CN211455662U - 一种用于反应室的晶片传动装置 - Google Patents
一种用于反应室的晶片传动装置 Download PDFInfo
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- CN211455662U CN211455662U CN201922123814.5U CN201922123814U CN211455662U CN 211455662 U CN211455662 U CN 211455662U CN 201922123814 U CN201922123814 U CN 201922123814U CN 211455662 U CN211455662 U CN 211455662U
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Effective date of registration: 20231113 Address after: Room 103, Building 1, No. 500 Shunda Road, Yuhang Economic and Technological Development Zone, Linping District, Hangzhou City, Zhejiang Province, 311103 Patentee after: Zhejiang Qiushi Chuangxin Semiconductor Equipment Co.,Ltd. Patentee after: ZHEJIANG JINGSHENG M&E Co.,Ltd. Address before: 311100 Zhejiang Province Hangzhou Yuhang District East Lake Street Qianjiang Economic Development Zone, No. 96 Longchuanwu Road, Building 2, 3 Floors Patentee before: ZHEJIANG QIUSHI SEMICONDUCTOR EQUIPMENT Co.,Ltd. Patentee before: ZHEJIANG JINGSHENG M&E Co.,Ltd. |
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