CN112817181A - Motion control system - Google Patents

Motion control system Download PDF

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Publication number
CN112817181A
CN112817181A CN201911124168.2A CN201911124168A CN112817181A CN 112817181 A CN112817181 A CN 112817181A CN 201911124168 A CN201911124168 A CN 201911124168A CN 112817181 A CN112817181 A CN 112817181A
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China
Prior art keywords
imaging
motion
light
motion control
motor
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CN201911124168.2A
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Chinese (zh)
Inventor
黄文彬
郑致刚
张新君
王骁乾
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East China University of Science and Technology
Suzhou University
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East China University of Science and Technology
Suzhou University
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Priority to CN201911124168.2A priority Critical patent/CN112817181A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention discloses a motion control system, which comprises a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller comprises a focusing plane motion control unit and a workbench motion control unit, and the focusing plane motion control unit and the workbench motion control unit are respectively used for controlling an imaging objective lens to vertically move up and down, focus through an imaging detection part and always keep a focusing plane on the surface of a light polarization sensitive material and control the workbench carrying the light polarization sensitive material to move on a two-dimensional plane; the motor driving device is used for driving the motor to drive the focusing plane and the workbench to move. The invention adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, and has great significance for realizing large-format writing.

Description

Motion control system
Technical Field
The invention relates to the field of liquid crystal alignment control, in particular to a motion control system in a patterned liquid crystal photo-alignment device.
Background
Liquid crystals have wide applications in the fields of information display, optics, photonics devices and the like; the liquid crystal can further realize amplitude, phase and polarization modulation of light according to designed orientation arrangement, and plays an important role in the applications, so the orientation arrangement control mode of the liquid crystal becomes a research hotspot of academia and industrial production, and the prior art disclosed at present is mainly a photoalignment technology.
Photoalignment is a non-contact liquid crystal aligning method which is newly developed, and the photoalignment technology is divided into four types at present, wherein the photoalignment technology utilizes photosensitive materials to perform oriented photocrosslinking, isomerization or photocracking reaction under the irradiation of ultraviolet or blue light polarized light to obtain the required arrangement: mask overlay polarization patterning techniques, periodic liquid crystal alignment techniques obtained by holographic interference methods, dynamic mask photo-alignment techniques based on DMDs, and also polarization alignment techniques based on spatial modulators.
The polarization orientation technology based on the liquid crystal spatial modulator is a programmable control device capable of modulating the phase and amplitude of incident light, and pattern recording of different orientation arrangements of liquid crystals in different selected areas can be realized by single projection orientation.
Patent application No. CN201820881217.1 discloses a photo-alignment apparatus for realizing arbitrary distribution by one exposure, which introduces a photo-alignment method for single exposure using a pixelated electrically controlled phase delay device, wherein the phase delay of each pixel of the pixelated electrically controlled phase delay device is controlled by a corresponding voltage respectively for generating the phase delay of arbitrary pattern distribution, but the problem of generating a phase pattern by one exposure is that the data size is proportional to the format size, which limits the format size of the prepared device, and also considers that a high-precision high-resolution photo-alignment pattern cannot be generated.
Foreign beam corporation has provided an apparatus and method for photoalignment by irradiating LCOS phase modulation devices with continuous laser light (De Sio L, Roberts D E, Liao Z, et al, digital polarization altering geographic phase Optics [ J ] Optics express, 2016, 24 (16): 18297 18306.), they have adopted low-energy continuous laser light to expose, considering the information amount of the image and the properties of exposure uniformity, material heat capacity, thermal diffusion, etc., tens of seconds to tens of minutes are required for exposure to a single field of view, and the exposure breadth is limited by the image information and cannot photoalign a large area breadth.
Therefore, a device capable of realizing large-scale patterned liquid crystal photo-alignment is desired.
Disclosure of Invention
In order to solve the problems of the prior art, on one hand, the invention discloses a motion control system which comprises a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller is used for converting collected light path data comprising motion information into control signals and sending the control signals to each execution component;
the motion controller comprises a focusing plane motion control unit and a workbench motion control unit;
the focusing plane motion control unit is used for controlling the imaging objective lens to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component;
the workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields;
the motor driving device is used for driving the motor to drive the focusing plane and the workbench to move.
As a further improvement of the embodiment of the present invention, a main axis direction of an optical path of the imaging objective lens group is perpendicular to the worktable, and the motor drives the imaging objective lens group to move up and down in a vertical direction, so as to form the focusing plane on the worktable.
As a further improvement of the embodiment of the present invention, the workbench is disposed below the imaging objective lens group and has a two-dimensional motion track, which is used for bearing the light polarization sensitive material and driving the light polarization sensitive material to move in a two-dimensional plane under the driving of the motion control component, so that the surface of the light polarization sensitive material is always kept at the focusing plane of the imaging objective lens group.
As a further improvement of the embodiment of the present invention, the motion control system further includes a detection device, and the detection device is configured to monitor the motion of the motor in real time and send the motion position and the motion speed of the motor to the motion controller.
As a further improvement of the embodiment of the present invention, the motion controller is configured to receive the acquired two-dimensional physical coordinate signal of the stage and send an exposure switching command to the polarization pattern generation unit.
As a further improvement of the embodiment of the present invention, the worktable is provided with a scanning shaft, and the scanning shaft comprises a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
As a further improvement of the embodiment of the present invention, the motion control system further includes a detection device for monitoring the motion state information of the motor in real time and sending the motion position and speed of the motor to the motion controller;
the workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
As a further improvement of the embodiment of the present invention, the imaging detection unit includes a first light splitter, a tube lens, an imaging objective lens group, a polarizing plate, a first lens, and a first imaging CCD, which are connected in sequence; the front focal plane of the imaging objective group is positioned near the rear focal plane of the tube mirror; the imaging surface of the first imaging CCD is positioned on the front focal plane of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
As a further improvement of the embodiment of the present invention, the imaging detection assembly is connected to the miniature imaging component, and is used for carrying out miniature on the polarization pattern output by the polarization pattern generation component and writing the polarization pattern into the light polarization sensitive material;
the polarization pattern generation component comprises a phase modulator for outputting a pixelated programmable polarization pattern; or the electric adjustable polaroid is rotated to the corresponding polarization angle by controlling the rotating motor, and the polarized light with the fixed polarization angle is generated.
As a further improvement of the embodiment of the present invention, the motion control system is connected to a focus servo system, and the focus servo system is used for correcting the defocus phenomenon generated by the motion;
the focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
the detection light source is positioned on the front focal plane of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
the first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-format writing;
2. because the light energy is not concentrated, the invention proposes that the abutted seams between each light-operated orientation view field are eliminated and the resolution is improved by controlling the relation between the size of a single view field and the single translation distance;
3. the invention has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of single-exposure polarization patterns, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices;
4. the invention utilizes the imaging detection component to enter the first imaging CCD through the first lens by the image reflected by the surface of the light polarization sensitive material, and judges whether the focal plane of the objective lens is on the surface of the photosensitive material by observing the contrast of the outline of the imaging light spot in the first imaging CCD, thereby realizing the accurate detection of the imaging and having great significance for realizing the liquid crystal light orientation with large breadth, high efficiency and good reliability;
5. the invention adopts the assistance of a focusing servo system to control the objective lens to move up and down, so as to focus in real time and improve the resolution.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a motion control system according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a patterned liquid crystal photo-alignment device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing the selection of the pulse laser frequency and the refresh frequency of the phase modulation device of the high-speed exposure patterned liquid crystal photo-alignment device according to the embodiment of the present invention;
fig. 4 is a schematic representation of the peak absorption characteristics of a light polarization sensitive material used in an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In one aspect, the present invention discloses a motion control system, as shown in fig. 1, comprising a table, a motion controller, a motor, and a motor driving device;
the motion controller is used for converting the collected light path data including the motion information into control signals and sending the control signals to each execution component; specifically, the motion controller receives the acquired two-dimensional physical coordinate signal of the workbench and sends an exposure switching instruction to the polarization pattern generation component.
In the embodiment of the invention, the workbench is provided with a scanning shaft, and the scanning shaft comprises a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time; the location may be located in two-dimensional physical coordinates.
In an embodiment of the present invention, the motion controller includes a focus plane motion control unit and a stage motion control unit;
the focusing plane motion control unit is used for controlling the imaging objective lens group to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component; specifically, the main axis direction of the optical path of the imaging objective lens group is perpendicular to the workbench, and the motor drives the imaging objective lens group to vertically move up and down to form the focusing plane on the workbench.
The workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields; the workbench is arranged below the imaging objective lens group and is provided with a two-dimensional motion track which is used for bearing the light polarization sensitive material and driving the light polarization sensitive material to move on a two-dimensional plane under the drive of the motion control component, so that the surface of the light polarization sensitive material is always kept on the focusing plane of the imaging objective lens group.
The motor driving device is used for driving the motor to drive the focusing plane and the workbench to move; it should be noted that, in the embodiment of the present invention, the concept of "focal plane" is introduced for the description of the focused imaging, and the focal plane is a functional plane formed on the mechanical structure table.
In the embodiment of the invention, the motion control system further comprises a detection device, and the detection device is used for monitoring the motion of the motor in real time and sending the motion position and the motion speed of the motor to the motion controller.
The workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
Specifically, the imaging detection component comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing plate, a first lens and a first imaging CCD which are connected in sequence; wherein, the front focal plane of the imaging objective group is positioned near the back focal plane of the tube lens; the imaging surface of the first imaging CCD is positioned on the front focal surface of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
Further, the imaging detection assembly is connected with the miniature imaging component and used for carrying out miniature on the polarization pattern output by the polarization pattern generating component and writing the polarization pattern into the light polarization sensitive material;
in the embodiment of the invention, the liquid crystal optical orientation polarization pattern generation component comprises a quarter-wave plate and a phase modulator which are connected in sequence and used for outputting a pixilated programmable polarization pattern; the phase modulator is connected with the imaging detection component; the phase modulation device is a liquid crystal phase modulation device and is used for loading different phases to each pixel.
In other alternative embodiments, the liquid crystal photoalignment polarization pattern generation component comprises a digitally controlled micromirror DMD, a computer control system, an electrically adjustable polarizer, and a beam splitter prism;
the electrically adjustable polaroid and the beam splitter prism are positioned on the horizontal central axis of the digital control micromirror DMD in an open state;
and the computer control system is used for rotating the electrically adjustable polaroid to a corresponding polarization angle by controlling the rotating motor according to the gray value of the numerical control micro-mirror DMD refreshing graph to generate the polarized light with a fixed polarization angle.
In the embodiment of the invention, the motion control system is connected with the focal length servo system, and the focal length servo system is used for correcting the defocusing phenomenon generated by motion;
specifically, the focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
the detection light source is positioned on the front focal surface of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
the first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
Specifically, the embodiment of the present invention is applied to a patterned liquid crystal photo-alignment device, as shown in fig. 2, including an illumination component, a polarization pattern generation component, an imaging detection component, a focal length servo system, and a motion control component, which are connected in sequence;
the illumination component is used for providing a light source for continuous stroboscopic exposure and realizing single-polarization collimation uniform surface light spots;
the polarization pattern generating component comprises a quarter-wave plate and a phase modulator which are connected in sequence and is used for outputting a pixilated programmable polarization pattern to a workpiece; the phase modulator is connected with the imaging detection component; the phase modulation device is a liquid crystal phase modulation device and is used for loading different phases to each pixel;
an imaging detection component for detecting the generated pattern imaging; the focal length servo system comprises a normally open light source insensitive to the light polarization sensitive material and a vertical direction correction assembly, and is used for correcting the defocusing phenomenon generated by movement;
and the motion control component is used for adjusting the spatial position of the workbench loaded with the light polarization sensitive material so as to realize light field splicing.
In the embodiment of the present invention, the illumination means is a pulsed light source, specifically, a pulsed laser 11; in other alternative embodiments the illumination means may also be a continuous light source with a controllable barrier system; the pulse width of the pulse laser generated by the lighting component is in the picosecond to second level, and the wavelength of the pulse laser 11 is 340nm to 600 nm; the energy per unit area of the pulse light source is higher than the threshold energy of the optical polarization sensitive material on the liquid crystal substrate and lower than the damage threshold of the phase modulation device.
In other alternative embodiments, the pulsed light source may also be generated by a continuous laser plus mechanical or electro-optical barrier, or by a pulsed LED or continuous LED plus controllable barrier system.
Preferably, the pulse width of the pulse laser is less than or equal to the image holding time of the phase modulation device, and when one image of the phase modulation device is held, at least one pulse laser peak is irradiated onto the phase modulation device.
In the embodiment of the invention, the wavelength of light emitted by the laser is 442nm, the single pulse energy is 0.2mJ, the pulse width is 10ns, the light is pulse light and S polarization, the light is collimated and adjusted by the beam expanding system, and after the light passes through the polarizer, a collimated uniform light spot with the light spot diameter of 2cm, the divergence angle of less than 10mrad, the S polarization and the light intensity uniformity of better than 80 percent is formed.
Specifically, in an embodiment of the present invention, the illumination component comprises a collimating assembly and a polarizer; the collimating component and the polarizing plate form a collimating polarizing component.
The collimation assembly is used for adjusting the linear light source or the point light source into a parallel surface light source and outputting the parallel surface light source to the polarization image generation component;
the polarizer is connected with the collimation assembly and is used for controlling the initial polarization direction of light and generating a surface light source with any polarization direction within the range of 0-179 degrees.
In the embodiment of the invention, the phase modulation device is a pixel type phase delayer with adjustable phase difference; reflecting the polarized surface light source into light spots containing different polarization information and transmitting the light spots to the light splitting component; the phase delay modulation of the phase modulation device on the pulse light source is more than 2 pi; the single gray level controlled by a computer program has the phase modulation precision superior to 0.01 pi so as to realize random phase delay modulation in one period; the phase delay amount drift of the phase modulation device is less than 0.005 pi.
In an embodiment of the invention, the quarter-wave plate is arranged between the phase modulator and the imaging detection assembly; the phase modulator 22 is a liquid crystal spatial light modulator, and is a pixel type phase retarder with adjustable phase difference delta; the polarization rotation direction is one-half δ/2; the polarization direction of incident light, the crystal axis direction of the phase modulation device and the crystal axis direction of the quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In another practical way, the polarization pattern generation component comprises a first quarter-wave plate, a phase modulation device and a second quarter-wave plate which are connected in sequence; the number of quarter-wave plates may not be unique.
Wherein, the major axis direction of the first quarter-wave plate, the crystal axis direction of the phase modulation device and the crystal axis direction of the first quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In some embodiments, to address the problem of generating arbitrary polarization orientations, a polarization pattern generation component, comprising a quarter-wave plate and a phase modulator connected in series, is used to generate a pattern of arbitrary polarization distribution; the phase modulation device regulates and controls the polarization level of each pixel point through voltage, and each pixel point determines the size of the voltage through different gray scale information, so that the regulation and control of the gray scale image on the polarization information are realized. The gray scale map can be written in real time or pre-loaded; the phase modulation device can be but is not limited to an ultra-high speed liquid crystal spatial light modulator, and can be used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized. The resolution of the original polarized light field is determined by the pixel size of the liquid crystal spatial light modulator.
The specific process of forming the polarization pattern based on the phase modulation device is as follows: the fast axis directions of the first quarter-wave plate and the second quarter-wave plate are orthogonal and form 45-degree angles with the main axis direction of the liquid crystal arrangement of the phase modulator respectively. After passing through the first quarter-wave plate, the collimated light spot is incident at an included angle of 3 degrees with the normal of the phase modulation device, the phase modulation device is irradiated uniformly, the phase modulation device adopted in the embodiment is an LCOS device, the working frequency is 50Hz to 400Hz, and the damage threshold of the pulse laser 11 is more than 300mJ/cm210ns, 1920 × 1080 pixels, 8 microns in size of a single pixel, 1.54cm × 0.86cm in size of the whole phase modulation device 22, and the phase modulation precision is better than 0.03 pi for a phase modulation amount of 442nm larger than 2 pi.
The control logic in the embodiment of the invention is specifically as follows: the control software in the industrial personal computer transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, and the motor driver controls the motion of the motor according to the received control signal; the detection device is responsible for monitoring the motion of the motor in real time and sending the motion position and the motion speed of the motor to the motion control module; and the motion control module feeds back the current position and speed of the workbench to the software.
The phase modulator LCOS in the optical system is connected with the industrial personal computer through a data transmission line, so that the control software can transmit phase diagram data to the LCOS. The motion control card is connected with the laser through a trigger line and controls the light emission of the laser by sending a pulse signal.
In another aspect, the present invention also provides a high-speed exposure patterned liquid crystal photoalignment method, comprising the steps of:
s1, adjusting the linear light source or point light source emitted by the light source into a collimated polarized light source through a polarizing collimator;
s2, loading corresponding phases by a phase modulation device of the polarization pattern generation component according to the pattern information, and reflecting the polarization surface light source into light spots containing different polarization information to transmit the light spots to the light splitting component;
s3, the light splitting component transmits the light with polarization information to the imaging detection assembly;
s4, adjusting the distance between the imaging objective lens group and the light polarization sensitive material surface by the servo focusing system to ensure that the focal plane of the imaging objective lens group is always kept at the light polarization sensitive material surface;
s5, recording the single light control orientation on the light polarization sensitive material;
and S6, moving the workbench carrying the light polarization sensitive material to the next designated position for the next pattern light field recording.
In the embodiment of the present invention, step S3 is followed by the following steps: the miniature imaging component forms a fixed miniature multiplying power through the ratio of the focal lengths of the cylindrical lens and the imaging objective lens group, and miniature the polarization pattern output by the phase modulation component so as to output a polarization pattern light field.
Further, the high-speed exposure patterned liquid crystal photoalignment method further includes, after the step S6:
and S7, splicing each orientation unit together to form the optical orientation structure with large-area polarization light pattern on the optical polarization sensitive material.
Step S2 is to adjust the polarization information of each pixel in each sub-image by using a gray scale image, specifically including that the phase modulation device adjusts the polarization level of each pixel by using voltage, and each pixel determines the magnitude of the voltage by using different gray scale information, so as to adjust and control the polarization information by using the gray scale image;
the gray-scale image is written in real time or pre-loaded;
the phase modulation device is a high-speed liquid crystal phase modulation device and is used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized.
Preferably, the wavelength of light emitted by the light source is detected to be a value outside the polarization photosensitive absorption wavelength region; in step S4, detecting that the wavelength of light emitted from the light source is any value between 550nm and 650 nm;
the second lens reflects the light spots projected to the light polarization sensitive material surface to the second imaging CCD, the Z-axis servo focusing position is mapped through the light spot diameter, the vertical height of the Z-axis lens is adjusted, the light spot diameter in the second imaging CCD can be always kept to be R, and whether the light polarization sensitive material surface is on the focusing surface of the objective lens or not is judged by detecting the size of the light spots projected to the light polarization sensitive material surface through the second imaging CCD.
In the embodiment of the present invention, after the single polarization pattern is recorded on the light polarization sensitive material, the stage carrying the light polarization sensitive material is moved to the next designated position for the next alignment in step S6, which is implemented by the following steps:
the controller transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, the motor driver controls the motion of the motor according to the received control signal, and the detection device is responsible for monitoring the motion of the motor in real time and transmitting the motion position and the motion speed of the motor to the motion control module; and then the motion control module feeds back the current position and the speed of the workbench to the controller.
After the single light-operated orientation is recorded on the light polarization sensitive material, the moving distance of the workbench carrying the light polarization sensitive material to the next specified position is the size of the single orientation unit through the motion control module, and the moving mode is that the workbench moves and scans line by line in sequence; specifically, the time of each moving step is integral multiple of the pulse width of the pulse laser, and the same pattern light field can be exposed by using multiple laser pulses.
The relationship between the pulse laser frequency and the phase modulation device refresh frequency is shown in fig. 3, the pulse laser frequency corresponds to the phase modulation device frequency, and the pulse width is less than or equal to the image maintaining time of the phase modulation device, that is, when one image of the phase modulation device is maintained, one pulse laser peak irradiates the phase modulation device.
In the image maintaining time of the phase modulation device, a plurality of pulse laser peaks can be irradiated on the receiving window of the phase modulation device, so that the single exposure energy can be enhanced.
The wavelength absorption characteristics of the photoalignment material used in this example are shown in fig. 4; the adopted material is an azo photo-alignment material, corresponding to the material 3 in fig. 4, a better photo-alignment effect can be obtained when laser with the wavelength of 442nm is used for illumination, pulse laser light sources with different wavelengths can be selected according to the photo-alignment material, or corresponding photo-alignment materials can be selected according to the pulse laser light sources with different wavelengths, a miniature part adopts a miniature objective lens with the power of 20 times, namely, the area of a light spot is reduced by 400 times, the energy density is improved by 400 times, the size of a single pixel after the miniature is only 0.4 micron, and the exposure direct writing of high-precision pattern information can be realized. At this time, the photosensitive amount of the photo-alignment material was 50mJ/cm2Above the photoalignment energy threshold and below the damage threshold.
It should be noted that the "strobe" defined in the present invention is to emit light and/or quench light at a predetermined frequency.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-format writing;
2. because the light energy is not concentrated, the invention proposes that the abutted seams between each light-operated orientation view field are eliminated and the resolution is improved by controlling the relation between the size of a single view field and the single translation distance;
3. the invention has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of single-exposure polarization patterns, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices;
4. the invention utilizes the imaging detection component to enter the first imaging CCD through the first lens by the image reflected by the surface of the light polarization sensitive material, and judges whether the focal plane of the objective lens is on the surface of the photosensitive material by observing the contrast of the outline of the imaging light spot in the first imaging CCD, thereby realizing the accurate detection of the imaging and having great significance for realizing the liquid crystal light orientation with large breadth, high efficiency and good reliability;
5. the invention adopts the assistance of a focusing servo system to control the objective lens to move up and down, so as to focus in real time and improve the resolution.
All the above-mentioned optional technical solutions can be combined arbitrarily to form the optional embodiments of the present invention, and are not described herein again.
It should be noted that: in the motion control system provided in the above embodiment, when executing a motion control method, only the division of the above functional modules is taken as an example, and in practical applications, the above function distribution may be completed by different functional modules according to needs, that is, the internal structure of the system is divided into different functional modules to complete all or part of the above described functions. In addition, the embodiments of the motion control system and the motion control method provided by the embodiments belong to the same concept, and specific implementation processes thereof are described in the embodiments of the methods for details, which are not described herein again.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (10)

1. A motion control system is characterized by comprising a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller is used for converting collected light path data comprising motion information into control signals and sending the control signals to each execution component;
the motion controller comprises a focusing plane motion control unit and a workbench motion control unit;
the focusing plane motion control unit is used for controlling the imaging objective lens to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component;
the workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields;
the motor driving device is used for driving the motor to drive the focusing plane and the workbench to move.
2. The motion control system according to claim 1, wherein the principal axis direction of the optical path of the imaging objective lens group is perpendicular to the stage, and the motor drives the imaging objective lens group to move up and down in the vertical direction, forming the focusing plane on the stage.
3. The motion control system according to claim 2, wherein the stage is disposed below the imaging objective lens group and has a two-dimensional motion track for carrying the light polarization sensitive material and driving the light polarization sensitive material to move in a two-dimensional plane under the driving of the motion control component, so that the surface of the light polarization sensitive material is always kept at the focusing plane of the imaging objective lens group.
4. The motion control system of claim 1, further comprising a detection device for monitoring the motion of the motor in real time and sending the position and speed of the motion of the motor to the motion controller.
5. The motion control system of claim 1, wherein the motion controller is configured to receive the acquired two-dimensional physical coordinate signal of the stage and send an exposure switching command to the polarization pattern generation unit.
6. The motion control system of claim 1, wherein the table is provided with a scan axis, the scan axis including a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
7. The motion control system of claim 1, further comprising a detection device for monitoring the motion status information of the motor in real time and sending the motion position and speed of the motor to a motion controller;
the workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
8. The motion control system according to claim 1, wherein the imaging detection unit comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing plate, a first lens, a first imaging CCD, which are connected in sequence; the front focal plane of the imaging objective group is positioned near the rear focal plane of the tube mirror; the imaging surface of the first imaging CCD is positioned on the front focal plane of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
9. The motion control system of claim 1, wherein the imaging detection assembly is connected to a miniature imaging component for miniature polarization pattern output from the polarization pattern generation component and writing into the light polarization sensitive material;
the polarization pattern generation component comprises a phase modulator for outputting a pixelated programmable polarization pattern; or the electric adjustable polaroid is rotated to the corresponding polarization angle by controlling the rotating motor, and the polarized light with the fixed polarization angle is generated.
10. The motion control system of claim 1, wherein the motion control system is coupled to a focus servo for correcting motion-induced defocus;
the focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
the detection light source is positioned on the front focal plane of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
the first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
CN201911124168.2A 2019-11-15 2019-11-15 Motion control system Pending CN112817181A (en)

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Application Number Priority Date Filing Date Title
CN201911124168.2A CN112817181A (en) 2019-11-15 2019-11-15 Motion control system

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CN112817181A true CN112817181A (en) 2021-05-18

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