CN103698910A - Foreign matter detection machine and detection method thereof - Google Patents
Foreign matter detection machine and detection method thereof Download PDFInfo
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- CN103698910A CN103698910A CN201310628660.XA CN201310628660A CN103698910A CN 103698910 A CN103698910 A CN 103698910A CN 201310628660 A CN201310628660 A CN 201310628660A CN 103698910 A CN103698910 A CN 103698910A
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Abstract
The invention discloses a novel foreign matter detection machine which not only can detect the area of a foreign matter, but also can detect the height of the foreign matter. The detection machine comprises a substrate bearing platform, a plurality of image sensors, an image processor and a plurality of 2D (2-dimensional) laser displacement sensors, wherein the substrate bearing platform is used for conveying substrates; the images sensors are fixedly arranged on a support at the middle-to-upper part of the substrate bearing platform; the image processor is connected with the image sensors through the Ethernet and is used for preliminarily processing images collected by the image sensors; the 2D laser displacement sensors are used for detecting the information of the height and the position of the foreign matter on the substrate, are uniformly distributed in two rows and are respectively arranged on the upper side and the lower side of the input end of the substrate bearing platform. By adopting the technical scheme of combining the images sensors with the 2D laser displacement sensors, the height of the foreign matter can be accurately detected while the size of the area of the foreign matter is detected, the situation that the substrates and a jig are scratched due to a reason that the foreign matter is undetected is effectively avoided, and products with poor quality are prevented from occurring.
Description
Technical field
The present invention relates to a kind of foreign body checking machine and inspection method thereof, relate in particular to a kind of inspection of foreign substance of substrate of the LCD panel before LCD panel exposure manufacture process.
Background technology
In LCD panel processing procedure, often occur because the situation (as scratch tool PI film galley, exposure machine mask plate etc.) of the tool of the substrate foreign matter scratch of LCD panel exposure, if after tool scratch, can not find in time, can cause a large amount of products bad, so need to increase the foreign body detecting device to the substrate of LCD panel before these engineerings.Existing testing fixture, can only pass through camera scanning substrate surface, checks the sectional area size of substrate surface foreign matter or defect, press foreign matter or defect sectional area size, carry out statistic of classification, value last and that set contrasts, certain big or small number exceeds setting value, reports to the police.Or by laser-correlation principle, if when foreign matter is excessive, can block the part light quantity that laser pickoff is received, receive light lower than certain value, equipment alarm.But existing testing fixture can not accurately check the height of foreign matter; Can not detect the two sides of the substrate of LCD panel; The pattern of sampling observation, the effectively all abnormal substrates of management and control; And laser-correlation mode, is easily subject to the impact of environment to cause inspection erroneous judgement, and then affects sowing of equipment etc.
Summary of the invention
Goal of the invention: order of the present invention is to have the height that can not accurately check foreign matter in order to solve testing fixture of the prior art; Can not detect the two sides of the substrate of LCD panel; The pattern of sampling observation, the effectively problem of all abnormal substrate of management and control.
Technical scheme: in order to realize above goal of the invention, the invention provides a kind of foreign body checking machine that a kind of novel area that both can check foreign matter has the height that can check foreign matter, this inspection machine comprises: a base plate carrying platform, for transmitting substrate; Some imageing sensors, are fixed on the support of this carrying platform middle and upper part, a portrait processor, and this portrait processor is connected by Ethernet with imageing sensor, and the image that portrait processor is collected imageing sensor carries out rough handling; Also comprise some 2D laser displacement sensors, for detection of the height of substrate foreign matter and the information of position, be evenly divided into two rows and be arranged in respectively the both sides up and down of importing end into of base plate carrying platform.
Further, also comprise a PC and the PLC being connected with PC; Described PC is also connected with described portrait processor with described 2D laser displacement sensor respectively; Described PLC is also connected with described imageing sensor; PC receives the height of substrate foreign matter and the information of position that 2D laser displacement sensor detects; And this information is passed to PLC, and PLC controls described imageing sensor according to reception information, and imageing sensor checks and takes the picture of foreign matter, and portrait processor sends PC to after the pictorial information of shooting is processed.
Further, being connected between described PC and described 2D laser displacement sensor, described PC and described PLC, described PLC and described imageing sensor and described portrait processor and described PC is to connect by Ethernet.
The present invention gives a kind of inspection method of foreign body checking machine, comprises foreign body checking machine described above, comprises the steps:
Step 1: first measuring the whole substrate surface of the LCD panel of foreign matter that do not exist by 2D laser displacement sensor and arrive the distance between this sensor, and make distance Curve figure, is reference pattern by this distance Curve graphical definition;
Step 2: the surface of the substrate of checked LCD panel is measured to the distance between 2D laser displacement sensor, and obtained a measuring distance curvilinear figure;
Step 3: the reference pattern in the measuring distance curvilinear figure obtaining in step 2 and step 1 is contrasted, if any extremely, just can obtain the coordinate of abnormity point and the height of abnormity point.As not abnormal, the step of inspection machine repeating step 2;
Step 4: the elevation information of the coordinate of the abnormity point in step 3 and abnormity point is passed to PLC; PLC control chart image-position sensor moves to corresponding abnormity point position, and checks the picture of taking abnormal area; And the pictorial information of shooting is passed to portrait processor;
Step 5: portrait processor send PC to after will pictorial information processing, and PC is reported to the police after integrating all information, and inspection machine quits work, and waits for that staff confirms.
Beneficial effect: the present invention is by the combination of imageing sensor and 2D laser displacement sensor, when checking foreign matter sectional area size, accurately check the height of foreign matter, effectively avoid causing because foreign matter is undetected the situation of substrate and tool scratch, the bad generation of product of avoiding.
Accompanying drawing explanation
Fig. 1 is the partial top view of foreign body checking machine of the present invention;
Fig. 2 is that 2D laser displacement sensor of the present invention is with respect to the schematic diagram of the position of base plate carrying platform;
Fig. 3 is the graph of a relation of each parts of foreign body checking machine of the present invention;
Fig. 4 is that foreign body checking machine of the present invention is not to existing the substrate surface of the LCD panel of foreign matter to carry out instrumentation plan to the distance between sensor;
Fig. 5 is the reference pattern recording in Fig. 4;
Fig. 6 is that foreign body checking machine of the present invention is to existing the substrate surface of the LCD panel of foreign matter to carry out instrumentation plan to the distance between sensor;
Fig. 7 is the distance Curve figure that records in Fig. 6 and the comparison diagram of reference pattern.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, should understand these embodiment is only not used in and limits the scope of the invention for the present invention is described, after having read the present invention, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present invention.
In order to solve the problem of prior art, the invention provides a kind of novel inspection machine that not only can check the area of foreign matter but also can check the height of foreign matter.As shown in Figure 1 to Figure 3, this inspection machine comprises: base plate carrying platform 10, this carrying platform is provided with power wheel 11, for transmitting the substrate 20 of LCD panel, this substrate 20 adopts linear motor Control Shaft to drive power wheel to transmit while being transmitted, linear motor Control Shaft is positioned at the outside (not shown) of board; Some imageing sensors 30, this imageing sensor built-in light source, and be fixed on the support 31 of this carrying platform middle and upper part, for obtaining the information such as foreign matter image, foreign matter size, position; Some 2D laser displacement sensors 40 are evenly divided into two rows, are distributed in the both sides up and down of importing end into of base plate carrying platform, for detection of height and the position of substrate 20 surfaces of LCD panel and the foreign matter at the back side; One portrait processor, this portrait processor is connected by Ethernet with imageing sensor, and the image that portrait processing module is collected imageing sensor carries out rough handling, obtains foreign matter size, position, pictorial information result; Also comprise a PC and a PLC.
Wherein, PC is connected with 2D laser displacement sensor, PC receives the height of basic foreign matter and the information of position that 2D laser displacement sensor detects, and this information is passed to PLC, PLC is according to the information of reception control chart image-position sensor 30, and imageing sensor checks and take the picture of abnormal area, and portrait processor sends PC to after the pictorial information of shooting is processed, PC is reported to the police after integrating all information, and equipment stops.Wherein, being connected between PC and 2D laser displacement sensor, PC and PLC, PLC and imageing sensor and portrait processor and PC is all to connect by Ethernet.
While transmitting on the substrate of the LCD panel base plate carrying platform 10 at inspection machine, 2D laser displacement sensor carries out foreign matter detection to the substrate surface of LCD panel and the back side, the processing module of 2D laser displacement sensor goes out the position of each point on whole coplanar laser illumination to the distance between 2D laser displacement sensor 40 according to the Calculation of Optical Path of the substrate surface back reflection of Ear Mucosa Treated by He Ne Laser Irradiation LCD panel, and record corresponding coordinate, then send PC to by Ethernet.If any extremely, PC sends the coordinate of abnormity point to PLC, PLC control chart image-position sensor carries out follow shot, the result that image processor is processed pictorial information is the information such as foreign matter size, foreign matter position, foreign matter picture, by Ethernet, send computer to, PC is reported to the police after integrating all information, and equipment stops, and waits for personnel inspection.
The flow process of the inspection method of foreign body checking machine of the present invention is as follows:
Step 1: first measuring the whole substrate surface of the LCD panel of foreign matter that do not exist by 2D laser displacement sensor and arrive the distance between this sensor, and make distance Curve figure, is reference pattern by this distance Curve graphical definition.As shown in Figure 4,40 pairs of 2D laser displacement sensors do not exist foreign matter LCD panel substrate 30 two surface to the distance between this sensor, measure, obtain a distance Curve figure as shown in Figure 5, y axle is distance height, x takes out the coordinate into each measurement point of substrate, by this distance Curve graphical definition, is reference pattern the altitude range that obtains reference pattern.
Step 2: the surface of the substrate of checked LCD panel is measured to the distance between 2D laser displacement sensor, and obtained a measuring distance curvilinear figure.
Step 3: the reference pattern in the measuring distance curvilinear figure obtaining in step 2 and step 1 is contrasted, if any extremely, just can obtain the coordinate of abnormity point and the height of abnormity point.As not abnormal, the step of inspection machine repeating step 2.As shown in Figure 6, after measuring with the substrate 50 of foreign matter 71, foreign matter 72, foreign matter 73 and foreign matter 75, the distance Curve figure obtaining and the reference pattern in step 1 contrast the waveform obtaining as shown in Figure 7.From Fig. 7, can obtain foreign matter 71, foreign matter 72 and foreign matter 75 coordinates of place substrate 50 and the height of foreign matter.
Step 4: the elevation information of the coordinate of the abnormity point in step 3 and abnormity point is passed to PLC; PLC control chart image-position sensor moves to corresponding abnormity point position, and checks the picture of taking abnormal area; And the pictorial information of shooting is passed to portrait processor.
Step 5: portrait processor send PC to after will pictorial information processing, and PC is reported to the police after integrating all information, and inspection machine quits work, and waits for that staff confirms.
The present invention is by the combination of imageing sensor and 2D laser displacement sensor, by rational control, process and feedback system, when checking foreign matter sectional area size, accurately check the height of foreign matter, effectively avoid causing because foreign matter is undetected the situation of substrate and tool scratch, the bad generation of product of avoiding.
Claims (4)
1. a foreign body checking machine, comprising: a base plate carrying platform, for transmitting substrate; Some imageing sensors, be fixed on the support of this carrying platform middle and upper part, one portrait processor, this portrait processor is connected by Ethernet with imageing sensor, the image that portrait processor is collected imageing sensor carries out rough handling, it is characterized in that: also comprise some 2D laser displacement sensors, for detection of the height of substrate foreign matter and the information of position, be evenly divided into two rows and be arranged in respectively the both sides up and down of importing end into of base plate carrying platform.
2. a kind of foreign body checking machine according to claim 1, is characterized in that: also comprise a PC and the PLC being connected with PC; Described PC is also connected with described portrait processor with described 2D laser displacement sensor respectively; Described PLC is also connected with described imageing sensor; PC receives the height of substrate foreign matter and the information of position that 2D laser displacement sensor detects; And this information is passed to PLC, and PLC controls described imageing sensor according to reception information, and imageing sensor checks and takes the picture of foreign matter, and portrait processor sends PC to after the pictorial information of shooting is processed.
3. a kind of foreign body checking machine according to claim 2, is characterized in that: being connected between described PC and described 2D laser displacement sensor, described PC and described PLC, described PLC and described imageing sensor and described portrait processor and described PC is to connect by Ethernet.
4. an inspection method for foreign body checking machine, comprises inspection machine as claimed in claim 1, it is characterized in that comprising the steps:
Step 1: first measuring the whole substrate surface of the LCD panel of foreign matter that do not exist by 2D laser displacement sensor and arrive the distance between this sensor, and make distance Curve figure, is reference pattern by this distance Curve graphical definition;
Step 2: the surface of the substrate of checked LCD panel is measured to the distance between 2D laser displacement sensor, and obtained a measuring distance curvilinear figure;
Step 3: the reference pattern in the measuring distance curvilinear figure obtaining in step 2 and step 1 is contrasted, if any extremely, just can obtain the coordinate of abnormity point and the height of abnormity point.As not abnormal, the step of inspection machine repeating step 2;
Step 4: the elevation information of the coordinate of the abnormity point in step 3 and abnormity point is passed to PLC; PLC control chart image-position sensor moves to corresponding abnormity point position, and checks the picture of taking abnormal area; And the pictorial information of shooting is passed to portrait processor;
Step 5: portrait processor send PC to after will pictorial information processing, and PC is reported to the police after integrating all information, and inspection machine quits work, and waits for that staff confirms.
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| CN201310628660.XA CN103698910B (en) | 2013-11-28 | 2013-11-28 | A kind of foreign body checking machine and inspection method thereof |
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Cited By (7)
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| CN104808213A (en) * | 2015-05-11 | 2015-07-29 | 合肥京东方光电科技有限公司 | Foreign matter detecting device and coating system |
| CN107408518A (en) * | 2015-02-27 | 2017-11-28 | 株式会社高永科技 | Substrate inspecting method and system |
| CN108375354A (en) * | 2018-01-12 | 2018-08-07 | 嵊州市东浩电子科技有限公司 | A kind of method and apparatus of leaded light slab warping defects detection |
| CN108663377A (en) * | 2014-07-23 | 2018-10-16 | 塞米西斯科株式会社 | Bad inspection system and method |
| CN110058439A (en) * | 2019-05-20 | 2019-07-26 | 成都中电熊猫显示科技有限公司 | The foreign matter minimizing technology and equipment of colorized optical filtering on piece |
| CN110161729A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Display panel test method and system |
| CN114188870A (en) * | 2021-12-15 | 2022-03-15 | 江苏安靠智能输电工程科技股份有限公司 | 110kV outdoor three-phase integrated switching all-in-one machine |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108663377A (en) * | 2014-07-23 | 2018-10-16 | 塞米西斯科株式会社 | Bad inspection system and method |
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| CN108375354A (en) * | 2018-01-12 | 2018-08-07 | 嵊州市东浩电子科技有限公司 | A kind of method and apparatus of leaded light slab warping defects detection |
| CN110161729A (en) * | 2019-05-17 | 2019-08-23 | 深圳市华星光电半导体显示技术有限公司 | Display panel test method and system |
| CN110161729B (en) * | 2019-05-17 | 2021-08-03 | 深圳市华星光电半导体显示技术有限公司 | Display panel testing method and system |
| CN110058439A (en) * | 2019-05-20 | 2019-07-26 | 成都中电熊猫显示科技有限公司 | The foreign matter minimizing technology and equipment of colorized optical filtering on piece |
| CN110058439B (en) * | 2019-05-20 | 2021-03-23 | 成都中电熊猫显示科技有限公司 | Method and apparatus for removing foreign matter on color filter |
| CN114188870A (en) * | 2021-12-15 | 2022-03-15 | 江苏安靠智能输电工程科技股份有限公司 | 110kV outdoor three-phase integrated switching all-in-one machine |
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| CN103698910B (en) | 2016-03-16 |
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Effective date of registration: 20170302 Address after: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Patentee after: Nanjing CLP panda flat panel display technology Co., Ltd. Patentee after: Nanjing CEC Panda LCD Technology Co., Ltd. Address before: 210033 Jiangsu city of Nanjing province science and technology road Xianlin Avenue Nanjing Crystal Valley Nanjing panda LCD Technology Co. Ltd. Patentee before: Nanjing CEC Panda LCD Technology Co., Ltd. |
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Effective date of registration: 20200902 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Patentee after: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Co-patentee before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Patentee before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. |