been avoided, and easy operation.

Description

Probe card cleaning device
Technical Field
The utility model relates to a probe card washs the field, specifically is a probe card belt cleaning device.
Background
The probe card is a kind of test interface, mainly test the bare chip, connect tester and chip through it, thus transmit the signal, finish the test to the chip parameter, the main purpose of the probe card is to directly contact with bond pad or lobe block on the chip on the probe card, draw the chip signal, cooperate with peripheral test instrument and software control to achieve the goal of measuring automatically, the probe card is applied before IC is not packed yet, use the probe to do the functional test to the bare chip, screen out the defective products, carry on the subsequent packaging engineering, therefore, it is one of the important processes that influences the manufacturing cost in IC manufacture considerably.
The probe card is often polluted after being used for many times, so that the using effect of the probe card is influenced, and the probe card is necessary to be cleaned, but the probe card needs to be manually put into an isopropyl acetone solution for cleaning when being cleaned, the cleaning is time-consuming and labor-consuming, the isopropyl acetone solution is harmful to a human body, the probe needs to be manually wiped dry after being cleaned, the operation is complex, and a worker can be stabbed by the probe in the wiping process.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a: in order to solve the problems that the probe card cleaning operation is complex and the probes are inconvenient to wipe manually in the prior art, the probe card cleaning device is provided.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a probe card belt cleaning device, includes the workstation, the internally mounted of workstation has the second motor, and the output of second motor is connected with the revolving stage, the top of revolving stage is connected with the support column, and the top of support column installs first motor, the output of first motor is connected with the lead screw, and the outside of lead screw is provided with the slider, one side at workstation top is connected with the washing case, and washs the internally mounted of case and have ultrasonic cleaner, wash one side of case and install the fan, and the input of fan and output all are connected with the tuber pipe, the one end of tuber pipe is connected with the filter tube, and the one end that the filter tube was kept away from to the tuber pipe is connected with the tuber pipe frame, the outside of tuber pipe frame is provided with the shower nozzle, one side of slider is connected with the connecting.
Preferably, the inside of support column has seted up the spout, and the inner wall phase-match of slider and spout, slider and spout sliding connection.
Preferably, the inside of slider is seted up with the screw hole of lead screw assorted, and the lead screw is kept away from the one end of first motor and is passed through the bearing and be connected with the support column.
Preferably, the two ends of the filter pipe are provided with external threads, and the inside of the air pipe is provided with internal threads matched with the external threads.
Preferably, the number of the spray heads is three, and the three groups of spray heads are all symmetrically arranged about the longitudinal central axis of the wind pipe frame.
Preferably, the both sides of lifter plate are connected with the fixed plate, and one side of fixed plate is connected with the spring, the one end that the fixed plate was kept away from to the spring is connected with splint, and the quantity of splint is two sets of.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses a washing case, first motor, lead screw, slider, lifter plate, spring and splint that set up, application motor drives the lead screw and rotates, makes the slider move on the lead screw, has realized the lift of lifter plate, makes the probe card can enter the washing case and wash, and application splint and spring, and the staff of being convenient for fixes the probe card below the lifter plate, makes the staff need not contact with the washing liquid when wasing the probe card, has avoided staff and washing liquid contact to the harm that the human body caused, and easy operation;
2. through the second motor, revolving stage, fan, filter tube, shower nozzle and the tuber pipe support that set up, application second motor drives the rotary disk rotation for the work piece that washs can be rotated to the air-dry position of shower nozzle, and application filter tube makes impurity in the wind that the fan blew off filtered, has reduced external impurity because of air-drying the harm that the adhesion caused the work piece on the work piece, and has solved the operation inconvenience of artifical wiping.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a cross-sectional view of the present invention;
FIG. 3 is an enlarged view of a portion of the structure of the present invention at A;
fig. 4 is a schematic structural view of the filter tube of the present invention.
In the figure: 1. a work table; 2. a first motor; 3. a support pillar; 4. a chute; 5. a screw rod; 6. a connecting plate; 7. a cleaning tank; 8. an ultrasonic cleaner; 9. a lifting plate; 10. a fixing plate; 11. a spring; 12. a splint; 13. a fan; 14. an air duct; 15. a filter tube; 16. an air pipe frame; 17. a spray head; 18. a rotating table; 19. a second motor; 20. a slider; 21. and (4) external threads.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model discloses in mention first motor (the model is OPG), second motor (the model is OPG) all can be obtained in market or private order.
Referring to fig. 1 to 4, a probe card cleaning apparatus includes a table 1, a second motor 19 installed inside the table 1, and the output end of the second motor 19 is connected with a rotating platform 18, the top of the rotating platform 18 is connected with a supporting column 3, and the top of the support column 3 is provided with a first motor 2, the output end of the first motor 2 is connected with a screw rod 5, and the outer side of the screw rod 5 is provided with a slide block 20, one side of the top of the worktable 1 is connected with a cleaning box 7, and the interior of the cleaning box 7 is provided with an ultrasonic cleaner 8, one side of the cleaning box 7 is provided with a fan 13, and the input end and the output end of the fan 13 are both connected with an air pipe 14, one end of the air pipe 14 is connected with a filter pipe 15, and the end of the air pipe 14 far away from the filter pipe 15 is connected with an air pipe frame 16, the outer side of the air pipe frame 16 is provided with a spray head 17, one side of the sliding block 20 is connected with a connecting plate 6, and the bottom of the connecting plate 6 is connected with a lifting plate 9.
According to the device, through the arrangement of the cleaning box 7, the first motor 2, the lead screw 5, the sliding block 20, the lifting plate 9, the spring 11 and the clamping plate 12, workers do not need to be in contact with cleaning liquid when cleaning the probe card, damage to human body operation caused by contact of the workers and the cleaning liquid is avoided, and the operation is simple; the inconvenience of manual wiping operation is solved by the second motor 19, the rotary table 18, the fan 13, the filter pipe 15, the spray head 17 and the blast pipe support 16.
Please refer to fig. 2, the inside of the supporting column 3 is provided with a sliding slot 4, the sliding block 20 is matched with the inner wall of the sliding slot 4, the sliding block 20 is connected with the sliding slot 4 in a sliding manner, and the sliding block 20 is matched with the sliding slot 4 to limit the movement of the sliding block 20 on the screw rod 5.
Please refer to fig. 2, a threaded hole matching with the screw rod 5 is formed inside the slider 20, and one end of the screw rod 5 far away from the first motor 2 is connected with the supporting column 3 through a bearing, and a rotating shaft is arranged inside the bearing.
Please refer to fig. 4, the two ends of the filtering pipe 15 are provided with external threads 21, the inside of the air pipe 14 is provided with internal threads matching with the external threads 21, and the inside of the filtering pipe 15 is provided with an activated carbon and PP cotton filtering layer.
Please refer to fig. 1, the number of the nozzles 17 is three, and the three groups of nozzles 17 are all symmetrically arranged about the longitudinal central axis of the wind pipe rack 16, and the three groups of nozzles 17 can rapidly dry the workpiece.
Please refer to fig. 3, two sides of the lifting plate 9 are connected with a fixing plate 10, one side of the fixing plate 10 is connected with a spring 11, one end of the spring 11 away from the fixing plate 10 is connected with two sets of clamping plates 12, the clamping plates 12 are welded with the spring 11, and the fixing plate 10 is welded with the lifting plate 9.
The working principle is as follows: when the device is used, the device is connected with an external power supply to obtain electric energy, the device can normally run, a workpiece is placed at the bottom of the lifting plate 9, the workpiece is fixed at the bottom of the lifting plate 9 through the clamping plate 12 and the spring 11, the second motor 19 is started, the second motor 19 drives the screw rod 5 to rotate, the screw rod 5 drives the sliding block 20 to move, the sliding block 20 drives the lifting plate 9 to descend through the connecting plate 6, so that the workpiece descends into the cleaning box 7, the ultrasonic cleaner 8 in the cleaning box 7 can clean probes on the workpiece in the cleaning box 7, after cleaning is finished, the first motor 2 is started to ascend the workpiece, the second motor 19 is started, the second motor 19 drives the rotating platform 18 to rotate, the workpiece is rotated to the position where the spray head is air dried, the fan 13 is started, the fan 13 conveys air filtered by the filter pipe 15 into the air pipe frame 16 through the air pipe 14, and then the workpiece is dried by a spray head 17 connected with an air pipe frame 16.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (6)

1. A probe card cleaning apparatus includes a stage (1), characterized in that: the automatic cleaning device is characterized in that a second motor (19) is arranged inside the workbench (1), the output end of the second motor (19) is connected with a rotating table (18), the top of the rotating table (18) is connected with a support column (3), a first motor (2) is arranged at the top of the support column (3), the output end of the first motor (2) is connected with a screw rod (5), a sliding block (20) is arranged outside the screw rod (5), a cleaning box (7) is connected to one side of the top of the workbench (1), an ultrasonic cleaner (8) is arranged inside the cleaning box (7), a fan (13) is arranged on one side of the cleaning box (7), the input end and the output end of the fan (13) are both connected with air pipes (14), one end of the air pipe (14) is connected with a filter pipe (15), and one end of the air pipe (14), far away from the filter pipe (15), is, the outer side of the air pipe frame (16) is provided with a spray head (17), one side of the sliding block (20) is connected with a connecting plate (6), and the bottom of the connecting plate (6) is connected with a lifting plate (9).
2. The apparatus of claim 1, wherein: the inside of support column (3) has been seted up spout (4), and the inner wall phase-match of slider (20) and spout (4), slider (20) and spout (4) sliding connection.
3. The apparatus of claim 1, wherein: threaded holes matched with the screw rods (5) are formed in the sliding blocks (20), and one ends, far away from the first motors (2), of the screw rods (5) are connected with the supporting columns (3) through bearings.
4. The apparatus of claim 1, wherein: and external threads (21) are arranged at two ends of the filter pipe (15), and internal threads matched with the external threads (21) are arranged in the air pipe (14).
5. The apparatus of claim 1, wherein: the number of the spray heads (17) is three, and the three groups of spray heads (17) are symmetrically arranged about the longitudinal central axis of the wind pipe frame (16).
6. The apparatus of claim 1, wherein: the both sides of lifter plate (9) are connected with fixed plate (10), and one side of fixed plate (10) is connected with spring (11), the one end that fixed plate (10) were kept away from in spring (11) is connected with splint (12), and the quantity of splint (12) is two sets of.
CN201922207817.7U 2019-12-11 2019-12-11 Probe card cleaning device Active CN211726765U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922207817.7U CN211726765U (en) 2019-12-11 2019-12-11 Probe card cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922207817.7U CN211726765U (en) 2019-12-11 2019-12-11 Probe card cleaning device

Publications (1)

Publication Number Publication Date
CN211726765U true CN211726765U (en) 2020-10-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922207817.7U Active CN211726765U (en) 2019-12-11 2019-12-11 Probe card cleaning device

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CN (1) CN211726765U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182265A (en) * 2020-12-23 2021-07-30 李厚平 Cleaning equipment for producing image sensor chip and using method thereof
CN115159587A (en) * 2022-07-21 2022-10-11 江苏先丰纳米材料科技有限公司 Preparation method of molybdenum trioxide nanosheet loaded ferroferric oxide magnetic nanoparticle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182265A (en) * 2020-12-23 2021-07-30 李厚平 Cleaning equipment for producing image sensor chip and using method thereof
CN115159587A (en) * 2022-07-21 2022-10-11 江苏先丰纳米材料科技有限公司 Preparation method of molybdenum trioxide nanosheet loaded ferroferric oxide magnetic nanoparticle

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