CN204746769U - Even quick -witted exhaust device of glue and even machine of gluing - Google Patents
Even quick -witted exhaust device of glue and even machine of gluing Download PDFInfo
- Publication number
- CN204746769U CN204746769U CN201520396814.1U CN201520396814U CN204746769U CN 204746769 U CN204746769 U CN 204746769U CN 201520396814 U CN201520396814 U CN 201520396814U CN 204746769 U CN204746769 U CN 204746769U
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- CN
- China
- Prior art keywords
- flexible pipe
- scrap rubber
- sol evenning
- exhausting device
- air exhausting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses an even quick -witted exhaust device of glue and even machine of gluing, including fan, exhaust pipe, the fan with the exhaust pipe links to each other, but still includes an at least hose and at least one adjusting valve, wherein, the one end and the scrap rubber tank bottom portion of hose communicate with each other, the other end of hose passes through but adjusting valve with the exhaust pipe communicates with each other. The utility model discloses an even quick -witted exhaust device of glue and even machine of gluing, but closing of hose controlled through adjusting valve to control the flow of the above -mentioned air of substrate, with this drying rate who adjusts the photosensitive resist, the film uniformity that makes substrate surface photoetching glue is better, and while substrate surface can not produce the bad circumstances of changing colour yet.
Description
Technical field
The utility model relates to semiconductor applications, especially, relates to a kind of sol evenning machine air exhausting device and sol evenning machine.
Background technology
Sol evenning machine is a kind of centrifugal principle utilizing rotation to produce, and is evenly thrown away by glue, and tiling, to the mechanical device of material surface, is applied to experiment or manufacture field that all kinds of uniformity for material surface coating has strict demand.During even glue, the rate of drying of photoresist not only depends on the self property (volatility) of photoresist, and depend on substrate ambient air situation in even glue process, therefore, reduce air above substrate flowing and because of the air disorder caused of flowing be very important, in even glue process, while photoresist is thrown toward substrate edge, due to solvent volatilization, photoresist is able to drying, cause photoresist thickness radially skewness, and the film thickness uniformity of whole substrate surface photoresist can be made to keep good by the rate of drying of adjustment photoresist.Air exhausting device in current sol evenning machine, owing to cannot adjust the rate of drying of photoresist, causes the defects such as the film thickness uniformity of substrate surface photoresist is not good, substrate surface variable color.
Utility model content
The utility model provides a kind of sol evenning machine air exhausting device, to solve air exhausting device in existing sol evenning machine owing to cannot adjust the rate of drying of photoresist, causes that the film thickness uniformity of substrate surface photoresist is not good, the technical problem of substrate surface variable color.
The technical solution adopted in the utility model is as follows:
A kind of sol evenning machine air exhausting device, comprise blower fan, exhaust duct, blower fan is connected with exhaust duct, sol evenning machine air exhausting device also comprises at least one flexible pipe and at least one adjustable gate, wherein, one end of flexible pipe communicates with scrap rubber trench bottom, and the other end of flexible pipe is communicated with exhaust duct by adjustable gate.
Further, be provided with the scrap rubber casing for collecting cull between flexible pipe and exhaust duct, adjustable gate is positioned at the connectivity part of flexible pipe and scrap rubber casing.
Further, the quantity of flexible pipe is many, and many flexible pipes share scrap rubber casing and are communicated with exhaust duct through scrap rubber casing, and every root flexible pipe correspondence is provided with adjustable gate.
Further, the quantity of flexible pipe is four, and correspondingly, the quantity of adjustable gate is four, and four flexible pipes are that 90 degree of right angles are symmetrically distributed in scrap rubber trench bottom.
Further, scrap rubber casing is drawer type casing.
Further, flexible pipe is connected by band with adjustable gate.
Further, flexible pipe is fixed on scrap rubber trench bottom by band.
The utility model also provides on the other hand:
A kind of sol evenning machine, comprise main body machine and glue evenning table, glue evenning table is located at the middle position of main body machine, and is connected with the electro-motor in main body machine, for driving glue evenning table to rotate, sol evenning machine also comprise as above-mentioned arbitrary as described in sol evenning machine air exhausting device.
The utility model has following beneficial effect:
Sol evenning machine air exhausting device of the present utility model and sol evenning machine, the closedown of flexible pipe is controlled by adjustable gate, thus control the flowing of air above substrate, the rate of drying of photoresist is adjusted with this, make the film thickness uniformity of substrate surface photoresist better, substrate surface also can not produce the bad situation of variable color simultaneously.
Except object described above, feature and advantage, the utility model also has other object, feature and advantage.Below with reference to figure, the utility model is described in further detail.
Accompanying drawing explanation
The accompanying drawing forming a application's part is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is a side view of the sol evenning machine air exhausting device of the utility model preferred embodiment;
Fig. 2 is the opposite side view of the sol evenning machine air exhausting device of the utility model preferred embodiment;
Fig. 3 is the another side view of the sol evenning machine air exhausting device of the utility model preferred embodiment;
Fig. 4 is the top view of the sol evenning machine air exhausting device in Fig. 3.
Description of reference numerals:
1: blower fan; 2: exhaust duct; 3: flexible pipe; 4: adjustable gate; 5: scrap rubber groove; 6: scrap rubber casing; 7: main body machine; 8: glue evenning table.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in detail, but the multitude of different ways that the utility model can be defined by the claims and cover is implemented.
With reference to Fig. 1, preferred embodiment of the present utility model provides a kind of sol evenning machine air exhausting device, comprises blower fan 1, exhaust duct 2, at least one flexible pipe 3 and at least one adjustable gate 4.Wherein, one end of flexible pipe 3 communicates with bottom scrap rubber groove 5, and the other end of flexible pipe 3 is communicated with exhaust duct 2 by adjustable gate 4.Blower fan 1 is for providing power to be drawn in air by flexible pipe 3 and exhaust duct 2 by the gas in scrap rubber groove 5.
In the present embodiment, flexible pipe 3 is regulated by adjustable gate 4, to regulate the air force be discharged to bottom scrap rubber groove 5 exhaust duct 2, thus the flowing of air above control substrate, the rate of drying of photoresist is adjusted with this, make the film thickness uniformity of substrate surface photoresist better, substrate surface also can not produce the bad situation of variable color simultaneously.
On the basis of above-described embodiment, with reference to Fig. 2, further, be provided with the scrap rubber casing 6 for collecting cull between flexible pipe 3 and exhaust duct 2, adjustable gate 4 is positioned at the connectivity part of flexible pipe 3 and scrap rubber casing 6.
In the present embodiment; the setting of scrap rubber casing 6; the splashing particle produced when the cull particle in scrap rubber groove 5 and gluing can be made can not to pollute exhaust duct 2; thus the particle contamination source of assembling in exhaust duct 2 can not be made to pollute gluing environment conversely; make chip particle bad; and fritter cull and photoresist solid granulates can be stored in scrap rubber casing 6, can not block exhaust duct 2.
On the basis of above-described embodiment, further, sol evenning machine air exhausting device of the present utility model, the quantity of flexible pipe 3 is many, and many flexible pipes 3 share scrap rubber casing 6 and are communicated with exhaust duct 2 through scrap rubber casing 6, and every root flexible pipe 3 correspondence is provided with adjustable gate 4.Concrete, with reference to Fig. 3 and Fig. 4, the quantity of flexible pipe 3 is four, and correspondingly, the quantity of adjustable gate 4 is four, and four flexible pipes 3 are symmetrically distributed in bottom scrap rubber groove 5 in 90 degree of right angles.Can the flowing of air above convenient uniform adjustment substrate, adjust the rate of drying of photoresist more accurately, make the film thickness uniformity of substrate surface photoresist better, substrate surface also can not produce the bad situation of variable color simultaneously.
Further, scrap rubber casing 6 is drawer type casing.After sol evenning machine runs a period of time, can accumulate fritter cull and photoresist solid granulates in scrap rubber casing 6, now only scrap rubber casing 6 need be extracted out, clean scrap rubber casing 6, drawer type casing is for convenience detach and install.
Further, flexible pipe 3 is connected by band with adjustable gate 4.Untie band flexible pipe 3 and adjustable gate 4 to be dismantled, be convenient to the clean and replacing of flexible pipe 3 and adjustable gate 4, simple to operation.
Further, flexible pipe is fixed on scrap rubber trench bottom by band.
With reference to Fig. 4, preferred embodiment of the present utility model additionally provides a kind of sol evenning machine, comprise the sol evenning machine air exhausting device in main body machine 7, glue evenning table 8 and above-described embodiment, glue evenning table 8 is located at the middle position of main body machine 7, and be connected with the electro-motor (not shown) in main body machine 7, rotate for driving glue evenning table 8.During even glue, scrap rubber groove 5, main body machine 7 and glue evenning table 8 form a seal cavity, the gas in sealing space can be expelled in air by sol evenning machine air exhausting device.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.
Claims (8)
1. a sol evenning machine air exhausting device, comprise blower fan (1), exhaust duct (2), described blower fan (1) is connected with described exhaust duct (2), it is characterized in that, described sol evenning machine air exhausting device also comprises at least one flexible pipe (3) and at least one adjustable gate (4), wherein, one end of described flexible pipe (3) communicates with scrap rubber groove (5) bottom, and the other end of described flexible pipe (3) is communicated with described exhaust duct (2) by described adjustable gate (4).
2. sol evenning machine air exhausting device according to claim 1, it is characterized in that, be provided with the scrap rubber casing (6) for collecting cull between described flexible pipe (3) and described exhaust duct (2), described adjustable gate (4) is positioned at the connectivity part of described flexible pipe (3) and described scrap rubber casing (6).
3. sol evenning machine air exhausting device according to claim 2, it is characterized in that, the quantity of described flexible pipe (3) is many, many described flexible pipes (3) share described scrap rubber casing (6) and are communicated with described exhaust duct (2) through described scrap rubber casing (6), and described in every root, flexible pipe (3) correspondence is provided with described adjustable gate (4).
4. sol evenning machine air exhausting device according to claim 2, it is characterized in that, the quantity of described flexible pipe (3) is four, correspondingly, the quantity of described adjustable gate (4) is four, and four described flexible pipes (3) are symmetrically distributed in described scrap rubber groove (5) bottom in 90 degree of right angles.
5. sol evenning machine air exhausting device according to claim 2, is characterized in that, described scrap rubber casing (6) is drawer type casing.
6., according to the arbitrary described sol evenning machine air exhausting device of claim 1-5, it is characterized in that, described flexible pipe (3) is connected by band with described adjustable gate (4).
7. according to the arbitrary described sol evenning machine air exhausting device of claim 1-5, it is characterized in that, described flexible pipe (3) is fixed on described scrap rubber groove (5) bottom by band.
8. a sol evenning machine, comprise main body machine (7) and glue evenning table (8), described glue evenning table (8) is located at the middle position of main body machine (7), and be connected with the electro-motor in main body machine (7), rotate for driving glue evenning table (8), it is characterized in that, described sol evenning machine also comprise as arbitrary in the claims 1-7 as described in sol evenning machine air exhausting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520396814.1U CN204746769U (en) | 2015-06-10 | 2015-06-10 | Even quick -witted exhaust device of glue and even machine of gluing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520396814.1U CN204746769U (en) | 2015-06-10 | 2015-06-10 | Even quick -witted exhaust device of glue and even machine of gluing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204746769U true CN204746769U (en) | 2015-11-11 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520396814.1U Expired - Fee Related CN204746769U (en) | 2015-06-10 | 2015-06-10 | Even quick -witted exhaust device of glue and even machine of gluing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204746769U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765759A (en) * | 2017-11-09 | 2019-05-17 | 沈阳芯源微电子设备股份有限公司 | A kind of sol evenning machine air exhausting device |
| CN110385238A (en) * | 2019-08-16 | 2019-10-29 | 吉林华微电子股份有限公司 | Sol evenning machine remodeling method |
-
2015
- 2015-06-10 CN CN201520396814.1U patent/CN204746769U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765759A (en) * | 2017-11-09 | 2019-05-17 | 沈阳芯源微电子设备股份有限公司 | A kind of sol evenning machine air exhausting device |
| CN110385238A (en) * | 2019-08-16 | 2019-10-29 | 吉林华微电子股份有限公司 | Sol evenning machine remodeling method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151111 Termination date: 20190610 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |