CN211565615U - Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure - Google Patents
Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure Download PDFInfo
- Publication number
- CN211565615U CN211565615U CN201922109594.0U CN201922109594U CN211565615U CN 211565615 U CN211565615 U CN 211565615U CN 201922109594 U CN201922109594 U CN 201922109594U CN 211565615 U CN211565615 U CN 211565615U
- Authority
- CN
- China
- Prior art keywords
- probe card
- fixed
- movable rod
- guide ring
- rubber gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a clamp, an elastic force supply structure and a clamping structure for a 3DMEMS probe card, wherein the clamp comprises a bottom plate, an elastic force supply structure and a clamping structure, and the elastic force supply structure and the clamping structure are both fixedly arranged on the bottom plate; the elastic force supply structure comprises a fixed pipe, a guide ring, a movable rod, a spring and a pull rod; the clamping structure comprises a fixed U-shaped plate, a raised edge, a processing opening, a rubber filler strip, a flat plate and a rubber gasket. The utility model discloses simple structure, convenient operation is applied to the centre gripping when 3DMEMS probe card makes, can provide the centre gripping position for the probe card pcb board through the centre gripping structure, carries out the centre gripping to the three limit of probe card pcb board, and the centre gripping effect is better, and the atress is even, makes the surface of probe card pcb board expose in the bottom of processing opening, can carry out the processing operation; can provide for probe card pcb board through elasticity confession power structure and compress tightly, through the elasticity after the spring extension, for the movable rod application of force, further for dull and stereotyped application of force, through blockking of fixed U-shaped board, realize pressing from both sides tightly.
Description
Technical Field
The utility model discloses 3 anchor clamps, elasticity power supply structure and clamping structure for DMEMS probe card belong to probe card application technical field.
Background
The probe card is to make the probe on the probe card directly contact with the welding pad or bump on the chip, to lead out the chip signal, and then to match with the peripheral test instrument and software control to achieve the purpose of automatic measurement; the probe card is applied to the IC before packaging, the naked crystal system is tested by using a probe to do work, defective products are screened out, and then the packaging engineering is carried out; therefore, probe cards are one of the important processes in IC manufacturing that significantly impact manufacturing costs.
The probe card needs to be fixed in the manufacturing process, and when the conventional clamp is used for clamping the probe card, the clamping is generally carried out on two sides, so that the fixation is realized, the clamping effect is poor, the stress is not uniform, and meanwhile, the clamping operation is possibly complex and the operation is inconvenient. Accordingly, a holder for a 3d ems probe card, an elastic force applying structure, and a clamping structure are provided to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to provide a clamp for a DMEMS probe card, an elastic force-supplying structure and a clamping structure for solving the above problems.
The utility model discloses a following technical scheme realizes above-mentioned mesh, and DMEMS is anchor clamps for probe card, including bottom plate, elasticity confession power structure and clamping structure all fixed mounting are on the bottom plate;
the elastic force supply structure comprises three fixed pipes and pull rods, the number of the fixed pipes is three, the fixed pipes are fixedly connected with the bottom plate vertically, a guide ring is fixedly installed at the top end of each fixed pipe, three movable rods which are distributed at equal intervals are fixedly installed on each pull rod, the movable rods penetrate through the fixed pipes and the guide rings, springs in a stretching state are sleeved on the surfaces of the movable rods, the springs are located inside the fixed pipes, and the movable rods are elastically connected with the bottoms of the guide rings through the springs;
the clamping structure is including fixed U-shaped plate and flat board, the top border department of fixed U-shaped plate is provided with sticks up the limit, and sticks up the inboard processing opening that forms in limit, stick up limit bottom bonding and be connected with the rubber filler strip, dull and stereotyped bottom and elasticity confession power structure top rigid coupling, and dull and stereotyped bottom has laid the rubber gasket, the centre gripping has the probe card pcb board between rubber gasket and the rubber filler strip, and the probe card pcb board is located the processing opening bottom.
Preferably, the four corners of the surface of the bottom plate are all provided with mounting holes, and the mounting holes are in a round hole structure.
Preferably, the top end of the spring is fixedly connected with the bottom of the guide ring, and the bottom end of the spring is fixedly connected with the surface of the movable rod.
Preferably, the rubber filler strip is of a U-shaped structure, and the thickness of the rubber filler strip is the same as that of the rubber gasket.
Preferably, the pull rod is perpendicular to the movable rod, and the pull rod is located at the bottom of the bottom plate.
Preferably, the inner diameter of the fixed pipe is larger than that of the guide ring, and the guide ring is connected with the movable rod in a matched mode.
Elastic force supply structure for anchor clamps for DMEMS probe card, including fixed pipe and pull rod, the figure of fixed pipe is three, and fixed pipe and the perpendicular rigid coupling of bottom plate, the top fixed mounting of fixed pipe has the guide ring, fixed mounting has three equidistant distribution's movable rod on the pull rod, the movable rod runs through fixed pipe and guide ring, and the movable rod surface has cup jointed the spring that is in tensile state, the spring is located inside the fixed pipe, the movable rod passes through spring and guide ring bottom elastic connection.
Clamping structure for anchor clamps for DMEMS probe card, including fixed U-shaped board and flat board, the top border department of fixed U-shaped board is provided with sticks up the limit, and sticks up the inboard processing opening that forms in limit, stick up limit bottom bonding connection and have the rubber filler strip, dull and stereotyped bottom and elasticity confession power structure top rigid coupling, and dull and stereotyped bottom have laid the rubber gasket, the centre gripping has the probe card pcb board between rubber gasket and the rubber filler strip, and the probe card pcb board is located the processing opening bottom.
The utility model has the advantages that:
1. the clamp can be applied to clamping during manufacturing of a 3DMEMS probe card, a clamping position can be provided for the probe card pcb through the clamping structure, three edges of the probe card pcb are clamped, the clamping effect is good, the stress is uniform, the surface of the probe card pcb is exposed at the bottom of a processing opening, and the processing operation can be carried out;
2. this kind of anchor clamps can provide for probe card pcb board through elasticity confession power structure and compress tightly, through the elasticity after the spring is tensile, for the movable rod application of force, further for dull and stereotyped application of force, through blockking of fixed U-shaped board, realize pressing from both sides tightly, press from both sides tight application of force in-process, only need carry on the pull rod the pulling can, easy operation, the centre gripping is convenient.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive exercise.
FIG. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic side view of the edge warping and the pcb board of the probe card of the present invention;
fig. 3 is a schematic structural view of the rubber filler strip of the present invention.
In the figure: 1. the probe card comprises a base plate, 2, a fixed U-shaped plate, 3, a raised edge, 4, a machining opening, 5, a rubber filler strip, 6, a fixed pipe, 7, a guide ring, 8, a movable rod, 9, a spring, 10, a flat plate, 11, a rubber gasket, 12, a probe card pcb, 13, a pull rod, 14 and a mounting hole.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the embodiments described below are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Detailed description of the preferred embodiment
The following embodiment is an embodiment of a holder for a DMEMS probe card according to the present application 3.
Referring to fig. 1 to 3, the clamp for the 3d mems probe card includes a base plate 1, an elastic force-supplying structure and a clamping structure, wherein the elastic force-supplying structure and the clamping structure are both fixedly mounted on the base plate 1;
the elastic force supply structure comprises three fixed tubes 6 and pull rods 13, the three fixed tubes 6 are fixedly connected with the bottom plate 1 vertically, guide rings 7 are fixedly installed at the top ends of the fixed tubes 6, three movable rods 8 distributed at equal intervals are fixedly installed on the pull rods 13, the movable rods 8 penetrate through the fixed tubes 6 and the guide rings 7, springs 9 in a stretching state are sleeved on the surfaces of the movable rods 8, the springs 9 are located inside the fixed tubes 6, and the movable rods 8 are elastically connected with the bottoms of the guide rings 7 through the springs 9;
the clamping structure is including fixed U-shaped plate 2 and dull and stereotyped 10, the top border department of fixed U-shaped plate 2 is provided with sticks up limit 3, and sticks up 3 inboard formation process openings 4 in the limit, 3 bottom bonds in the limit of sticking up are connected with rubber filler strip 5, dull and stereotyped 10 bottoms and elasticity power supply structure top rigid coupling, and dull and stereotyped 10 bottoms have laid rubber gasket 11, the centre gripping has probe card pcb board 12 between rubber gasket 11 and the rubber filler strip 5, and probe card pcb board 12 is located process openings 4 bottoms.
The utility model discloses when using, regard as mounting hole 14 position through mounting hole 14, install on the operation processing platform, the structure of bottom plate 1 bottom is located the bottom of workstation, when carrying out the centre gripping of probe card pcb board 12, artifical one hand carries out the pulling of pull rod 13, rubber filler strip 5 separates with rubber gasket 11, then packs into probe card pcb board 12 between probe card pcb board 12, unclamps pull rod 13, through the elasticity of spring 9, makes rubber filler strip 5 and rubber gasket 11 carry out the clamp of probe card pcb board 12, probe card pcb board 12 top surface sees through processing opening 4 and exposes, the manual work can carry out the operation processing;
after the processing, the pull rod 13 is manually pulled, the rubber gasket 5 and the rubber gasket 11 loosen the probe card pcb 12, and the probe card pcb is manually pulled out to finish the removal.
Detailed description of the invention
The following embodiment is an embodiment of an elastic force applying structure for a clip for a DMEMS probe card according to the present application 3.
3 elasticity confession power structure for anchor clamps for DMEMS probe card, including fixed pipe 6 and pull rod 13, the figure of fixed pipe 6 is three, and fixed pipe 6 and the 1 perpendicular rigid couplings of bottom plate, the top fixed mounting of fixed pipe 6 has guide ring 7, fixed mounting has three equidistant distribution's movable rod 8 on the pull rod 13, movable rod 8 runs through fixed pipe 6 and guide ring 7, and 8 surface cup joints the spring 9 that is in tensile state on the movable rod, spring 9 is located inside fixed pipe 6, movable rod 8 passes through spring 9 and 7 bottom elastic connections of guide ring.
Detailed description of the preferred embodiment
The following embodiment is an embodiment of a clamping structure for a clamp for a DMEMS probe card according to the present application 3.
3 clamping structure for anchor clamps for DMEMS probe card, including fixed U-shaped plate 2 and dull and stereotyped 10, the top border department of fixed U-shaped plate 2 is provided with sticks up limit 3, and sticks up 3 inboard formation process opening 4 on the limit, 3 bottom bonds in the limit of sticking up are connected with rubber filler strip 5, dull and stereotyped 10 bottoms and elasticity confession power structure top rigid coupling, and dull and stereotyped 10 bottoms have laid rubber gasket 11, the centre gripping has probe card pcb board 12 between rubber gasket 11 and the rubber filler strip 5, and probe card pcb board 12 is located process opening 4 bottoms.
It should be noted that the present application relates to circuits and electronic components and modules, all of which are prior art, and that the present invention is fully capable of implementation by those skilled in the art, and is not limited to software and process modifications.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (8)
1.3 clamp for DMEMS probe card, its characterized in that: the clamping device comprises a bottom plate (1), an elastic force supply structure and a clamping structure, wherein the elastic force supply structure and the clamping structure are fixedly arranged on the bottom plate (1);
the elastic force supply structure comprises three fixed pipes (6) and pull rods (13), the number of the fixed pipes (6) is three, the fixed pipes (6) are fixedly connected with the bottom plate (1) vertically, a guide ring (7) is fixedly mounted at the top end of each fixed pipe (6), three movable rods (8) distributed at equal intervals are fixedly mounted on each pull rod (13), each movable rod (8) penetrates through the corresponding fixed pipe (6) and the corresponding guide ring (7), a spring (9) in a stretching state is sleeved on the surface of each movable rod (8), each spring (9) is located inside the corresponding fixed pipe (6), and each movable rod (8) is elastically connected with the bottom of the corresponding guide ring (7) through the corresponding spring (9);
the clamping structure comprises a fixed U-shaped plate (2) and a flat plate (10), the top edge of the fixed U-shaped plate (2) is provided with a warping edge (3), the inner side of the warping edge (3) forms a machining opening (4), the bottom of the warping edge (3) is connected with a rubber gasket strip (5) in an adhering mode, the bottom of the flat plate (10) is fixedly connected with the top of an elastic force supply structure, a rubber gasket (11) is laid at the bottom of the flat plate (10), a probe card pcb (12) is clamped between the rubber gasket (11) and the rubber gasket strip (5), and the probe card pcb (12) is located at the bottom of the machining opening (4).
2. The jig for a 3d ems probe card according to claim 1, wherein: the four corners of the surface of the bottom plate (1) are provided with mounting holes (14), and the mounting holes (14) are of round hole structures.
3. The jig for a 3d ems probe card according to claim 1, wherein: the top end of the spring (9) is fixedly connected with the bottom of the guide ring (7), and the bottom end of the spring (9) is fixedly connected with the surface of the movable rod (8).
4. The jig for a 3d ems probe card according to claim 1, wherein: the rubber gasket strip (5) is of a U-shaped structure, and the thickness of the rubber gasket strip (5) is the same as that of the rubber gasket (11).
5. The jig for a 3d ems probe card according to claim 1, wherein: the pull rod (13) is perpendicular to the movable rod (8), and the pull rod (13) is located at the bottom of the bottom plate (1).
6. The jig for a 3d ems probe card according to claim 1, wherein: the inner diameter of the fixed pipe (6) is larger than that of the guide ring (7), and the guide ring (7) is connected with the movable rod (8) in a matched mode.
7.3DMEMS is elasticity for anchor clamps for probe card supplies power structure, its characterized in that: elasticity confession power structure is including fixed pipe (6) and pull rod (13), the figure of fixed pipe (6) is three, and fixed pipe (6) and bottom plate (1) perpendicular rigid coupling, the top fixed mounting of fixed pipe (6) has guide ring (7), fixed mounting has three equidistant distribution's movable rod (8) on pull rod (13), movable rod (8) run through fixed pipe (6) and guide ring (7), and movable rod (8) surface has cup jointed spring (9) that are in tensile state, spring (9) are located fixed inside managing (6), movable rod (8) are through spring (9) and guide ring (7) bottom elastic connection.
8.3 clamping structure for anchor clamps for DMEMS probe card, its characterized in that: clamping structure is including fixed U-shaped board (2) and flat board (10), the top border department of fixed U-shaped board (2) is provided with sticks up limit (3), and sticks up limit (3) inboard formation processing opening (4), stick up limit (3) bottom bonding connection and have rubber filler strip (5), dull and stereotyped (10) bottom and elasticity confession power structure top rigid coupling, and dull and stereotyped (10) bottom has laid rubber gasket (11), clamp probe card pcb board (12) between rubber gasket (11) and rubber filler strip (5), and probe card pcb board (12) are located processing opening (4) bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922109594.0U CN211565615U (en) | 2019-11-29 | 2019-11-29 | Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922109594.0U CN211565615U (en) | 2019-11-29 | 2019-11-29 | Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211565615U true CN211565615U (en) | 2020-09-25 |
Family
ID=72533945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922109594.0U Active CN211565615U (en) | 2019-11-29 | 2019-11-29 | Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211565615U (en) |
-
2019
- 2019-11-29 CN CN201922109594.0U patent/CN211565615U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211122948U (en) | Antenna test fixture and antenna test system | |
| CN209766820U (en) | Connector assembling equipment | |
| WO2022143037A1 (en) | Chip test assembly, chip test system and chip test method | |
| CN211565615U (en) | Clamp for 3DMEMS probe card, elastic force supply structure and clamping structure | |
| CN203011783U (en) | Shearing force testing device | |
| CN103091247B (en) | The method of testing of a kind of pad and base material adhesion and equipment | |
| CN108760437B (en) | Sample preparation method for tensile shear strength of structural adhesive steel to steel | |
| DE102013107081B4 (en) | Capacitive test apparatus and method for capacitive testing of a component | |
| CN211234887U (en) | Vibration sensor connector | |
| CN205786708U (en) | A kind of PCBA test needle plate | |
| CN208653949U (en) | Junction box testing apparatus | |
| CN210572596U (en) | Flexible printed circuit board detection test fixture device | |
| CN215429962U (en) | Automatic production equipment for charger | |
| CN210388124U (en) | Air pipe welding positioning device | |
| CN105182013B (en) | A kind of display panel test fixture | |
| CN219064839U (en) | Push-pull force jig | |
| CN211527255U (en) | Lower plate checking fixture on automobile chassis | |
| CN213673756U (en) | Circuit board equipment for testing multiple lead wires | |
| CN112034218B (en) | CAF testing device and testing method | |
| CN210402324U (en) | LCM finished product test tool | |
| CN204525090U (en) | A kind of grind away platform | |
| CN219842326U (en) | Clamp for ultrasonic cleaning detection | |
| CN213903714U (en) | FPC test equipment convenient to counterpoint | |
| CN218272571U (en) | New energy automobile PTC heating module voltage-withstanding insulation testing device | |
| CN218341886U (en) | Clamp for radio frequency test of semiconductor chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Strong half conductor (Shanghai) Co.,Ltd. Assignor: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd. Contract record no.: X2021320010005 Denomination of utility model: Fixture, elastic force supply structure and clamping structure for 3dmems probe card Granted publication date: 20200925 License type: Common License Record date: 20210207 |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee after: Strong Half Conductor (Suzhou) Co.,Ltd. Address before: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000 Patentee before: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd. |