Graphite boat washs pure water recovery unit
Technical Field
The utility model relates to a graphite boat washs technical field, especially relates to a graphite boat washs pure water recovery unit.
Background
In the silicon wafer coating process in the solar cell production process, a graphite boat is used as a carrier for placing a silicon wafer, a layer of silicon nitride film is attached to the surface of the graphite boat, and the silicon nitride film can affect the coating effect of the silicon wafer. Therefore, the operator is required to clean the graphite boat periodically.
In the process of cleaning the graphite boat, the graphite boat needs to be placed in a container made of acid-resistant materials, a certain amount of pure water and hydrofluoric acid are added into the container, and silicon nitride on the surface of the graphite boat can be removed completely through bubbling cleaning, water bath deacidification and other processes.
However, when the graphite boat is cleaned with pure water, a large amount of pure water is required to be used and cleaned for many times, and the cleaned waste water is directly discharged into a waste water tank, so that the water resource is seriously wasted, the utilization rate is low, the use cost is high, and the recovery cost is high.
In view of the above, it is necessary to provide a pure water recovery device for cleaning graphite boat to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a resources are saved, reduce cost's graphite boat washs pure water recovery unit.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a graphite boat washs pure water recovery unit, including be used for wasing the graphite boat wash the pond, with wash wastewater disposal basin, tank and the pipeline subassembly of pond intercommunication, the pipeline subassembly includes water intake pipe and outlet pipe way, water intake pipe will wash the pond and be linked together with the tank, outlet pipe way will wash the pond and be linked together with wastewater disposal basin, tank.
As a further improved technical scheme of the utility model, the water inlet pipeline still will wash the pond and be linked together with outside pure water installation.
As the utility model discloses further modified technical scheme, the water intake pipe includes first inlet tube and second inlet tube, first inlet tube will wash the pond and be linked together with the pure water installation, the second inlet tube will wash the pond and be linked together with the tank.
As the utility model discloses further modified technical scheme, the outlet pipe way includes first outlet pipe and second outlet pipe, first outlet pipe will wash the pond and be linked together with the wastewater disposal basin, the second outlet pipe will wash the pond and be linked together with the tank.
As the utility model discloses further modified technical scheme, install the control valve on first inlet tube, second inlet tube, first outlet pipe and the second outlet pipe respectively, the control valve is the pneumatic valve.
As a further improved technical scheme of the utility model, install the circulating pump on the second inlet tube.
As a further improved technical scheme of the utility model, the graphite boat need be through wasing many times, wherein, the water that flows out in the washing pond can be divided into waste water and reuse's water, waste water directly discharges into in the wastewater disposal basin, reuse's water directly discharges into in the tank storage, reuse's water can pour into again in the washing pond for wash another graphite boat for the first time into.
As a further improved technical solution of the present invention, the graphite boat needs to be cleaned five times, wherein the water after the first, second and third cleaning is waste water, and the water after the fourth and fifth cleaning is reusable water.
As a further improved technical scheme of the utility model, the pipeline subassembly still includes the overflow pipeline, the overflow pipe includes the first portion that is linked together with the tank upper end and the second portion that is linked together with the wastewater disposal basin upper end, the tank is linked together through overflow pipeline and wastewater disposal basin.
As a further improved technical scheme of the utility model, the cleaning pool, the waste water pool and the water storage pool are discharged from the upper end to the lower end.
The utility model has the advantages that: through setting up the tank, directly arrange into the tank as reuse's water with the relatively clean waste water of graphite boat washing back and retrieve to realize the reuse of waste water, resources are saved, reduce cost.
Drawings
FIG. 1 is a schematic view of a part of the pure water recovery device for cleaning graphite boat of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Please refer to fig. 1, the utility model discloses a pure water recovery unit is washd to graphite boat includes washs pond 1, effluent disposal basin 2, tank 3 and pipeline subassembly 4, and this pure water recovery unit is washd to graphite boat can practice thrift the pure water resource, reduces the washing cost of graphite boat.
A graphite boat (not shown) is placed in the cleaning tank 1, and is mainly used for cleaning the graphite boat for multiple times. The waste water tank 2 is communicated with the cleaning tank 1 and is mainly used for collecting relatively dirty waste water after the graphite boat is cleaned. Tank 3 is linked together with washing pond 1, and mainly used retrieves the relatively clean reuse's of graphite boat washing back water, but reuse's water reinjects into in the washing pond 1 again in order to supply for wasing another graphite boat for first time in the tank 3 to realize the reuse of waste water. In addition, the cleaning pool 1, the wastewater pool 2 and the water storage pool 3 are all set to be drained from the upper end to the lower end, so that water inlet and drainage are facilitated to the maximum extent.
The pipeline assembly 4 comprises a water inlet pipeline 41, a water outlet pipeline 42 and an overflow pipeline 43, and the cleaning tank 1, the wastewater tank 2 and the water storage tank 3 are communicated with each other through the pipeline assembly 4. The water inlet pipeline 41 includes a first water inlet pipe 411 and a second water inlet pipe 412, and the first water inlet pipe 411 and the second water inlet pipe 412 are independent of each other. The first water inlet pipe 411 connects the cleaning tank 1 to an external pure water device (not shown), and is mainly used for injecting pure water into the cleaning tank 1 to perform cleaning operation of the graphite boat. The second water inlet pipe 412 connects the cleaning tank 1 with the water storage tank 3, and is mainly used for refilling the reusable water recovered from the water storage tank 3 into the cleaning tank 1 to clean another graphite boat.
In addition, the first water inlet pipe 411 and the second water inlet pipe 412 are respectively provided with a control valve 413, and the control valves are 413 pneumatic valves and are mainly used for independently controlling the first water inlet pipe 411 and the second water inlet pipe 412. The second water inlet pipe 412 is provided with a circulation pump 414 for increasing the water pressure in the second water inlet pipe 412, so that the water discharged from the water storage tank 3 can be smoothly injected into the clean water tank 1.
The water outlet pipeline 42 includes a first water outlet pipe 421 and a second water outlet pipe 422, and the first water outlet pipe 421 and the second water outlet pipe 422 are independent of each other. First outlet pipe 421 will wash pond 1 and be linked together with wastewater disposal basin 2, mainly used discharges into wastewater disposal basin 2 with the relative dirty waste water in washing pond 1 and abandons. The second water outlet pipe 422 connects the clean water tank 1 with the water storage tank 3, and is mainly used for discharging relatively clean reusable water in the clean water tank 1 into the water storage tank 3 for storage and reuse. In addition, the first water outlet pipe 421 and the second water outlet pipe 422 are respectively provided with a control valve 423, and the control valve 423 is a pneumatic valve and is mainly used for independently controlling the first water outlet pipe 421 and the second water outlet pipe 422.
In the utility model, one graphite boat needs to be cleaned five times. Wherein, the water after the first, second and third cleaning is waste water, and the waste water is directly discharged into the waste water tank 2 through the first water outlet pipe 421 for discarding; the water after the fourth and fifth washing is reusable water, and the reusable water is directly discharged into the water storage tank 3 through the second water outlet pipe 422 for temporary storage; after the graphite boat is cleaned five times, the water storage tank 3 injects the reusable water after the fourth and fifth cleaning into the cleaning tank 1 again through the second water inlet pipe 414 for the first and second cleaning of another graphite boat, and the above steps are repeated.
The overflow pipe 43 includes a first part 431 communicated with the upper end of the reservoir 3 and a second part 432 communicated with the upper end of the wastewater tank 2, and is mainly used for discharging excessive wastewater in the reservoir 3 into the wastewater tank 2 to be discarded.
To sum up, the utility model provides a pure water recovery unit is washd to graphite boat, including be used for wasing graphite boat wash 1, with wash wastewater disposal basin 2, tank 3 and the pipeline subassembly 4 of 1 intercommunication in pond. The pure water recovery device for graphite boat cleaning is characterized in that the water storage tank 3 is arranged, so that relatively clean waste water after the graphite boat cleaning is directly discharged into the water storage tank 3 as reusable water to be recovered, thereby realizing the reutilization of the waste water, saving resources and reducing cost.
Terms such as "upper," "lower," "left," "right," "front," "rear," and the like, used herein to denote relative spatial positions, are used for ease of description to describe one feature's relationship to another feature as illustrated in the figures. It will be understood that the spatially relative positional terms may be intended to encompass different orientations than those shown in the figures depending on the product presentation position and should not be construed as limiting the claims.
In addition, the above embodiments are only used for illustrating the present invention and not for limiting the technical solutions described in the present invention, and the understanding of the present specification should be based on the technical personnel in the technical field, and although the present specification has described the present invention in detail with reference to the above embodiments, the person of ordinary skill in the art should understand that the person of ordinary skill in the art can still modify the present invention or substitute the same, and all the technical solutions and modifications that do not depart from the spirit and scope of the present invention should be covered within the scope of the claims of the present invention.