CN211425740U - Piezoresistive zirconia ceramic pressure core and sensor thereof - Google Patents
Piezoresistive zirconia ceramic pressure core and sensor thereof Download PDFInfo
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- CN211425740U CN211425740U CN202020313126.5U CN202020313126U CN211425740U CN 211425740 U CN211425740 U CN 211425740U CN 202020313126 U CN202020313126 U CN 202020313126U CN 211425740 U CN211425740 U CN 211425740U
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- pressure core
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Abstract
The utility model discloses a piezoresistive zirconia ceramic pressure core and a sensor thereof, wherein, the piezoresistive zirconia ceramic pressure core comprises a zirconia ceramic matrix, a silver circuit, a resistor, a temperature compensation resistor, a protective glass layer and an anti-oxidation coating; the silver circuit is connected with the outer side of the sensing film of the zirconia ceramic substrate, the resistor and the temperature compensation resistor are connected on the silver circuit and connected in series, the protective glass layer is arranged on the tops of the silver circuit, the resistor and the temperature compensation resistor, and the anti-oxidation coating is arranged on the top of the protective glass layer. The utility model discloses a piezoresistive zirconia ceramic pressure core is not fragile, sturdy and durable. The utility model discloses a sensor includes protecting sheathing, O type sealing washer, first fixed block, second fixed block and piezoresistive zirconia ceramic pressure core, simple structure, and the equipment is convenient firm, and the leakproofness is good, can be applied to pressure detection under the various complex environment.
Description
Technical Field
The utility model relates to a detect the sensing element technical field of various flowing medium pressure, more specifically the saying so relates to a piezoresistive zirconia ceramic pressure core and sensor thereof.
Background
At present, the conditions that media need to be pressurized and used in the fields of urban construction, industrial field, life, safety, medical treatment and health and the like are not kept away, pressure sensors are needed to monitor and control the media from domestic water supply to factory pipeline transportation, the pressure sensors are not kept away from pressure sensing components, the pressure sensing components are the basis and the core of all the pressure sensors, and the pressure sensing components are components for converting physical signals into electric signals capable of being identified or identifiable physical signals.
The ceramic has high strength, high hardness, corrosion resistance, high temperature resistance, high pressure resistance and vibration resistance, is basically insoluble in other media except specific solvents, is safe and reliable, and has no pollution to the media, so that the ceramic pressure core has wide application fields. The ceramic pressure core mainly comprises a ceramic capacitance type pressure core and a piezoresistive type ceramic pressure core. Ceramic piezoresistive pressure core body divide into alumina ceramics pressure core body and zirconia ceramic pressure core body again, and for alumina ceramics, zirconia ceramics's density is the twice of alumina ceramics, and zirconia's compressive capacity is stronger under comparing, and zirconia ceramics's toughness is about 4 times of alumina ceramics, and alumina is more fragile under the same condition.
The existing pressure measurement core body thick film circuit is printed on a ceramic substrate, and a resistor is arranged on the thick film circuit. But because of lacking the protection device, the resistance is easy to oxidize and damage, and the pressure measurement core body can not normally measure.
Therefore, how to provide a flowing medium pressure measuring core which is not easy to damage and is durable is a problem that needs to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a piezoresistive zirconia ceramic pressure core, it is not fragile, sturdy and durable, can be applied to flowing medium pressure detection under the various complex environment.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a piezoresistive zirconia ceramic pressure core comprises a zirconia ceramic substrate, a silver circuit, a resistor, a temperature compensation resistor, a protective glass layer and an anti-oxidation coating;
the silver circuit is connected with the outer side of an induction film of the zirconia ceramic substrate, the resistor and the temperature compensation resistor are connected on the silver circuit, the resistor and the temperature compensation resistor are connected in series, the protective glass layer is arranged on the top of the silver circuit, the top of the resistor and the top of the temperature compensation resistor, and the anti-oxidation coating is arranged on the top of the protective glass layer.
Preferably, the resistors and the silver line form a wheatstone bridge line.
Preferably, the silver line is attached to the outer side of the sensing film of the zirconia ceramic substrate in a thick film silk-screen printing manner.
Preferably, the resistor and the temperature compensation resistor are connected to the silver circuit in a thick film silk-screen printing mode.
Preferably, the protective glass layer is attached to the tops of the silver circuit, the resistor and the temperature compensation resistor in a thick film silk-screen printing mode.
Preferably, the anti-oxidation coating is attached to the protective glass layer in a thick film screen printing mode.
Preferably, the zirconia ceramic matrix comprises 18mm outer diameter concave zirconia ceramic.
A sensor comprises a protective shell, an O-shaped sealing ring, a first fixing block, a second fixing block and a piezoresistive zirconia ceramic pressure core body;
the protective shell is positioned on the outermost side, the piezoresistive zirconia ceramic pressure core is installed in the protective shell, a space is formed between the bottom of the piezoresistive zirconia ceramic pressure core and the protective shell, a pressure medium inlet is formed in the protective shell, and the pressure medium inlet is communicated with the space; the top of the piezoresistive zirconia ceramic pressure core body is fixed through the first fixing block, and the first fixing block is installed on the inner side of the protective shell; the second fixing block is arranged on the first fixing block and is arranged in a groove on the inner side of the protective shell; the protective shell and the piezoresistive zirconia ceramic pressure core body are sealed through the O-shaped sealing ring.
Preferably, the first fixing block is an annular device.
Preferably, the second fixing block is a standard component hole C-shaped retaining ring.
Can know via foretell technical scheme, compare with prior art, the utility model discloses a piezoresistive zirconia ceramic pressure core and sensor has set up protection glass layer and anti oxidation coating on piezoresistive zirconia ceramic pressure core, has good guard action to resistance and temperature compensation resistance on silver circuit and the silver circuit on the core, avoids receiving the water smoke, dust pollution's influence and oxidative damage, the utility model discloses a piezoresistive zirconia ceramic pressure core is not fragile, sturdy and durable. The utility model discloses a sensor includes protecting sheathing, O type sealing washer, first fixed block, second fixed block and piezoresistive zirconia ceramic pressure core, simple structure, and the equipment is convenient firm, and the leakproofness is good, can be applied to pressure detection under the various complex environment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a structural explosion diagram of the piezoresistive zirconia ceramic pressure core provided by the present invention.
Fig. 2 is a first schematic diagram of the piezoresistive zirconia ceramic pressure core provided by the present invention.
Fig. 3 is a diagram of the sensor assembly structure provided by the present invention.
Fig. 4 is a second schematic diagram of the piezoresistive zirconia ceramic pressure core provided by the present invention.
Fig. 5 is a second fixing block composition provided by the present invention.
In the figure: 1-a zirconia ceramic matrix; 2-silver lines; 3-resistance; 4-temperature compensation of the resistor; 5-a protective glass layer; 6-anti-oxidation coating; 7-a protective housing; 8-piezoresistive zirconia ceramic pressure core body; 9-O type sealing ring; 10-a first fixed block; 11-a second fixed block; 12-pressure medium inlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to the attached drawings 1 and 2, the embodiment of the utility model discloses a piezoresistive zirconia ceramic pressure core, which comprises a zirconia ceramic matrix 1, a silver circuit 2, a resistor 3, a temperature compensation resistor 4, a protective glass layer 5 and an anti-oxidation coating 6;
the silver circuit 2 is connected with the outer side of an induction film of the zirconia ceramic substrate 1, the resistor 3 and the temperature compensation resistor 4 are connected on the silver circuit 2, the resistor 3 and the temperature compensation resistor 4 are connected in series, the protective glass layer 5 is arranged on the tops of the silver circuit 2, the resistor 3 and the temperature compensation resistor 4, and the anti-oxidation coating 6 is arranged on the top of the protective glass layer 5;
when the pressure of a flowing medium is measured, the pressure medium extrudes the zirconia ceramic substrate 1 to cause the resistor 3 to deform, so that the resistance value changes, and electric signal transmission is carried out through the silver line 2; when the temperature changes, especially the temperature rises, the resistance value of the resistor 3 changes due to the temperature rise, and the resistance value of the temperature compensation resistor 4 changes along with the change of the resistance value to reduce or eliminate the influence of the temperature change on the resistance value of the resistor 3; the piezoresistive zirconia ceramic pressure core has high strength, good toughness, high hardness, corrosion resistance and high temperature resistance, can keep stable in various complex environments, and is almost insoluble in inorganic media and organic media such as water, oil and the like except specific media (66.7 percent sulfuric acid solution, slightly soluble in hydrochloric acid and nitric acid and slowly soluble in hydrofluoric acid); can work normally at the temperature below 600 ℃, has high sensitivity, and the withstand voltage can reach more than 4 times of the range and is higher than the withstand voltage of the range of about 3 times of the alumina ceramics.
In order to further optimize the above solution, the resistor 3 and the silver line 2 form a wheatstone bridge line.
In order to further optimize the above technical solution, the silver line 2 is attached to the outer side of the sensing film (the reverse side of the recessed end) of the zirconia ceramic substrate 1 by means of thick film screen printing, and after detection, drying and sintering, the silver line 2 is solidified and fixed to the outer side of the sensing film (the reverse side of the recessed end) of the zirconia ceramic substrate 1, and the silver line 2 is cooled.
In order to further optimize the technical scheme, the resistor 3 and the temperature compensation resistor 4 are connected to the silver circuit 2 in a thick film screen printing mode, the resistor 3 is connected to the silver circuit in a thick film screen printing mode, the resistor 3 is solidified through detection, drying and sintering, a Wheatstone bridge circuit is formed by the resistor 3 and the silver circuit 2, the temperature compensation resistor 4 is connected to the silver circuit in a thick film screen printing mode after the resistor 3 is cooled, the temperature compensation resistor 4 is solidified through detection, drying and sintering, and the temperature compensation resistor 4 is cooled; the resistor 3 and the temperature compensation resistor 4 are connected in series through a printed circuit.
In order to further optimize the technical scheme, the protective glass layer 5 is attached to the tops of the silver circuit 2, the resistor 3 and the temperature compensation resistor 4 in a thick film silk-screen printing mode, and the protective glass layer 5 is solidified and covers the upper surface of the protective glass layer 5 after detection, drying and sintering.
In order to further optimize the technical scheme, the anti-oxidation coating 6 is attached to the protective glass layer 5 in a thick film silk-screen printing mode, the anti-oxidation coating 6 is solidified through detection, drying and sintering, and the anti-oxidation coating 6 is cooled; the protective glass layer 5 and the anti-oxidation coating 6 are attached to the silver circuit 2, the resistor 3 and the temperature compensation resistor 4 in a silk-screen manner, so that the silver circuit 2, the resistor 3 and the temperature compensation resistor 4 can be protected from oxidation damage caused by water mist, air, dust pollution and the like.
In order to further optimize the technical scheme, the zirconia ceramic substrate 1 comprises 18mm outer-diameter concave zirconia ceramic, a circuit is attached to the outer side of the concave zirconia ceramic induction film in a thick film silk-screen printing mode, and the deformation of the diaphragm is converted into an electric signal through a Wheatstone bridge and then transmitted out.
Referring to fig. 3, 4 and 5, the embodiment of the present invention further discloses a sensor, which includes a protective casing 7, an O-ring 9, a first fixed block 10, a second fixed block 11 and a piezoresistive zirconia ceramic pressure core 8;
the protective shell 7 is positioned at the outermost side, the piezoresistive zirconia ceramic pressure core 8 is arranged in the protective shell 7, a space is formed between the bottom of the piezoresistive zirconia ceramic pressure core 8 and the protective shell 7, the protective shell 7 is provided with a pressure medium inlet 12, and the pressure medium inlet 12 is communicated with the space; the top of the piezoresistive zirconia ceramic pressure core body 8 is fixed through a first fixing block 10, and the first fixing block 10 is installed on the inner side of the protective shell 7; the second fixed block 11 is arranged on the first fixed block 10 and is arranged in a groove on the inner side of the protective shell 7; seal through O type sealing washer 9 between protecting sheathing 7 and the piezoresistive zirconia ceramic pressure core 8, the utility model discloses a sensor is divided by the aforesaid four bibliographic categories and is constituteed, simple structure, and the equipment is convenient, and setting up of first fixed block 10, second fixed block 11 and O type sealing washer 9 makes the sensor sound construction, and the leakproofness is good, can be applied to pressure detection under the various complex environment.
In order to further optimize the technical scheme, the first fixing block 10 is a metal annular device, supports the non-conductive induction part of the piezoresistive zirconia ceramic pressure core body 8 and the second fixing block 11, and is mainly used for separating the second fixing block 11 from the piezoresistive zirconia ceramic pressure core body 8 and transmitting the force generated when the core body is pressed to the second fixing block 11.
In order to further optimize the technical scheme, the second fixing block 11 is a standard component made of stainless steel, and a C-shaped retaining ring is used for a hole, and sus304 or sus303 stainless steel can be selected; the second fixed block 11 is used for axial positioning of the hole groove, the second fixed block 11 can deform, the outer diameter of the second fixed block is reduced by deforming the second fixed block 11, the second fixed block is placed into a groove corresponding to the protective shell 7, and the second fixed block 11 is restored to the original shape after the second fixed block is placed into the groove, so that the first fixed block 10 is fixed.
Can know via foretell embodiment, compare with prior art, the utility model discloses a piezoresistive zirconia ceramic pressure core and sensor has set up protection glass layer and anti oxidation coating on piezoresistive zirconia ceramic pressure core, has good guard action to resistance and temperature compensation resistance on silver circuit and the silver circuit on the core, avoids receiving the water smoke, dust pollution's influence and oxidative damage, the utility model discloses a piezoresistive zirconia ceramic pressure core is not fragile, sturdy and durable. The utility model discloses a sensor includes protecting sheathing, O type sealing washer, first fixed block, second fixed block and piezoresistive zirconia ceramic pressure core, simple structure, and the equipment is convenient firm, and the leakproofness is good, can be applied to pressure detection under the various complex environment.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A piezoresistive zirconia ceramic pressure core body is characterized by comprising a zirconia ceramic base body (1), a silver circuit (2), a resistor (3), a temperature compensation resistor (4), a protective glass layer (5) and an anti-oxidation coating (6);
silver-colored circuit (2) with the response membrane outside of zirconia ceramic base member (1) links to each other, resistance (3) with temperature compensation resistance (4) are connected on silver-colored circuit (2), resistance (3) with temperature compensation resistance (4) series connection, install protection glass layer (5) silver-colored circuit (2), resistance (3) with the top of temperature compensation resistance (4), anti-oxidation coating (6) are installed the top of protection glass layer (5).
2. A piezoresistive zirconia ceramic pressure core according to claim 1, characterised in that said resistor (3) and said silver wire (2) form a wheatstone bridge wire.
3. A piezoresistive zirconia ceramic pressure core body according to claim 1, wherein the silver lines (2) are attached to the outside of the sensing film of the zirconia ceramic substrate (1) by means of thick film screen printing.
4. A piezoresistive zirconia ceramic pressure core body according to claim 1, characterised in that said resistor (3) and said temperature compensation resistor (4) are connected to said silver track (2) by means of thick-film screen printing.
5. A piezoresistive zirconia ceramic pressure core according to claim 1, characterised in that said protective glass layer (5) is attached on top of said silver line (2), said resistor (3) and said temperature compensation resistor (4) by means of thick film screen printing.
6. A piezoresistive zirconia ceramic pressure core according to claim 1, wherein the oxidation resistant coating (6) is attached to the protective glass layer (5) by means of thick film screen printing.
7. A piezoresistive zirconia ceramic pressure core according to claim 1, characterised in that the zirconia ceramic substrate (1) comprises a 18mm external diameter concave zirconia ceramic.
8. A sensor, characterized by comprising a protective housing (7), an O-ring (9), a first fixed block (10), a second fixed block (11) and a piezoresistive zirconia ceramic pressure core (8) according to any of claims 1 to 7;
the protective shell (7) is located on the outermost side, the piezoresistive zirconia ceramic pressure core (8) is installed in the protective shell (7), a space is formed between the bottom of the piezoresistive zirconia ceramic pressure core (8) and the protective shell (7), a pressure medium inlet (12) is formed in the protective shell (7), and the pressure medium inlet (12) is communicated with the space; the top of the piezoresistive zirconia ceramic pressure core body (8) is fixed through the first fixing block (10), and the first fixing block (10) is installed on the inner side of the protective shell (7); the second fixing block (11) is arranged on the top of the first fixing block (10) and is arranged in a groove on the inner side of the protective shell (7); the protective shell (7) and the piezoresistive zirconia ceramic pressure core body (8) are sealed through the O-shaped sealing ring (9).
9. A sensor according to claim 8, characterized in that said first fixing block (10) is of annular configuration.
10. A sensor according to claim 8, characterized in that said second fixed block (11) is a standard component-holed C-shaped clasp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020313126.5U CN211425740U (en) | 2020-03-13 | 2020-03-13 | Piezoresistive zirconia ceramic pressure core and sensor thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020313126.5U CN211425740U (en) | 2020-03-13 | 2020-03-13 | Piezoresistive zirconia ceramic pressure core and sensor thereof |
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| Publication Number | Publication Date |
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| CN211425740U true CN211425740U (en) | 2020-09-04 |
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| CN202020313126.5U Active CN211425740U (en) | 2020-03-13 | 2020-03-13 | Piezoresistive zirconia ceramic pressure core and sensor thereof |
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Effective date of registration: 20210426 Address after: Room 101, building 27, Changping jewelry culture industry center, 568 Huanchang North Road, Changping Town, Dongguan City, Guangdong Province, 523000 Patentee after: Dongguan judeshou Technology Co.,Ltd. Address before: 535, building B, building 12, shenzhenwan science and technology ecological park, Nanshan District, Shenzhen City, Guangdong Province Patentee before: Shenzhen judesou Technology Co., Ltd |