CN206052138U - A kind of linear coating source and its vacuum coater suitable for large-area coating film - Google Patents
A kind of linear coating source and its vacuum coater suitable for large-area coating film Download PDFInfo
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- CN206052138U CN206052138U CN201621042605.8U CN201621042605U CN206052138U CN 206052138 U CN206052138 U CN 206052138U CN 201621042605 U CN201621042605 U CN 201621042605U CN 206052138 U CN206052138 U CN 206052138U
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- container
- evaporation
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Abstract
A kind of linear coating source and its vacuum coater suitable for large-area coating film of this utility model, including filling container, switch and container for evaporation, the filling container is connected with the container for evaporation, the switch is arranged between filling container and container for evaporation the material for being used to control in filling container and enters container for evaporation, heating element heater is provided with the container for evaporation,, for being steam stream into the material heating evaporation in container for evaporation, the steam stream is for the plated film on substrate for the heating element heater.The linear coating source of this utility model is by least two coating source of substrate arranged, can on greater area of substrate the thin film of depositing homogeneous and different types of thin film, filling container is arranged on outside vacuum chamber, with continual fill material or material variety can be changed, by the uninterrupted of on-off control coating source, break-make, determines the thickness and species of substrate regional plated film.
Description
Technical field
This utility model is related to technical field of vacuum plating, especially a kind of linear coating source suitable for large-area coating film
And its vacuum coater.
Background technology
As industrial expansion, coating technique are increasingly extensive in the application of industry-by-industry, the requirement to coated product is also got over
Come stricter：（1）Area is increasing；（2）The uniformity requirement more and more higher of thickness；（3）Thickness speed is increasingly faster etc..Cause
This, how to control accurate plated film and efficient plated film becomes the key of coating technique.
Utility model content
To solve above-mentioned technical problem, this utility model purpose is to provide a kind of linear plated film suitable for large-area coating film
Source and its vacuum coater.
The technical solution adopted in the utility model is：
A kind of linear coating source suitable for large-area coating film, including filling container, switch and container for evaporation, the filler hold
Device is connected with the container for evaporation, and the switch is arranged between filling container and container for evaporation to be used to control in filling container
Material enters container for evaporation, is provided with heating element heater in the container for evaporation, and the heating element heater is for by container for evaporation
Material heating evaporation is steam stream, and the steam stream is for the plated film on substrate.
A kind of vacuum coater suitable for large-area coating film, including vacuum chamber and two or more linear distribution
The linear coating source of surface to be coated in vacuum chamber, should include filling container, switch and container for evaporation, and the filler holds
Device is arranged on outside vacuum chamber and is connected with the container for evaporation, and container for evaporation is located in vacuum chamber, and the switch is arranged on
The material for being used for controlling in filling container between filling container and container for evaporation enters container for evaporation, is provided with the container for evaporation
Heating element heater, for being steam stream into the material heating evaporation in container for evaporation, the steam stream is for base for the heating element heater
Plated film on plate.
The beneficial effects of the utility model：
The linear coating source of this utility model, can be in more large area by least two coating source of substrate arranged
Substrate on depositing homogeneous thin film and different types of thin film, filling container is arranged on outside vacuum chamber, can be with continual
Fill material or replacing material variety, by the uninterrupted of on-off control coating source, break-make, determine substrate regional
The thickness and species of plated film.
Description of the drawings
Below in conjunction with the accompanying drawings specific embodiment of the present utility model is described further.
Structural representations of the Fig. 1 for the linear coating source of this utility model；
Structural representations of the Fig. 2 for this utility model vacuum coater.
Specific embodiment
As shown in figure 1, for a kind of linear coating source suitable for large-area coating film of the present utility model, including filling container
1st, switch 2 and container for evaporation 3, the filling container 1 are connected with the container for evaporation 3, the switch 2 be arranged on filling container 1 with
The material for being used for controlling in filling container 1 between container for evaporation 3 enters container for evaporation 3, is provided with heating unit in the container for evaporation 3
Part, for being steam stream 4 into the material heating evaporation in container for evaporation 3, the steam stream 4 is for substrate 5 for the heating element heater
On plated film.
As shown in Fig. 2 being another technical scheme of the present utility model：A kind of vacuum coating suitable for large-area coating film is filled
Put, including vacuum chamber 6, and linear plated film of the two or more linear distribution above ilm substrate to be plated 5 in vacuum chamber 6
Source, should include filling container 1, switch 2 and container for evaporation 3, and the filling container 1 is arranged on outside vacuum chamber 6, can be with continual
Fill material or replacing material variety, and be connected with the container for evaporation 3, container for evaporation 3 is located in vacuum chamber 6, described
Switch 2 is arranged between filling container 1 and container for evaporation 3 material for being used to control in filling container 1 and enters container for evaporation 3, should
Heating element heater is provided with container for evaporation 3, the heating element heater will be for will be steam into the material heating evaporation in container for evaporation 3
Stream 4, the plated film that the steam stream 4 is used on substrate 5 control the uninterrupted of coating source by switch 2, and break-make determines that substrate 5 is each
The thickness and species of individual region plated film.
As set forth above, it is possible to find out the linear coating source of this utility model by arranging at least two plating in substrate 5
Film source, can on greater area of substrate 5 thin film of depositing homogeneous and different types of thin film, filling container 1 is arranged on very
Outside plenum chamber 6, with continual fill material or material variety can be changed, the flow for coating source being controlled by switch 2 is big
Little, break-make determines the thickness and species of 5 regional plated film of substrate.
Preferred embodiments of the present utility model are the foregoing is only, this utility model is not limited to above-mentioned embodiment party
Formula, if with essentially identical means realize the technical scheme of this utility model purpose belong to protection domain of the present utility model it
It is interior.
Claims (2)
1. a kind of linear coating source suitable for large-area coating film, it is characterised in that：Hold including filling container, switch and evaporation
Device, the filling container are connected with the container for evaporation, and the switch is arranged between filling container and container for evaporation to be used to control
Material in filling container enters container for evaporation, is provided with heating element heater in the container for evaporation, and the heating element heater is used to enter
Material heating evaporation in container for evaporation is steam stream, and the steam stream is for the plated film on substrate.
2. a kind of vacuum coater suitable for large-area coating film, it is characterised in that：Including vacuum chamber and two or more
The linear coating source of linear distribution surface to be coated in vacuum chamber, should include filling container, switch and container for evaporation,
The filling container is arranged on outside vacuum chamber and is connected with the container for evaporation, and container for evaporation is located in vacuum chamber, described to open
Pass is arranged between filling container and container for evaporation the material for being used to control in filling container and enters container for evaporation, the container for evaporation
Inside be provided with heating element heater, the heating element heater for by into the material heating evaporation in container for evaporation be steam stream, the steam
Flow for the plated film on substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621042605.8U CN206052138U (en) | 2016-09-07 | 2016-09-07 | A kind of linear coating source and its vacuum coater suitable for large-area coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621042605.8U CN206052138U (en) | 2016-09-07 | 2016-09-07 | A kind of linear coating source and its vacuum coater suitable for large-area coating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206052138U true CN206052138U (en) | 2017-03-29 |
Family
ID=58371101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621042605.8U Active CN206052138U (en) | 2016-09-07 | 2016-09-07 | A kind of linear coating source and its vacuum coater suitable for large-area coating film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206052138U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111575649A (en) * | 2020-07-08 | 2020-08-25 | 成都中建材光电材料有限公司 | Evaporation source device and method for preparing large-area cadmium telluride film |
-
2016
- 2016-09-07 CN CN201621042605.8U patent/CN206052138U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111575649A (en) * | 2020-07-08 | 2020-08-25 | 成都中建材光电材料有限公司 | Evaporation source device and method for preparing large-area cadmium telluride film |
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