CN211689204U - High energy-saving high-efficiency nano vacuum coating instrument - Google Patents
High energy-saving high-efficiency nano vacuum coating instrument Download PDFInfo
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- CN211689204U CN211689204U CN202020211203.6U CN202020211203U CN211689204U CN 211689204 U CN211689204 U CN 211689204U CN 202020211203 U CN202020211203 U CN 202020211203U CN 211689204 U CN211689204 U CN 211689204U
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- crucible
- cylindricality
- evaporation
- vacuum coating
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 44
- 238000001704 evaporation Methods 0.000 claims abstract description 42
- 230000008020 evaporation Effects 0.000 claims abstract description 42
- 238000001816 cooling Methods 0.000 claims description 11
- 238000010030 laminating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 13
- 238000007738 vacuum evaporation Methods 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 230000002349 favourable effect Effects 0.000 description 4
- 239000012141 concentrate Substances 0.000 description 3
- 239000007888 film coating Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 101100495256 Caenorhabditis elegans mat-3 gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000013212 metal-organic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The utility model discloses a high energy-conserving high efficiency nanometer vacuum coating appearance, including the evaporation source, the evaporation source is equipped with the lid including the cylindricality crucible that has the evaporation chamber, and the top of cylindricality crucible has seted up the gas outlet on the lid, and the interior bottom surface of cylindricality crucible is equipped with first boss, is equipped with the recess on the outer bottom surface of cylindricality crucible, and the upper end inner wall of cylindricality crucible is the toper face, and the outward flange of lid is equipped with the three annular slab that is connected in proper order, and three annular slab closely laminates with the toper face, up end and the upper end outer wall of cylindricality crucible respectively. The first boss is arranged in the cylindrical crucible, so that the heating area of an evaporation material and the cylindrical crucible can be increased during vacuum evaporation, and the evaporation efficiency is improved; the cylindrical crucible is provided with the conical surface, the cover body is provided with the plurality of annular plates which are tightly attached to the upper end of the cylindrical crucible respectively, the sealing performance of the edge connection of the cylindrical crucible and the cover body is improved, evaporated gas is ejected from the gas outlet only, and material waste caused by deposition to other positions is prevented.
Description
Technical Field
The utility model relates to an evaporation equipment technical field, concretely relates to high energy-conserving high efficiency nanometer vacuum coating appearance.
Background
The nano vacuum coating instrument can carry out high-precision temperature control on evaporated source materials and is often used for preparing nano thin film materials and nano devices. In the evaporation process, evaporation materials in the evaporation source are heated to a certain temperature to be evaporated or sublimated, and the steam rises from the crucible and is deposited on the surface of a target substrate to form a thin film.
The crucible of the existing commonly used nano vacuum evaporation source is U-shaped, and the opening is completely opened, so that the scattering surface is large, and a part of nano materials can be deposited at other positions during evaporation, thereby easily causing material waste. If the crucible is made in a U-shape with a small caliber, the capacity of the crucible is reduced, and the problem of insufficient loading of the crucible may be caused.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical defects, the technical proposal adopted by the utility model is to provide a high energy-saving and high efficiency nano vacuum coating instrument, which comprises an evaporation source, the evaporation source comprises a cylindrical crucible with an evaporation cavity, the top of the cylindrical crucible is provided with an opening, a cover body is detachably arranged on the opening, the cover body is provided with an air outlet, the inner bottom surface of the cylindrical crucible is provided with a first boss, the outer bottom surface of the cylindrical crucible is provided with a groove corresponding to the first boss, the inner wall of the upper end of the cylindrical crucible is a conical surface with a narrow lower part and a wide upper part, the outer edge of the cover body is sequentially provided with a first annular plate, a second annular plate and a third annular plate which are connected, the first annular plate is tightly attached to the conical surface, the second annular plate is tightly attached to the upper end face of the cylindrical crucible, and the third annular plate is tightly attached to the outer wall of the upper end of the cylindrical crucible.
Further, the bottom of cylindricality crucible is equipped with the heating pad, the upper surface of heating pad is equipped with the second boss, the second boss is laminated with the recess embedding.
Furthermore, the cover body is provided with a horn-shaped air guide sheet, the air outlet is formed in the horn-shaped air guide sheet, and the upper end of the horn-shaped air guide sheet is wide and the lower end of the horn-shaped air guide sheet is narrow.
Further, the outside of heating pad is equipped with heat shield, the lower extreme at cylindricality crucible is established to the last pot head of heat shield.
Further, the outer wall of the cylindrical crucible is provided with a first spiral groove, and a spiral heating wire is installed in the first spiral groove.
Furthermore, the outer wall of the cylindrical crucible is provided with a second spiral groove, a spiral cooling belt is installed in the second spiral groove, and the first spiral groove and the second spiral groove extend in the same direction and are arranged at intervals.
Compared with the prior art the utility model discloses technical scheme's beneficial effect does:
1. the utility model provides a high energy-saving high efficiency nanometer vacuum coating instrument, which can increase the heating area of the evaporation material and the cylindrical crucible when vacuum evaporation is carried out by arranging the first boss in the cylindrical crucible, so as to improve the evaporation efficiency; be equipped with the conical surface on the cylindricality crucible, set up a plurality of annular plates on the lid and closely laminate with the upper end of cylindricality crucible respectively, be favorable to improving the sealing performance that cylindricality crucible and lid edge are connected, make the gas after the evaporation only jet out from the gas outlet, can guarantee the capacity of cylindricality crucible, can reduce the opening bore of cylindricality crucible again, reduce the scattering surface of cylindricality crucible, prevent to deposit to other positions and cause the waste of material, also convenient clearance simultaneously.
2. The second boss is arranged on the upper surface of the heating pad and is embedded and attached to the groove at the bottom of the cylindrical crucible, so that the cylindrical crucible is uniformly stressed, and the heating stability of the heating pad can be ensured; can reduce thermal scattering and disappearing through setting up the heat shield, can effectively concentrate the heat around the heat shield, be favorable to improving the heating efficiency of heating pad.
3. The horn-shaped air guide sheet is arranged to guide the evaporated gas, so that the gas flow is rapidly sprayed onto the substrate to be coated.
4. The cylindrical crucible can be uniformly heated by arranging the spiral heating wires, so that the evaporation efficiency of the cylindrical crucible can be further improved; the cylindrical crucible can be uniformly cooled by adopting the spiral cooling zone, and the cooling effect of the evaporation source is favorably improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a perspective view of a high-efficiency energy-saving nano vacuum coating apparatus provided by an embodiment of the present invention;
FIG. 2 is a front view of a high-efficiency energy-saving nano vacuum coating apparatus provided by an embodiment of the present invention;
FIG. 3 is a top view of a high energy-saving and high efficiency nano vacuum coating apparatus provided by an embodiment of the present invention;
fig. 4 is a sectional view a-a of fig. 3.
Wherein the reference numerals are:
1. cylindrical crucible, 11, evaporation chamber, 12, opening, 13, first boss, 14, recess, 15, conical surface, 16, first helicla flute, 17, second helicla flute, 2, lid, 21, gas outlet, 22, first annular plate, 23, second annular plate, 24, third annular plate, 3, heating pad, 31, second boss, 4, tubaeform air guide sheet, 5, heat shield, 6, spiral heater strip, 7, spiral cooling zone.
Detailed Description
The invention will be further explained with reference to the drawings and the specific embodiments.
Example 1
Referring to fig. 1-4, the present invention provides a high energy-saving and high efficiency nano vacuum coating apparatus, which comprises an evaporation source, the evaporation source comprises a cylindrical crucible 1 having an evaporation chamber 11, an opening 12 is disposed at the top of the cylindrical crucible 1, a cover body 2 is detachably disposed on the opening 12, so as to conveniently place evaporation materials in the cylindrical crucible 1 and clean the cylindrical crucible 1, an air outlet 21 is disposed on the cover body 2, a first boss 13 is disposed on the inner bottom surface of the cylindrical crucible 1, a groove 14 is disposed on the outer bottom surface of the cylindrical crucible 1 corresponding to the first boss 13, the inner wall of the upper end of the cylindrical crucible 1 is a tapered surface 15 with a narrow lower part and a wide upper part, a first annular plate 22, a second annular plate 23 and a third annular plate 24 are sequentially disposed on the outer edge of the cover body 2, the first annular plate 22 is tightly attached to the tapered surface 15, the second annular plate 23 is tightly attached to the upper end of the cylindrical crucible 1, the third annular plate 24 is closely attached to the outer wall of the upper end of the cylindrical crucible 1. Preferably, the evaporation cavity 11 is used for placing a material to be evaporated, and the material to be evaporated is a metal material or an organic material. The size of the air outlet 21 can be adjusted according to the thickness and the width of the coating film.
By arranging the first boss 13 in the cylindrical crucible 1, the heating area of the evaporation material and the cylindrical crucible 1 can be increased during vacuum evaporation so as to improve the evaporation efficiency; be equipped with conical surface 15 on the cylindricality crucible 1, set up a plurality of annular plates on the lid 2 and closely laminate with the upper end of cylindricality crucible 1 respectively, be favorable to improving the sealing performance of cylindricality crucible 1 with lid 2 edge connection, make the gas after the evaporation only jet out from gas outlet 21, can guarantee the capacity of cylindricality crucible 1, can reduce the 12 bores of opening of cylindricality crucible 1 again, reduce the scattering surface of cylindricality crucible 1, prevent that the deposit from causing the waste of material to other positions, convenient clearance, the time cost and the human cost of experiment are saved.
The bottom of the cylindrical crucible 1 is provided with a heating pad 3, the upper surface of the heating pad 3 is provided with a second boss 31, and the second boss 31 is embedded and attached with the groove 14. Preferably, the heating mat 3 is externally provided with a heat shield 5, the upper end of the heat shield 5 being fitted over the lower end of the cylindrical crucible 1.
The second boss 31 is arranged on the upper surface of the heating pad 3 and is embedded and attached with the groove 14 at the bottom of the cylindrical crucible 1, so that the cylindrical crucible 1 is uniformly stressed, and the heating stability of the heating pad 3 can be ensured; can reduce thermal scattering and disappearing through setting up heat shield 5, can effectively concentrate the heat around heat shield 5, be favorable to improving the heating efficiency of heating pad 3.
The evaporation source further comprises a first temperature detection device, the multifunctional nano vacuum coating instrument further comprises a temperature controller and a power supply controller, the first temperature detection device and the heating pad 3 are respectively and electrically connected with the temperature controller and the power supply controller, and the temperature controller is electrically connected with the power supply controller and is used for detecting and adjusting the heating temperature of the heating pad 3 and controlling the start-stop state of the first temperature detection device.
The cover body 2 is provided with a horn-shaped air guide sheet 4, the air outlet 21 is arranged on the horn-shaped air guide sheet 4, and the upper end of the horn-shaped air guide sheet 4 is wide and the lower end is narrow. The horn-shaped air guide sheet 4 is arranged to guide the evaporated gas, so that the gas flow is rapidly sprayed onto the substrate to be coated.
The outer wall of the cylindrical crucible 1 is provided with a first spiral groove 16, and a spiral heating wire 6 is arranged in the first spiral groove 16. The outer wall of the cylindrical crucible 1 is provided with a second spiral groove 17, a spiral cooling belt 7 is installed in the second spiral groove 17, and the first spiral groove 16 and the second spiral groove 17 extend in the same direction and are arranged at intervals.
The cylindrical crucible 1 can be uniformly heated by arranging the spiral heating wire 6, so that the evaporation efficiency of the cylindrical crucible 1 can be further improved; the cylindrical crucible 1 can be uniformly cooled by adopting the spiral cooling belt 7, and the cooling effect of the evaporation source is favorably improved.
Preferably, the evaporation source further comprises a second temperature detection device, and the second temperature detection device and the spiral heating wire 6 are respectively and electrically connected with the power controller and the temperature controller, and are used for detecting and adjusting the heating temperature of the spiral heating wire 6 and controlling the start-stop state of the second temperature detection device. The spiral cooling belt 7 is connected with an external water supply device through a pipeline, and the water supply device is respectively electrically connected with the temperature controller and the power supply controller and is used for cooling the cylindrical crucible 1 and controlling the start and stop of the water supply device.
The high-energy-saving nano vacuum coating instrument further comprises a vacuum cavity, a sample table and a plurality of evaporation sources are arranged in the vacuum cavity, a substrate is arranged on the sample table, the evaporation sources are arranged below the sample table, the substrate is correspondingly arranged with the air outlet 21 of the cover body 2, the vacuum cavity is connected with a vacuumizing device, a sample heating device, a film thickness measuring device and a vacuum measuring device are arranged in the vacuum cavity, the sample heating device, the vacuumizing device, the film thickness measuring device and the vacuum measuring system are respectively and electrically connected with the power supply controller, and the film thickness measuring device and the sample heating device are respectively and electrically connected with the temperature controller.
The vacuumizing device is used for vacuumizing the vacuum cavity, the vacuum measuring device is used for monitoring the vacuum degree in the vacuum cavity in real time, the temperature detecting device detects the temperature environment in the vacuum cavity, and the temperature controller adjusts the heating temperature of the sample heating device, the heating pad 3 and the spiral heating wire 6 according to the detection information of the temperature detecting device. After the evaporation is finished, the power supply controller controls the film thickness measuring device to work, so that the film thickness measuring device measures the film coating thickness of each evaporation area of the substrate after the evaporation is finished, the measured film coating thickness information is transmitted to the temperature controller, the temperature controller judges whether the film thickness of each evaporation area meets the preset thickness, and for the evaporation area which does not meet the preset thickness, the temperature of the area is adjusted to continue the evaporation operation, and the uniformity of the film coating of the substrate is ensured.
The utility model provides a pair of high energy-conserving nanometer vacuum coating appearance, its theory of operation as follows: the heating pad 3 and the spiral heating wire 6 work, the heat shield 5 concentrates heat around the heating pad 3, metal materials or organic materials in the cylindrical crucible 1 are melted and evaporated, vapor deposition of the metal materials or the organic materials is accumulated on the surface of a substrate, cooling water is injected through the spiral cooling belt 7, and flows from bottom to top along the second spiral groove 17 on the cylindrical crucible 1, so that the surface of the cylindrical crucible 1 is cooled.
It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. The utility model provides a high energy-conserving high efficiency nanometer vacuum coating appearance, includes the evaporation source, the evaporation source is including cylindricality crucible (1) that has evaporation chamber (11), the top of cylindricality crucible (1) is equipped with opening (12), can dismantle on opening (12) and be equipped with lid (2), gas outlet (21), its characterized in that have been seted up on lid (2): the interior bottom surface of cylindricality crucible (1) is equipped with first boss (13), the position that corresponds with first boss (13) is equipped with recess (14) on the outer bottom surface of cylindricality crucible (1), the upper end inner wall of cylindricality crucible (1) is narrow down and goes up wide toper face (15), the outward flange of lid (2) is equipped with first annular slab (22), second annular slab (23) and third annular slab (24) that are connected in proper order, first annular slab (22) closely laminates with toper face (15), second annular slab (23) closely laminates with the up end of cylindricality crucible (1), third annular slab (24) closely laminates with the upper end outer wall of cylindricality crucible (1).
2. The high-energy-saving high-efficiency nano vacuum coating instrument according to claim 1, wherein: the bottom of cylindricality crucible (1) is equipped with heating pad (3), the upper surface of heating pad (3) is equipped with second boss (31), second boss (31) and recess (14) embedding laminating.
3. The high-energy-saving high-efficiency nano vacuum coating instrument according to claim 1, wherein: be equipped with tubaeform air guide sheet (4) on lid (2), gas outlet (21) set up on tubaeform air guide sheet (4), the wide lower extreme in upper end of tubaeform air guide sheet (4) is narrow.
4. The high-energy-saving high-efficiency nano vacuum coating instrument according to claim 2, wherein: the outside of heating pad (3) is equipped with heat shield (5), the lower extreme at cylindricality crucible (1) is established to the last pot head of heat shield (5).
5. The high-energy-saving high-efficiency nano vacuum coating instrument according to claim 1, wherein: the outer wall of the cylindrical crucible (1) is provided with a first spiral groove (16), and a spiral heating wire (6) is installed in the first spiral groove (16).
6. The high-energy-saving high-efficiency nano vacuum coating instrument according to claim 5, wherein: the outer wall of cylindricality crucible (1) is equipped with second helicla flute (17), install spiral cooling zone (7) in second helicla flute (17), first helicla flute (16) and second helicla flute (17) syntropy extend and interval setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020211203.6U CN211689204U (en) | 2020-02-25 | 2020-02-25 | High energy-saving high-efficiency nano vacuum coating instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020211203.6U CN211689204U (en) | 2020-02-25 | 2020-02-25 | High energy-saving high-efficiency nano vacuum coating instrument |
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| Publication Number | Publication Date |
|---|---|
| CN211689204U true CN211689204U (en) | 2020-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020211203.6U Expired - Fee Related CN211689204U (en) | 2020-02-25 | 2020-02-25 | High energy-saving high-efficiency nano vacuum coating instrument |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877670A (en) * | 2021-02-06 | 2021-06-01 | 合肥市辉耀真空材料有限责任公司 | Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process |
-
2020
- 2020-02-25 CN CN202020211203.6U patent/CN211689204U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112877670A (en) * | 2021-02-06 | 2021-06-01 | 合肥市辉耀真空材料有限责任公司 | Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220223 Address after: 215000 No. 168, Ludang Road, Jiangling street, Wujiang District, Suzhou City, Jiangsu Province (north of Lingyi Road) Patentee after: Inaco (Suzhou) semiconductor technology Co.,Ltd. Address before: Room 8209, No. 88-1, Jincheng Road, Taiping Street, Xiangcheng District, Suzhou, Jiangsu 215000 Patentee before: Suzhou hongyouda Instrument Technology Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201016 |