CN211717496U - High-precision measuring equipment - Google Patents
High-precision measuring equipment Download PDFInfo
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- CN211717496U CN211717496U CN202020595023.2U CN202020595023U CN211717496U CN 211717496 U CN211717496 U CN 211717496U CN 202020595023 U CN202020595023 U CN 202020595023U CN 211717496 U CN211717496 U CN 211717496U
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Abstract
A high precision measurement device comprising: the device comprises a base, a bottom plate, a cross beam, an X-axis transmission group, a Y-axis transmission group, a Z-axis transmission group, a workbench, a measurement assembly, a control assembly and a power supply. According to the high-precision measuring equipment, the X-axis transmission set and the Y-axis transmission set independently move, and the superposition of errors is avoided; the X-axis transmission group is arranged on the side surface of the cross beam, so that the cantilever distance of the Z-axis transmission group is reduced; meanwhile, the transmission connection on the X-axis transmission set and the Y-axis transmission set adopts steel sheet connection, so that the transmission rigidity is kept, and the error of the movement of the screw rod is offset.
Description
Technical Field
The utility model relates to a measuring technical field especially relates to a high accuracy measuring equipment.
Background
In traditional gantry structure measuring equipment, the X axis is arranged on the Y axis, and the X axis can move along with the Y axis when the Y axis moves, so that errors in the X axis direction are superposed, and the precision of the X axis cannot be guaranteed to be in the most perfect state.
In other traditional gantry structure measuring equipment, an X-axis transmission set is mostly arranged on a cross beam, and the distance between the transmission centers of a Z axis and the X axis is far, so that a lever structure is formed, and the transmission of the slight error of the X axis to the Z axis can be further amplified.
In other conventional gantry structure measuring devices, the transmission structures are all rigid connection structures, and one of the disadvantages of the structure is that radial errors on the screw rod can be directly transmitted to the whole transmission structure, so that the errors of the whole transmission structure are increased.
It can be seen that the prior art has at least the following disadvantages: the traditional gantry structure measuring equipment is low in precision and large in error.
Therefore, it is necessary to provide a technical means to solve the above-mentioned drawbacks.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's defect, provide a high accuracy measuring equipment to traditional gantry structure measuring equipment precision is low among the solution prior art, the problem that the error is big.
The utility model discloses a realize like this, a high accuracy measuring equipment, include:
the base is used for mounting each part;
the bottom plate is used for mounting each part; the bottom plate is arranged on the base;
the beam is used for mounting the X-axis transmission set; the cross beam is arranged on the bottom plate;
the X-axis transmission set is used for driving the Z-axis transmission set to move along the X-axis direction; the X-axis transmission group is arranged on the cross beam;
the Y-axis transmission set is used for driving the workbench to move along the Y-axis direction; the Y-axis transmission group is arranged on the bottom plate;
the Z-axis transmission set is used for driving the measuring assembly to move along the Z-axis direction; the Z-axis transmission group is arranged on the X-axis transmission group;
the workbench is used for placing an object to be measured; the workbench is arranged on the Y-axis transmission set;
a measuring assembly for measuring an object to be measured; the measuring assembly is arranged on the Z-axis transmission set and is positioned above the workbench;
the control assembly is used for controlling the work of each part; the control assembly is arranged on the base and is respectively connected with the X-axis transmission set, the Y-axis transmission set, the Z-axis transmission set and the measuring assembly;
the power supply is used for supplying power to all parts; the power supply is arranged on the base and is respectively connected with the X-axis transmission group, the Y-axis transmission group, the Z-axis transmission group, the measurement assembly and the control assembly.
Preferably, the X-axis transmission set includes: the X-axis motor, the X-axis motor fixing seat, the X-axis transmission guide rail, the X-axis transmission lead screw, the X-axis transmission connecting block, the X-axis guide block, the X-axis induction block, the first X-axis limit inductor and the second X-axis limit inductor, wherein the beam comprises an X-axis motor mounting groove, the X-axis motor mounting groove is positioned on the lateral wall of the beam, the X-axis motor is arranged in the X-axis motor mounting groove, the X-axis motor fixing seat is fixed on the lateral wall of the beam and is connected with the X-axis motor, the X-axis transmission guide rail is arranged on the lateral wall of the beam and is parallel to the X-axis motor mounting groove, the X-axis transmission lead screw is arranged in the X-axis motor mounting groove and is connected with the X-axis transmission connecting block, the X-axis guide block is arranged on the bottom surface of the X-axis transmission connecting block and is supported on the X-axis transmission guide rail, the X-axis induction block is connected with the X-axis transmission connecting block and is located above the top of the beam, and the first X-axis limiting inductor and the second X-axis limiting inductor are respectively arranged on two sides of the top of the beam and parallel to the X-axis transmission guide rail.
Preferably, the X-axis transmission set further comprises: the X-axis connecting device comprises a first X-axis connecting flange, an X-axis connecting steel sheet and a second X-axis connecting flange, wherein the first X-axis connecting flange is arranged on the bottom surface of an X-axis transmission connecting block, the second X-axis connecting flange is sleeved on an X-axis transmission screw rod and connected with the X-axis transmission screw rod, and two ends of the X-axis connecting steel sheet are respectively connected with the first X-axis connecting flange and the side wall of the second X-axis connecting flange.
Preferably, the Y-axis transmission set includes: y axle motor, Y axle motor fixing base, Y axle transmission guide rail, Y axle transmission lead screw and Y axle guide block, wherein, the bottom plate includes Y axle motor mounting groove, Y axle motor mounting groove is located the bottom plate top surface, Y axle motor set up in the Y axle motor mounting groove, Y axle motor fixing base is fixed in the bottom plate top surface and with the Y axle motor is connected, Y axle transmission guide rail set up in on the bottom plate top surface and with Y axle motor mounting groove is parallel, Y axle transmission lead screw set up in the Y axle motor mounting groove and with the workstation is connected, Y axle guide block set up in the workstation bottom surface just support in on the Y axle transmission guide rail.
Preferably, the Y-axis transmission set further includes: the Y-axis transmission device comprises a first Y-axis connection flange, a Y-axis connection steel sheet and a second Y-axis connection flange, wherein the first Y-axis connection flange is arranged on the bottom surface of the workbench, the second Y-axis connection flange is sleeved on the Y-axis transmission screw rod and connected with the Y-axis transmission screw rod, and two ends of the Y-axis connection steel sheet are respectively connected with the side walls of the first Y-axis connection flange and the second Y-axis connection flange.
Preferably, the Z-axis transmission set includes: z axle mounting panel, Z axle motor fixing base, Z axle transmission guide rail, Z axle transmission lead screw, determine module mounting panel, Z axle guide block, first Z axle spacing inductor, second Z axle spacing inductor and determine module mounting bracket, wherein, the Z axle mounting panel with X axle transmission connecting block among the X axle transmission group is connected, the Z axle motor fixing base set up in on the Z axle mounting panel, the Z axle motor set up in on the Z axle motor fixing base, the Z axle transmission guide rail set up in on the Z axle mounting panel, the Z axle transmission lead screw respectively with the Z axle motor with the determine module mounting panel is connected, the Z axle guide block set up in determine module mounting panel bottom surface and support in on the Z axle transmission guide rail, first Z axle spacing inductor and the second Z axle spacing inductor set up respectively in Z axle mounting panel both sides and the line of the two is parallel with the Z axle transmission guide rail, the detection assembly mounting frame is arranged on the detection assembly mounting plate.
Preferably, the work table includes: the bottom surface of the workbench underframe is connected with a Y-axis guide block in the Y-axis transmission set, the bottom of the support block is connected with the workbench underframe, the top of the support block is connected with the workbench flat plate, and the glass is arranged in a groove on the workbench flat plate.
Preferably, the measuring assembly comprises: the detection lens is arranged on a detection component mounting frame in the Z-axis transmission group, the guide rail plate is fixed on the side wall of the cross beam and is positioned between the worktable underframe and the worktable flat plate in the worktable, the guide rail and the drag chain are arranged on the guide rail plate, the guide rail is arranged along the X-axis direction, the drag chain is connected with the extension plate, the bottom of the guide block is supported on the guide rail, and the top of the guide block is connected with the extension plate, the illuminating lamp is arranged on the extension plate and positioned between the workbench underframe and the workbench flat plate, the Z-axis transmission set controls the detection lens to move in the X-axis direction and the Z-axis direction, and the tow chain controls the illuminating lamp to move in the X-axis direction along the guide rail and is positioned under the detection lens.
According to the high-precision measuring equipment, the X-axis transmission set and the Y-axis transmission set independently move, and the superposition of errors is avoided; the X-axis transmission group is arranged on the side surface of the cross beam, so that the cantilever distance of the Z-axis transmission group is reduced; meanwhile, the transmission connection on the X-axis transmission set and the Y-axis transmission set adopts steel sheet connection, so that the transmission rigidity is kept, and the error of the movement of the screw rod is offset.
Drawings
Fig. 1 is a schematic diagram of an overall structure of a high-precision measurement device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an X-axis transmission set in a high-precision measuring apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an X-axis transmission set in a high-precision measuring apparatus according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a Y-axis transmission set in a high-precision measuring apparatus according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a Y-axis transmission set in a high-precision measurement device according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a Z-axis transmission set in a high-precision measurement device according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a workbench in a high-precision measuring device according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a measuring assembly in a high-precision measuring device according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a part of a measuring component in a high-precision measuring device according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.
Referring to fig. 1-9, in an embodiment of the present application, the present application provides a high precision measurement apparatus, including: the base 100, the bottom plate 200, the cross beam 300, the X-axis transmission set 400, the Y-axis transmission set 500, the Z-axis transmission set 600, the worktable 700, the measuring assembly 800, the control assembly (not shown), and the power supply (not shown), which will be described in detail below.
Referring to fig. 1-9, in an embodiment of the present application, the present application provides a high precision measurement apparatus, including:
a base 100 for mounting various parts;
a base plate 200 for mounting various parts; the base plate 200 is disposed on the base 100;
a cross beam 300 for mounting an X-axis transmission set 400; the cross beam 300 is arranged on the bottom plate 200;
the X-axis transmission set 400 is used for driving the Z-axis transmission set 600 to move along the X-axis direction; the X-axis transmission set 400 is disposed on the cross beam 300;
a Y-axis transmission set 500 for driving the table 700 to move along the Y-axis direction; the Y-axis transmission set 500 is disposed on the base plate 200;
the Z-axis transmission set 600 is used for driving the measurement assembly 800 to move along the Z-axis direction; the Z-axis transmission set 600 is disposed on the X-axis transmission set 400;
a table 700 for placing an object to be measured; the worktable 700 is disposed on the Y-axis transmission set 500;
a measuring assembly 800 for measuring an object to be measured; the measuring assembly 800 is disposed on the Z-axis transmission set 600 and above the worktable 700;
the control assembly is used for controlling the work of each part; the control component is disposed on the base 100 and is respectively connected to the X-axis transmission set 400, the Y-axis transmission set 500, the Z-axis transmission set 600 and the measurement component 800;
the power supply is used for supplying power to all parts; the power supply is arranged on the base 100 and is respectively connected with the X-axis transmission set 400, the Y-axis transmission set 500, the Z-axis transmission set 600, the measurement component 800 and the control component.
When an object to be measured is measured, firstly, the object to be measured is placed on a workbench, and the control assembly controls the X-axis transmission set 400 to control the Z-axis transmission set 600 to move along the X-axis direction and be positioned on the same Y-axis direction straight line with the object to be measured; the control assembly then controls the Y-axis drive train 500. So that the worktable 700 is controlled to move along the Y-axis direction and is positioned right below the Z-axis transmission set 600; then the control component controls the Z-axis transmission set 600 to control the measurement component 800 to move along the Z-axis direction, so that the distance between the measurement component 800 and the object to be measured reaches a preset distance; and then the control assembly controls the measuring assembly 800 to measure the object to be measured.
Referring to fig. 1-9, in the embodiment of the present application, the X-axis transmission set 400 includes: an X-axis motor 401, an X-axis motor fixing seat 402, an X-axis transmission guide rail 403, an X-axis transmission screw rod 404, an X-axis transmission connecting block 405, an X-axis guide block 406, an X-axis induction block 407, a first X-axis limit inductor 408 and a second X-axis limit inductor 409, wherein the beam 300 comprises an X-axis motor 401 mounting groove, the X-axis motor 401 mounting groove is positioned on the side wall of the beam 300, the X-axis motor 401 is arranged in the X-axis motor 401 mounting groove, the X-axis motor fixing seat 402 is fixed on the side wall of the beam 300 and connected with the X-axis motor 401, the X-axis transmission guide rail 403 is arranged on the side wall of the beam 300 and parallel to the X-axis motor 401 mounting groove, the X-axis transmission screw rod 404 is arranged in the X-axis motor 401 mounting groove and connected with the X-axis transmission connecting block 405, the X-axis guide block 406 is arranged on the bottom surface of the X-axis transmission connecting block 405 and, the Z-axis transmission group 600 is connected with the X-axis transmission connecting block 405, the X-axis sensing block 407 is connected with the X-axis transmission connecting block 405 and located above the top of the cross beam 300, the first X-axis limiting sensor 408 and the second X-axis limiting sensor 409 are respectively arranged on two sides of the top of the cross beam 300, and connecting lines of the first X-axis limiting sensor and the second X-axis limiting sensor are parallel to the X-axis transmission guide rail 403.
In this embodiment, when the movement of the Z-axis transmission set 600 in the X-axis direction needs to be adjusted, the control component sends a control command to the X-axis motor 401, and the X-axis motor 401 controls the X-axis transmission screw rod 404 to move and drives the X-axis transmission connection block 405 to move on the X-axis transmission guide rail 403, so as to adjust the position of the Z-axis transmission set 600 on the side wall of the cross beam 300 and the position of the X-axis sensing block 407 on the top of the cross beam 300. When the X-axis sensing block 407 reaches the edge positions of the two sides of the top of the beam 300, the first X-axis limit sensor 408 and the second X-axis limit sensor 409 sense the X-axis sensing block 407 respectively, and feed back the X-axis sensing block 407 to the control module, and the control module controls the X-axis motor 401 to stop moving or controls the X-axis transmission connection block 405 to move in the reverse direction.
Referring to fig. 1-9, in the embodiment of the present application, the X-axis transmission set 400 further includes: the X-axis connecting device comprises a first X-axis connecting flange 410, an X-axis connecting steel sheet 411 and a second X-axis connecting flange 412, wherein the first X-axis connecting flange 410 is arranged on the bottom surface of an X-axis transmission connecting block 405, the second X-axis connecting flange 412 is sleeved on an X-axis transmission screw rod 404 and connected with the X-axis transmission screw rod, and two ends of the X-axis connecting steel sheet 411 are respectively connected with the side walls of the first X-axis connecting flange 410 and the second X-axis connecting flange 412.
In the embodiment of the present application, the first X-axis connecting flange 410 and the second X-axis connecting flange 412 are connected by an X-axis connecting steel sheet 411, that is, the X-axis transmission connecting block 405 and the X-axis transmission screw rod 404 are connected by an X-axis connecting steel sheet 411. The X-axis connecting steel sheet 411 is flat, has a length in the axial direction greater than that in the radial direction, has elasticity in the radial direction, and is easily deformed, and has rigidity in the axial direction, and is not easily deformed. When the X-axis transmission screw rod 404 rotates, the radial error of the X-axis transmission screw rod is absorbed and counteracted by the radial deformation of the X-axis connection steel sheet 411 in the transmission process, and when the X-axis transmission screw rod transmits axially, the X-axis connection steel sheet 411 is not easy to deform axially, so that the axial accurate transmission of the X-axis transmission screw rod 404 is reserved.
Referring to fig. 1-9, in the embodiment of the present application, the Y-axis transmission set 500 includes: y axle motor 501, Y axle motor fixing base 502, Y axle transmission guide rail 503, Y axle transmission lead screw 504 and Y axle guide block 505, wherein, bottom plate 200 includes Y axle motor 501 mounting groove, Y axle motor 501 mounting groove is located the bottom plate 200 top surface, Y axle motor 501 set up in the Y axle motor 501 mounting groove, Y axle motor fixing base 502 is fixed in bottom plate 200 top surface and with Y axle motor 501 is connected, Y axle transmission guide rail 503 set up in on the bottom plate 200 top surface and with Y axle motor 501 mounting groove is parallel, Y axle transmission lead screw 504 set up in the Y axle motor 501 mounting groove and with workstation 700 is connected, Y axle guide block 505 set up in workstation 700 bottom surface and support in on the Y axle transmission guide rail 503.
In this embodiment, when the movement of the worktable 700 in the Y-axis direction needs to be adjusted, the control component generates a control command to the Y-axis motor 501, and the Y-axis motor 501 controls the Y-axis transmission screw 504 to rotate and drives the worktable 700 to move on the Y-axis transmission guide rail 503.
Referring to fig. 1-9, in the embodiment of the present application, the Y-axis transmission set 500 further includes: the Y-axis connecting device comprises a first Y-axis connecting flange 506, a Y-axis connecting steel sheet 507 and a second Y-axis connecting flange 508, wherein the first Y-axis connecting flange 506 is arranged on the bottom surface of the workbench 700, the second Y-axis connecting flange 508 is sleeved on the Y-axis transmission screw rod 504 and connected with the same, and two ends of the Y-axis connecting steel sheet 507 are respectively connected with the side walls of the first Y-axis connecting flange 506 and the second Y-axis connecting flange 508.
In the embodiment of the present application, the first Y-axis connecting flange 506 and the second Y-axis connecting flange 508 are connected by a Y-axis connecting steel sheet 507, that is, the Y-axis transmission screw 504 and the worktable 700 are connected by a Y-axis connecting steel sheet 507. The Y-axis connecting steel sheet 507 is flat, has a length in the axial direction greater than that in the radial direction, has elasticity in the radial direction, is easily deformed, and has rigidity in the axial direction, so that it is not easily deformed. When the Y-axis transmission screw rod 504 rotates, the radial error of the Y-axis transmission screw rod is absorbed and counteracted by the radial deformation of the Y-axis connection steel sheet 507 in the transmission process, and when the Y-axis transmission screw rod transmits axially, the Y-axis connection steel sheet 507 is not easy to deform axially, so that the axial accurate transmission of the Y-axis transmission screw rod 504 is maintained.
Referring to fig. 1-9, in the embodiment of the present application, the Z-axis transmission set 600 includes: a Z-axis mounting plate 601, a Z-axis motor 602, a Z-axis motor fixing seat 603, a Z-axis transmission guide rail 604, a Z-axis transmission lead screw 605, a detection component mounting plate 606, a Z-axis guide block 607, a first Z-axis limit sensor 608, a second Z-axis limit sensor 609 and a detection component mounting frame 610, wherein the Z-axis mounting plate 601 is connected with an X-axis transmission connecting block 405 in the X-axis transmission group 400, the Z-axis motor fixing seat 603 is arranged on the Z-axis mounting plate 601, the Z-axis motor 602 is arranged on the Z-axis motor fixing seat 603, the Z-axis transmission guide rail 604 is arranged on the Z-axis mounting plate 601, the Z-axis transmission lead screw 605 is respectively connected with the Z-axis motor 602 and the detection component mounting plate 606, the Z-axis guide block 607 is arranged on the bottom surface of the detection component mounting plate 606 and supported on the Z-axis transmission guide rail 604, and the first Z-axis limit sensor 608 and the second Z-axis limit sensor 609 are respectively arranged on the Z The two sides of the shaft mounting plate 601 are connected with the Z-axis transmission guide rail 604 in parallel, and the detection component mounting frame 610 is arranged on the detection component mounting plate 606.
In this embodiment, when the movement of the detection component mounting plate 606 in the Z-axis direction needs to be adjusted, the control component sends a control command to the Z-axis motor 602, and the Z-axis motor 602 controls the Z-axis transmission screw 605 to move and drives the detection component mounting plate 606 to move on the Z-axis transmission guide rail 604. When the detecting component mounting plate 606 reaches the edge positions of the two ends of the Z-axis mounting plate 601, the first Z-axis limit sensor 608 and the second Z-axis limit sensor 609 sense the detecting component mounting plate 606 respectively, and feed back the detecting component to the control component, and at this time, the control component controls the Z-axis motor 602 to stop moving or controls the detecting component mounting plate 606 to move reversely.
Referring to fig. 1-9, in the embodiment of the present application, the worktable 700 includes: the device comprises a workbench underframe 701, a supporting block 702, a workbench panel 703 and glass 704, wherein the bottom surface of the workbench underframe 701 is connected with a Y-axis guide block 505 in the Y-axis transmission set 500, the bottom of the supporting block 702 is connected with the workbench underframe 701, the top of the supporting block 702 is connected with and supports the workbench panel 703, and the glass 704 is arranged in a groove on the workbench panel 703.
Referring to fig. 1-9, in the present embodiment, the measurement assembly 800 includes: an inspection lens 801, an illuminating lamp 802, a guide rail plate 803, a guide rail 804, a drag chain 805, a guide block 806 and an extension plate 807, wherein the inspection lens 801 is arranged on an inspection component mounting frame 610 in the Z-axis transmission set 600, the guide rail plate 803 is fixed on the side wall of the beam 300 and is positioned between a workbench chassis 701 and a workbench flat plate 703 in the workbench 700, the guide rail 804 and the drag chain 805 are arranged on the guide rail plate 803, the guide rail 804 is arranged along the X-axis direction, the drag chain 805 is connected with the extension plate 807, the guide block 806 is supported on the guide rail 804 at the bottom and is connected with the extension plate 807 at the top, the illuminating lamp 802 is arranged on the extension plate 807 and is positioned between the workbench chassis 701 and the workbench flat plate 703, the Z-axis transmission set 600 controls the inspection lens 801 to move in the X-axis direction and the Z-axis direction, the drag chain 805 controls the illuminating lamp 802 to move along the guide rail 804 in the X-axis direction, and is located right below the detection lens 801.
When measuring an object to be measured, it is first necessary to ensure that the detection lens 801, the object to be measured, and the illumination lamp 802 are located on the same vertical line. The position of the detection lens 801 is controlled by the Z-axis transmission set 600, the position of the object to be measured is realized by the Y-axis transmission set 500 through the adjustment workbench 700, and the position control flow of the illuminating lamp 802 specifically comprises: the control assembly sends control commands to the drag chain 805, and the drag chain 805 controls the extension board 807 to move on the guide rail 804, thereby ensuring that it is positioned directly under the inspection lens 801 and the object. When measuring, the control assembly controls the illuminating lamp 802 to emit light, the light penetrates through the glass 704 to irradiate on an object and enters the detection lens 801, and the detection lens 801 analyzes the light and transmits data to the control assembly to finally complete the measurement.
In this embodiment, the control component may be a PLC controller, and the power supply may be an internal power supply or an external power supply.
According to the high-precision measuring equipment, the X-axis transmission set and the Y-axis transmission set independently move, and the superposition of errors is avoided; the X-axis transmission group is arranged on the side surface of the cross beam, so that the cantilever distance of the Z-axis transmission group is reduced; meanwhile, the transmission connection on the X-axis transmission set and the Y-axis transmission set adopts steel sheet connection, so that the transmission rigidity is kept, and the error of the movement of the screw rod is offset.
The above description is only for the preferred embodiment of the present invention, and the structure is not limited to the above-mentioned shape, and any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A high-precision measuring apparatus, characterized by comprising:
the base is used for mounting each part;
the bottom plate is used for mounting each part; the bottom plate is arranged on the base;
the beam is used for mounting the X-axis transmission set; the cross beam is arranged on the bottom plate;
the X-axis transmission set is used for driving the Z-axis transmission set to move along the X-axis direction; the X-axis transmission group is arranged on the cross beam;
the Y-axis transmission set is used for driving the workbench to move along the Y-axis direction; the Y-axis transmission group is arranged on the bottom plate;
the Z-axis transmission set is used for driving the measuring assembly to move along the Z-axis direction; the Z-axis transmission group is arranged on the X-axis transmission group;
the workbench is used for placing an object to be measured; the workbench is arranged on the Y-axis transmission set;
a measuring assembly for measuring an object to be measured; the measuring assembly is arranged on the Z-axis transmission set and is positioned above the workbench;
the control assembly is used for controlling the work of each part; the control assembly is arranged on the base and is respectively connected with the X-axis transmission set, the Y-axis transmission set, the Z-axis transmission set and the measuring assembly;
the power supply is used for supplying power to all parts; the power supply is arranged on the base and is respectively connected with the X-axis transmission group, the Y-axis transmission group, the Z-axis transmission group, the measurement assembly and the control assembly.
2. The high accuracy measurement device of claim 1, wherein the X-axis drive train comprises: the X-axis motor, the X-axis motor fixing seat, the X-axis transmission guide rail, the X-axis transmission lead screw, the X-axis transmission connecting block, the X-axis guide block, the X-axis induction block, the first X-axis limit inductor and the second X-axis limit inductor, wherein the beam comprises an X-axis motor mounting groove, the X-axis motor mounting groove is positioned on the lateral wall of the beam, the X-axis motor is arranged in the X-axis motor mounting groove, the X-axis motor fixing seat is fixed on the lateral wall of the beam and is connected with the X-axis motor, the X-axis transmission guide rail is arranged on the lateral wall of the beam and is parallel to the X-axis motor mounting groove, the X-axis transmission lead screw is arranged in the X-axis motor mounting groove and is connected with the X-axis transmission connecting block, the X-axis guide block is arranged on the bottom surface of the X-axis transmission connecting block and is supported on the X-axis transmission guide rail, the X-axis induction block is connected with the X-axis transmission connecting block and is located above the top of the beam, and the first X-axis limiting inductor and the second X-axis limiting inductor are respectively arranged on two sides of the top of the beam and parallel to the X-axis transmission guide rail.
3. The high accuracy measurement device of claim 2, wherein the X-axis drive train further comprises: the X-axis connecting device comprises a first X-axis connecting flange, an X-axis connecting steel sheet and a second X-axis connecting flange, wherein the first X-axis connecting flange is arranged on the bottom surface of an X-axis transmission connecting block, the second X-axis connecting flange is sleeved on an X-axis transmission screw rod and connected with the X-axis transmission screw rod, and two ends of the X-axis connecting steel sheet are respectively connected with the first X-axis connecting flange and the side wall of the second X-axis connecting flange.
4. The high accuracy measurement device of claim 1, wherein the Y-axis drive train comprises: y axle motor, Y axle motor fixing base, Y axle transmission guide rail, Y axle transmission lead screw and Y axle guide block, wherein, the bottom plate includes Y axle motor mounting groove, Y axle motor mounting groove is located the bottom plate top surface, Y axle motor set up in the Y axle motor mounting groove, Y axle motor fixing base is fixed in the bottom plate top surface and with the Y axle motor is connected, Y axle transmission guide rail set up in on the bottom plate top surface and with Y axle motor mounting groove is parallel, Y axle transmission lead screw set up in the Y axle motor mounting groove and with the workstation is connected, Y axle guide block set up in the workstation bottom surface just support in on the Y axle transmission guide rail.
5. The high accuracy measurement device of claim 4, wherein said Y-axis drive train further comprises: the Y-axis transmission device comprises a first Y-axis connection flange, a Y-axis connection steel sheet and a second Y-axis connection flange, wherein the first Y-axis connection flange is arranged on the bottom surface of the workbench, the second Y-axis connection flange is sleeved on the Y-axis transmission screw rod and connected with the Y-axis transmission screw rod, and two ends of the Y-axis connection steel sheet are respectively connected with the side walls of the first Y-axis connection flange and the second Y-axis connection flange.
6. The high accuracy measurement device of claim 1, wherein the Z-axis drive train comprises: z axle mounting panel, Z axle motor fixing base, Z axle transmission guide rail, Z axle transmission lead screw, determine module mounting panel, Z axle guide block, first Z axle spacing inductor, second Z axle spacing inductor and determine module mounting bracket, wherein, the Z axle mounting panel with X axle transmission connecting block among the X axle transmission group is connected, the Z axle motor fixing base set up in on the Z axle mounting panel, the Z axle motor set up in on the Z axle motor fixing base, the Z axle transmission guide rail set up in on the Z axle mounting panel, the Z axle transmission lead screw respectively with the Z axle motor with the determine module mounting panel is connected, the Z axle guide block set up in determine module mounting panel bottom surface and support in on the Z axle transmission guide rail, first Z axle spacing inductor and the second Z axle spacing inductor set up respectively in Z axle mounting panel both sides and the line of the two is parallel with the Z axle transmission guide rail, the detection assembly mounting frame is arranged on the detection assembly mounting plate.
7. The high-precision measurement apparatus according to claim 1, wherein the stage comprises: the bottom surface of the workbench underframe is connected with a Y-axis guide block in the Y-axis transmission set, the bottom of the support block is connected with the workbench underframe, the top of the support block is connected with the workbench flat plate, and the glass is arranged in a groove on the workbench flat plate.
8. The high accuracy measurement device of claim 1, wherein the measurement assembly comprises: the detection lens is arranged on a detection component mounting frame in the Z-axis transmission group, the guide rail plate is fixed on the side wall of the cross beam and is positioned between the worktable underframe and the worktable flat plate in the worktable, the guide rail and the drag chain are arranged on the guide rail plate, the guide rail is arranged along the X-axis direction, the drag chain is connected with the extension plate, the bottom of the guide block is supported on the guide rail, and the top of the guide block is connected with the extension plate, the illuminating lamp is arranged on the extension plate and positioned between the workbench underframe and the workbench flat plate, the Z-axis transmission set controls the detection lens to move in the X-axis direction and the Z-axis direction, and the tow chain controls the illuminating lamp to move in the X-axis direction along the guide rail and is positioned under the detection lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020595023.2U CN211717496U (en) | 2020-04-20 | 2020-04-20 | High-precision measuring equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020595023.2U CN211717496U (en) | 2020-04-20 | 2020-04-20 | High-precision measuring equipment |
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| CN211717496U true CN211717496U (en) | 2020-10-20 |
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| CN202020595023.2U Active CN211717496U (en) | 2020-04-20 | 2020-04-20 | High-precision measuring equipment |
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| CN (1) | CN211717496U (en) |
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