CN211718326U - Double-shaft fluid sensitive device based on resonator amplitude ratio detection - Google Patents
Double-shaft fluid sensitive device based on resonator amplitude ratio detection Download PDFInfo
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- CN211718326U CN211718326U CN201920549684.9U CN201920549684U CN211718326U CN 211718326 U CN211718326 U CN 211718326U CN 201920549684 U CN201920549684 U CN 201920549684U CN 211718326 U CN211718326 U CN 211718326U
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Abstract
The utility model discloses a double-shaft fluid sensitive device based on resonator amplitude ratio detection, which is characterized in that three-dimensional hair outside a plane is bonded at the geometric center of a middle-layer silicon microsensor, and the structure of the middle-layer silicon microsensor consists of a mass block base, four same weak coupling resonator groups and four same out-of-plane motion suppression elastic structures; wherein, the four same weak coupling resonator groups are symmetrically distributed in the upper, lower, left and right directions of the mass block base; the weak coupling resonator group is connected with the mass block base through an input straight beam of the secondary force amplification lever; the four same out-of-plane motion suppression elastic structures are symmetrically distributed in four directions of the upper left direction, the upper right direction, the lower right direction and the lower left direction of the mass block base, and the out-of-plane motion suppression elastic structures are connected with the mass block base through out-of-plane motion suppression elastic U-shaped beams. The utility model discloses a restrain elastic construction group with weak coupling resonator group and plane external motion and be symmetrical structure and arrange, realize that the biax of velocity of flow in the plane is sensitive.
Description
Technical Field
The utility model belongs to the technical field of micro-electromechanical system and microfluid measurement, concretely relates to can be used to the sensitive biax fluid sensing device based on syntonizer amplitude ratio detection of the interior fluid of biax plane.
Background
The micro-mechanical system (MEMS) is a micro device or system which integrates a micro sensor, a micro actuator, a micro mechanical mechanism, a signal processing and control circuit, a high-performance electronic integrated device, an interface, communication and a power supply into a whole by utilizing the traditional semiconductor process and materials, and has the characteristics of small volume, low cost, integration and the like. MEMS sensor all has extensive application in consumer electronics such as smart mobile phone, AR/VR, wearable, and the internet of things fields such as intelligent driving, intelligent mill, wisdom commodity circulation, intelligent house, environmental monitoring, wisdom medical treatment.
The hair flow velocity sensor is used for detecting the flow velocity of external microfluid, environment identification can be carried out by identifying surrounding flow field changes, such as identification of obstacles, moving bodies and the like in the environment, navigation, motion guidance, obstacle avoidance and the like under the condition of no vision can be carried out, and the hair flow velocity sensor is a novel MEMS sensor with huge application potential.
In recent years, research institutes at home and abroad have started to perform certain research on micro-mechanical hair flow velocity sensors. Mohsen Asadnia et al, a research of Nanyang university of science and Singapore-MIT, who jointly research center, developed a hair flow velocity sensor structure based on a micromechanical piezoelectric film PZT, which can realize sensitivity to external input flow velocity. However, most of the existing mechanisms develop a hair flow rate sensor with low relative sensitivity and poor practicability.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: in order to overcome the deficiency of the prior art, the utility model provides a biax fluid sensing device based on detection of syntonizer amplitude ratio with advantages such as relative sensitivity is high, the cross coupling coefficient is little.
The technical scheme is as follows: the utility model provides a biaxial fluid sensitive device based on detection of resonator amplitude ratio, the device is three-layer spatial structure, and the upper strata is the three-dimensional hair outside the plane, and the middle level is silicon microsensor structure, and the lower floor is the glass substrate, the structure of middle level silicon microsensor comprises a quality piece base, four the same weak coupling resonator group and four the same elastic structures of motion suppression outside the plane; wherein, the four same weak coupling resonator groups are symmetrically distributed in the upper, lower, left and right directions of the mass block base; the weak coupling resonator group is connected with the mass block base through an input straight beam of the secondary force amplification lever; the four same out-of-plane motion suppression elastic structures are symmetrically distributed in four directions of the upper left direction, the upper right direction, the lower right direction and the lower left direction of the mass block base, and the out-of-plane motion suppression elastic structures are connected with the mass block base through out-of-plane motion suppression elastic U-shaped beams.
Further, the weak coupling resonator group, wherein the first weak coupling resonator group is located on the left side of the mass block base, the second weak coupling resonator group is located on the upper side of the mass block base, the third weak coupling resonator group is located on the right side of the mass block base, and the fourth weak coupling resonator group is located on the lower side of the mass block base.
Further, the out-of-plane motion suppression elastic structure has a first out-of-plane motion suppression elastic structure located on the upper left side of the mass block base, a second out-of-plane motion suppression elastic structure located on the upper right side of the mass block base, a third out-of-plane motion suppression elastic structure located on the lower right side of the mass block base, and a fourth out-of-plane motion suppression elastic structure located on the lower left side of the mass block base.
Furthermore, the weak coupling resonator group consists of a coupling cross beam, two identical two-stage force amplification levers, two identical resonators and a driving detection structure thereof; the coupling cross beam is connected with the first anchor point through the first elastic straight beam and connected with the second anchor point through the second elastic straight beam;
the two same resonators and the driving detection structures thereof are symmetrically distributed at two ends of the coupling cross beam, wherein the first resonator is connected with the coupling cross beam through a first elastic U-shaped beam, is connected with a third anchor point through a second elastic U-shaped beam and is connected with a fourth anchor point through a first supporting straight beam; the second resonator is connected with the coupling cross beam through a third elastic U-shaped beam, connected with the fifth anchor point through a fourth elastic U-shaped beam and connected with the sixth anchor point through a second supporting straight beam;
the two identical two-stage force amplification levers are symmetrically distributed at two ends of the coupling cross beam, wherein the first two-stage force amplification lever is connected with the first resonator through the first output straight beam and is connected with the mass block base through the first input straight beam; the second two-stage force amplification lever is connected with the second resonator through the second output straight beam and is connected with the mass block base through the second input straight beam.
Furthermore, the resonator and the driving detection structure thereof are composed of a resonance mass block containing comb teeth, four driving comb tooth frames and two detection comb tooth frames; the four driving comb tooth frames are symmetrically distributed on the outer sides of the comb teeth of the resonance mass block, and the two detection comb tooth frames are symmetrically distributed on the inner sides of the comb teeth of the resonance mass block; the driving comb-tooth frame and the detection comb-tooth frame are fixed on the glass substrate and are respectively inserted with the comb teeth of the resonance mass block to form a driving comb-tooth group and a detection comb-tooth group.
Further, the out-of-plane motion-inhibiting elastic structure is composed of an anchor point and two out-of-plane motion-inhibiting elastic U-shaped beams.
Furthermore, the glass substrate consists of an electrode, a glass-silicon bonding anchor point and a metal lead; the electrodes comprise a common electrode, a carrier input electrode, a driving electrode and a detection electrode, and are respectively connected with the outer cutting layer protection structure of the gyroscope, the mass block base, the driving comb-tooth frame and the leading-out electrodes of the detection comb-tooth frame through metal leads.
Furthermore, the out-of-plane three-dimensional hair is made of a metal alloy material and is bonded to the geometric center of the middle-layer silicon micro-sensor. The solid hairs are arranged at the geometric center of the middle-layer silicon microsensor, so that the whole structure of the microsensor is symmetrically distributed, the realization of differential detection is facilitated, the mechanical sensitivity characteristics of an X axis and a Y axis are basically consistent, and the parameter design of a measurement and control circuit is simplified.
Further, the silicon micro sensor is bonded on the lower glass substrate through anchor points. The lower glass substrate is made of boron-based glass material, and a metal electrode lead is arranged on the glass substrate.
The working principle is as follows: applying an alternating current driving voltage with direct current bias on an input electrode connected with a driving comb rack of the weak coupling resonator group, wherein the resonant mass block can do simple harmonic vibration in the direction vertical to the supporting straight beam; measuring current vibration frequency and amplitude signals of the resonant mass block through an output electrode connected with the detection comb rack, and feeding back the signals to a control system to realize closed-loop locking of the natural frequency of the weak coupling resonator group;
when the sensor is arranged in a horizontal axis or vertical axis flow field in a plane, the three-dimensional hair can be subjected to the drag force from the horizontal axis or vertical axis of the flow field, so that the mass block base is driven to move along the direction of the horizontal axis or vertical axis; the deflection torque of the mass block base acts on the input end of a secondary force amplification lever arranged on a vertical shaft or a horizontal shaft, and the drag force acts on a supporting straight beam of the resonator after being amplified by the secondary force amplification lever; when the supporting straight beams of the resonator are acted by axial external force, the rigidity of the supporting straight beams is changed, and the rigidity change trends of the first supporting straight beam and the second supporting straight beam are opposite; when the external flow velocity is larger, the corresponding change of the rigidity of the resonator supporting straight beam is larger;
when the sensor is arranged in a horizontal axis or vertical axis flow field in a plane, the rigidity of the supporting beams of the resonator changes, and the rigidity change trends of the first supporting straight beam and the second supporting straight beam are opposite; when alternating current driving voltage with the frequency of the natural frequency of the weak coupling resonator group is applied to an input electrode connected with a driving comb rack of the weak coupling resonator group, the amplitude ratio of the first resonator and the second resonator can be changed due to the mode localization effect of the weak coupling resonator, and the amplitude ratio of the first resonator and the second resonator can be measured by measuring capacitance amplitude signals of the detection comb rack of the first resonator and the second resonator, so that the sensitivity to the external flow speed is realized.
The application mode of the driving voltages of the first weak coupling resonator group and the second weak coupling resonator group is a resonator in-phase motion mode, and the application mode of the driving voltages of the third weak coupling resonator group and the fourth weak coupling resonator group is a resonator in-phase motion mode.
The output signal of the horizontal axis of the sensor is the sum of the amplitude ratios of the first weak coupling resonator group and the third weak coupling resonator group, and the output signal of the vertical axis is the sum of the amplitude ratios of the second weak coupling resonator group and the fourth weak coupling resonator group. Such a signal output avoids the occurrence of a sensitivity nonlinear region theoretically.
Has the advantages that: the utility model discloses a, compare prior art, have following beneficial effect:
(1) the utility model can realize double-shaft sensitivity of flow velocity in the plane by arranging the weak coupling resonator group and the plane external motion inhibition elastic structure group in a symmetrical structure;
(2) the utility model adopts the two-stage force amplifying lever to effectively amplify the dragging force introduced by the external flow velocity, thereby improving the working performance of the sensor;
(3) the utility model discloses based on the mode localization effect of weak coupling syntonizer, adopt the amplitude ratio of syntonizer as output signal, greatly improved the relative sensitivity of signal detection;
(5) the two coaxial groups of weak coupling resonators work in an in-phase motion mode and an anti-phase motion mode respectively, and an output signal is the sum of the amplitude ratios of the two groups of weak coupling resonators, so that the occurrence of a sensitivity nonlinear region is avoided theoretically.
(6) The utility model discloses a arrange three-dimensional hair at middle level silicon microsensor's geometric center for sensor overall structure is the symmetric distribution, is favorable to the realization of difference detection, and makes the mechanical sensitivity characteristic of X axle, Y axle unanimous basically, thereby simplifies the parametric design of observing and controlling circuit
Drawings
Fig. 1 is a schematic view of the overall mechanical structure of the present invention;
fig. 2 is a schematic diagram of a weakly coupled resonator group according to the present invention;
FIG. 3 is a schematic view of the out-of-plane motion-suppressing elastic structure of the present invention;
fig. 4 is a schematic diagram of a glass substrate signal lead according to the present invention.
Detailed Description
The technical solution of the present invention will be further explained with reference to the accompanying drawings.
As shown in fig. 1, the micro-mechanical hair flow velocity sensor based on the mode localization effect of the weak coupling resonator provided by the utility model is a three-layer three-dimensional structure, the upper layer is the out-of-plane three-dimensional hair 1, the middle layer is a silicon micro-sensor structure, and the lower layer is a glass substrate. The out-of-plane three-dimensional hair 1 is made of a metal alloy material and is bonded to the geometric center of the middle-layer silicon microsensor; the silicon micro sensor is bonded on the lower glass substrate through anchor points; the lower glass substrate is made of boron-based glass material, and a metal electrode lead is arranged on the glass substrate.
The structure of the middle-layer silicon microsensor consists of a mass block base 2, four same weak coupling resonator groups and four same out-of-plane motion suppression elastic structures; four identical weak coupling resonator groups are symmetrically distributed in the upper direction, the lower direction, the left direction and the right direction of the mass block base and are used for sensing the change of the external flow velocity. The weak coupling resonator group is connected with the mass block base through an input straight beam of the two-stage force amplification lever, wherein the first weak coupling resonator group 4-1 is located on the left side of the mass block base 2, the second weak coupling resonator group 4-2 is located on the upper side of the mass block base 2, the third weak coupling resonator group 4-3 is located on the right side of the mass block base 2, and the fourth weak coupling resonator group 4-4 is located on the lower side of the mass block base 2. The four identical out-of-plane motion suppression elastic structures are symmetrically distributed in four directions, namely, the upper left direction, the upper right direction, the lower right direction and the lower left direction of the mass block base 2 and are used for suppressing out-of-plane motion of the mass block base 2. The out-of-plane motion suppression elastic structure is connected with the mass block base 2 through an out-of-plane motion suppression elastic U-shaped beam, wherein the first out-of-plane motion suppression elastic structure 3-1 is located on the left upper side of the mass block base 2, the second out-of-plane motion suppression elastic structure 3-2 is located on the right upper side of the mass block base 2, the third out-of-plane motion suppression elastic structure 3-3 is located on the right lower side of the mass block base 2, and the fourth out-of-plane motion suppression elastic structure 3-4 is located on the left lower side of the mass block base 2.
The utility model provides a first weak coupling resonator group 4-1, second weak coupling resonator group 4-2, third weak coupling resonator group 4-3, fourth weak coupling resonator group 4-4 structure identical and adjacent interval are 90 degrees. As shown in fig. 2, specifically, taking the first weakly coupled resonator group 4-1 as an example, the first weakly coupled resonator group 4-1 is composed of a coupling cross beam 4013, two identical two-stage force amplification levers 401a and 401b, two identical resonators 409a and 409b, and a driving detection structure thereof. The coupling cross beam 4013 is connected to the first anchor point 404a via the first elastic straight beam 403a and to the second anchor point 404b via the second elastic straight beam 403 b. Two identical resonators 409a and 409b and driving detection structures thereof are symmetrically distributed at two ends of a coupling cross beam 4013 and are used for sensing drag force introduced by external flow velocity, wherein the first resonator 409a is connected with the coupling cross beam 4013 through a first elastic U-shaped beam 402a, is connected with a third anchor point 4010a through a second elastic U-shaped beam 402c, and is connected with a fourth anchor point 405a through a first supporting straight beam 406 a; the second resonator 409b is connected to the coupling cross beam 4013 through a third flexible U-beam 402b, to a fifth anchor point 4010b through a fourth flexible U-beam 402d, and to a sixth anchor point 405b through a second supporting straight beam 406 b. The two identical two-stage force amplification levers 401a and 401b are symmetrically distributed at two ends of the coupling cross beam 4013 and are used for amplifying the drag force introduced by the external flow velocity, wherein the first two-stage force amplification lever 401a is connected with the first resonator 409a through the first output straight beam 4011a and is connected with the mass block base 2 through the first input straight beam 4012 a; the second two-stage force amplification lever 401b is connected to the second resonator 409b via the second output straight beam 4011b and to the proof mass base 2 via the second input straight beam 4012 b.
The utility model provides an its drive of first syntonizer 409a detects the structure and its drive of second syntonizer 409b detects the structure identical. Specifically, taking the first resonator 409a and the driving detection structure thereof as an example, the driving detection structure of the first resonator 409a is composed of a resonant mass 409a including comb teeth, four driving comb-tooth frames 407a, four driving comb-tooth frames 407b, four driving comb-tooth frames 407c, four driving comb-tooth frames 407d, and two detection comb- tooth frames 408a and 408 b. The four driving comb- tooth frames 407a, 407b, 407c, and 407d are symmetrically distributed on the outer side of the comb teeth of the resonant mass 409a, and the two detection comb- tooth frames 408a and 408b are symmetrically distributed on the inner side of the comb teeth of the resonant mass 409 a. The driving comb-tooth frame 407a, the four driving comb-tooth frames 407b, the four driving comb-tooth frames 407c, the four driving comb-tooth frames 407d, the detection comb-tooth frame 408a and the detection comb-tooth frame 408b are all fixed on the glass substrate, and are respectively inserted into the comb teeth of the resonant mass block 409a to form a driving comb-tooth group and a detection comb-tooth group. The driving comb tooth group is used for providing alternating current driving force for driving the resonant mass block, and the detection comb tooth group is used for detecting the vibration displacement of the resonant mass block.
The utility model provides a first plane external motion restraines elastic construction 3-1, second plane external motion restraines elastic construction 3-2, third plane external motion restraines elastic construction 3-3, fourth plane external motion restraines elastic construction 3-4 structure identical and adjacent interval is 90 degrees. As shown in fig. 3, specifically taking the first out-of-plane motion-inhibiting elastic structure 3-1 as an example, the first out-of-plane motion-inhibiting elastic structure 3-1 is composed of an anchor point 301 and two out-of-plane motion-inhibiting elastic U-beams 302a, 302 b.
The electrode distribution and signal lead on the glass substrate of the present invention are shown in fig. 4. The electrode 507a, the electrode 508a, the electrode 5011a, the electrode 5012a, the electrode 507b, the electrode 508b, the electrode 5011b and the electrode 5012b are respectively bonded with the driving comb-tooth frame 407a, the driving comb-tooth frame 407b, the driving comb-tooth frame 407c, the driving comb-tooth frame 407d, the driving comb-tooth frame 407e, the driving comb-tooth frame 407f, the driving comb-tooth frame 407g and the driving comb-tooth frame 407h in the first weak coupling resonator group 4-1, and are connected with the extraction electrode 502a, the electrode 501a, the electrode 502b and the electrode 501b through signal leads; the electrode 509a, the electrode 5010a, the electrode 509b and the electrode 5010b are respectively bonded with a detection comb-tooth frame 408a, a detection comb-tooth frame 408b, a detection comb-tooth frame 408c and a detection comb-tooth frame 408d in the first weakly coupled resonator group 401, and are connected with the extraction electrode 503a, the electrode 504a, the electrode 503b and the electrode 504b through signal leads; the electrode 507c, the electrode 508c, the electrode 5011c, the electrode 5012c, the electrode 507d, the electrode 508d, the electrode 5011d and the electrode 5012d are respectively bonded with the driving comb-tooth frame 407a, the driving comb-tooth frame 407b, the driving comb-tooth frame 407c, the driving comb-tooth frame 407d, the driving comb-tooth frame 407e, the driving comb-tooth frame 407f, the driving comb-tooth frame 407g and the driving comb-tooth frame 407h in the second weak coupling resonator group 4-2, and are connected with the extraction electrode 502c, the electrode 501c, the electrode 502d and the electrode 501d through signal leads; the electrode 509c, the electrode 5010c, the electrode 509d and the electrode 5010d are respectively bonded with the detection comb-tooth frame 408a, the detection comb-tooth frame 408b, the detection comb-tooth frame 408c and the detection comb-tooth frame 408d in the second weakly coupled resonator group 4-2, and are connected with the extraction electrode 503c, the electrode 504c, the electrode 503d and the electrode 504d through signal leads; the electrode 507e, the electrode 508e, the electrode 5011e, the electrode 5012e, the electrode 507f, the electrode 508f, the electrode 5011f and the electrode 5012f are respectively bonded with the driving comb-tooth frame 407a, the driving comb-tooth frame 407b, the driving comb-tooth frame 407c, the driving comb-tooth frame 407d, the driving comb-tooth frame 407e, the driving comb-tooth frame 407f, the driving comb-tooth frame 407g and the driving comb-tooth frame 407h in the third weak coupling resonator group 4-3, and are connected with the extraction electrode 502e, the electrode 501e, the electrode 502f and the electrode 501f through signal leads; the electrode 509e, the electrode 5010e, the electrode 509f and the electrode 5010f are respectively bonded with a detection comb-tooth frame 408a, a detection comb-tooth frame 408b, a detection comb-tooth frame 408c and a detection comb-tooth frame 408d in the third weakly coupled resonator group 4-3, and are connected with the extraction electrode 503e, the electrode 504e, the electrode 503f and the electrode 504f through signal leads; the electrode 507g, the electrode 508g, the electrode 5011g, the electrode 5012g, the electrode 507h, the electrode 508h, the electrode 5011h and the electrode 5012h are respectively bonded with the driving comb-tooth frame 407a, the driving comb-tooth frame 407b, the driving comb-tooth frame 407c, the driving comb-tooth frame 407d, the driving comb-tooth frame 407e, the driving comb-tooth frame 407f, the driving comb-tooth frame 407g and the driving comb-tooth frame 407h in the fourth weak coupling resonator group 4-4, and are connected with the extraction electrode 502g, the electrode 501g, the electrode 502h and the electrode 501h through signal leads; the electrode 509g, the electrode 5010g, the electrode 509h, and the electrode 5010h are bonded to the detection comb-tooth holder 408a, the detection comb-tooth holder 408b, the detection comb-tooth holder 408c, and the detection comb-tooth holder 408d in the fourth weakly coupled resonator group 4-4, respectively, and are connected to the extraction electrode 503g, the electrode 504g, the electrode 503h, and the electrode 504h via signal leads.
The utility model provides a when the sensor was arranged in the horizontal axis in the plane or the vertical axis flow field, three-dimensional hair can receive the drag power that comes from the horizontal axis in flow field or vertical axis to drive the motion of quality piece base along horizontal axis or vertical axis direction. The deflection torque of the mass block base acts on the input end of a secondary force amplification lever arranged on a vertical shaft or a horizontal shaft, and the drag force acts on a supporting straight beam of the resonator after being amplified by the secondary force amplification lever. When the supporting straight beams of the resonator are acted by axial external force, the rigidity of the supporting straight beams is changed, and the rigidity change trends of the first supporting straight beam and the second supporting straight beam are opposite. The larger the external flow velocity is, the larger the corresponding change of the rigidity of the straight beam supported by the resonator is. When alternating current driving voltage with the frequency of the natural frequency of the weak coupling resonator group is applied to an input electrode connected with a driving comb rack of the weak coupling resonator group, the amplitude ratio of the first resonator and the second resonator can be changed due to the mode localization effect of the weak coupling resonator, and the measurement of the amplitude ratio of the first resonator and the second resonator can be realized by measuring capacitance amplitude signals of the detection comb rack of the first resonator and the second resonator, so that the sensitivity to the external flow velocity is realized.
According to the vibration mechanics analysis, the dynamic equation of the weak coupling resonator group is as follows:
wherein m is1And m2Is the mass of the resonant mass, c1And c2For the damping coefficient, k, to which the resonant mass is subjected1And k2For the supporting stiffness of the resonator, kcFor the coupling stiffness between the first resonator and the second resonator, Δ k1And Δ k2Variation of the supporting stiffness of the first resonator and the second resonator, respectively, F1And F2Is the external driving force to which the resonator is subjected. The above formula is the utility model provides a forced vibration equation based on two resonance quality pieces in the weak coupling resonator group.
Solving the equation, and taking the sum of the amplitude ratios of the two coaxial groups of weakly coupled resonators as an output signal, the total amplitude ratio of the horizontal axis (or the vertical axis) can be obtained as follows:
in the formula etainAmplitude ratio of in-phase mode, ηantiIs the amplitude ratio of the anti-phase mode. According to the deduction, when the micro-mechanical hair flow velocity sensor based on the mode localization effect of the weak coupling resonator is arranged in a horizontal axis (or vertical axis) flow field in a plane, the amplitude ratio of the weak coupling resonator group can be obtained through calculation by detecting the capacitance of the capacitance electrode plate group, and the flow velocity of an external fluid is reversely deduced, so that the sensitivity to the flow velocity in an external input plane is realized.
The embodiments of the present invention have been described with reference to the accompanying drawings, but these descriptions should not be construed as limiting the scope of the present invention, which is defined by the appended claims, and any modification based on the claims is the scope of the present invention.
Claims (9)
1. The utility model provides a biax fluid sensing device based on detection of resonator amplitude ratio, the device is three-layer spatial structure, and the upper strata is three-dimensional hair outside the plane, and the middle level is the silicon microsensor, and the lower floor is the glass substrate, its characterized in that: the silicon microsensor consists of a mass block base, four identical weak coupling resonator groups and four identical out-of-plane motion suppression elastic structures; wherein, the four same weak coupling resonator groups are symmetrically distributed in the upper, lower, left and right directions of the mass block base; the weak coupling resonator group is connected with the mass block base through an input straight beam of the secondary force amplification lever; the four same out-of-plane motion suppression elastic structures are symmetrically distributed in four directions of the upper left direction, the upper right direction, the lower right direction and the lower left direction of the mass block base, and the out-of-plane motion suppression elastic structures are connected with the mass block base through out-of-plane motion suppression elastic U-shaped beams.
2. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: and the weak coupling resonator group comprises a first weak coupling resonator group, a second weak coupling resonator group, a third weak coupling resonator group and a fourth weak coupling resonator group, wherein the first weak coupling resonator group is positioned on the left side of the mass block base, the second weak coupling resonator group is positioned on the upper side of the mass block base, the third weak coupling resonator group is positioned on the right side of the mass block base, and the fourth weak coupling resonator group is positioned on the lower side of the mass.
3. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the out-of-plane motion suppression elastic structure comprises a first out-of-plane motion suppression elastic structure, a second out-of-plane motion suppression elastic structure, a third out-of-plane motion suppression elastic structure and a fourth out-of-plane motion suppression elastic structure, wherein the first out-of-plane motion suppression elastic structure is located on the upper left side of the mass block base, the second out-of-plane motion suppression elastic structure is located on the upper right side of the mass block base, the third out-of-plane motion suppression elastic.
4. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the weak coupling resonator group consists of a coupling cross beam, two identical two-stage force amplification levers, two identical resonators and a driving detection structure thereof; the coupling cross beam is connected with the first anchor point through the first elastic straight beam and connected with the second anchor point through the second elastic straight beam;
the two same resonators and the driving detection structures thereof are symmetrically distributed at two ends of the coupling cross beam, wherein the first resonator is connected with the coupling cross beam through a first elastic U-shaped beam, is connected with a third anchor point through a second elastic U-shaped beam and is connected with a fourth anchor point through a first supporting straight beam; the second resonator is connected with the coupling cross beam through a third elastic U-shaped beam, connected with the fifth anchor point through a fourth elastic U-shaped beam and connected with the sixth anchor point through a second supporting straight beam;
the two identical two-stage force amplification levers are symmetrically distributed at two ends of the coupling cross beam, wherein the first two-stage force amplification lever is connected with the first resonator through the first output straight beam and is connected with the mass block base through the first input straight beam; the second two-stage force amplification lever is connected with the second resonator through the second output straight beam and is connected with the mass block base through the second input straight beam.
5. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 4, wherein: the resonator and the driving detection structure thereof are composed of a resonance mass block containing comb teeth, four driving comb tooth frames and two detection comb tooth frames; the four driving comb tooth frames are symmetrically distributed on the outer sides of the comb teeth of the resonance mass block, and the two detection comb tooth frames are symmetrically distributed on the inner sides of the comb teeth of the resonance mass block; the driving comb-tooth frame and the detection comb-tooth frame are fixed on the glass substrate and are respectively inserted with the comb teeth of the resonance mass block to form a driving comb-tooth group and a detection comb-tooth group.
6. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the out-of-plane motion-inhibiting elastic structure consists of an anchor point and two out-of-plane motion-inhibiting elastic U-shaped beams.
7. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the glass substrate consists of electrodes, glass-silicon bonding anchor points and metal leads; the electrodes comprise a common electrode, a carrier input electrode, a driving electrode and a detection electrode, and are respectively connected with the outer cutting layer protection structure of the gyroscope, the mass block base, the driving comb-tooth frame and the leading-out electrodes of the detection comb-tooth frame through metal leads.
8. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the out-of-plane three-dimensional hair is made of a metal alloy material and is bonded at the geometric center of the silicon micro sensor.
9. The dual-axis fluid sensor based on resonator amplitude ratio detection of claim 1, wherein: the silicon micro sensor is bonded on the lower glass substrate through anchor points; the lower glass substrate is made of boron-based glass material, and a metal electrode lead is arranged on the glass substrate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975577A (en) * | 2019-04-22 | 2019-07-05 | 东南大学 | Micromechanics hair flow sensor and its operation method based on weak coupling resonator |
| CN113092817A (en) * | 2021-03-03 | 2021-07-09 | 南京理工大学 | High-precision and wide-range acceleration sensor with switchable detection modes and control method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975577A (en) * | 2019-04-22 | 2019-07-05 | 东南大学 | Micromechanics hair flow sensor and its operation method based on weak coupling resonator |
| CN109975577B (en) * | 2019-04-22 | 2024-01-26 | 东南大学 | Micromechanical hair flow velocity sensor based on weakly coupled resonator and operation method thereof |
| CN113092817A (en) * | 2021-03-03 | 2021-07-09 | 南京理工大学 | High-precision and wide-range acceleration sensor with switchable detection modes and control method thereof |
| CN113092817B (en) * | 2021-03-03 | 2023-04-07 | 南京理工大学 | High-precision and wide-range acceleration sensor with switchable detection modes and control method thereof |
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