CN211603794U - Low-speed motion control system applied to LCOS system phase modulation workbench - Google Patents
Low-speed motion control system applied to LCOS system phase modulation workbench Download PDFInfo
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- CN211603794U CN211603794U CN201921983616.XU CN201921983616U CN211603794U CN 211603794 U CN211603794 U CN 211603794U CN 201921983616 U CN201921983616 U CN 201921983616U CN 211603794 U CN211603794 U CN 211603794U
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Abstract
The utility model discloses a low-speed motion control system applied to a LCOS system phase modulation workbench, which comprises a workbench, a motion controller, a motor drive circuit and a motor; the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench and sending an exposure switch instruction to the LCOS system phase modulation device; and the motor driving circuit is used for sending a driving voltage control signal. The utility model discloses utilize that pulse laser energy is big, the pulse width is short, repetition frequency is high characteristics, realize single frame polarization pattern record based on single pulse, to the accurate control of the motion of workstation, realized that exposure area is big, efficient, the advantage of good reliability.
Description
Technical Field
The utility model relates to a liquid crystal orientation arranges the control field, especially relates to a be applied to low-speed motion control system of LCOS system phase modulation workstation.
Background
The polarization orientation technology based on the liquid crystal spatial modulator is a programmable control device capable of modulating the phase and amplitude of incident light, and pattern recording of different orientation arrangements of liquid crystals in different selected areas can be realized by single projection orientation.
Patent application No. CN201820881217.1 discloses a photo-alignment apparatus for realizing arbitrary distribution by one exposure, which introduces a photo-alignment method for single exposure using a pixelated electrically controlled phase delay device, wherein the phase delay of each pixel of the pixelated electrically controlled phase delay device is controlled by a corresponding voltage respectively for generating the phase delay of arbitrary pattern distribution, but the problem of generating a phase pattern by one exposure is that the data size is proportional to the format size, which limits the format size of the prepared device, and also considers that a high-precision high-resolution photo-alignment pattern cannot be generated.
Foreign beam corporation has provided an apparatus and method for photoalignment using continuous laser irradiation on LCOS phase modulation devices (De Sio L, Roberts D E, Liao Z, et al, digital polarization and polarization geographic phase Optics [ J ] Optics express, 2016, 24 (16): 18297 18306.), they have employed low energy continuous laser for exposure, taking into account the information amount of the image and the exposure uniformity and properties of the material heat capacity, thermal diffusion, etc., the exposure to a single field of view takes tens of seconds to tens of minutes, and the exposure breadth is limited by the image information and cannot photoalign large area breadth.
Therefore, a new device for outputting polarization patterns and a workbench motion control system matched with the device in the field of liquid crystal display are needed to realize efficient and accurate large-area breadth photo-alignment.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems of the prior art, the embodiment of the utility model discloses a low-speed motion control system applied to a LCOS system phase modulation workbench, which comprises a workbench, a motion controller, a motor driving circuit and a motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench and sending an exposure switch instruction to the LCOS system phase modulation device;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
As a further improvement of the embodiment of the present invention, the low-speed motion control system further includes a detection device for real-time monitoring the motion state information of the motor, and will the motion position and the speed of the motor are sent to the motion controller.
As the utility model discloses the embodiment improves further, the workstation carrier band light polarization sensitive material is in the two-dimensional plane motion to further realize the interconnection between polarization light field concatenation or the different polarization light fields.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model relates to a be applied to the low-speed motion control system of LCOS system phase modulation workstation and realized the accurate control to the motion of workstation, further utilize the high-speed exposure patterning liquid crystal photo-orientation method of pulse laser illumination to control the phase change in single exposure area in real time, accomplish the exposure of high accuracy high resolution;
2. the utility model utilizes the characteristics of large pulse laser energy, short pulse width and high repetition frequency, realizes the recording of single-frame polarization patterns based on single pulse, and realizes the advantages of large exposure area, high efficiency and good reliability;
3. the utility model adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-breadth writing;
4. the utility model adopts the light energy not concentrated, and eliminates the abutted seam between each light-operated orientation view field by controlling the relation between the size of a single view field and the single translation distance, thereby improving the resolution;
5. the utility model has the advantages of single exposure polarization pattern high accuracy is controllable wantonly, the large tracts of land is write, efficient, has important meaning to design and preparation jumbo size, high accuracy, multi-functional liquid crystal optical device.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a flowchart of a low-speed motion control method applied to a phase modulation workbench of an LCOS system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a low-speed motion control system applied to a LCOS system phase modulation workbench according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a high-speed exposure patterned liquid crystal photo-alignment device according to an embodiment of the present invention;
fig. 4 is a schematic diagram showing the selection of the pulse laser frequency and the refresh frequency of the phase modulation device of the high-speed exposure patterned liquid crystal photo-alignment device according to the embodiment of the present invention;
fig. 5 is a schematic diagram of the peak absorption characteristics of a light polarization sensitive material employed in an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
On the one hand, the embodiment of the utility model discloses a be applied to LCOS system phase modulation workstation's low-speed motion control method, as shown in fig. 1, low-speed motion control method includes following step:
s1, carrying out data processing on the large-format processing graph to generate a corresponding gray-scale graph; the data processing specifically comprises the steps of pre-correcting the gray value of the large-format processing graph to enable the gray value of a file to be matched with the phase regulation and control of the LCOS;
s2, dividing the gray graph into a plurality of gray graph blocks, generating two-dimensional physical coordinates and graph block numbers corresponding to each gray graph block, recording the two-dimensional physical coordinates and the graph block numbers into a position file, and recording the graph block numbers and the file paths of the graph block numbers into a sequence file; the dividing operation specifically comprises dividing the large-format processing graph into M x N graph blocks according to the size not larger than the field resolution;
wherein the size of the field resolution is LOCS pixel width pixel height, and is selected from any one of 1024 x 768, 1920 x 1080 and 1920 x 1152;
s3, the motion controller reads the two-dimensional physical coordinates in the position file and controls the workbench to move to the designated position corresponding to the two-dimensional physical coordinates;
s4, finding a file path corresponding to the graphics block number in a sequence file according to the graphics block number corresponding to the two-dimensional physical coordinate and acquiring the gray scale graphics block file;
s5, uploading the gray scale pattern block file to an LCOS (liquid Crystal on silicon) board card memory and displaying the gray scale pattern block on an LCOS panel;
s6, controlling a pulse light source switch by the motion controller to form primary exposure;
and S7, moving the workbench to the designated position corresponding to the next two-dimensional physical coordinate, and repeating the operations of S4-S6 until the two-dimensional physical coordinate points of the whole large-format processing graph are completely executed.
Specifically, in S7, the two-dimensional movement manner in which the workbench moves to the specified position corresponding to the next two-dimensional physical coordinate is consistent with the arrangement order of the two-dimensional physical coordinate points in the position file, and when the two-dimensional physical coordinate points in the position file are arranged row by row, the movement workbench moves row by row; when the two-dimensional physical coordinate points are arranged in a row one by one, the moving workbench moves in a row one by one; and when the two-dimensional physical coordinate points are arranged randomly, the moving workbench moves randomly.
In the embodiment of the utility model, the low-speed motion control method adopts the parallel processing mode of the controller memory and the LCOS board memory; the storage points of the controller memory and the LCOS board memory are both N; uploading 2 x N pieces of two-dimensional physical coordinate data in the memory of the controller; and uploading the number data of 2 × N graphic blocks in the LCOS board memory.
The parallel processing mode of the controller memory and the LCOS board memory in the low-speed motion control method comprises the following specific steps:
when the data updating device works, the data in the first memory is executed, after the data in the first memory is executed, an instruction is sent to the controller, the data in the first memory is updated, and meanwhile, the workbench does not stop working and continues to execute the data in the second memory; and after the data in the second memory block is executed, sending an instruction to the controller to update the data in the second memory block, and continuously executing the data in the first memory block without stopping the work of the workbench, and sequentially circulating.
On the other hand, the embodiment of the utility model discloses a be applied to the low-speed motion control system of LCOS system phase modulation workstation, as shown in fig. 2, the low-speed motion control system includes workstation, motion controller, motor drive circuit and motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench and sending an exposure switching instruction to the LCOS system phase modulation device;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
Furthermore, the low-speed motion control system also comprises a detection device which is used for monitoring the motion state information of the motor in real time and sending the motion position and the motion speed of the motor to the motion controller.
The workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
The low-speed motion control system of the workbench is applied to the phase modulation process of the LCOS system; the phase modulation process of the LCOS system is realized by a high-speed exposure patterning liquid crystal photo-alignment device, as shown in fig. 3, which includes an illumination component, a polarization pattern generation component, an imaging detection component, a focal length servo system and a motion control component, which are connected in sequence;
the illumination component is used for providing a light source for continuous stroboscopic exposure and realizing single-polarization collimation uniform surface light spots;
the polarization pattern generating component comprises a quarter-wave plate and a phase modulator which are connected in sequence and is used for outputting a pixilated programmable polarization pattern to a workpiece; the phase modulator is connected with the imaging detection component; the phase modulation device is a liquid crystal phase modulation device and is used for loading different phases to each pixel;
an imaging detection component for detecting the generated pattern imaging; the focal length servo system comprises a normally open light source insensitive to the light polarization sensitive material and a vertical direction correction assembly, and is used for correcting the defocusing phenomenon generated by movement;
and the motion control component is used for adjusting the spatial position of the workbench loaded with the light polarization sensitive material so as to realize light field splicing.
In an embodiment of the present invention, the illumination component is a pulsed light source, specifically, a pulsed laser; in other alternative embodiments the illumination means may also be a continuous light source with a controllable barrier system; the pulse width of the pulse laser generated by the lighting component is in the range of picoseconds to seconds, and the wavelength of the pulse laser is 340nm to 600 nm; the energy per unit area of the pulse light source is higher than the threshold energy of the optical polarization sensitive material on the liquid crystal substrate and lower than the damage threshold of the phase modulation device.
In other alternative embodiments, the pulsed light source may also be generated by a continuous laser plus mechanical or electro-optical barrier, or by a pulsed LED or continuous LED plus controllable barrier system.
Preferably, the pulse width of the pulse laser is less than or equal to the image holding time of the phase modulation device, and when one image of the phase modulation device is held, at least one pulse laser peak is irradiated onto the phase modulation device.
The embodiment of the utility model provides an optical wavelength that the laser instrument sent is 442nm, the monopulse energy is 0.2mJ, and the pulsewidth is 10ns, is pulse light and S polarization, and the adjustment of collimating is carried out through expanding the beam system, after the polarizer again, forms a facula diameter and is 2cm, and the divergence angle is less than 10mrad, and S polarization, light intensity uniformity is superior to the even facula of 80% collimation.
Specifically, in an embodiment of the present invention, the illumination component includes a collimating assembly and a polarizer; the collimating component and the polarizing plate form a collimating polarizing component.
The collimation assembly is used for adjusting the linear light source or the point light source into a parallel surface light source and outputting the parallel surface light source to the polarization image generation component;
the polarizer is connected with the collimation assembly and is used for controlling the initial polarization direction of light and generating a surface light source with any polarization direction within the range of 0-179 degrees.
In the embodiment of the present invention, the phase modulation device is a phase difference adjustable pixel type phase retarder; reflecting the polarized surface light source into light spots containing different polarization information and transmitting the light spots to the light splitting component; the phase delay modulation of the phase modulation device on the pulse light source is more than 2 pi; the single gray level controlled by a computer program has the phase modulation precision superior to 0.01 pi so as to realize random phase delay modulation in one period; the phase delay amount drift of the phase modulation device is less than 0.005 pi.
Further, the imaging detection assembly further comprises a miniature imaging component;
the miniature imaging component is used for carrying out miniature on the polarization pattern output by the polarization pattern generating component and writing the polarization pattern into the light polarization sensitive material;
the miniature imaging component comprises an imaging objective lens group, the main shaft direction of the optical path of the imaging objective lens group is vertical to the workbench 6, and the motor drives the imaging objective lens group to vertically move, so that a focusing surface is formed on the workbench.
In the embodiment of the present invention, the working table is disposed below the imaging objective lens group and has a two-dimensional motion track for bearing the light polarization sensitive material and driving the light polarization sensitive material to move in a two-dimensional plane under the driving of the motion control component, so that the surface of the light polarization sensitive material is always kept on the focal plane of the imaging objective lens group;
the motion control component is connected with the miniature imaging component and is used for splicing the miniature polarization pattern light field.
The imaging detection assembly comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing film, a first lens and a first imaging CCD which are sequentially connected;
the front focal plane of the imaging objective group is positioned near the back focal plane of the tube lens; the imaging surface of the first imaging CCD is positioned on the front focal surface of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror.
As a further improvement of the embodiment of the present invention, the focal length servo system includes a detection light source, a second lens, a second dichroic plate, an imaging objective lens group, a second imaging CCD, and a motor, which are connected in sequence;
the detection light source is positioned on the front focal plane of the second lens; the second light splitting sheet is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; a motor-driven imaging objective lens group;
the first imaging CCD receives the reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the phase modulator form conjugate images.
In the embodiment of the present invention, the quarter-wave plate is disposed between the phase modulator and the imaging detection module; the phase modulator 22 is a liquid crystal spatial light modulator, and is a phase difference adjustable pixel type phase retarder; the polarization rotation direction is one half/2; the polarization direction of incident light, the crystal axis direction of the phase modulation device and the crystal axis direction of the quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In another practical way, the polarization pattern generation component comprises a first quarter-wave plate, a phase modulation device and a second quarter-wave plate which are connected in sequence; the number of quarter-wave plates may not be unique.
Wherein, the major axis direction of the first quarter-wave plate, the crystal axis direction of the phase modulation device and the crystal axis direction of the first quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In the embodiment of the present invention, the motion control unit further includes a controller, a motor driving device, and a motor detecting device, wherein the controller is configured to convert the collected light path data into a control signal and send the control signal to each executing unit;
the controller comprises a motion control module, and the motion control module comprises a workbench motion control unit;
the motor detection device is used for monitoring the motion of the motor in real time and sending the motion position and the motion speed of the motor to the motion control module;
and the workbench motion control unit is used for controlling the light polarization sensitive material to move in a two-dimensional plane so as to realize the splicing of the polarized light fields or the interconnection of different polarized light fields through the pattern splicing assembly.
In some embodiments, to address the problem of generating arbitrary polarization orientations, a polarization pattern generation component, comprising a quarter-wave plate and a phase modulator connected in series, is used to generate a pattern of arbitrary polarization distribution; the phase modulation device regulates and controls the polarization level of each pixel point through voltage, and each pixel point determines the size of the voltage through different gray scale information, so that the regulation and control of the gray scale image on the polarization information are realized. The gray scale map can be written in real time or pre-loaded; the phase modulation device can be but is not limited to an ultra-high speed liquid crystal spatial light modulator, and can be used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized. The resolution of the original polarized light field is determined by the pixel size of the liquid crystal spatial light modulator.
The specific process of forming the polarization pattern based on the phase modulation device is as follows: the fast axis directions of the first quarter-wave plate and the second quarter-wave plate are orthogonal and form 45-degree angles with the main axis direction of the liquid crystal arrangement of the phase modulator respectively. After the collimated light spot passes through the first quarter-wave plate, the collimated light spot is incident at an included angle of 3 degrees with the normal of the phase modulation device, the phase modulation device is uniformly irradiated, the phase modulation device adopted in the embodiment is an LCOS device, the working frequency is 50Hz to 400Hz, and the damage threshold of the pulse laser is more than 300mJ/cm210ns, 1920 x 1080 pixels, 8 microns of single pixel size, 1.54cm x 0.86cm of the size of the whole phase modulation device, and the phase modulation precision is better than 0.03 pi when the phase modulation amount is larger than 2 pi for 442 nm.
The light splitting component is respectively connected with the miniature imaging component and the imaging detection component and is used for filtering light with specified wave bands to respectively enter the miniature imaging component and the imaging detection component;
the motion control part also comprises a pattern splicing assembly, and the pattern splicing assembly is used for splicing the miniature polarization pattern light field.
The embodiment of the present invention provides a control logic specifically comprising: the control software in the industrial personal computer transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, and the motor driver controls the motion of the motor according to the received control signal; the detection device is responsible for monitoring the motion of the motor in real time and sending the motion position and the motion speed of the motor to the motion control module; and the motion control module feeds back the current position and speed of the workbench to the software.
The phase modulator LCOS in the optical system is connected with the industrial personal computer through a data transmission line, so that the control software can transmit phase diagram data to the LCOS. The motion control card is connected with the laser through a trigger line and controls the light emission of the laser by sending a pulse signal.
Accordingly, a high-speed exposure patterned liquid crystal photoalignment method, comprising the steps of:
s1, adjusting the linear light source or point light source emitted by the light source into a collimated polarized light source through a polarizing collimator;
s2, loading corresponding phases by a phase modulation device of the polarization pattern generation component according to the pattern information, and reflecting the polarization surface light source into light spots containing different polarization information to transmit the light spots to the light splitting component;
s3, the light splitting component transmits the light with polarization information to the imaging detection assembly;
s4, adjusting the distance between the imaging objective lens group and the light polarization sensitive material surface by the servo focusing system to ensure that the focal plane of the imaging objective lens group is always kept at the light polarization sensitive material surface;
s5, recording the single light control orientation on the light polarization sensitive material;
and S6, moving the workbench carrying the light polarization sensitive material to the next designated position for the next pattern light field recording.
In the embodiment of the present invention, the following steps are further included after step S3: the miniature imaging component forms a fixed miniature multiplying power through the ratio of the focal lengths of the cylindrical lens and the imaging objective lens group, and miniature the polarization pattern output by the phase modulation component so as to output a polarization pattern light field.
Further, the high-speed exposure patterned liquid crystal photoalignment method further includes, after the step S6:
and S7, splicing each orientation unit together to form the optical orientation structure with large-area polarization light pattern on the optical polarization sensitive material.
Step S2 is to adjust the polarization information of each pixel in each sub-image by using a gray scale image, specifically including that the phase modulation device adjusts the polarization level of each pixel by using voltage, and each pixel determines the magnitude of the voltage by using different gray scale information, so as to adjust and control the polarization information by using the gray scale image;
the gray-scale image is written in real time or pre-loaded;
the phase modulation device is a high-speed liquid crystal phase modulation device and is used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized.
Preferably, the wavelength of light emitted by the light source is detected to be a value outside the polarization photosensitive absorption wavelength region; in step S4, detecting that the wavelength of light emitted from the light source is any value between 550nm and 650 nm;
the second lens reflects the light spots projected to the light polarization sensitive material surface to the second imaging CCD, the Z-axis servo focusing position is mapped through the light spot diameter, the vertical height of the Z-axis lens is adjusted, the light spot diameter in the second imaging CCD can be always kept to be R, and whether the light polarization sensitive material surface is on the focusing surface of the objective lens or not is judged by detecting the size of the light spots projected to the light polarization sensitive material surface through the second imaging CCD.
In an embodiment of the present invention, after the step S6 of recording the single polarization pattern on the light polarization sensitive material, the workbench carrying the light polarization sensitive material is moved to the next designated position for the next alignment, which is specifically realized by the following steps:
the controller transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, the motor driver controls the motion of the motor according to the received control signal, and the detection device is responsible for monitoring the motion of the motor in real time and transmitting the motion position and the motion speed of the motor to the motion control module; and then the motion control module feeds back the current position and the speed of the workbench to the controller.
After the single light-operated orientation is recorded on the light polarization sensitive material, the moving distance of the workbench carrying the light polarization sensitive material to the next specified position is the size of the single orientation unit through the motion control module, and the moving mode is that the workbench moves and scans line by line in sequence; specifically, the time of each moving step is integral multiple of the pulse width of the pulse laser, and the same pattern light field can be exposed by using multiple laser pulses.
The relationship between the pulse laser frequency and the phase modulation device refresh frequency is shown in fig. 4, the pulse laser frequency corresponds to the phase modulation device frequency, and the pulse width is less than or equal to the image maintaining time of the phase modulation device, that is, when an image of the phase modulation device is maintained, a pulse laser 11 peak is irradiated on the phase modulation device.
In the image maintaining time of the phase modulation device, a plurality of pulse laser peaks can be irradiated on the receiving window of the phase modulation device, so that the single exposure energy can be enhanced.
The wavelength absorption characteristics of the photoalignment material used in this example are shown in fig. 5; the adopted material is an azo photo-alignment material, corresponding to the material 3 in fig. 5, a better photo-alignment effect can be obtained when laser with the wavelength of 442nm is used for illumination, pulse laser light sources with different wavelengths can be selected according to the photo-alignment material, or corresponding photo-alignment materials can be selected according to the pulse laser light sources with different wavelengths, a miniature part adopts a miniature objective lens with the power of 20 times, namely, the area of a light spot is reduced by 400 times, the energy density is improved by 400 times, the size of a single pixel after the miniature is only 0.4 micron, and the exposure direct writing of high-precision pattern information can be realized. At this time, the photosensitive amount of the photo-alignment material was 50mJ/cm2Above the photoalignment energy threshold and below the damage threshold.
It should be noted that the "stroboscopic" defined in the present invention is to emit light and/or quench light at a certain preset frequency.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model relates to a be applied to the low-speed motion control system of LCOS system phase modulation workstation and realized the accurate control to the motion of workstation, further utilize the high-speed exposure patterning liquid crystal photo-orientation method of pulse laser illumination to control the phase change in single exposure area in real time, accomplish the exposure of high accuracy high resolution;
2. the utility model utilizes the characteristics of large pulse laser energy, short pulse width and high repetition frequency, realizes the recording of single-frame polarization patterns based on single pulse, and realizes the advantages of large exposure area, high efficiency and good reliability;
3. the utility model adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-breadth writing;
4. the utility model adopts the light energy not concentrated, and eliminates the abutted seam between each light-operated orientation view field by controlling the relation between the size of a single view field and the single translation distance, thereby improving the resolution;
5. the utility model has the advantages of single exposure polarization pattern high accuracy is controllable wantonly, the large tracts of land is write, efficient, has important meaning to design and preparation jumbo size, high accuracy, multi-functional liquid crystal optical device.
Above-mentioned all optional technical scheme can adopt arbitrary combination to form the optional embodiment of this utility model, and the repeated description is no longer given here.
It should be noted that: in the motion control system provided in the above embodiment, when executing a motion control method, only the division of the above functional modules is taken as an example, and in practical applications, the above function distribution may be completed by different functional modules according to needs, that is, the internal structure of the system is divided into different functional modules to complete all or part of the above described functions. In addition, the embodiments of the motion control system and the motion control method provided by the embodiments belong to the same concept, and specific implementation processes thereof are described in the embodiments of the methods for details, which are not described herein again.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, where the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (3)
1. A low-speed motion control system applied to a phase modulation workbench of an LCOS system is characterized by comprising the workbench, a motion controller, a motor drive circuit and a motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench and sending an exposure switch instruction to the LCOS system phase modulation device;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
2. The system of claim 1, further comprising a detection device for monitoring the motion status of the motor in real time and sending the motion position and speed of the motor to the motion controller.
3. The system of claim 1, wherein the stage carries light polarization sensitive material in two dimensions to further achieve polarized light field splicing or interconnection between differently polarized light fields.
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| CN201921983616.XU CN211603794U (en) | 2019-11-15 | 2019-11-15 | Low-speed motion control system applied to LCOS system phase modulation workbench |
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| CN201921983616.XU CN211603794U (en) | 2019-11-15 | 2019-11-15 | Low-speed motion control system applied to LCOS system phase modulation workbench |
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