CN211553713U

CN211553713U - Scratch recorder

Info

Publication number: CN211553713U
Application number: CN201922253521.9U
Authority: CN
Inventors: 刘珊珊
Original assignee: SiEn Qingdao Integrated Circuits Co Ltd
Current assignee: SiEn Qingdao Integrated Circuits Co Ltd
Priority date: 2019-12-16
Filing date: 2019-12-16
Publication date: 2020-09-22
Anticipated expiration: 2029-12-16

Abstract

The utility model provides a scratch recorder which is of a plate-shaped structure, has the specification consistent with that of a target wafer to be tested and is made of transparent materials; the scratch recorder is marked with scales, and the scales cover the top surface and/or the bottom surface of the whole scratch recorder; the scale is a grid scale or a dot matrix scale. The utility model provides a fish tail record appearance can accurately record the appearance information of fish tail, replaces the wafer to compare on the arm of machinery, or directly transmits the test on the machine platform, has reduced the risk of wafer fish tail or fragment, discovers and analyzes the reason of crystal back fish tail more easily; the testing steps are simplified, the workload is reduced, and the measuring efficiency is improved; the accuracy of detection is improved, and human errors are reduced.

Description

Scratch recorder

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a fish tail record appearance for verifying crystal back fish tail.

Background

The wafer back is scratched by the robot arm during the wafer transfer process, so the target robot arm causing the scratch needs to be found out. As shown in fig. 1 and 2, since the wafer 1 is opaque and cannot be directly compared with the suspected robot 3, the verification of the back side scratch 2 in the prior art generally uses a common measurement tool to collect information equivalent to the length, approximate shape, and width from the center or edge of the wafer of the scratch 2, and then compares the information with the robot 3 or CAD bitmap of the robot 3 to try to find the target robot 3 causing the scratch 2. Various problems exist in this measurement method, and firstly, measurement using a measurement tool often causes a calculation error or a measurement error, and the measurement process is complicated and complicated, which increases the workload. There is also a method of putting the blank wafer 1 into the machine for trial operation to find out the target mechanical arm 3, but since the wafer 1 is opaque, it is difficult to accurately put the wafer 1 back into place because the wafer 1 needs to be picked up to check whether the back of the wafer has the scratch 2, and even the risk of scratching and even breaking is increased.

SUMMERY OF THE UTILITY MODEL

In view of the above prior art's shortcoming, the utility model aims to provide a fish tail record appearance can effectively solve the inaccurate or inconvenient problem that exists in the wafer fish tail verification process.

In order to achieve the above objects and other related objects, the present invention provides a scratch recorder, which has a plate-shaped structure, has a specification consistent with that of a target wafer to be inspected, and is made of a transparent material; the scratch recorder is marked with scales, and the scales cover the top surface and/or the bottom surface of the whole scratch recorder; the scales are grid scales or dot matrix scales.

Preferably, the scratch recorder is made of a transparent acrylic sheet.

In a preferred embodiment, the wafer is a 12-inch wafer, and the scratch recorder is a circular plate-shaped structure with a diameter of 300 mm.

In the above embodiment, the grid scale on the scratch recorder divides the diameter thereof into thirty equal parts, and each equal part is divided into four minimum scales.

In another preferred embodiment, the wafer is an 8-inch wafer, and the scratch recorder is a circular plate-shaped structure with a diameter of 200 mm.

In the above embodiment, the grid-like scale on the scratch recorder divides the diameter thereof into twenty equal parts, and each equal part is divided into four minimum scales.

In both embodiments, the minimum scale unit is 2.5 mm.

Preferably, the scale is convex or concave relative to the plane of the top surface or the bottom surface of the scratch recorder, or is on the same plane with the top surface or the bottom surface.

As above, the utility model discloses a fish tail record appearance has following beneficial effect:

(1) the utility model provides a scratch recorder with transparent characteristic, which can realize visual inspection to confirm a target mechanical arm, is more visual and convenient to detect the scratch of the crystal back, and can reduce the workload without picking up to confirm the scratch due to being transparent;

(2) the scratch recorder provided by the utility model is provided with scales, thereby reducing the measuring error and improving the accuracy;

(3) the utility model provides a fish tail record appearance can replace wafer and arm to carry out direct comparison, has reduced the risk of wafer fish tail or fragment.

Drawings

FIG. 1 is a first schematic diagram illustrating a wafer back scratch verification in the prior art;

FIG. 2 is a second schematic diagram illustrating a wafer back scratch verification in the prior art;

fig. 3 is a first schematic diagram for verifying the scratch of the wafer back by using the scratch recorder disclosed by the utility model;

fig. 4 is a second schematic diagram for verifying the scratch of the wafer back by using the scratch recorder disclosed by the utility model.

Description of the reference symbols

1 wafer

2 scratching

3 mechanical arm

4 scratch recorder

5 graduation

Detailed Description

The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be apparent to those skilled in the art from the disclosure herein. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.

It should be understood that the structures, ratios, sizes, etc. shown in the drawings of the present specification are only used for matching with the contents disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any modification of the structures, changes of the ratio relationship or adjustment of the sizes should still fall within the scope covered by the technical contents disclosed in the present invention without affecting the function and the achievable purpose of the present invention. Meanwhile, the terms such as "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof may be made without substantial technical changes, and the present invention is also regarded as the scope of the present invention.

The embodiment of the utility model discloses an embodiment provides a fish tail record appearance 4, this kind of fish tail record appearance 4's specification is unanimous with testing wounded target wafer 1, and shape and the size of surface are the same or basically the same with wafer 1 about this place specification means the fish tail record appearance that adopts platelike structure, and thickness then can be conventional wafer thickness for accurate. Such a scratch recorder 4 is made of a transparent material, preferably a transparent acrylic plate. The surface of the scratch recorder 4 is provided with lattice-shaped scales 5, when the scratch recorder 5 simulates a 12-inch wafer, the diameter of the scratch recorder is divided into thirty equal parts, each equal part is divided into four minimum scales, and the unit of the minimum scale is 2.5 mm. When the scratch recorder 5 simulates an 8-inch wafer, the diameter of the scratch recorder can be divided into twenty equal parts, each equal part is divided into four minimum scales, and the unit of the minimum scale is 2.5 mm. In other embodiments, the minimum scale unit may be set to other lengths as required for accuracy, with the smaller the minimum scale unit, the greater the accuracy of scratching the recorder 4. The scale 5 may be provided on the top and/or bottom surface of the scratch recorder 4.

In other embodiments, the scale 5 on the scratch recorder 4 may be of other structures capable of accurately recording the scratch 2, for example, it may be a dot matrix, the distance between two adjacent points is equal, the dots are spread over the entire scratch recorder 4 in the form of a matrix, when the scratch recorder 4 is used for scratch comparison, the trend of the scratch 2 may be recorded through the connection between the dots, and the information such as the length and position of the scratch may be calculated through the distance between the dots. The distance between two adjacent points is the minimum scale unit, and the more densely the points are arranged, the more accurately the scratch 2 can be recorded.

The arrangement of the scale 5 on the scratch recorder 4 comprises three embodiments: firstly, the scale 5 can slightly bulge relative to the plane where the top surface or the bottom surface of the scratch recorder 4 is located; secondly, the scale 5 and the top surface or the bottom surface of the scratch recorder 4 can be positioned on the same plane; finally, the scale 5 can also be slightly recessed with respect to the plane in which the top or bottom surface of the scratch recorder 4 lies.

When using the utility model provides a time measuring of back of a wafer fish tail is carried out to fish tail record appearance 4, there are following several kinds of application methods:

the target mechanical arm is found through comparison, the scratch 2 on the wafer 1 is accurately recorded, specifically, the scratch recorder 4 and the scratched wafer 1 are placed in adjacent slots of the wafer box, so that the scratch recorder and the scratched wafer 1 are conveniently and accurately positioned, and then information such as the track of the scratch 2 and the direction of a gap is accurately recorded on the scratch recorder 4. And comparing the information with the collected CAD bitmap of the mechanical arm 3, or directly comparing the information with the mechanical arm 3 instead of the wafer 1 to find out the target mechanical arm 3.

When the target robot arm 3 cannot be found using the above method, or when several suspicious robot arms 3 cannot be found to determine the target robot arm 3, the following method may be employed. As shown in fig. 3 and 4, the scratch recorder 4 is placed in a suspicious machine for a test run test, and since the scratch recorder 4 is transparent, the scratch on the back surface can be directly observed by eyes, the target mechanical arm 3 is determined, the loss probability of the wafer 1 is reduced, and the measurement efficiency is improved. And because the surface scale 5 of the scratch recorder 4 exists, the information such as the shape, the length, the position and the like of the scratch 2 can be intuitively and accurately transmitted to the working personnel. In order to facilitate direct visual inspection, the baffle of the machine table can be opened, and the running speed of the machine table is reduced.

It should be noted that, when the second way is used to find the target robot arm 3, the scratch recorder 4 is preferably made of a material with a hardness close to that of the wafer 1, such as an acrylic plate, so that the scratch recorder is more likely to generate scratches similar to that of the wafer, and the acrylic plate has stable physical properties and high toughness, is less likely to be broken to generate small fragments or particles, and will not damage the machine.

The utility model provides a fish tail record appearance 4 can also have another kind of usage: the scratch evidence of each mechanical arm 3 in the machine table is reserved by using the scratch recorder 4, the scratch recorder 4 is numbered, once the surface of the wafer 1 is scratched, the scratch recorder 4 can be used for comparison, and the target mechanical arm 3 can be found quickly.

The utility model provides a fish tail record appearance can accurately record the appearance information of fish tail, replaces the wafer to compare on the arm of machinery, or directly transmits the test on the machine platform, has reduced the risk of wafer fish tail or fragment, discovers and analyzes the reason of crystal back fish tail more easily; the testing steps are simplified, the workload is reduced, and the measuring efficiency is improved; the accuracy of detection is improved, and human errors are reduced.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. A scratch recorder is characterized in that:

the scratch recorder is of a plate-shaped structure, the specification of the scratch recorder is consistent with that of a target wafer to be tested, and the scratch recorder is made of transparent materials;

the scratch recorder is marked with scales, and the scales cover the top surface and/or the bottom surface of the whole scratch recorder;

the scales are grid scales or dot matrix scales.

2. A scratch recorder according to claim 1, characterized in that:

the scratch recorder is made of a transparent acrylic plate.

3. A scratch recorder according to claim 1, characterized in that:

the wafer is a 12-inch wafer, and the scratch recorder is of a circular plate-shaped structure with the diameter of 300 mm.

4. A scratch recorder according to claim 3, characterized in that:

the diameter of the scratch recorder is divided into thirty equal parts by the grid-shaped scales, and each equal part is divided into four minimum scales.

5. A scratch recorder according to claim 1, characterized in that:

the wafer is 8 inches of wafer, then the fish tail record appearance is the circular platelike structure that the diameter is 200 mm.

6. The scratch recorder of claim 5, wherein:

the diameter of the scratch recorder is divided into twenty equal parts by the grid-shaped scales on the scratch recorder, and each equal part is divided into four minimum scales.

7. A scratch recorder according to claim 4 or 6, characterized in that:

the minimum scale unit is 2.5 mm.

8. A scratch recorder according to claim 1, characterized in that:

the scales are convex or concave relative to the plane where the top surface or the bottom surface of the scratch recorder is located, or are located on the same plane with the top surface or the bottom surface.