CN211367718U

CN211367718U - Carrying mechanism for plate-type Pecvd carrier plate

Info

Publication number: CN211367718U
Application number: CN201921716508.6U
Authority: CN
Inventors: 杨林海; 童锐; 张忠卫
Original assignee: Nantong Sumin Energy Technology Co ltd
Current assignee: Nantong Sumin Energy Technology Co ltd
Priority date: 2019-10-14
Filing date: 2019-10-14
Publication date: 2020-08-28
Anticipated expiration: 2029-10-14

Abstract

The utility model discloses a carry on mechanism for board-like Pecvd support plate, including the frame body, set up the couple in the inboard symmetry of any set of opposite side of frame body, the couple adopt the mode detachable of embedding insert the inboard frame of frame body in be equipped with in the frame body inboard frame with couple matched with T type recess. The utility model discloses the couple that sets up adopts separable mode to connect on the frame body of graphite support plate, when silicon nitride film couple point seal is more serious, can dismantle alone the couple and wash, needn't wash whole graphite support plate, reduces and washs the degree of difficulty.

Description

Carrying mechanism for plate-type Pecvd carrier plate

Technical Field

The utility model belongs to battery piece preparation equipment field, concretely relates to carry on mechanism for board-like Pecvd support plate.

Background

In the process of manufacturing the anti-reflection film for manufacturing the solar cell, the hooks arranged on the two transverse edges of the carrier plate for supporting the silicon wafer are used for a long time, so that the silicon nitride film is deposited on the surface, the color difference at the later stage is serious, and the cleaning is required periodically. Because the original hook is fixed on the graphite carrier plate, the whole cleaning is needed, and the cleaning difficulty is increased.

SUMMERY OF THE UTILITY MODEL

To the problem, the utility model provides a carry on mechanism for board-like Pecvd support plate.

Realize above-mentioned technical purpose, reach above-mentioned technological effect, the utility model discloses a following technical scheme realizes:

the utility model provides a carry-on mechanism for board-like Pecvd support plate, includes the frame body, the inboard symmetry of any set of opposite side at the frame body has set up the couple, the couple adopt the mode detachable of embedding to insert in the inboard frame of frame body be equipped with in the frame body inboard frame with couple matched with T type recess.

As a further improvement, the hook comprises a transversely arranged installation fixed end and a bearing end vertically connected with the installation fixed end, the bearing end is opposite to the installation fixed end and can slide up and down, and the installation fixed end is inserted into the T-shaped groove, and the bearing end is in perpendicular contact with the surface of the frame body.

As a further improvement of the present invention, the T-shaped groove has a notch for inserting the fixing end therein, which includes a first opening end located on the frame surface and a first accommodating hole embedded in the frame body, the first opening end has the same transverse length as the first accommodating hole and the same transverse length as the fixing end, the longitudinal height of the first opening end is equal to or slightly greater than the longitudinal height of the fixing end, the longitudinal depth of the first accommodating hole is greater than the longitudinal height of the first opening end, and a protruding baffle is disposed on the plane where the frame surface of the joint of the two ends is located.

As a further improvement of the utility model, the T type recess in be used for inserting the notch that bears the weight of the end including the second open end that is located the frame surface and the inside second holding hole of embedding side frame body, the second open end with second holding hole size the same, under the installation status, bear the weight of the side that the end is on a parallel with the frame and be greater than the second open end or the size of second holding hole.

As a further improvement of the utility model, the bearing end upper surface is an arc with a downward bending direction, and the bearing silicon wafer is in point contact.

As a further improvement of the utility model, each group has set up at least two sets of couples of symmetry on the opposite side.

The utility model has the advantages that: the hook arranged in the utility model is connected on the frame body of the graphite support plate in a separable way, when the point printing of the silicon nitride film hook is serious, the hook can be detached and cleaned independently, the whole graphite support plate is not needed to be cleaned, the cleaning difficulty is reduced, the maintenance period of the graphite frame is further promoted, and the maintenance cost of a production line is reduced; and the utility model discloses a well design of cavity area draw-in groove, the structural design of convenient dismantlement installation.

Drawings

Fig. 1 is a schematic top view of an embodiment of a carrier;

FIG. 2 is a schematic cross-sectional view of one embodiment of a carrier;

FIG. 3 is a schematic view of the inner side surface of the carrier;

fig. 4 is a schematic cross-sectional view of the carrier board along line a-a of fig. 3;

fig. 5 is a schematic cross-sectional view of the carrier board along line B-B of fig. 3;

FIG. 6 is a schematic perspective view of the hook;

wherein: 1-frame body, 2-hook, 201-installation fixed end, 202-bearing end, 3-T-shaped groove, 300-first opening end, 301-first containing hole, 302-baffle, 303-second opening end and 304-second containing hole.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The following description is made in detail for the application of the principles of the present invention with reference to the accompanying drawings.

As shown in the figure the utility model relates to a carry on mechanism for board-like Pecvd support plate, including frame body 1, graphite support plate base member promptly, in frame body 1 any set of opposite side inboard symmetry set up couple 2, couple 2 adopt the mode detachable of embedding insert in the inboard frame of frame body 1 be equipped with in the frame body 1 inboard frame with couple 2 matched with T type recess 3.

In order to facilitate the detachment and installation of the hook 2, the hook 2 comprises a transversely arranged installation fixing end 201 and a bearing end 202 vertically connected with the transversely arranged installation fixing end 201, the bearing end 202 can slide up and down relative to the installation fixing end 201, and when the installation fixing end 201 is inserted into the T-shaped groove 3, the bearing end 202 is vertically contacted with the frame surface of the frame body 1.

With it assorted T type recess 3 has following structure, T type recess 3 in be used for inserting the notch of installation stiff end 201 including the first open end 300 that is located the frame surface and imbed the inside first holding hole 301 of frame body, first open end 300 with the horizontal length of first holding hole 301 the same and with the horizontal length of installation stiff end 201 is the same, the vertical height of first open end 300 equals or slightly is greater than the vertical height of installation stiff end 201, the vertical degree of depth of first holding hole 301 be greater than the vertical height of first open end 300, the plane at the frame surface place of both junctions has set up upwards bellied baffle 302. The notch of the T-shaped groove 3 for inserting the carrying end 202 includes a second opening end 303 located on the surface of the frame and a second receiving hole 304 embedded inside the frame body, the second opening end 303 and the second receiving hole 304 have the same size, and in the installed state, the side surface of the carrying end 202 parallel to the frame is larger than the size of the second opening end 303 or the second receiving hole 304.

When the hook is installed, the insertion end 201 of the hook 2 is inserted into the first accommodating hole 301 from the first opening end 300, and then moves downwards slightly, so that the insertion end 201 is clamped in the first accommodating hole 301, and then the bearing end 202 slides downwards to a stable position. When unloading, only the reverse operation is needed. Not only the installation is dismantled conveniently, has firm the connection moreover between couple 201 and the frame body 1.

As shown in fig. 1, the opposite sides of each group of the carrier plate of the present invention are provided with two groups of hooks 2 which are symmetrical. The upper surface of the bearing end 202, i.e. the surface contacting with the silicon wafer, is in an arc shape with a downward bending direction, so that the bearing silicon wafer contacts with the carrier plate in a point contact manner.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a carry on mechanism for board-like Pecvd support plate which characterized in that: the frame comprises a frame body (1), wherein hooks (2) are symmetrically arranged on the inner sides of any group of opposite sides of the frame body (1), the hooks (2) are detachably inserted into an inner side frame of the frame body (1) in an embedded mode, and T-shaped grooves (3) matched with the hooks (2) are formed in the inner side frame of the frame body (1); the T-shaped groove (3) comprises a first opening end (300) positioned on the surface of the frame and a first containing hole (301) embedded into the frame body, the longitudinal depth of the first containing hole (301) is greater than the longitudinal height of the first opening end (300), and an upward protruding baffle (302) is arranged on the plane of the frame surface at the joint of the first containing hole and the first containing hole.

2. The mounting mechanism for a plate-type Pecvd carrier plate according to claim 1, characterized in that: couple (2) including horizontal installation stiff end (201) that sets up and bearing end (202) that link to each other perpendicularly with it, bearing end (202) for installation stiff end (201) can slide from top to bottom, work as installation stiff end (201) insert T type recess (3) in, bearing end (202) with the perpendicular contact of frame surface of frame body (1).

3. The mounting mechanism for a plate-type Pecvd carrier plate according to claim 2, characterized in that: the transverse length of the first opening end (300) and the first accommodating hole (301) is the same as that of the mounting fixed end (201), and the longitudinal height of the first opening end (300) is equal to or slightly greater than that of the mounting fixed end (201).

4. The mounting mechanism for a plate-type Pecvd carrier plate according to claim 2, characterized in that: the notch for inserting the bearing end (202) in the T-shaped groove (3) comprises a second opening end (303) positioned on the surface of the frame and a second containing hole (304) embedded in the frame body, the size of the second opening end (303) is the same as that of the second containing hole (304), and in the installation state, the side surface of the bearing end (202) parallel to the frame is larger than the size of the second opening end (303) or the second containing hole (304).

5. The mounting mechanism for a plate-type Pecvd carrier plate according to claim 2, characterized in that: the upper surface of the bearing end (202) is in an arc shape with a downward bending direction and is in point contact with the bearing silicon wafer.

6. The mounting mechanism for a plate-type Pecvd carrier plate according to claim 1, characterized in that: each pair of edges is symmetrically provided with at least two groups of hooks (2).