CN112946876B - Low-speed motion control method and system applied to DMD system workbench - Google Patents
Low-speed motion control method and system applied to DMD system workbench Download PDFInfo
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- CN112946876B CN112946876B CN201911262820.7A CN201911262820A CN112946876B CN 112946876 B CN112946876 B CN 112946876B CN 201911262820 A CN201911262820 A CN 201911262820A CN 112946876 B CN112946876 B CN 112946876B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
Abstract
The invention discloses a low-speed motion control method applied to a DMD system workbench, which sequentially uploads all monochromatic bitmaps in a monochromatic sequence file path to a DMD board memory; displaying a monochromatic bitmap stored in a memory of the DMD board card on the DMD panel, reading polarization angle data in the memory of the motion controller by the motion controller, and controlling an electric adjustable polarizer to rotate to a specified angle; the motion controller controls the pulse light source to be switched on and off to form primary exposure; and moving the workbench to a specified position corresponding to the next two-dimensional physical coordinate until the execution of the two-dimensional physical coordinate points of the whole large-format processing graph is finished. The invention realizes the accurate control of the movement of the workbench and has the advantages of large exposure area, high efficiency and good reliability.
Description
Technical Field
The invention relates to the field of liquid crystal orientation arrangement control, in particular to a low-speed motion control method and system applied to a DMD system workbench.
Background
The polarization orientation technology based on the liquid crystal spatial modulator is a programmable control device capable of modulating the phase and amplitude of incident light, and pattern recording of different orientation arrangements of liquid crystals in different selected areas can be realized by single projection orientation.
The photoalignment is a non-contact liquid crystal aligning method which is newly developed, and the photoalignment technology is divided into four types at present, wherein the photoalignment technology is that a photosensitive material is subjected to oriented photocrosslinking, isomerization or photocracking reaction under ultraviolet or blue light polarized light irradiation to obtain required arrangement: mask overlay polarization patterning techniques, periodic liquid crystal alignment techniques obtained by holographic interference methods, dynamic mask photo-alignment techniques based on DMDs, and also polarization alignment techniques based on spatial modulators.
The dynamic mask photo-alignment technology based on the DMD can quickly generate a required mask plate pattern by refreshing an intensity distribution diagram on the DMD, does not need to physically produce a new mask plate, is easier to realize alignment distribution of various shapes, but still uses a method of mechanically rotating a linear polarization film to control the polarization direction of light, so that multiple exposures are still needed to complete photo-alignment of complex patterns.
Therefore, a motion control system for a DMD system is desired to provide a device and method that can simultaneously satisfy high precision and large output polarization pattern.
Disclosure of Invention
In order to solve the problems in the prior art, on one hand, the embodiment of the invention discloses a low-speed motion control method applied to a workbench of a DMD system, and the low-speed motion control method comprises the following steps:
s1, performing data processing on the large-format processing graph to generate a corresponding gray graph;
s2, dividing the gray-scale graph into a plurality of gray-scale graph blocks, generating two-dimensional physical coordinates and graph block numbers corresponding to each gray-scale graph block, and recording the two-dimensional physical coordinates and the graph block numbers into a position file;
s3, decomposing each gray scale graphic block into single-color bitmaps with the same number as the gray scales according to the gray scales to generate a sequence file; each gray scale and the corresponding monochromatic bitmap have a corresponding position on the electric adjustable polarizer, and the corresponding position is recorded into a polarization angle file;
s4, reading the two-dimensional physical coordinates in the position file by a motion controller, and controlling a workbench to move to a specified position corresponding to the two-dimensional physical coordinates;
s5, finding a path corresponding to the monochrome sequence file in the sequence file according to the figure block number corresponding to the two-dimensional physical coordinate;
s6, sequentially uploading all the monochrome bitmaps in the monochrome sequence file path to a DMD board card memory;
s7, reading a corresponding polarization angle file according to the path of the monochrome sequence file, and writing the polarization angle into a memory of the motion controller according to the number of the monochrome sequence file;
s8, displaying a monochrome bitmap stored in a memory of the DMD board card on the DMD panel, reading polarization angle data in the memory of the motion controller by the motion controller, and controlling the electric adjustable polarizer to rotate to a specified angle;
s9, controlling a pulse light source switch by a motion controller to form primary exposure;
s10, repeating S8 and S9 until all the monochrome bitmaps stored in the DMD board memory and the polarization angle data in the controller memory are executed;
and S11, moving the workbench to a designated position corresponding to the next two-dimensional physical coordinate, and repeating the operations of S5-S10 until the two-dimensional physical coordinate points of the whole large-format processing graph are completely executed.
As a further improvement of the embodiment of the present invention, the dividing operation in step S1 specifically includes dividing the large-format processed pattern into M × N pattern blocks by a size not greater than the resolution of the field of view.
As a further improvement of the embodiments of the present invention, the size of the field resolution is DMD pixel width x pixel height.
As a further improvement of the embodiment of the present invention, in S11, a two-dimensional motion manner in which the workbench moves to a specified position corresponding to a next two-dimensional physical coordinate is consistent with an arrangement sequence of two-dimensional physical coordinate points in the location file, and when the two-dimensional physical coordinate points in the location file are arranged row by row, the motion workbench moves row by row; when the two-dimensional physical coordinate points are arranged in a row one by one, the moving workbench moves in a row one by one; and when the two-dimensional physical coordinate points are arranged randomly, the moving workbench moves randomly.
As a further improvement of the embodiment of the invention, the low-speed motion control method adopts a parallel processing mode of a controller memory and a DMD board memory; the storage points of the controller memory and the DMD board memory are both 2N; uploading 2 x N pieces of two-dimensional physical coordinate data in the memory of the controller; uploading 2 x N graphic block number data in the DMD board memory.
As a further improvement of the embodiment of the present invention, the parallel processing method of the controller memory and the DMD board memory in the low-speed motion control method specifically includes the following steps:
when the data updating device works, the data in the first memory is executed, after the data in the first memory is executed, an instruction is sent to the controller, the data in the first memory is updated, and meanwhile, the workbench does not stop working and continues to execute the data in the second memory; and after the data in the second memory block is executed, sending an instruction to the controller to update the data in the second memory block, and continuously executing the data in the first memory block without stopping the work of the workbench, and sequentially circulating.
On the other hand, the embodiment of the invention further discloses a low-speed motion control system applied to a workbench of a DMD system, wherein the low-speed motion control system comprises the workbench, a motion controller, a motor driving circuit and a motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench, sending a graphic refreshing command to the DMD system and sending a light-on command to the pulse light source;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
As a further improvement of the embodiment of the present invention, the low-speed motion control system further includes a detection device for monitoring the motion state information of the motor in real time and sending the motion position and the motion speed of the motor to the motion controller.
As a further improvement of the embodiment of the invention, the workbench carries the optical polarization sensitive material to move in a two-dimensional plane, so as to further realize splicing of polarized light fields or interconnection of different polarized light fields.
Compared with the prior art, the invention has the following beneficial effects:
1. the low-speed motion control system applied to the phase modulation workbench of the DMD system realizes the accurate control of the motion of the workbench;
2. the invention utilizes the characteristics of large pulse laser energy, short pulse width and high repetition frequency to realize single-frame polarization pattern recording based on a single pulse, thereby realizing the advantages of large exposure area, high efficiency and good reliability;
3. the invention adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-format writing;
4. because the light energy is not concentrated, the invention eliminates the abutted seams between each light-operated orientation view field and improves the resolution by controlling the relation between the size of a single view field and the single translation distance;
5. the invention has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of the polarization pattern, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a low-speed motion control system applied to a DMD system workbench according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a DMD-based patterned liquid crystal photo-alignment device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the path of incident collimated light according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of gray scale levels and polarization angles according to an embodiment of the present invention;
FIG. 5 is an example of photo-orientation generation according to an embodiment of the present invention;
fig. 6 is a schematic diagram of information interaction among a sequence file, a location file, and a polarization angle file according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
On one hand, the embodiment of the invention discloses a low-speed motion control method applied to a DMD system workbench, which comprises the following steps:
s1, performing data processing on the large-format processing graph to generate a corresponding gray-scale graph;
s2, dividing the gray scale graph into a plurality of gray scale graph blocks, generating two-dimensional physical coordinates and graph block numbers corresponding to each gray scale graph block, and recording the two-dimensional physical coordinates and the graph block numbers into a position file;
s3, decomposing each gray scale graphic block into single-color bitmaps with the same number as the gray scale according to the gray scale, and generating a sequence file; each gray scale and the corresponding monochromatic bitmap have a corresponding position on the electric adjustable polarizer, and the corresponding position is recorded into a polarization angle file;
s4, reading the two-dimensional physical coordinates in the position file by a motion controller, and controlling a workbench to move to a specified position corresponding to the two-dimensional physical coordinates;
s5, finding out a path corresponding to the monochromatic sequence file in the sequence file according to the number of the graphic block corresponding to the two-dimensional physical coordinate;
s6, sequentially uploading all the monochrome bitmaps in the monochrome sequence file path to a DMD board card memory;
s7, reading a corresponding polarization angle file according to the path of the monochrome sequence file, and writing the polarization angle into a memory of the motion controller according to the number of the monochrome sequence file;
s8, displaying a monochromatic bitmap stored in a memory of the DMD board card on the DMD board card, reading polarization angle data in the memory of the motion controller by the motion controller, and controlling the electric adjustable polarizer to rotate to a specified angle;
s9, controlling a pulse light source switch by a motion controller to form primary exposure;
s10, repeating S8 and S9 until all the monochromatic bitmaps stored in the DMD board card memory and the polarization angle data in the controller memory are executed;
and S11, moving the workbench to a designated position corresponding to the next two-dimensional physical coordinate, and repeating the operations of S5-S10 until the two-dimensional physical coordinate points of the whole large-format processing graph are completely executed.
The information interaction among the sequence file, the position file and the polarization angle file is shown in figure 6.
The dividing operation in step S1 specifically includes dividing the large-format processed pattern into M × N pattern blocks in a size not greater than the field resolution.
In particular, the size of the field resolution is pixel width by pixel height.
In the embodiment of the present invention, in S11, a two-dimensional motion manner in which the workbench moves to a specified position corresponding to a next two-dimensional physical coordinate is consistent with an arrangement sequence of two-dimensional physical coordinate points in the position file, and when the two-dimensional physical coordinate points in the position file are arranged row by row, the motion workbench moves row by row; when the two-dimensional physical coordinate points are arranged in a row one by one, the moving workbench moves in a row one by one; when the two-dimensional physical coordinate points are arranged randomly, the moving workbench moves randomly.
In the embodiment of the invention, the low-speed motion control method adopts a parallel processing mode of a controller memory and a DMD board memory; the storage points of the controller memory and the DMD board memory are both 2N; uploading 2 × N two-dimensional physical coordinate data in a memory of a controller; uploading 2 x N graphic block number data in the memory of the DMD board card.
The method for controlling the low-speed motion comprises the following specific steps of:
when the data updating device works, the data in the first memory is executed, after the data in the first memory is executed, an instruction is sent to the controller, the data in the first memory is updated, and meanwhile, the workbench does not stop working and continues to execute the data in the second memory; and after the data in the second memory block is executed, sending an instruction to the controller to update the data in the second memory block, and continuously executing the data in the first memory block without stopping the work of the workbench, and sequentially circulating.
On the other hand, the implementation of the invention further discloses a low-speed motion control system which is applied to a workbench of a DMD system and corresponds to the motion control method, and as shown in figure 1, the low-speed motion control system comprises the workbench, a motion controller, a motor driving circuit and a motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench, sending a graphic refreshing command to the DMD system and sending a light-on command to the pulse light source;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
Furthermore, the low-speed motion control system also comprises a detection device which is used for monitoring the motion state information of the motor in real time and sending the motion position and the motion speed of the motor to the motion controller.
As a further improvement of the embodiment of the present invention, the workbench carries the optical polarization sensitive material to move in a two-dimensional plane, so as to further realize splicing of polarized light fields or interconnection between different polarized light fields.
The embodiment of the invention provides a large-area patterned liquid crystal photo-alignment device based on a digital micro-reflector, which comprises a light source assembly, a dynamic mask generation assembly, an imaging detection assembly, a focal length servo system and a motion control assembly which are sequentially arranged, as shown in FIG. 2;
the light source assembly comprises an ultraviolet or blue light source, a collimation and beam expansion system and a polarizer which are sequentially connected, wherein the polarizer is connected with the collimation and beam expansion system and used for controlling the initial polarization direction of light and generating a surface light source with any polarization direction within the range of 0-179 ℃;
the dynamic mask generating assembly comprises a numerical control micro-mirror DMD, an electrically adjustable polaroid and a computer control system and is used for dynamically adjusting and controlling the polarization state of incident light; wherein, the image signal of the computer control system is input to the signal input end of the digital micromirror DMD;
an imaging detection component for detecting the generated pattern imaging;
the focal length servo system comprises a normally open light source insensitive to light polarization sensitive materials and a vertical direction correction assembly, and is used for correcting the defocusing phenomenon generated by movement;
and the motion control component is used for adjusting the spatial position of the platform carrying the light polarization sensitive material so as to realize light field splicing.
In some embodiments, the imaging detection assembly further comprises a miniature imaging component for miniature and writing the polarization pattern output by the polarization pattern generation component into the light polarization sensitive material;
the miniature imaging component comprises an imaging objective lens group, the main shaft direction of the optical path of the imaging objective lens group is vertical to the platform, and the motor drives the imaging objective lens group to vertically move up and down to form a focusing surface on the platform;
the imaging objective group comprises a tubular lens and a microobjective; the digital micromirror DMD is arranged in front of the tubular lens.
Specifically, the miniature imaging component is connected with an electrically adjustable polarizing film and a beam splitter prism, and the electrically adjustable polarizing film and the beam splitter prism are arranged on a horizontal central axis of the digital micromirror DMD; the beam splitting prism is used for transmitting the light with polarization information to the imaging detection assembly.
The apparatus further comprises a platform for carrying the light polarization sensitive material; the platform is arranged below the imaging objective lens group and is provided with a two-dimensional motion track which is used for bearing the light polarization sensitive material and driving the light polarization sensitive material to move on a two-dimensional plane under the drive of the motion control component, so that the surface of the light polarization sensitive material is always kept on the focus plane of the imaging objective lens group;
the motion control component is connected with the miniature imaging component and is used for splicing the miniature polarization pattern light field.
The imaging detection assembly comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing film, a first lens and a first imaging CCD which are sequentially connected;
specifically, the front focal plane of the imaging objective lens group is located near the back focal plane of the barrel mirror; the imaging surface of the first imaging CCD is positioned on the front focal surface of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror.
The focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
the detection light source is positioned on the front focal plane of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; a motor-driven imaging objective lens group;
the first imaging CCD receives the reflected image projected to the light polarization sensitive material surface, and the first imaging CCD forms a conjugate image with the generated polarization pattern.
In the embodiment of the invention, the light source is a pulse light source or a continuous light source with a controllable light barrier system; the pulse width of the pulse laser generated by the light source is in picosecond to second level, and the wavelength of the pulse laser is 340nm to 600nm.
On the other hand, the embodiment of the invention discloses a large-breadth randomly-distributed optical orientation method based on a digital micro-reflector, which comprises the following steps:
s1, light emitted by a light source is adjusted into a collimated light beam through a collimation and beam expansion system;
s2, uniformly irradiating the collimated light beam to the surface of the DMD panel of the numerical control micro-mirror array at a preset angle;
s3, outputting a graphic signal by the computer to control each micromirror of the DMD to present different reflection states to realize a mask, and refreshing an exposure graphic by a DMD panel;
and S4, after the light beam forming the exposure pattern is micro-scaled through a micro objective, the light beam is projected to a liquid crystal substrate coated with a photo-alignment material on the surface through a polaroid, the exposure is completed by controlling the light intensity and time, and the liquid crystal in the exposure pattern area is reoriented.
Wherein, step S4 specifically includes:
s401, refreshing the graph according to the DMD, and rotating the polaroid to a corresponding polarization angle to enable the light passing through the polaroid to be polarized light with a preset fixed polarization angle;
s402, the polarized light on the horizontal central axis is reflected by a beam splitter prism to form vertically downward polarized light, and the vertically downward polarized light sequentially passes through a tubular lens and a miniature objective lens to irradiate the surface of the light polarization sensitive material, and the beam splitter prism transmits the light with polarization information to an imaging detection assembly.
Specifically, in step S4, the miniature imaging component forms a fixed miniature magnification ratio by the focal length ratio of the tubular lens to the miniature objective lens, and miniature the polarization pattern, so as to output the polarization pattern light field.
Further, step S402 specifically includes:
after an image reflected from the surface of the light polarization sensitive material sequentially passes through the microscope objective, the tubular lens, the specified waveband reflection flat plate and the first light splitter, the image enters the first imaging CCD through the first lens, and a generated polarization pattern and the first imaging CCD are positioned on the front focal plane of the tubular lens and form a conjugate relation; adjusting the definition of an image in the first imaging CCD by controlling the up-and-down movement of a lens of the microobjective, judging whether the focal plane of the microobjective is on the light polarization sensitive material surface, calibrating the size of a laser spot in the second imaging CCD, and carrying out focusing monitoring on subsequent splicing; and judging whether the focal plane of the objective lens is on the surface of the light polarization sensitive material or not by the contrast of the outline of the imaging light spot projected to the light polarization sensitive material.
Further, step S4 is followed by:
s5, the imaging detection part detects and adjusts the distance between the miniature objective lens and the light polarization sensitive material surface, so that the focus surface of the miniature objective lens is always kept on the light polarization sensitive material surface; specifically, step S5 specifically includes:
detecting any value between 550nm and 650nm of wavelength of light emitted by a light source;
the second lens reflects the light spots projected on the light polarization sensitive material surface to the second imaging CCD, the Z-axis servo focusing position is mapped through the light spot diameter, the vertical height of the Z-axis lens is adjusted, the light spot diameter in the second imaging CCD can be always kept as R, and whether the light polarization sensitive material surface is on the focusing surface of the objective lens or not is judged by detecting the size of the light spots projected on the light polarization sensitive material surface through the second imaging CCD.
S6, recording a single polarized light pattern on the light polarization sensitive material;
and S7, equally dividing any patterned polarization information into a plurality of different polarized light patterns, and performing pattern refreshing and polarization control for a plurality of times to form a pattern recording process.
As a further improvement of the embodiment of the present invention, after the step S7, the method further includes:
s8, moving the platform carrying the light polarization sensitive material to the next appointed view field position for next pattern light field recording;
the polarization pattern of one splicing unit is formed by a plurality of different polarization patterns, wherein in a single polarization pattern, all polarization states are fixed.
In the embodiment of the invention, the light source collimation mode in the step S1 includes using an LED light source, forming collimated light through a set of collimating lenses or using a laser light source, expanding the beam of the laser light source through an objective lens, and forming the collimated light through the lenses.
Further, as shown in fig. 3, in step S3, the different reflection states are that the DMD panel divides the incident collimated light into two paths for reflection, including forming on-state reflected light in the area where the exposure pattern is formed, and forming off-state reflected light in the area where the exposure pattern is not formed;
the on-state reflected light is vertical to the DMD panel and is positioned on the horizontal central axis; collimated light is incident on the DMD panel after passing through the reflecting lens; the incident angle was 12 degrees.
In the step S8, the single exposure area can be spliced into a complete pattern light field through the stepping movement of the platform controlled by the motion control part, so that large-format high-precision exposure patterns are formed;
further, after the single polarization pattern is recorded on the light polarization sensitive material in step S6, the motion control component moves the platform carrying the light polarization sensitive material to the next designated position for the next light orientation by the following steps:
the computer control system transmits the position data to the motion control part, the motion control part converts the received data into a control signal and transmits the control signal to the motor driver, the motor driver controls the motion of the motor according to the received control signal, and the detection device is responsible for monitoring the motion of the motor in real time and transmitting the motion position and the motion speed of the motor to the motion control part; and then the motion control part feeds back the current positions and speeds of the focusing platform and the sample carrying platform to the computer control system.
The invention also comprises a set of data processing and motion control method, which establishes a mapping function relation between the gray level and the polarization angle: a = (255-g) × 180/256, where g is the grayscale value for the image pixel point location and a is the corresponding polarization angle. And decomposing the gray image according to gray values. As shown in fig. 4, one gray scale map includes 3 gray scales, the original image is decomposed into 3 monochrome bitmaps according to the gray scale value, each monochrome bitmap has only two values of 0 and 1, 1 represents white, 0 represents black, and 1 in the monochrome bitmap and the gray scale value represented by the monochrome bitmap are at the same position of the gray scale value in the original image, but the pixel values at the positions other than the gray scale value are all 0. Each monochromatic bitmap corresponds to a polarization angle, the polarization angle corresponding to 255 gray scales is 0 degree, the polarization angle corresponding to 128 gray scales is 90 degrees, and the polarization angle corresponding to 0 gray scales is 180 degrees. The pixel value of the monochrome bitmap corresponding to the gray value position is 1, and the rest positions are 0. After the 3 monochromatic bitmaps are uploaded to the DMD control board card in sequence, the control system controls the DMD panel to refresh the 3 monochromatic bitmaps in sequence according to a fixed time interval, and when one monochromatic bitmap is brushed, the control system rotates the polaroid to a specified angle by controlling the rotating motor. In the monochrome bitmap refreshed by the DMD panel, the position with the pixel value of 1 is in the on state, and the position with the pixel value of 0 is in the off state. After passing through the polarizer with the adjusted angle, the light at the on-state position is projected onto the photosensitive material to form primary fixed-orientation exposure. Keeping the position of the two-dimensional motion platform unchanged, refreshing 3 monochromatic bitmaps by the DMD, and rotating the polaroid for 3 times by a polarization angle to form exposure with 3 orientations, as shown in FIG. 5.
Compared with the prior art, the invention has the following beneficial effects:
1. the low-speed motion control system applied to the phase modulation workbench of the DMD system realizes the accurate control of the motion of the workbench;
2. the invention realizes the recording of single-frame polarization patterns based on single pulse by utilizing the characteristics of large pulse laser energy, short pulse width and high repetition frequency, and realizes the advantages of large exposure area, high efficiency and good reliability;
3. the invention adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-format writing;
4. because the light energy is not concentrated, the invention proposes that the abutted seams between each light-operated orientation view field are eliminated and the resolution is improved by controlling the relation between the size of a single view field and the single translation distance;
5. the invention has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of the polarization pattern, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices.
All the above-mentioned optional technical solutions can be combined arbitrarily to form the optional embodiments of the present invention, and are not described herein again.
It should be noted that: in the motion control system provided in the above embodiment, when executing a motion control method, only the division of the above functional modules is taken as an example, and in practical applications, the above function distribution may be completed by different functional modules according to needs, that is, the internal structure of the system is divided into different functional modules to complete all or part of the above described functions. In addition, the embodiment of the motion control system and the motion control method provided by the above embodiments belong to the same concept, and the specific implementation process thereof is described in detail in the embodiment of the method, which is not described herein again.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, where the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A low-speed motion control method applied to a workbench of a DMD system is characterized by comprising the following steps:
s1, performing data processing on the large-format processing graph to generate a corresponding gray graph;
s2, dividing the gray scale graph into a plurality of gray scale graph blocks, generating two-dimensional physical coordinates and graph block numbers corresponding to each gray scale graph block, and recording the two-dimensional physical coordinates and the graph block numbers into a position file;
s3, decomposing each gray scale graphic block into single-color bitmaps with the same number as the gray scale according to the gray scale, and generating a sequence file; each gray scale and the corresponding monochromatic bitmap have a corresponding position on the electric adjustable polarizer, and the corresponding position is recorded into a polarization angle file;
s4, reading the two-dimensional physical coordinates in the position file by a motion controller, and controlling a workbench to move to a specified position corresponding to the two-dimensional physical coordinates;
s5, finding out a path corresponding to the monochromatic sequence file in the sequence file according to the number of the graphic block corresponding to the two-dimensional physical coordinate;
s6, sequentially uploading all the monochrome bitmaps in the monochrome sequence file path to a DMD board memory;
s7, reading a corresponding polarization angle file according to the path of the monochrome sequence file, and writing the polarization angle into a memory of the motion controller according to the number of the monochrome sequence file;
s8, displaying a monochrome bitmap stored in a memory of the DMD board card on the DMD panel, reading polarization angle data in the memory of the motion controller by the motion controller, and controlling the electric adjustable polarizer to rotate to a specified angle;
s9, controlling a pulse light source switch by a motion controller to form primary exposure;
s10, repeating S8 and S9 until all the monochrome bitmaps stored in the DMD board memory and the polarization angle data in the controller memory are executed;
and S11, moving the workbench to a designated position corresponding to the next two-dimensional physical coordinate, and repeating the operations of S5-S10 until the two-dimensional physical coordinate points of the whole large-format processing graph are completely executed.
2. The method as claimed in claim 1, wherein the dividing operation in step S1 includes dividing the large-format processing pattern into M × N pattern blocks according to a size not greater than the resolution of the field of view.
3. The method of claim 2, wherein the field resolution is defined as pixel width by pixel height.
4. The method for controlling the low-speed motion of a workbench of a DMD system according to claim 1, wherein the control unit comprises a plurality of control units,
in the S11, the two-dimensional movement mode of the workbench moving to the designated position corresponding to the next two-dimensional physical coordinate is consistent with the arrangement sequence of the two-dimensional physical coordinate points in the location file, and when the two-dimensional physical coordinate points in the location file are arranged row by row one by one, the movement workbench moves row by row; when the two-dimensional physical coordinate points are arranged in a row one by one, the moving workbench moves in a row one by one; and when the two-dimensional physical coordinate points are arranged randomly, the moving workbench moves randomly.
5. The method for controlling the low-speed motion of the workbench applied to the DMD system according to claim 1, wherein the method for controlling the low-speed motion adopts a parallel processing mode of a controller memory and a DMD board memory; the storage points of the controller memory and the DMD board memory are both 2N; uploading 2 x N pieces of two-dimensional physical coordinate data in the memory of the controller; uploading 2 x N graphic block number data in the DMD board memory.
6. The method for controlling the low-speed motion of the workbench of the DMD system according to claim 5, wherein the parallel processing manner of the memory of the controller and the memory of the DMD board card in the low-speed motion control method comprises the following specific steps:
when the data updating device works, the data in the first internal memory is executed firstly, after the data in the first internal memory is executed, an instruction is sent to the controller to update the data in the first internal memory, and meanwhile, the workbench continues to execute the data in the second internal memory without stopping working; and after the data in the second memory block is executed, sending an instruction to the controller to update the data in the second memory block, and continuously executing the data in the first memory block without stopping the work of the workbench, and sequentially circulating.
7. A low-speed motion control system applied to a workbench of a DMD system and used for realizing the control method of claim 1, wherein the low-speed motion control system comprises the workbench, a motion controller, a motor driving circuit and a motor;
the motion controller is used for receiving the two-dimensional physical coordinate signal of the workbench, sending a graphic refreshing command to the DMD system and sending a light-on command to the pulse light source;
the motor driving circuit is used for sending out a driving voltage control signal;
the motor is used for being controlled by the motor driving circuit to drive the workbench;
the workbench comprises a scanning shaft and a position feedback module, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
8. The DMD system workbench low-speed motion control system of claim 7, further comprising a detection device for real-time monitoring the motion status information of the motor and sending the motion position and speed of the motor to the motion controller.
9. The system of claim 7, wherein the stage carries the light polarization sensitive material to move in two-dimensional plane, so as to further realize the splicing of polarized light fields or the interconnection between different polarized light fields.
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| CN101226343A (en) * | 2008-01-29 | 2008-07-23 | 芯硕半导体（中国）有限公司 | Method for improving photolithography exposure energy homogeneity using grey level compensation |
| CN102768472A (en) * | 2012-06-30 | 2012-11-07 | 南京大学 | Method and device for realizing liquid crystal arbitrary orientation control through numerical control micromirror array photoetching |
| CN105204297A (en) * | 2015-09-30 | 2015-12-30 | 合肥芯碁微电子装备有限公司 | Two-dimensional splicing treatment method for inclined scanning type photoetching machine during stepping type exposure |
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