CN211529925U

CN211529925U - Discharging device for diffusion furnace

Info

Publication number: CN211529925U
Application number: CN201922453226.8U
Authority: CN
Inventors: 颜廷福
Original assignee: Qingdao Furunde Microelectronic Equipment Co ltd
Current assignee: Qingdao Furunde Microelectronic Equipment Co ltd
Priority date: 2019-12-31
Filing date: 2019-12-31
Publication date: 2020-09-18
Anticipated expiration: 2029-12-31

Abstract

The utility model discloses a discharging device for diffusion furnace, the induction cooker comprises a cooker bod, the first motor of the equal fixedly connected with in top both ends of furnace body, the first threaded rod of output shaft fixedly connected with of first motor, two the common threaded connection of surface of first threaded rod has the crane, the equal fixedly connected with slider in both sides of crane, the position that the inner wall of furnace body corresponds the slider is provided with the spout, and slider and spout sliding connection, the position fixedly connected with third motor of top one side of crane. The utility model discloses in, the rotary rod can drive the semi-gear and rotate, and the semi-gear can drive gear revolve, and the gear can drive the dead lever and rotate, and the dead lever can drive the quartz boat and rotate to can shift out the inside of furnace body with the article of quartz boat inside is automatic, simple structure, it is with low costs, the furnace body of being convenient for can automatic discharge, make things convenient for people to use, can make the efficiency that increases the diffusion simultaneously.

Description

Discharging device for diffusion furnace

Technical Field

The utility model relates to a discharging device technical field especially relates to a discharging device for diffusion furnace.

Background

The diffusion furnace is one of important process devices of a front process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, and consists of a control system, a quartz boat system, a furnace body heating system, a gas control system and the like, and is of two types, namely a vertical diffusion furnace and a horizontal diffusion furnace.

The diffusion furnace needs a process for diffusing objects through high temperature, but after diffusion is finished, people need to take out the diffused objects, so that a discharging device for the diffusion furnace is needed, the existing discharging structure of the diffusion furnace is very complex, the cost is very high, the operation is more complicated, and the use is inconvenient and has certain influence.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a discharging device for a diffusion furnace.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a discharging device for a diffusion furnace comprises a furnace body, wherein both ends of the top of the furnace body are fixedly connected with a first motor, an output shaft of the first motor is fixedly connected with a first threaded rod, the outer surfaces of the two first threaded rods are jointly and threadedly connected with a lifting frame, both sides of the lifting frame are fixedly connected with sliding blocks, a sliding groove is arranged on the inner wall of the furnace body corresponding to the position of the sliding block, the sliding block is slidably connected with the sliding groove, a third motor is fixedly connected with the position of one side of the top of the lifting frame, an output shaft of the third motor is fixedly connected with a second threaded rod, one end of the second threaded rod, far away from the third motor, is rotatably connected with a fixed seat, the outer surface of the second threaded rod is threadedly connected with a movable plate, both ends of the top of the movable plate are, two the common fixedly connected with quartz boat of one end of mount is kept away from to the dead lever, the surface fixedly connected with gear of dead lever, the top fixedly connected with motor cabinet of movable plate, the top fixedly connected with second motor of motor cabinet, the output shaft fixedly connected with rotary rod of second motor, the one end fixedly connected with half-gear of mount is kept away from to the rotary rod, and half-gear is connected with the gear engagement, the bottom fixedly connected with second magnet of quartz boat, the top of movable plate corresponds the first magnet of position fixedly connected with of second magnet.

As a further description of the above technical solution:

the rotating rod is connected with the fixing frame in a penetrating way.

As a further description of the above technical solution:

the fixing seat is fixedly connected with the lifting frame.

As a further description of the above technical solution:

the moving plate is in through connection with the lifting frame.

As a further description of the above technical solution:

the top one end of furnace body is provided with the feed inlet, the bottom other end of furnace body is provided with the discharge gate.

As a further description of the above technical solution:

the two fixing rods are positioned on the same central shaft.

The utility model discloses following beneficial effect has:

1. this discharging device for diffusion furnace, when using, through the second motor that sets up, the rotary rod, the semi-gear, the gear, dead lever and quartz boat, the second motor can drive the rotary rod and rotate, the rotary rod can drive the semi-gear and rotate, the semi-gear can drive gear revolve, the gear can drive the dead lever and rotate, the dead lever can drive quartz boat and rotate, thereby can shift out the inside of furnace body with the article automation of quartz boat inside, moreover, the steam generator is simple in structure, low cost, the furnace body of being convenient for can the automatic discharge, make things convenient for people to use, simultaneously can make the efficiency of increase diffusion.

2. This discharging device for diffusion furnace, when using, through second magnet, first magnet, slider and the spout that sets up, second magnet and first magnet can make the quartz boat can automatic recovery through magnetic force between to the people of being convenient for use once more, slider and spout can make the lift frame go up and down on the inside fixed position of furnace body, prevent that the slow-moving influence diffusion process from appearing in the lift process.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is an enlarged view of a in fig. 1 according to the present invention;

fig. 3 is a top view of the present invention;

fig. 4 is a schematic view of the connection between the quartz boat and the movable plate of the present invention.

Illustration of the drawings:

1. a furnace body; 2. a quartz boat; 3. a feed inlet; 4. a first motor; 5. a first threaded rod; 6. moving the plate; 7. a lifting frame; 8. a discharge port; 9. a motor base; 10. a gear; 11. fixing the rod; 12. a fixed mount; 13. a half gear; 14. a second motor; 15. a third motor; 16. a second threaded rod; 17. rotating the rod; 18. a fixed seat; 19. a first magnet; 20. a slider; 21. a chute; 22. a second magnet.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-4, the present invention provides an embodiment: a discharging device for a diffusion furnace comprises a furnace body 1, wherein both ends of the top of the furnace body 1 are fixedly connected with a first motor 4, an output shaft of the first motor 4 is fixedly connected with a first threaded rod 5, the outer surfaces of the two first threaded rods 5 are jointly in threaded connection with a lifting frame 7, both sides of the lifting frame 7 are fixedly connected with sliders 20, a sliding groove 21 is arranged on the inner wall of the furnace body 1 corresponding to the position of the slider 20, the slider 20 is in sliding connection with the sliding groove 21, the position of one side of the top of the lifting frame 7 is fixedly connected with a third motor 15, the output shaft of the third motor 15 is fixedly connected with a second threaded rod 16, one end of the second threaded rod 16 far away from the third motor 15 is rotatably connected with a fixed seat 18, the outer surface of the second threaded rod 16 is in threaded connection with a movable plate 6, both ends of the top of, the quartz boat 2 of the common fixedly connected with of one end of mount 12 is kept away from to two dead levers 11, the outer fixed surface of dead lever 11 is connected with gear 10, the top fixedly connected with motor cabinet 9 of movable plate 6, the top fixedly connected with second motor 14 of motor cabinet 9, the output shaft fixedly connected with rotary rod 17 of second motor 14, the one end fixedly connected with half gear 13 of mount 12 is kept away from to rotary rod 17, and half gear 13 is connected with the meshing of gear 10, the bottom fixedly connected with second magnet 22 of quartz boat 2, the first magnet 19 of the position fixedly connected with of second magnet 22 is corresponded at the top of movable plate 6.

The rotating rod 17 is connected with the fixed frame 12 in a penetrating way, so that the half gear 13 can rotate at a fixed position, and the quartz boat 2 can automatically rotate to pour out objects; the fixed seat 18 is fixedly connected with the lifting frame 7, so that the second threaded rod 16 can rotate at a fixed position, and the quartz boat 2 can automatically move conveniently; the movable plate 6 is in through connection with the lifting frame 7, so that the movable plate 6 can move at a fixed position, and the objects in the quartz boat 2 are prevented from falling off when being diffused, and the diffusion process is prevented from being influenced; a feed inlet 3 is formed in one end of the top of the furnace body 1, a discharge outlet 8 is formed in the other end of the bottom of the furnace body 1, and articles can be conveniently moved in and out of the furnace body 1 through the feed inlet 3 and the discharge outlet 8 respectively; the two fixing rods 11 are positioned on the same central shaft, which can facilitate the rotation of the quartz boat 2, so that the components inside the quartz boat 2 can be poured out.

The working principle is as follows: when the discharging device for the diffusion furnace is used, firstly, objects to be diffused are placed on the quartz boat 2 through the feeding hole 3, then the first motor 4 is started, the output shaft of the first motor 4 drives the first threaded rod 5 to rotate, the first threaded rod 5 rotates to drive the lifting frame 7 to lift, meanwhile, the third motor 15 is started, the output shaft of the third motor 15 drives the second threaded rod 16 to rotate, the second threaded rod 16 rotates to drive the moving plate 6 to move, so that the quartz boat 2 can move in the furnace body 1, the diffusion of the quartz boat is more complete, finally, when the quartz boat 2 moves above the discharging hole 8, the second motor 14 is started, the second motor 14 drives the rotating rod 17 to rotate, the rotating rod 17 drives the half gear 13 to rotate, the half gear 13 drives the gear 10 to rotate, the gear 10 drives the quartz boat 2 to rotate through the fixed rod 11, so that the objects in the quartz boat 2 can be automatically poured out of the furnace body 1 through the discharging hole 8, the magnetic force between the second magnet 22 and the first magnet 19 can automatically recover the quartz boat 2, so that the next diffusion is facilitated, the operation is simple, and certain practicability is achieved.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a discharging device for diffusion furnace, includes furnace body (1), its characterized in that: the furnace is characterized in that both ends of the top of the furnace body (1) are fixedly connected with a first motor (4), an output shaft of the first motor (4) is fixedly connected with a first threaded rod (5), the outer surfaces of the two first threaded rods (5) are jointly in threaded connection with a lifting frame (7), both sides of the lifting frame (7) are fixedly connected with sliding blocks (20), a sliding groove (21) is formed in the inner wall of the furnace body (1) corresponding to the position of the sliding block (20), the sliding block (20) is in sliding connection with the sliding groove (21), a third motor (15) is fixedly connected with the position of one side of the top of the lifting frame (7), an output shaft of the third motor (15) is fixedly connected with a second threaded rod (16), one end of the second threaded rod (16) far away from the third motor (15) is rotatably connected with a fixed seat (18), and the outer surface of the second threaded rod (, the quartz boat is characterized in that fixing frames (12) are fixedly connected to two ends of the top of the movable plate (6), fixing rods (11) are rotatably connected to the inner sides of the two fixing frames (12) through bearings, one ends, far away from the fixing frames (12), of the two fixing rods (11) are fixedly connected with a quartz boat (2) together, gears (10) are fixedly connected to the outer surfaces of the fixing rods (11), a motor base (9) is fixedly connected to the top of the movable plate (6), a second motor (14) is fixedly connected to the top of the motor base (9), rotary rods (17) are fixedly connected to output shafts of the second motor (14), half gears (13) are fixedly connected to one ends, far away from the fixing frames (12), of the rotary rods (17), the half gears (13) are meshed with the gears (10), and second magnets (22) are fixedly connected to the bottoms, the top of the moving plate (6) is fixedly connected with a first magnet (19) at a position corresponding to the second magnet (22).

2. The discharging device for the diffusion furnace according to claim 1, wherein: the rotating rod (17) is connected with the fixed frame (12) in a penetrating way.

3. The discharging device for the diffusion furnace according to claim 1, wherein: the fixed seat (18) is fixedly connected with the lifting frame (7).

4. The discharging device for the diffusion furnace according to claim 1, wherein: the moving plate (6) is in through connection with the lifting frame (7).

5. The discharging device for the diffusion furnace according to claim 1, wherein: the furnace body is characterized in that a feeding hole (3) is formed in one end of the top of the furnace body (1), and a discharging hole (8) is formed in the other end of the bottom of the furnace body (1).

6. The discharging device for the diffusion furnace according to claim 1, wherein: the two fixing rods (11) are positioned on the same central shaft.