CN213878046U

CN213878046U - Diffusion quartz boat

Info

Publication number: CN213878046U
Application number: CN202023041551.2U
Authority: CN
Inventors: 沈丽萍; 董梦姣; 金芸
Original assignee: Suzhou Bolet Quartz Co ltd
Current assignee: Suzhou Bolet Quartz Co ltd
Priority date: 2020-12-17
Filing date: 2020-12-17
Publication date: 2021-08-03
Anticipated expiration: 2030-12-17

Abstract

The utility model discloses a diffusion quartz boat, including two backup pads and three quartz stick, three quartz stick is a bottom sprag quartz stick and two lateral parts support quartz stick respectively, bottom sprag quartz stick fixed connection is between two backup pads, be equipped with in the backup pad and supply the lateral part to support quartz stick male horizontal through groove, horizontal through groove includes roof and diapire, be equipped with a plurality of lower clamping groove on the diapire, be equipped with the clamp plate in the horizontal through groove, the bottom of clamp plate is equipped with and presss from both sides the groove on a plurality of lower clamping groove one-to-one, be equipped with the spring mounting hole on the roof, install compression spring in the spring mounting hole, compression spring's lower extreme run through the opening of spring mounting hole and with clamp plate fixed connection, the tip that the lateral part supported quartz stick inserts in the horizontal through groove, the tip that the lateral part supported quartz stick presss from both sides tightly between corresponding last clamping groove and the lower clamping groove. The utility model relates to a diffusion quartz boat can bear the silicon chip of unidimensional to avoid spending the extra expense purchase quartz boat because of the silicon chip size changes.

Description

Diffusion quartz boat

Technical Field

The utility model relates to a diffusion quartz boat.

Background

Solar energy is now becoming more and more widely used as an emerging clean, renewable energy source. The diffusion process is one of key processes in the production process of the crystalline silicon solar cell, and is to diffuse N (P) type impurities on a P (N) type silicon wafer to form a PN junction, which is the basis of the photovoltaic effect of the silicon wafer. The diffusion process needs to use a silicon wafer bearing device to orderly place the silicon wafers on the device, then place the bearing device containing the silicon wafers on a carbonization boat and send the carbonization boat into a diffusion furnace for diffusion. Quartz is the preferred carrier for silicon wafer diffusion processes because of its acid, high temperature, thermal shock resistance, low coefficient of thermal expansion, etc., and silicon wafer diffusion carriers made of quartz are generally called quartz boats. In the prior art, a conventional quartz boat can only bear silicon wafers with one size, and when the specifications of the silicon wafers are different, the quartz boat needs to be replaced to bear the silicon wafers, so that the cost is increased.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a diffusion quartz boat, its is rational in infrastructure, can bear the not unidimensional silicon chip to avoid spending the extra expense purchase quartz boat because of the silicon chip size changes.

In order to achieve the purpose, the technical scheme of the utility model is to design a diffusion quartz boat, which comprises two support plates and three quartz rods connected between the two support plates, wherein the three quartz rods form a bracket area for accommodating silicon wafers between the two support plates; the three quartz rods are respectively a bottom supporting quartz rod and two lateral supporting quartz rods, the two lateral supporting quartz rods are respectively positioned at two sides above the bottom supporting quartz rod, the bottom supporting quartz rod is fixedly connected between two supporting plates, the supporting plates are provided with transverse through grooves for the lateral supporting quartz rods to be inserted, each transverse through groove comprises a top wall and a bottom wall, the bottom wall is provided with a plurality of lower clamping grooves, each lower clamping groove is arc-shaped, a pressing plate is arranged in each transverse through groove, the bottom of the pressing plate is provided with a plurality of upper clamping grooves which are in one-to-one correspondence with the lower clamping grooves, each upper clamping groove is arc-shaped, each upper clamping groove is positioned right above the corresponding lower clamping groove, the top wall is provided with a plurality of spring mounting holes, compression springs are mounted in the spring mounting holes, each compression spring is vertically arranged, and the lower ends of the compression springs penetrate through openings of the spring mounting holes and are fixedly connected with the pressing plate, the end part of the side part supporting quartz rod is inserted into the transverse through groove, and the end part of the side part supporting quartz rod is clamped between the corresponding upper clamping groove and the lower clamping groove.

Preferably, the plurality of lower clamping grooves are arranged at equal intervals in the transverse direction.

Preferably, an upper rubber pad is arranged in the upper clamping groove, a lower rubber pad is arranged in the lower clamping groove, and the upper rubber pad and the lower rubber pad are both arc-shaped.

Preferably, silicon chip clamping grooves are formed in the bottom supporting quartz rod and the side supporting quartz rod.

The utility model has the advantages and the beneficial effects that: the diffusion quartz boat is reasonable in structure and capable of bearing silicon wafers of different sizes, and accordingly extra cost for purchasing the quartz boat due to size change of the silicon wafers is avoided.

When the silicon chip positioning device is used, the edges of the silicon chip are inserted into the silicon chip clamping grooves of the three quartz rods so as to position the silicon chip; and, the accessible is adjusted the interval between two lateral parts support quartz rod, realizes bearing the weight of not unidimensional silicon chip, during the adjustment, overcomes compression spring's elasticity and upwards mentions lateral part and supports quartz rod, makes lateral part support quartz rod break away from lower clamping groove, later along lateral shifting lateral part support quartz rod, makes lateral part support quartz rod fall into the lower clamping groove of suitable position, and the clamp plate moves down under compression spring's elasticity effect after accomplishing to press from both sides lateral part support quartz rod and fix between upper rubber pad and lower rubber pad.

Drawings

Fig. 1 is a schematic diagram of the present invention.

Fig. 2 is a schematic view of the middle support plate of the present invention.

Detailed Description

The following description will further describe embodiments of the present invention with reference to the accompanying drawings and examples. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.

The utility model discloses the technical scheme who specifically implements is:

as shown in fig. 1 and 2, a diffusion quartz boat includes two support plates 1, and three quartz rods connected between the two support plates 1, the three quartz rods forming a rack area for receiving silicon wafers between the two support plates 1; the three quartz rods are respectively a bottom supporting quartz rod 2 and two lateral supporting quartz rods 3, the two lateral supporting quartz rods 3 are respectively positioned at two sides above the bottom supporting quartz rod 2, the bottom supporting quartz rod 2 is fixedly connected between two supporting plates 1, a transverse through groove 4 for the lateral supporting quartz rod 3 to be inserted is arranged on each supporting plate 1, each transverse through groove 4 comprises a top wall 5 and a bottom wall 6, a plurality of lower clamping grooves 7 are arranged on each bottom wall 6, each lower clamping groove 7 is arc-shaped, a pressing plate 8 is arranged in each transverse through groove 4, a plurality of upper clamping grooves 9 which are in one-to-one correspondence with the lower clamping grooves 7 are arranged at the bottom of each pressing plate 8, each upper clamping groove 9 is arc-shaped, each upper clamping groove 9 is positioned right above the corresponding lower clamping groove 7, a plurality of spring mounting holes are arranged on the top wall 5, and a compression spring 10 is arranged in each spring mounting hole, each compression spring 10 is vertically arranged, the lower end of each compression spring 10 penetrates through the opening of the spring mounting hole and is fixedly connected with the pressing plate 8, the end part of the lateral supporting quartz rod 3 is inserted into the transverse through groove 4, and the end part of the lateral supporting quartz rod 3 is clamped between the corresponding upper clamping groove 9 and the corresponding lower clamping groove 7.

The lower clamping grooves 7 are arranged at equal intervals along the transverse direction.

An upper rubber pad 11 is arranged in the upper clamping groove 9, a lower rubber pad 12 is arranged in the lower clamping groove 7, and both the upper rubber pad 11 and the lower rubber pad 12 are arc-shaped.

And the bottom support quartz rod 2 and the side support quartz rod 3 are both provided with a silicon wafer clamping groove 13.

When the silicon chip positioning device is used, the edges of a silicon chip are inserted into the silicon chip clamping grooves 13 of the three quartz rods so as to position the silicon chip; and, the accessible is adjusted the interval between two lateral parts and is supported quartz stick 3, realize bearing the weight of the silicon chip of different sizes, during the adjustment, overcome the elasticity of compression spring 10 and mention lateral part and support quartz stick 3 upwards, make lateral part support quartz stick 3 break away from lower clamp groove 7, later along lateral movement lateral part support quartz stick 3, make lateral part support quartz stick 3 fall into the lower clamp groove 7 of suitable position, the clamp plate 8 moves down under the elasticity effect of compression spring 10 after accomplishing, and support quartz stick 3 with the lateral part and clamp and fix between upper rubber pad 11 and lower rubber pad 12.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the technical principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A diffusion quartz boat comprises two supporting plates and three quartz rods connected between the two supporting plates, wherein a bracket area for accommodating a silicon wafer is formed between the two supporting plates by the three quartz rods, the diffusion quartz boat is characterized in that the three quartz rods are respectively a bottom supporting quartz rod and two lateral supporting quartz rods, the two lateral supporting quartz rods are respectively positioned at two sides above the bottom supporting quartz rod, the bottom supporting quartz rod is fixedly connected between the two supporting plates, the supporting plates are provided with transverse through grooves for the lateral supporting quartz rods to be inserted into, each transverse through groove comprises a top wall and a bottom wall, the bottom wall is provided with a plurality of lower clamping grooves, each lower clamping groove is arc-shaped, a pressing plate is arranged in each transverse through groove, the bottom of the pressing plate is provided with a plurality of upper clamping grooves which are in one-to-one correspondence with the lower clamping grooves, and each upper clamping groove is arc-shaped, and each upper clamping groove is positioned right above the corresponding lower clamping groove, the top wall is provided with a plurality of spring mounting holes, compression springs are mounted in the spring mounting holes, each compression spring is vertically arranged, the lower ends of the compression springs penetrate through openings of the spring mounting holes and are fixedly connected with the pressing plate, the end part of the lateral part supporting quartz rod is inserted into the transverse through groove, and the end part of the lateral part supporting quartz rod is clamped between the corresponding upper clamping groove and the corresponding lower clamping groove.

2. The diffusion quartz boat of claim 1, wherein the plurality of lower clamping grooves are arranged at equal intervals in the lateral direction.

3. The diffusion quartz boat of claim 2, wherein the upper clamping groove is provided with an upper rubber pad, the lower clamping groove is provided with a lower rubber pad, and the upper rubber pad and the lower rubber pad are both arc-shaped.

4. The diffusion quartz boat of claim 3, wherein the bottom supporting quartz rods and the side supporting quartz rods are provided with silicon wafer slots.