CN211311571U - Cooling structure of heater lifting shaft assembly and heater lifting shaft system - Google Patents
Cooling structure of heater lifting shaft assembly and heater lifting shaft system Download PDFInfo
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- CN211311571U CN211311571U CN201921824581.5U CN201921824581U CN211311571U CN 211311571 U CN211311571 U CN 211311571U CN 201921824581 U CN201921824581 U CN 201921824581U CN 211311571 U CN211311571 U CN 211311571U
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Abstract
The utility model discloses a cooling structure and heater lift axle system of heater lift axle subassembly, this cooling structure includes: the bearing sleeve is sleeved on the periphery of the linear bearing and is in contact with the outer surface of the linear bearing; the cooling sleeve is sleeved outside the bearing sleeve, an annular cavity is defined between the inner wall of the cooling sleeve and the outer wall of the bearing sleeve, a liquid inlet and a liquid outlet which are communicated with the annular cavity are formed in the cooling sleeve, and the annular cavity is used for containing cooling liquid; through set up cooling sleeve at bearing sleeve's outer wall, increase refrigerated area of contact improves lift axle and linear bearing's cooling rate, guarantees the transmission precision of heater base, has avoided the lift axle high temperature and has leaded to grease to volatilize among the linear bearing and pollute the cavity.
Description
Technical Field
The utility model relates to a semiconductor equipment technical field, more specifically relates to a cooling structure and heater lift axle system of heater lift axle subassembly.
Background
The Physical Vapor Deposition (Physical Vapor Deposition) technique mainly includes: vacuum evaporation coating, vacuum sputtering coating, vacuum ion coating and vacuum winding coating. Magnetron sputtering (Magnetron sputtering) coating is used as one of vacuum sputtering coatings, has the advantages of easy control of coating deposition speed and thickness, small damage to the formed film, good combination of the deposited film and a substrate, wide range of deposited materials and the like, almost all metals, alloys and ceramics can be made into target materials, and the formed film has high purity, good compactness and good uniformity.
In the high aspect ratio Al magnetron sputtering, because the fluidity of Al is poor at 280 ℃, a very small amount of Al is sputtered to the bottom of a substrate slot, and only aluminum atoms within a certain angle range can reach the very small amount of Al, the deposition temperature needs to be increased to increase the fluidity of Al and improve the coverage rate of an aluminum step and the filling effect of a hole. Experiments show that the temperature of a Heater (Heater) in a high-temperature aluminum magnetron sputtering chamber needs to reach 450 ℃, and the Heater Lifting shaft needs to be cooled in order to ensure that a Lifting shaft (Lifting shaft) in the Heater is stably driven and avoid the phenomenon that the linear bearing generates oil stains to pollute the reaction chamber due to overhigh temperature of the Lifting shaft.
Fig. 1 is a schematic structural diagram of a high-temperature Al magnetron sputtering chamber in the prior art, as shown in fig. 1. The high-temperature Al magnetron sputtering chamber comprises: the device comprises a reaction chamber 101, a Heater Pedestal (Heater Pedestal) 102, a corrugated pipe 103, a bottom flange 104, a lifting fixing block 105, a cooling water pipe 106, a linear guide fixing block 107, a linear guide 108, a servo motor 109, a linear bearing with a seat 110, a lifting shaft 111, a first lifting shaft fixing block 112, a lifting shaft bracket 113 and a second lifting shaft fixing block 114.
The bellows 103 is sleeved outside the elevating shaft 111 in the reaction chamber 101, the upper end of the bellows 103 is connected to the lower portion of the heater base 102, and the other end is connected to the bottom flange 104 at the lower portion of the reaction chamber 101, so that the interior of the reaction chamber 101 is sealed and vacuumed, and the bellows 103 can extend and retract along the vertical direction along with the heater base 102. A sealing ring is arranged between the bottom flange 104 and the chamber reaction chamber 101 to ensure that the interior of the reaction chamber 101 is sealed and vacuum-tight, and is fixed with the bottom of the reaction chamber 101 by screws.
When the lifting shaft works, the servo motor 109 rotates, and the lifting shaft bracket 113 drives the lifting shaft 111 to move in the vertical direction, so that the heater base 102 moves up and down. The linear bearing with a seat 110 is used for limiting the radial displacement of the lifting shaft, and the movement precision of the heater base 102 in the vertical direction is ensured. Since the heater base 102 is heated to 450 ℃, the temperature may be too high to cause the lift shaft 111 to expand, which affects the movement accuracy of the heater base 102. Since the temperature of the elevating shaft 111 is transferred to the linear bearing with bearing 110 contacting with the elevating shaft, the grease on the linear bearing with bearing 110 is volatilized due to the excessive temperature, and the vacuum chamber is easily polluted. The lifting fixing block 105 is internally provided with a water channel, cooling water is introduced through the cooling water pipe 106, and heat on the lifting shaft 111 and the linear bearing with a seat 110 is taken away, so that the cooling effect is achieved.
Because there is certain clearance between promotion fixed block 105 and the linear bearing with seat 110, so the heat transfer effect is poor, and promote fixed block 105 and have the coincidence portion only at the top with the linear bearing with seat 110 in vertical direction, lead to the heat on the lift axle 111 to be hardly taken away fast by the cooling water in promoting fixed block 105, influence heater lift axle transmission precision, make heater base 102 take place the skew and take the seat linear bearing 110 to go up and down the too much volatilization of grease and pollute cavity 101.
Therefore, a scheme is needed to improve the cooling rate of the lifting shaft of the heater and ensure the transmission precision of the base of the heater.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a cooling structure and heater lift axle system of heater lift axle subassembly to in the current magnetron sputtering high temperature technology, heater lift axle cooling rate slow and influence the problem of the transmission precision of heater base.
In order to achieve the above object, according to an aspect of the present invention, there is provided a cooling structure of a heater lifting shaft assembly, the heater lifting shaft assembly including a lifting shaft and a linear bearing sleeved outside the lifting shaft, the cooling structure being sleeved outside the linear bearing;
the cooling structure includes:
the bearing sleeve is sleeved on the periphery of the linear bearing and is in contact with the outer surface of the linear bearing;
the cooling sleeve is sleeved outside the bearing sleeve, an annular cavity is defined between the inner wall of the cooling sleeve and the outer wall of the bearing sleeve, a liquid inlet and a liquid outlet which are communicated with the annular cavity are formed in the cooling sleeve, and the annular cavity is used for containing cooling liquid.
Preferably, the top of the inner wall of the bearing sleeve is provided with an annular blocking shoulder for axially limiting the heater lifting shaft assembly.
Preferably, an annular groove is formed in the bottom of the inner wall of the bearing sleeve and used for accommodating a check ring for axially limiting the lifting shaft.
Preferably, the liquid inlet and the liquid outlet are arranged along an axial direction perpendicular to the bearing sleeve, and the liquid outlet is located at the upper part of the liquid inlet.
Preferably, the top of the outer wall of the bearing sleeve is provided with a bearing sleeve mounting seat which protrudes outwards along the direction perpendicular to the axis of the bearing sleeve.
Preferably, the bearing sleeve mounting seat is provided with a positioning pin hole, a positioning pin is arranged in the positioning pin hole, and the positioning pin is used for mounting and positioning the bearing sleeve.
According to an aspect of the utility model, a heater lift axle system is provided, include: the heater lifting shaft assembly comprises a lifting shaft and a linear bearing sleeved outside the lifting shaft, one end of the lifting shaft is inserted into the reaction chamber through the installation shaft hole, and the lifting shaft can move up and down along the axis of the installation shaft hole;
the cooling structure of the heater lifting shaft assembly is sleeved outside the linear bearing.
Preferably, the lifting shaft connecting device further comprises a linear transmission mechanism, the linear transmission mechanism comprises a linear guide rail parallel to the lifting shaft and a lifting shaft connecting frame capable of moving along the linear guide rail, one end of the lifting shaft connecting frame is connected with the linear guide rail, and the other end of the lifting shaft connecting frame is connected with the lifting shaft;
bearing sleeve's outer wall top is equipped with along the perpendicular to the bearing sleeve's the outside convex bearing sleeve mount pad of axis direction, the periphery cover of bearing sleeve mount pad is equipped with the promotion fixed block, linear transmission passes through it is fixed in to promote the fixed block the lower part of reaction chamber.
Preferably, the bearing sleeve is connected to a lower portion of the reaction chamber by the bearing sleeve mount.
Preferably, the outer diameter of the cooling sleeve and/or the outer diameter of the bearing sleeve is smaller than the inner diameter of the lifting fixing block.
The beneficial effects of the utility model reside in that: through set up cooling sleeve at bearing sleeve's outer wall, increase cooling contact area improves lift axle and linear bearing's cooling rate, guarantees the transmission precision of heater base, has avoided the lift axle high temperature to lead to grease in the bearing to volatilize and pollute the cavity.
Other features and advantages of the present invention will be described in detail in the detailed description which follows.
Drawings
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention have been illustrated in the accompanying drawings, it is to be understood that the invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Fig. 1 is a schematic structural diagram of a high-temperature Al magnetron sputtering chamber in the prior art.
Fig. 2 shows a schematic view of a cooling structure of a heater lift shaft assembly according to an embodiment of the present invention.
Fig. 3 illustrates a heater lift shaft system according to one embodiment of the present invention.
Description of reference numerals:
101. a reaction chamber; 102. a heater base; 103. a bellows; 104. bottom flanges, 105 and lifting fixing blocks; 106. a cooling water pipe; 107. a linear guide rail fixing block; 108. a linear guide rail; 109. a servo motor; 110. a linear bearing with a seat; 111. a lifting shaft, 112 and a first lifting shaft fixing block; 113. a lifting shaft bracket; 114. a second lifting shaft fixing block; 115. a bolt; 201. lifting the fixed block; 202. a cooling structure; 203. a liquid outlet; 204. a linear bearing; 205. a liquid inlet; 206. A retainer ring; 2021. a bearing sleeve; 2022. a bearing sleeve mounting seat; 2023. cooling the sleeve; 2024. An annular cavity; 2027. a shoulder block; 2028. a retainer groove; 2029. and a positioning pin.
Detailed Description
Preferred embodiments of the present invention will be described in more detail below. While the following describes preferred embodiments of the present invention, it should be understood that the present invention may be embodied in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
According to the cooling structure of the heater lifting shaft assembly provided by the embodiment of the utility model, the heater lifting shaft assembly comprises a lifting shaft and a linear bearing sleeved outside the lifting shaft, and the cooling structure is sleeved outside the linear bearing;
the cooling structure includes: the bearing sleeve is sleeved on the periphery of the linear bearing and is in contact with the outer surface of the linear bearing; the cooling sleeve is sleeved outside the bearing sleeve, an annular cavity is formed between the inner wall of the cooling sleeve and the outer wall of the bearing sleeve in a surrounding mode, a liquid inlet and a liquid outlet which are communicated with the annular cavity are formed in the cooling sleeve, and the annular cavity is used for containing cooling liquid.
The cooling liquid lets in the annular cavity in the cooling sleeve through the inlet, and linear bearing and bearing sleeve surface contact have increased area of contact, and the cooling liquid can take away the heat that the lift axle was conducted fast, and the cooling liquid after the intensification is discharged from the liquid outlet, reaches quick refrigerated effect. Avoid the heat to take place thermal expansion deformation in a large number of aggregations on the lift axle, improve the transmission precision of heater base, avoid volatilizing because of the grease high temperature and polluting the reaction chamber.
As one example, the coolant includes an aqueous coolant and a non-aqueous coolant. For example, the coolant component is a reagent having good thermal conductivity such as water, ethylene glycol + water, and propylene glycol.
As preferred scheme, the top of the inner wall of the bearing sleeve is provided with an annular blocking shoulder for axially limiting the heater lifting shaft assembly. The axial freedom degree of the upper part of the linear bearing is limited by the retaining shoulder, and the linear bearing is prevented from moving up and down along with the lifting shaft to damage the lubricating effect of the lifting shaft.
As preferred scheme, the annular groove has been seted up to bearing sleeve's inner wall bottom, and the annular groove is used for holding and carries out the retaining ring that axial is spacing to the lift axle for the axial of lift axle is spacing.
The retainer ring is arranged in the retainer ring groove, so that the axial degree of freedom of the linear bearing is limited, the linear bearing is prevented from moving up and down along with the lifting shaft, and the lubricating effect of the lifting shaft is prevented from being damaged. Through the retaining shoulder and the retaining ring, the linear bearing is fixed in the bearing sleeve, so that the friction resistance of the lifting shaft during up-and-down movement is reduced, and high-precision stable movement can be obtained.
As preferred scheme, inlet and liquid outlet set up along the axis direction of perpendicular to bearing sleeve, and the liquid outlet is located the upper portion of inlet. The cooling liquid is introduced into the liquid inlet from the lower part of the cooling sleeve and is discharged from the liquid outlet above the liquid inlet, so that the retention time of the cooling liquid in the annular cavity is prolonged, the cooling liquid is fully subjected to heat exchange with the lifting shaft, and the effect of rapid cooling is achieved.
As an example, the water outlet connector and the water inlet connector are respectively arranged on the liquid outlet and the liquid inlet, and the water outlet connector and the water inlet connector can be detached.
Preferably, the top of the outer wall of the bearing sleeve is provided with a bearing sleeve mounting seat which protrudes outwards along the direction vertical to the axis of the bearing sleeve.
Specifically, be equipped with in the bearing sleeve mount pad with the shaft hole of the shaft diameter complex of lift axle, the bearing sleeve is coaxial with the shaft hole. The shaft hole that inserts on the bearing sleeve mount pad during lift axle assembly, the internal diameter in shaft hole and the external diameter of lift axle are clearance fit, guarantee the cylindricity precision in shaft hole through processing, satisfy bearing sleeve and linear bearing's axiality.
As the preferred scheme, be equipped with the locating pin hole on the bearing sleeve mount pad, be equipped with the locating pin in the locating pin hole, the locating pin is used for bearing sleeve's installation location, and the locating pin has guaranteed bearing sleeve's mounted position precision with the cooperation of locating pin hole.
As an example, the cooling sleeve, the bearing sleeve and the bearing sleeve mounting seat are of an integral structure, and the cooling sleeve is fixed on the bearing sleeve through welding so as to be convenient to mount and dismount.
According to the utility model discloses heater lift axle system, include:
the heater lifting shaft assembly comprises a lifting shaft and a linear bearing sleeved outside the lifting shaft, and one end of the lifting shaft is inserted into the reaction chamber through the mounting shaft hole and can move up and down along the axis of the mounting shaft hole; the cooling structure of the heater lifting shaft assembly is sleeved outside the linear bearing.
The top of lift axle is equipped with the heater base, the heater base is used for heating reaction chamber, the temperature of heater base can be conducted to the lift epaxially, at the epaxial quick cooling structure of lift installation, install linear bearing in the bearing sleeve who has cooling sleeve, the cooling area of coolant liquid has been increased, can be with the epaxial heat quick conduction of lift, guarantee the transmission precision that the lift axle is in cooling state and heater base, avoid the heater base to take place the skew in the course of the technology, and because the volatile condition of grease among the high linear bearing of temperature, guarantee that reaction chamber environment is clean and do not have the greasy dirt pollution.
Preferably, the bearing sleeve is connected to the lower portion of the reaction chamber by a bearing sleeve mount.
As an example, the bearing sleeve mounting seat is provided with mounting screw holes, and the bearing sleeve mounting seat is matched with the mounting screw holes through screws and fixed at the bottom of the reaction chamber.
Preferably, the fit tolerance between the inner diameter of the bearing sleeve and the outer diameter of the linear bearing is a clearance fit.
Specifically, the inner diameter dimension of the bearing sleeve is the same as the outer diameter dimension of the linear bearing, with a tolerance rating of H7. The cylindricity precision of the bearing sleeve hole is guaranteed through processing, the bearing sleeve and the linear bearing are in clearance fit, the coaxiality of the bearing sleeve and the linear bearing is guaranteed, and the installation precision of the lifting shaft installed in the linear bearing is guaranteed.
As a preferred scheme, the lifting device further comprises a linear transmission mechanism, wherein the linear transmission mechanism comprises a linear guide rail parallel to the lifting shaft and a lifting shaft connecting frame capable of moving along the linear guide rail, one end of the lifting shaft connecting frame is connected with the linear guide rail, and the other end of the lifting shaft connecting frame is connected with the lifting shaft;
the top of the outer wall of the bearing sleeve is provided with a bearing sleeve mounting seat protruding outwards along the axis direction perpendicular to the bearing sleeve, the periphery of the bearing sleeve mounting seat is sleeved with a lifting fixed block, and the linear transmission mechanism is fixed on the lower part of the reaction chamber through the lifting fixed block.
As an example, the linear transmission mechanism is a screw nut transmission mechanism, the guide rail is a screw, the driving motor drives the screw to rotate forwards or reversely, the lifting shaft connecting frame moves up and down along the screw, and the lifting connecting frame drives the lifting shaft to move up and down.
As the preferred scheme, the outer diameter of cooling sleeve and/or the outer diameter of bearing sleeve are less than the internal diameter of promotion fixed block to make things convenient for bearing sleeve mount pad's dismantlement and installation.
As an example, the lower shaft diameter of the lifting shaft is provided with an annular clamping groove, the lifting connecting frame comprises a first lifting shaft fixing block, a lifting shaft bracket and a second lifting shaft fixing block which are sequentially sleeved in the annular clamping groove from top to bottom, and the first lifting shaft fixing block and the second lifting shaft fixing block are fixed on the upper side and the lower side of the lifting shaft bracket, so that the lifting shaft bracket and the lifting shaft are stably fixed, and the relative sliding when the lifting shaft connecting frame drives the lifting shaft to move up and down is prevented from affecting the transmission precision of the lifting shaft.
As an example, the outer periphery of the bearing sleeve mounting seat is sleeved with a lifting fixing block, and the linear guide rail is fixed at the lower part of the reaction chamber through the lifting fixing block, so that the structural compactness of the system is improved, and the mounting and dismounting of the cooling structure are facilitated.
As an example, the upper part of the linear bearing is axially limited by a retaining shoulder, and the lower part of the linear bearing is axially limited by a retaining ring arranged in a retaining ring groove, so as to fix the linear bearing in the bearing sleeve.
Example 1
Fig. 2 shows a schematic view of a cooling structure of a heater lift shaft assembly according to an embodiment of the present invention.
As shown in fig. 2, according to the cooling structure of the heater lifting shaft assembly of the present embodiment, the heater lifting shaft assembly includes a lifting shaft and a linear bearing sleeved outside the lifting shaft, and the cooling structure is sleeved outside the linear bearing;
the cooling structure includes:
the bearing sleeve 2021, the bearing sleeve 2021 locates the periphery of the linear bearing, and contact with external surface of the linear bearing; the cooling sleeve 2023, the cooling sleeve 2023 is sleeved outside the bearing sleeve 2021, an annular cavity 2024 is defined between the inner wall of the cooling sleeve 2023 and the outer wall of the bearing sleeve 2021, the cooling sleeve 2023 is provided with a liquid inlet 205 and a liquid outlet 203 which are communicated with the annular cavity 2024, and the annular cavity 2024 is used for accommodating cooling liquid.
The top of the inner wall of the bearing sleeve 2021 is provided with an annular stop shoulder 2027 for axially limiting the heater lifting shaft assembly. An annular groove 2028 is formed in the bottom of the inner wall of the bearing sleeve 2021, and the annular groove 2028 is used for accommodating a check ring for axially limiting the lifting shaft; the liquid inlet 205 and the liquid outlet 203 are arranged in a direction perpendicular to the axis of the bearing sleeve 2021, and the liquid outlet 203 is located at the upper portion of the liquid inlet 205. The top of the outer wall of the bearing sleeve 2021 is provided with a bearing sleeve mounting seat 2022 which protrudes outwards along the direction perpendicular to the axis of the bearing sleeve 2021. The bearing sleeve mounting seat 2022 is provided with a positioning pin hole, a positioning pin 2029 is arranged in the positioning pin hole, and the positioning pin 2029 is used for mounting and positioning the bearing sleeve 2021.
The bearing sleeve 2021 in fig. 2 has an inner diameter dimension b, which is the same as the linear bearing outer diameter dimension b, with a tolerance rating of H7. The cylindricity precision of the inner diameter of the bearing sleeve 2021 is ensured through processing, and the fit tolerance of the bearing sleeve 2021 and the linear bearing is clearance fit, so that the bearing sleeve 2021 is ensured to be coaxial with the linear bearing, and the position installation precision of the lifting shaft is ensured.
Example 2
Fig. 2 shows a schematic view of a cooling structure of a heater lift shaft assembly according to an embodiment of the present invention, and fig. 3 shows a heater lift shaft system according to an embodiment of the present invention.
As shown in fig. 2 and 3, a heater elevation shaft system according to the present embodiment includes:
the heater lifting shaft 111 assembly comprises a lifting shaft 111 and a linear bearing 204 sleeved outside the lifting shaft 111, wherein one end of the lifting shaft 111 is inserted into the reaction chamber 101 through a mounting shaft hole and can move up and down along the axis of the mounting shaft hole; the cooling structure 202 of the heater lifting shaft assembly is sleeved outside the linear bearing 204.
The heater lifting shaft system of the embodiment further comprises a linear transmission mechanism, wherein the linear transmission mechanism comprises a linear guide rail 108 parallel to the lifting shaft 111 and a lifting shaft connecting frame capable of moving along the linear guide rail 108, one end of the lifting shaft connecting frame is connected with the linear guide rail 108, and the other end of the lifting shaft connecting frame is connected with the lifting shaft 111; the linear transmission mechanism is a screw nut transmission mechanism, the linear guide rail 108 is a screw, the servo motor 109 drives the screw to rotate forwards or reversely, the lifting shaft connecting frame moves up and down along the screw, and the lifting connecting frame drives the lifting shaft 111 to move up and down.
The top of the outer wall of the bearing sleeve 2021 is provided with a bearing sleeve mounting seat protruding outward along the direction perpendicular to the axis of the bearing sleeve, the outer circumference of the bearing sleeve mounting seat 2022 is sleeved with a lifting fixing block 201, and the bearing sleeve 2021 is connected to the lower part of the reaction chamber 101 through the bearing sleeve mounting seat 2022. The linear transmission mechanism is fixed to the lower portion of the reaction chamber 101 by lifting the fixing block 201. The outer diameter dimension c of the cooling sleeve and/or the outer diameter dimension d of the bearing sleeve is smaller than the inner diameter dimension a of the lifting fixing block.
The upper portion of the linear bearing 204 is axially restrained by a shoulder 2027 and the lower portion of the linear bearing 204 is axially restrained by a retainer ring 206 within a retainer ring groove 2028 to secure the linear bearing 204 within the bearing sleeve 2021.
The lower shaft diameter of the lifting shaft 111 is provided with an annular clamping groove, the lifting connecting frame comprises a first lifting shaft fixing block 112, a lifting shaft bracket 113 and a second lifting shaft fixing block 114 which are sequentially sleeved from top to bottom in the annular clamping groove, and the first lifting shaft fixing block 112 and the second lifting shaft fixing block 114 are fixed on the upper side and the lower side of the lifting shaft bracket 113, so that the lifting shaft bracket 113 and the lifting shaft 111 are stably fixed, and the lifting shaft connecting frame is prevented from sliding relatively when driving the lifting shaft 111 to move up and down to influence the transmission precision of the lifting shaft 111.
This heater lift axle system during operation, cooling water lets in the annular cavity 2024 in the cooling sleeve from inlet 205, lift axle 111 is with heat transfer to cooling water, cooling water after the intensification flows out from liquid outlet 203, form cooling water circulation system in annular cavity 2024, because linear bearing 204 and bearing sleeve 2021 direct contact, and area of contact is big, thereby reach lift axle 111 and the quick refrigerated effect of linear bearing 204, avoid the heat to gather in a large number and take place thermal expansion deformation on lift axle 111, guarantee the transmission precision of heater base.
The foregoing description of the embodiments of the invention has been presented for purposes of illustration and not limitation, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the illustrated embodiments.
Claims (10)
1. A cooling structure of a lifting shaft assembly of a heater is characterized in that,
the heater lifting shaft assembly comprises a lifting shaft and a linear bearing sleeved outside the lifting shaft, and the cooling structure is sleeved outside the linear bearing;
the cooling structure includes:
the bearing sleeve is sleeved on the periphery of the linear bearing and is in contact with the outer surface of the linear bearing;
the cooling sleeve is sleeved outside the bearing sleeve, an annular cavity is defined between the inner wall of the cooling sleeve and the outer wall of the bearing sleeve, a liquid inlet and a liquid outlet which are communicated with the annular cavity are formed in the cooling sleeve, and the annular cavity is used for containing cooling liquid.
2. The cooling structure of the heater lifting shaft assembly according to claim 1, wherein an annular stop shoulder is provided at the top of the inner wall of the bearing sleeve for axially limiting the heater lifting shaft assembly.
3. The cooling structure of the heater lifting shaft assembly according to claim 1, wherein an annular groove is formed at the bottom of the inner wall of the bearing sleeve, and the annular groove is used for accommodating a retainer ring for axially limiting the lifting shaft.
4. The cooling structure of a heater lift shaft assembly of claim 1, wherein the liquid inlet and the liquid outlet are disposed along a direction perpendicular to the axis of the bearing sleeve, and the liquid outlet is located at an upper portion of the liquid inlet.
5. The cooling structure of a heater lift shaft assembly of claim 1 wherein the top of the outer wall of the bearing sleeve is provided with a bearing sleeve mount projecting outwardly in a direction perpendicular to the axis of the bearing sleeve.
6. The cooling structure of the heater lifting shaft assembly according to claim 5, wherein the bearing sleeve mounting seat is provided with a positioning pin hole, and a positioning pin is arranged in the positioning pin hole and used for mounting and positioning the bearing sleeve.
7. A heater lift shaft system, comprising:
the heater lifting shaft assembly comprises a lifting shaft and a linear bearing sleeved outside the lifting shaft, one end of the lifting shaft is inserted into the reaction chamber through the installation shaft hole, and the lifting shaft can move up and down along the axis of the installation shaft hole;
the cooling structure of the heater lift shaft assembly of any one of claims 1 to 4, which is sleeved outside the linear bearing.
8. The heater lift shaft system of claim 7 further comprising a linear actuator comprising a linear guide parallel to the lift shaft and a lift shaft connection bracket movable along the linear guide, the lift shaft connection bracket connected at one end to the linear guide and at the other end to the lift shaft;
bearing sleeve's outer wall top is equipped with along the perpendicular to the bearing sleeve's the outside convex bearing sleeve mount pad of axis direction, the periphery cover of bearing sleeve mount pad is equipped with the promotion fixed block, linear transmission passes through it is fixed in to promote the fixed block the lower part of reaction chamber.
9. The heater lift shaft system of claim 8, wherein said bearing sleeve is connected to a lower portion of said reaction chamber by said bearing sleeve mount.
10. The heater lifter shaft system of claim 8, wherein an outer diameter of the cooling sleeve and/or an outer diameter of the bearing sleeve is less than an inner diameter of the lift anchor block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921824581.5U CN211311571U (en) | 2019-10-28 | 2019-10-28 | Cooling structure of heater lifting shaft assembly and heater lifting shaft system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921824581.5U CN211311571U (en) | 2019-10-28 | 2019-10-28 | Cooling structure of heater lifting shaft assembly and heater lifting shaft system |
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| CN211311571U true CN211311571U (en) | 2020-08-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115745388A (en) * | 2022-11-18 | 2023-03-07 | 虹阳显示(咸阳)科技有限公司 | Substrate glass transverse cutting equipment capable of preventing thermal pollution and using method thereof |
-
2019
- 2019-10-28 CN CN201921824581.5U patent/CN211311571U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115745388A (en) * | 2022-11-18 | 2023-03-07 | 虹阳显示(咸阳)科技有限公司 | Substrate glass transverse cutting equipment capable of preventing thermal pollution and using method thereof |
| CN115745388B (en) * | 2022-11-18 | 2024-03-26 | 虹阳显示(咸阳)科技有限公司 | Substrate glass transverse cutting equipment for protecting heat dirt and use method thereof |
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