CN211679048U - Hanging basket shaking device for wafer cleaning in wafer wet processing equipment - Google Patents
Hanging basket shaking device for wafer cleaning in wafer wet processing equipment Download PDFInfo
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- CN211679048U CN211679048U CN201922317682.XU CN201922317682U CN211679048U CN 211679048 U CN211679048 U CN 211679048U CN 201922317682 U CN201922317682 U CN 201922317682U CN 211679048 U CN211679048 U CN 211679048U
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Abstract
The utility model discloses a wafer washs with hanging basket shake device among wet processing procedure equipment of wafer, including shake actuating mechanism, the last tongs mechanism of installing of shake actuating mechanism, through shake actuating mechanism drive tongs mechanism up-and-down motion, be equipped with stores pylon mechanism in the tongs mechanism, through stores pylon mechanism carries to hang and places the basket of hanging that the wafer was used. The utility model provides a wafer washs with hanging basket shake device in wet processing procedure equipment of wafer, its structure is simple and clear, the practicality is strong, through shake actuating mechanism drive tongs mechanism reciprocal shake, drive stores pylon mechanism and hanging basket and get rid of powder and water droplet in advance; the hanging frame mechanism is arranged below the hand grip mechanism, so that the hand grip mechanism is not in direct contact with the hanging basket, and the hanging basket is positioned in the treatment tank in the cleaning process, so that the hand grip mechanism is also far away from the hanging basket, and further the contact with the liquid medicine in the treatment tank is avoided.
Description
Technical Field
The utility model relates to a wafer washs with hanging basket shake device among wet processing procedure equipment of wafer.
Background
In the field of semiconductor processing, semiconductor elements are often required to be processed by corresponding processing liquids, such as etching and cleaning in the production process of wafers, lead frames or PCB boards. After the etching is completed, if the powder adheres to the product, the quality of the product is affected, so that the powder needs to be removed. One method of removing the powder is by washing, using water to rinse the product, and removing the powder. During the water washing process, the powder may have a high adhesion ratio and be difficult to remove. After the cleaning, a large amount of water drops adhere to the surface of the product, and therefore, the powder and the water drops need to be removed in a shaking manner.
On the other hand, in the cleaning process, the semiconductor device (e.g., wafer) is generally supported by a structure such as a basket or a cradle, and then the entire semiconductor device is moved into the processing liquid by the gripper. However, when the gripper mechanism is extended downward to lift the basket, the gripper mechanism is likely to touch the treatment liquid chemical, and when the gripper mechanism is repeatedly used, different treatment liquid chemicals are likely to be mixed up. Therefore, it is desirable to avoid the gripper mechanism from touching the liquid medicine.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the defects in the prior art and providing a wafer cleaning hanging basket shaking device in wafer wet processing equipment.
In order to achieve the purpose, the method is realized by the following technical scheme:
a hanging basket shaking device for wafer cleaning in wafer wet process equipment comprises a shaking driving mechanism, wherein a hand gripping mechanism is installed on the shaking driving mechanism and drives the hand gripping mechanism to reciprocate up and down through the shaking driving mechanism, a hanging frame mechanism is arranged on the hand gripping mechanism, and a hanging basket for placing wafers is lifted and hung through the hanging frame mechanism.
Preferably, the shaking driving mechanism comprises a driving motor, an output shaft of the driving motor is provided with an eccentric mechanism, and the eccentric mechanism is connected to the gripper mechanism to drive the gripper mechanism to reciprocate up and down.
Preferably, the eccentric mechanism comprises a driving turntable and a driven turntable, the driving turntable is mounted on an output shaft of the driving motor, the driven turntable is eccentrically mounted on the driving turntable, the driven turntable rotates around the output shaft eccentrically, and the driven turntable is movably supported on the gripper mechanism.
Preferably, the gripper mechanism comprises a gripper cantilever, an extension connecting section and a driving mounting plate, the gripper cantilever is connected to the driving mounting plate through the extension connecting section, the driven turntable is movably supported on the driving mounting plate, and the hanging frame mechanism is hung under the gripper cantilever.
Preferably, a hooking groove is formed in the gripper cantilever, a hooking section extends out of the upper portion of the hanger mechanism, and the hooking section is hung on the hooking groove.
Preferably, the two sides of the lower part of the hanging rack mechanism are respectively provided with a lifting beam, the two sides of the hanging basket are provided with hanging lugs, and the hanging lugs are hung on the lifting beams.
Preferably, the shaking driving mechanism comprises a mounting base, the driving motor is mounted on the mounting base, a lifting guide mechanism is arranged on the mounting base, the driving mounting plate is slidably arranged on the lifting guide mechanism, and the extending connecting section can penetrate through the lifting guide mechanism in a vertical motion mode.
Preferably, the lifting guide mechanism comprises a vertical guide plate, a vertical opening is formed in the vertical guide plate, vertical guide rails are arranged on the vertical guide plate and are arranged on two sides of the vertical opening, a sliding block is arranged on the driving installation plate and is slidably arranged on the vertical guide rails, and the connecting end of the extending connecting section is fixedly connected to the driving installation plate and penetrates out of the vertical opening to form the vertical guide plate.
Preferably, the connecting end of the extension connecting section is provided with a vertical supporting block, the vertical supporting block is fixedly connected to the drive mounting plate and penetrates through the vertical opening, the upper end and the lower end of the vertical supporting block are respectively provided with a limiting supporting plate, and the limiting supporting plates vertically extend up and down.
Preferably, the drive mounting panel orientation be equipped with the kicking block on driving motor's a side, driven turntable activity kicking is under the kicking block, be equipped with perpendicular accent pole on the mounting base, it supports the piece to be equipped with the level that can adjust from top to bottom on the accent pole to erect, the level support the piece to gappedly correspond to the kicking block supports in order to supply spacing the kicking block, erect the upper end of accent pole with erect the baffle rigid coupling.
The utility model discloses wafer washs with hanging basket shake device's beneficial effect includes in the wet processing procedure equipment of wafer:
1) the shaking driving mechanism drives the gripper mechanism to shake in a reciprocating manner to drive the hanging frame mechanism and the hanging basket to remove powder and water drops in advance; the hanging frame mechanism is arranged below the hand grip mechanism, so that the hand grip mechanism is not in direct contact with the hanging basket, and the hanging basket is positioned in the treatment tank in the cleaning process, so that the hand grip mechanism is also far away from the hanging basket, and further the contact with the liquid medicine in the treatment tank is avoided.
2) Through driven turntable eccentric mounting on the drive carousel to make the drive carousel rotate through driving motor, with the drive mounting panel of this driven turntable top tongs mechanism, with this, the whole tongs mechanism of high-efficient drive is reciprocal from top to bottom to shake, and the easy dismouting of this mechanical drive mode is realized, and mechanical structure is stable, and the reciprocating motion process is lasting steady.
3) Through installing the hook groove on the hand grab cantilever, the hanging frame mechanism can be conveniently hung on the hand grab cantilever.
4) The driving installation plate of the gripper mechanism can be slidably arranged on a vertical guide plate of the lifting guide mechanism, so that the gripper mechanism can be stably guided.
5) Two limiting supporting plates arranged on the vertical supporting block of the gripper mechanism can effectively limit the lifting range of the gripper mechanism.
6) The mounting base is provided with a vertical adjusting rod, the vertical adjusting rod is provided with a horizontal supporting block which can be adjusted up and down, and therefore the supporting block can be limited in the horizontal direction to support the top supporting block of the driving mounting plate, and the whole gripper mechanism is prevented from horizontally shaking.
Drawings
Fig. 1 is a schematic view of the overall structure of a basket shaking device for wafer cleaning in wafer wet processing equipment according to the present invention.
Fig. 2 is a schematic view of another view structure corresponding to fig. 1.
Fig. 3 is an enlarged schematic view corresponding to the area a in fig. 2.
Fig. 4 is a schematic structural view of the gripper mechanism in fig. 1.
Fig. 5 is a schematic structural view of the hanging rack mechanism in fig. 1.
Fig. 6 is an enlarged schematic view corresponding to the area B in fig. 1.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings:
as shown in fig. 1, a basket shaking device for wafer cleaning in wafer wet processing equipment includes a shaking driving mechanism 1, a horizontally extending gripper mechanism 2 is installed on the shaking driving mechanism 1, the gripper mechanism 2 is driven by the shaking driving mechanism 1 to reciprocate up and down, a hanging mechanism 3 is installed on the gripper mechanism 2, and a basket 4 for placing a wafer 99 is hung by the hanging mechanism 3.
Referring to fig. 2 and 3, the shaking driving mechanism 1 includes a driving motor 10, an output shaft of the driving motor 10 is provided with an eccentric mechanism 5, and the eccentric mechanism 5 is connected to the gripper mechanism 2 to drive the gripper mechanism 2 to reciprocate up and down.
As shown in fig. 3, the eccentric mechanism 5 includes a driving turntable 50 and a driven turntable 52, the driving turntable 50 is mounted on the output shaft of the driving motor 10, the driven turntable 52 is eccentrically mounted on the driving turntable 50, the driven turntable 52 eccentrically rotates around the output shaft, and the driven turntable 52 movably supports against the gripper mechanism 2.
As shown in fig. 4, the gripper mechanism 2 includes a gripper cantilever 20, an extension connecting section 22 and a driving mounting plate 24, the gripper cantilever 20 is connected to the driving mounting plate 24 through the extension connecting section 22, the driven turntable 52 is movably supported on the driving mounting plate 24, and the hanger mechanism 3 is hung under the gripper cantilever 20.
Referring to fig. 4 and 5, a hooking groove 26 is formed in the gripping arm 20, the hanging rack mechanism 3 is a frame structure connected through a cross bar and a vertical bar, a hooking section 30 extends from the upper portion of the hanging rack mechanism 3, and the hooking section 30 is hung on the hooking groove 26. Referring to fig. 1 and 5, two sides of the lower portion of the hanging rack mechanism 3 are respectively provided with a hanging beam 32, two sides of the hanging basket 4 are provided with hanging lugs 40, and the hanging lugs 40 are hung on the hanging beams 32.
Referring to fig. 2 and 3, the shaking driving mechanism 1 includes a mounting base 12, the driving motor 10 is mounted on the mounting base 12, the lifting guide mechanism 6 is disposed on the mounting base 12, the driving mounting plate 24 is slidably disposed on the lifting guide mechanism 6, and the extending connection section 22 can vertically move to pass through the lifting guide mechanism 6.
As shown in fig. 3, the lifting guide mechanism 6 includes a vertical guide plate 60, a vertical opening 62 is provided on the vertical guide plate 60, vertical guide rails 64 are provided on the vertical guide plate 60 at two sides of the vertical opening 62, a sliding block 240 is provided on the driving mounting plate 24 and slidably provided on the vertical guide rails 64, and the connecting end of the extending connecting section 22 is fixedly connected to the driving mounting plate 24 and penetrates out of the vertical guide plate 60 through the vertical opening 62.
Referring to fig. 1 and 4, the connecting end of the extending connecting section 22 is provided with a vertical supporting block 28, the vertical supporting block 28 is fixedly connected to the driving mounting plate 24 and penetrates through the vertical opening 62, the upper end and the lower end of the vertical supporting block 28 are respectively provided with a limiting supporting plate 7, and the two limiting supporting plates 7 respectively extend vertically.
Referring to fig. 3 and 6, the vertical guide plate 60 is fixedly mounted on the mounting base 12 through a fixing block 66, a supporting block 242 is disposed on one side surface of the driving motor 10 facing the driving mounting plate 24, the driven turntable 52 is movably supported under the supporting block 242, a vertical adjusting rod 14 is disposed on the mounting base 12, a horizontal abutting block 16 which can be adjusted up and down is disposed on the vertical adjusting rod 14, the horizontal abutting block 16 corresponds to the supporting block 242 with a gap for limiting abutting against the supporting block 242, as shown in fig. 1, the upper end of the vertical adjusting rod 14 is fixedly connected to the vertical guide plate 60.
After having the above structural features, the utility model discloses can implement according to following process:
a. placing a plurality of wafers 99 in the hanging basket 4, and placing the whole hanging basket 4 in a processing tank for processing and cleaning;
b. after cleaning, the hanging beam at the bottom of the hanging frame mechanism 3 is hooked on the hanging lugs at two sides of the hanging basket 4, and the hand grip mechanism 2 is arranged at the upper part of the hanging frame mechanism 3, so that the liquid medicine in the treatment tank is prevented from contacting;
c. starting the driving motor 10, and driving the whole gripper mechanism 2 to shake up and down by matching the driving turntable 50 with the eccentric structure of the driven turntable 52;
d. due to the continuous shaking, the powder and water drops left on the wafer 99 can be removed, and after a period of time, the driving motor 10 is turned off, and the whole hanging basket 4 is taken out.
After accomplishing above-mentioned implementation process, should be able to embody the utility model discloses following characteristics:
the utility model provides a wafer washs with hanging basket shake device in wet processing procedure equipment of wafer, its structure is simple and clear, the practicality is strong, through shake actuating mechanism drive tongs mechanism reciprocal shake, drive stores pylon mechanism and hanging basket and get rid of powder and water droplet in advance; the hanging frame mechanism is arranged below the hand grip mechanism, so that the hand grip mechanism is not in direct contact with the hanging basket, and the hanging basket is positioned in the treatment tank in the cleaning process, so that the hand grip mechanism is also far away from the hanging basket, and further the contact with the liquid medicine in the treatment tank is avoided.
The embodiments of the present invention are only used for illustration, and do not limit the scope of the claims, and other substantially equivalent alternatives that may be conceived by those skilled in the art are within the scope of the present invention.
Claims (10)
1. The hanging basket shaking device for wafer cleaning in wafer wet process equipment is characterized by comprising a shaking driving mechanism, wherein a hand grip mechanism is mounted on the shaking driving mechanism and driven by the shaking driving mechanism to reciprocate up and down, a hanging frame mechanism is arranged on the hand grip mechanism, and a hanging basket for placing wafers is lifted and hung by the hanging frame mechanism.
2. The apparatus of claim 1, wherein the shaking driving mechanism comprises a driving motor, an output shaft of the driving motor is provided with an eccentric mechanism, and the eccentric mechanism is connected to the gripper mechanism to drive the gripper mechanism to reciprocate up and down.
3. The apparatus as claimed in claim 2, wherein the eccentric mechanism comprises a driving turntable and a driven turntable, the driving turntable is mounted on the output shaft of the driving motor, the driven turntable is eccentrically mounted on the driving turntable, the driven turntable eccentrically rotates around the output shaft, and the driven turntable movably supports against the gripper mechanism.
4. The apparatus of claim 3, wherein the gripper mechanism comprises a gripper arm, an extension link, and a driving plate, the gripper arm is connected to the driving plate through the extension link, the driven turntable is movably supported on the driving plate, and the hanging mechanism is hung under the gripper arm.
5. The apparatus as claimed in claim 4, wherein the handle arm has a hooking recess, and the hanging mechanism has a hooking section extending from an upper portion thereof, the hooking section being hung on the hooking recess.
6. The apparatus as claimed in claim 5, wherein the hanging basket shaking device is configured to be hung on the hanging beam by a hanging beam provided on each side of the lower portion of the hanging mechanism, and hanging lugs provided on each side of the hanging basket.
7. The apparatus as claimed in claim 4, wherein the shaking driving mechanism comprises a mounting base, the driving motor is mounted on the mounting base, a lifting guide mechanism is disposed on the mounting base, the driving mounting plate is slidably disposed on the lifting guide mechanism, and the extending connecting section passes through the lifting guide mechanism in a vertically movable manner.
8. The device as claimed in claim 7, wherein the elevating guide mechanism comprises a vertical guide plate, the vertical guide plate has a vertical opening, the vertical guide plate on both sides of the vertical opening has a vertical guide rail, the driving mounting plate has a slide block and is slidably disposed on the vertical guide rail, and the connecting end of the extending connecting section is fixedly connected to the driving mounting plate and extends out of the vertical guide plate through the vertical opening.
9. The apparatus as claimed in claim 8, wherein the connecting end of the extension connecting section has a vertical supporting block, the vertical supporting block is fixedly connected to the driving mounting plate and passes through the vertical opening, the vertical supporting block has upper and lower ends respectively provided with a limiting supporting plate, and the limiting supporting plates extend vertically.
10. The apparatus as claimed in claim 8, wherein a top support block is disposed on a side of the driving plate facing the driving motor, the driven turntable movably supports under the top support block, a vertical rod is disposed on the mounting base, a horizontal support block is disposed on the vertical rod, the horizontal support block is vertically adjustable and corresponds to the top support block for limiting against the top support block, and an upper end of the vertical rod is fixedly connected to the vertical guide plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922317682.XU CN211679048U (en) | 2019-12-22 | 2019-12-22 | Hanging basket shaking device for wafer cleaning in wafer wet processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922317682.XU CN211679048U (en) | 2019-12-22 | 2019-12-22 | Hanging basket shaking device for wafer cleaning in wafer wet processing equipment |
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| Publication Number | Publication Date |
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| CN211679048U true CN211679048U (en) | 2020-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201922317682.XU Active CN211679048U (en) | 2019-12-22 | 2019-12-22 | Hanging basket shaking device for wafer cleaning in wafer wet processing equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101210A (en) * | 2022-01-27 | 2022-03-01 | 常州德匠数控科技有限公司 | Cleaning device and cleaning process for cleaning indium phosphide crystals with low pollution |
-
2019
- 2019-12-22 CN CN201922317682.XU patent/CN211679048U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101210A (en) * | 2022-01-27 | 2022-03-01 | 常州德匠数控科技有限公司 | Cleaning device and cleaning process for cleaning indium phosphide crystals with low pollution |
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