CN211680538U - CCD camera shooting optical fiber laser scribing machine - Google Patents
CCD camera shooting optical fiber laser scribing machine Download PDFInfo
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- CN211680538U CN211680538U CN202020282980.XU CN202020282980U CN211680538U CN 211680538 U CN211680538 U CN 211680538U CN 202020282980 U CN202020282980 U CN 202020282980U CN 211680538 U CN211680538 U CN 211680538U
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Abstract
The utility model discloses a CCD camera shooting optical fiber laser scribing machine, which comprises a machine cabinet, wherein a marble platform and a Z-axis slide rail platform are installed in the machine cabinet, an X-axis slide rail platform is arranged on the marble platform, a Y-axis slide rail platform is installed on the X-axis slide rail platform, an adsorption platform is installed on the Y-axis slide rail platform, and the adsorption platform is connected with a vacuumizing device; a dust absorption device is arranged on one side of the absorption platform; install the lift slip table on the Z axle slide rail platform, be fixed with light path system on the lift slip table, install laser generating device in the light path system, 45 degrees alignment jig are connected to the light path system front end, are equipped with the optical lens piece on the 45 degrees alignment jig, and 45 degrees alignment jig's top is equipped with the CCD camera, passes through threaded connection focus lens cone below the 45 degrees alignment jig. The utility model discloses not only guarantee the marking off precision, improve production efficiency moreover.
Description
Technical Field
The utility model relates to a scribing machine especially relates to a CCD makes a video recording optic fibre laser scribing machine.
Background
The laser scribing machine is characterized in that laser is focused by a special optical system to form a very small light spot, the energy density is high, and the laser scribing machine is processed in a non-contact mode, does not have mechanical stamping force on a workpiece and is not easy to deform. The laser scribing device has the advantages of small heat influence and high scribing precision, is widely applied to cutting and scribing of solar panels and thin metal sheets, adopts a fiber laser as a working light source, controls a two-dimensional workbench by a computer, and can do various motions according to input graphs. Output is big, the scribing precision is high, high speed, can carry out curve and straight line figure cutting, these only to what figure of input is scribed what figure, but to the shape that has etched on the silicon chip, the line is drawn according to the circuit that has existed on the silicon chip, the line width on the silicon chip is only 50um, diameter 200 mm's silicon chip, the facula of laser is 30um, including workstation precision 10um, so upper and lower position deviation can not exceed 10um, if watch with naked eye and the anchor clamps is difficult to accomplish to the position, and production efficiency is low, can't satisfy the demand of production. Therefore, it is an urgent problem to be solved by those skilled in the art to develop a CCD camera fiber laser dicing saw.
Disclosure of Invention
The utility model provides a solve above-mentioned not enough, provide a CCD camera shooting optic fibre laser scribing machine.
The above object of the present invention is achieved by the following technical solutions: a CCD camera shooting optical fiber laser scribing machine comprises a machine cabinet, wherein a marble platform and a Z-axis slide rail platform are arranged in the machine cabinet,
an X-axis sliding rail platform is arranged on the marble platform, a Y-axis sliding rail platform is arranged on the X-axis sliding rail platform, an adsorption platform is arranged on the Y-axis sliding rail platform, the adsorption platform is connected with a vacuumizing device, and a product is fixed on the adsorption platform in a vacuumizing mode to prevent movement; a dust suction device is arranged on one side of the adsorption platform, so that dust generated in the scribing process is sucked away, and the product is prevented from being polluted;
the Z-axis sliding rail platform is provided with a lifting sliding table, a light path system is fixed on the lifting sliding table, a laser generating device is installed in the light path system, the front end of the light path system is connected with a 45-degree adjusting frame, an optical lens is arranged on the 45-degree adjusting frame and plays a role of vertically downwards directing the laser which comes out horizontally, a CCD camera is arranged above the 45-degree adjusting frame and is used for observing effects and positioning effects, a high-power camera lens is arranged below the CCD camera, a focusing lens barrel is connected below the 45-degree adjusting frame through threads and plays a role of focusing light beams, and an illuminating device is installed on the focusing lens barrel through a top wire to enhance the exposure amount, so that the clear and bright effect of a shot picture under the dim condition;
the marble platform below is equipped with the control box, and the right-hand member of control box is equipped with the display support, installs the display on the display support, and the monitor is equipped with to the display top.
Furthermore, the X-axis slide rail platform comprises an X-axis motor, a Z-axis motor and an X-axis seat rail, wherein the X-axis motor is connected with the Z-axis motor, and the Z-axis motor is fixed in the X-axis seat rail; the Y-axis sliding rail platform comprises a Y-axis motor, a Y-axis lead screw and a Y-axis seat rail, the Y-axis motor is connected with the Y-axis lead screw, the Y-axis lead screw is fixed in the Y-axis seat rail, and the Y-axis seat rail is fixed on the X-axis sliding screw; the bottom of the adsorption platform is provided with a Y-direction sliding screw sleeve installed on the Y-axis screw rod, and the adsorption platform is fixed on the Y-direction sliding screw sleeve.
Furthermore, the Z-axis slide rail platform comprises a Z-axis motor, a Z-axis lead screw and a Z-axis seat rail, wherein the Z-axis motor is connected with the Z-axis lead screw through a coupler, and the Z-axis lead screw is fixed in the Z-axis seat rail; the lifting sliding table is provided with a Z-direction sliding threaded sleeve arranged on the Z-axis lead screw.
Further, the stroke of Z axle slide rail platform is 500 mm.
Further, the strokes of the X-axis slide rail platform and the Y-axis slide rail platform are both 300 mm.
The utility model discloses work flow: when the system works, a silicon wafer to be processed is placed on an adsorption platform, a vacuumizing device is turned on to fix a product, a control button of a control box is turned on, a graph to be scribed is guided into CNC system software, then a CCD monitor and an operating system are used for controlling the states of an X-axis motor, a Y-axis motor and a Z-axis motor so as to drive the Z-axis motor, the Y-axis screw rod and the Z-axis screw rod to rotate and drive an X-direction sliding screw sleeve, a Y-direction sliding screw sleeve and a Z-direction sliding screw sleeve to move, at the moment, the Z-axis motor drives a light path system on the Z-axis screw rod to move in the Z-axis direction, a CCD camera is used for observation and positioning focusing, the adsorption platform is driven by the X-axis sliding rail platform and the Y-axis sliding rail platform to move in the X-axis direction and the Y-axis direction so as to capture mark points on two sides, and the system can calculate the cheap quantity of, therefore, the laser generating device of the optical path system is used for processing, and the problem of positioning of the patterns on the silicon chip is solved.
Compared with the prior art, the utility model the advantage be: the utility model discloses a CCD camera device, the user can be through existing etching circuit diagram on the observation sample that the monitor is clear, and the user only need be on software in the picture bootstrap system that will rule out, then utilize the monitor to find the mark point at product both ends, and the system can be according to the certain angle of the automatic skew of the picture on the product, not only guarantees the precision of ruling out, improves production efficiency moreover. Furthermore, the utility model discloses in, through adopting the marble mesa, the comprehensive stability of lift system, all mechanical parts are selected and joined in marriage meticulously in order to guarantee long-term precision.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of a side structure of the slide rail platform of the X-axis, Y-axis and Z-axis of the present invention.
Fig. 3 is the schematic diagram of the other side structure of the sliding rail platform of the X-axis, Y-axis and Z-axis of the present invention.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, 2 and 3, a CCD camera fiber laser scribing machine comprises a cabinet 1, a marble platform 2 and a Z-axis slide rail platform 16 are installed in the cabinet 1,
an X-axis sliding rail platform 3 is arranged on the marble platform 2, a Y-axis sliding rail platform 4 is arranged on the X-axis sliding rail platform 3, an adsorption platform 5 is arranged on the Y-axis sliding rail platform 4, the adsorption platform 5 is connected with a vacuumizing device (not shown), and a product is fixed on the adsorption platform in a vacuumizing mode to prevent movement; a dust absorption device 6 is arranged on one side of the absorption platform 5, so that dust generated in the scribing process is absorbed, and the product is prevented from being polluted;
a lifting sliding table 7 is installed on the Z-axis sliding rail platform 3, a light path system 8 is fixed on the lifting sliding table 7, a laser generating device (not shown) is installed in the light path system 8, the front end of the light path system 8 is connected with a 45-degree adjusting frame 9, an optical lens (not shown) is arranged on the 45-degree adjusting frame 9 and plays a role of vertically downwards directing the horizontal laser, a CCD camera 10 is arranged above the 45-degree adjusting frame 9 and is used for observing effects and positioning effects, a high-power camera lens 11 is arranged below the CCD camera 10, a focusing lens barrel 12 is connected below the 45-degree adjusting frame 9 through threads and plays a role of focusing light beams, an illuminating device (not shown) is installed on the focusing lens barrel 12 through a top thread, the exposure is enhanced, and the clear effect of a shot picture under the dim;
a control box 13 is arranged below the marble platform 2, a display support 14 is arranged at the right end of the control box 13, a display 15 is arranged on the display support 14, and a monitor (not shown) is arranged above the display 15.
Further, the X-axis slide rail platform 3 includes an X-axis motor 301, a Z-axis motor (not shown) and an X-axis seat rail 302, the X-axis motor 301 is connected to the Z-axis motor, and the Z-axis motor is fixed in the X-axis seat rail 302; the bottom of the Y-axis sliding rail platform 4 is provided with an X-direction sliding threaded sleeve 303 installed on a Z-axis motor, the Y-axis sliding rail platform 4 comprises a Y-axis motor 401, a Y-axis lead screw (not shown) and a Y-axis seat rail 402, the Y-axis motor 401 is connected with the Y-axis lead screw, the Y-axis lead screw is fixed in the Y-axis seat rail 402, and the Y-axis seat rail 402 is fixed on the X-direction sliding threaded sleeve 303; the bottom of the adsorption platform 5 is provided with a Y-direction sliding threaded sleeve 403 arranged on a Y-axis screw rod, and the adsorption platform 5 is fixed on the Y-direction sliding threaded sleeve 403.
Further, the Z-axis slide rail platform 16 includes a Z-axis motor 1601, a Z-axis lead screw (not shown) and a Z-axis seat rail 1602, the Z-axis motor 1601 is connected to the Z-axis lead screw through a coupling (not shown), and the Z-axis lead screw is fixed in the Z-axis seat rail 1602; the lifting sliding table 7 is provided with a Z-direction sliding threaded sleeve 1603 installed on the Z-axis screw rod.
Further, the stroke of the Z-axis slide rail platform 16 is 500 mm.
Further, the strokes of the X-axis slide rail platform 3 and the Y-axis slide rail platform 4 are both 300 mm.
The utility model discloses work flow: during working, a silicon wafer to be processed is placed on the adsorption platform 5, the vacuumizing device is turned on to fix a product, a control button of the control box 13 is turned on, a graphic to be scribed is guided into CNC system software, then a CCD monitor and an operating system are used for controlling the states of the X-axis motor 301, the Y-axis motor 401 and the Z-axis motor 1601, so that the Z-axis motor, the Y-axis screw rod and the Z-axis screw rod are driven to rotate, the X-direction sliding screw sleeve 303, the Y-direction sliding screw sleeve 403 and the Z-direction sliding screw sleeve 1603 are driven to move, at the moment, the Z-axis motor 1601 drives the optical path system 8 on the Z-axis screw rod to move in the Z-axis direction, the CCD camera 10 is used for observing and positioning focusing, the adsorption platform 5 is driven by the X-axis slide rail platform 3 and the Y-axis slide rail platform 4 to move in the X-axis direction and the Y-axis direction to capture, the system can calculate the cheap amount of the graph in the software according to the offset of the graph on the product, so that the laser generating device of the optical path system 8 is used for processing, and the problem of positioning the graph on the silicon chip is solved.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (5)
1. The utility model provides a CCD makes a video recording optic fibre laser scribing machine which characterized in that: comprises a cabinet, a marble platform and a Z-axis slide rail platform are arranged in the cabinet,
an X-axis slide rail platform is arranged on the marble platform, a Y-axis slide rail platform is arranged on the X-axis slide rail platform, an adsorption platform is arranged on the Y-axis slide rail platform, and the adsorption platform is connected with a vacuumizing device; a dust absorption device is arranged on one side of the absorption platform;
a lifting sliding table is mounted on the Z-axis sliding rail platform, a light path system is fixed on the lifting sliding table, a laser generating device is mounted in the light path system, the front end of the light path system is connected with a 45-degree adjusting frame, an optical lens is arranged on the 45-degree adjusting frame, a CCD camera is arranged above the 45-degree adjusting frame, a high-power camera lens is arranged below the CCD camera, a focusing lens barrel is connected below the 45-degree adjusting frame through threads, and a lighting device is mounted on the focusing lens barrel through a jackscrew;
the marble platform below is equipped with the control box, and the right-hand member of control box is equipped with the display support, installs the display on the display support, and the monitor is equipped with to the display top.
2. The CCD camera fiber laser scribe of claim 1, characterized by: the X-axis sliding rail platform comprises an X-axis motor, a Z-axis motor and an X-axis seat rail, wherein the X-axis motor is connected with the Z-axis motor, and the Z-axis motor is fixed in the X-axis seat rail; the Y-axis sliding rail platform comprises a Y-axis motor, a Y-axis lead screw and a Y-axis seat rail, the Y-axis motor is connected with the Y-axis lead screw, the Y-axis lead screw is fixed in the Y-axis seat rail, and the Y-axis seat rail is fixed on the X-axis sliding screw; the bottom of the adsorption platform is provided with a Y-direction sliding screw sleeve installed on the Y-axis screw rod, and the adsorption platform is fixed on the Y-direction sliding screw sleeve.
3. The CCD camera fiber laser scribe of claim 1, characterized by: the Z-axis sliding rail platform comprises a Z-axis motor, a Z-axis screw rod and a Z-axis seat rail, wherein the Z-axis motor is connected with the Z-axis screw rod through a coupler, and the Z-axis screw rod is fixed in the Z-axis seat rail; the lifting sliding table is provided with a Z-direction sliding threaded sleeve arranged on the Z-axis lead screw.
4. The CCD camera fiber laser scribe of claim 1, characterized by: the stroke of the Z-axis slide rail platform is 500 mm.
5. The CCD camera fiber laser scribe of claim 1, characterized by: the strokes of the X-axis slide rail platform and the Y-axis slide rail platform are both 300 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020282980.XU CN211680538U (en) | 2020-03-10 | 2020-03-10 | CCD camera shooting optical fiber laser scribing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020282980.XU CN211680538U (en) | 2020-03-10 | 2020-03-10 | CCD camera shooting optical fiber laser scribing machine |
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| CN211680538U true CN211680538U (en) | 2020-10-16 |
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| CN202020282980.XU Active CN211680538U (en) | 2020-03-10 | 2020-03-10 | CCD camera shooting optical fiber laser scribing machine |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113020575A (en) * | 2021-03-25 | 2021-06-25 | 常州欧茗铸造有限公司 | Casting box for wear-resistant casting parts |
| CN115302112A (en) * | 2022-08-02 | 2022-11-08 | 山东理工大学 | Femtosecond laser high-efficiency lossless precision scribing method and device for solar cell |
-
2020
- 2020-03-10 CN CN202020282980.XU patent/CN211680538U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113020575A (en) * | 2021-03-25 | 2021-06-25 | 常州欧茗铸造有限公司 | Casting box for wear-resistant casting parts |
| CN115302112A (en) * | 2022-08-02 | 2022-11-08 | 山东理工大学 | Femtosecond laser high-efficiency lossless precision scribing method and device for solar cell |
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