CN211142143U - Pulse laser deposition three-dimensional heating table - Google Patents
Pulse laser deposition three-dimensional heating table Download PDFInfo
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- CN211142143U CN211142143U CN201921802768.5U CN201921802768U CN211142143U CN 211142143 U CN211142143 U CN 211142143U CN 201921802768 U CN201921802768 U CN 201921802768U CN 211142143 U CN211142143 U CN 211142143U
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Abstract
The utility model relates to a pulsed laser deposition technical field discloses a three-dimensional warm table of pulsed laser deposition. The pulse laser deposition three-dimensional heating table comprises a heating platform, a corrugated pipe, a maintenance knob, a horizontal displacement mechanism, a vertical displacement mechanism, a rotating mechanism, a sample support and a control motor. This technical scheme drives heating platform through horizontal displacement mechanism, vertical displacement mechanism and rotary mechanism and carries out horizontal displacement, vertical displacement and rotation to realize the three-dimensional heating function of warm table, hold in the palm through control sample simultaneously and reciprocate in order to pack into, take out and fixed sample heats, promoted the use convenience and the work efficiency of warm table. Through the combined structure of the corrugated pipe and the maintenance knob, the heating platform can be conveniently and quickly pulled out of the cavity for maintenance or replacement.
Description
Technical Field
The utility model relates to a pulsed laser deposition technical field especially relates to a three-dimensional warm table of pulsed laser deposition.
Background
The pulse laser Deposition (Pulsed L ase Deposition, P L D) technology requires a heating platform to heat a substrate sample, but the existing heating platform is usually configured fixedly and cannot flexibly adjust the three-dimensional position and angle of the heating platform to adapt to the heating requirements of substrate samples at different positions and angles, so that the existing heating platform cannot meet the requirements of the high-throughput pulse laser Deposition technology.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a three-dimensional warm table of pulse laser deposition solves the technical problem that current heating platform can't realize high flux pulse laser equipment heating demand.
According to the embodiment of the utility model, a pulse laser deposition three-dimensional heating table is provided, which comprises a heating platform, a corrugated pipe, a maintenance knob, a horizontal displacement mechanism, a vertical displacement mechanism, a rotating mechanism, a sample holder and a control motor, wherein the corrugated pipe is arranged right above the heating platform, the maintenance knob is movably connected with a flange below the corrugated pipe through a first lead screw and is used for rotating to compress the corrugated pipe upwards, the horizontal displacement table is arranged right above the heating platform through a first support rod, the horizontal displacement mechanism is arranged on the horizontal displacement table, the rotating displacement table is movably connected right above the horizontal displacement mechanism through a second support rod and a second lead screw, the rotating mechanism is arranged on the rotating displacement table, the vertical displacement table is arranged right above the horizontal displacement table through a second support rod, the vertical displacement mechanism is arranged on the vertical displacement table, the sample support is arranged at the bottom of the heating platform and is controlled to move up and down through the control motor.
Preferably, a maintenance flange is arranged between the heating platform and the corrugated pipe.
Preferably, the first support rod, the second support rod, the first screw rod and the second screw rod are arranged perpendicular to the heating platform.
Preferably, the maintenance knob is arranged at the top of the first screw rod.
Preferably, the control motor is disposed on a top bracket of the bellows.
Preferably, the horizontal displacement mechanism and the vertical displacement mechanism include a slider rail structure.
Preferably, the rotating mechanism comprises a rotating shaft gear meshing structure.
Preferably, the vertical displacement platform, the rotary displacement platform and the horizontal displacement platform are sequentially arranged from top to bottom.
The utility model discloses a three-dimensional warm table of pulse laser deposition, including heating platform, bellows, maintenance knob, horizontal displacement mechanism, vertical displacement mechanism, rotary mechanism, sample holder and control motor, the bellows sets up directly over the heating platform, the maintenance knob through first lead screw with the flange swing joint under the bellows, be used for the rotation in order to compress upwards the bellows, be provided with horizontal displacement platform through first bracing piece directly over the heating platform, horizontal displacement mechanism sets up on the horizontal displacement platform, be connected with rotary displacement platform through second bracing piece and second lead screw swing joint directly over the horizontal displacement mechanism, rotary mechanism sets up on the rotary displacement platform, be provided with vertical displacement platform through the second bracing piece directly over the horizontal displacement platform, vertical displacement mechanism sets up on the vertical displacement platform, the sample support is arranged at the bottom of the heating platform and is controlled to move up and down through the control motor. Drive heating platform through horizontal displacement mechanism, vertical displacement mechanism and rotary mechanism and carry out horizontal displacement, vertical displacement and rotation to realize the three-dimensional heating function of warm table, reciprocate in order to pack into, take out and fixed sample heats through control sample support simultaneously, promoted the use convenience and the work efficiency of warm table. Through the combined structure of the corrugated pipe and the maintenance knob, the heating platform can be conveniently and quickly pulled out of the cavity for maintenance or replacement.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a schematic structural diagram of a pulsed laser deposition three-dimensional heating stage according to an embodiment of the present invention.
Detailed Description
The technical solution of the present invention will be further described in more detail with reference to the accompanying drawings and the detailed description. It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. To those of ordinary skill in the art, the specific meaning of the above terms in the present invention can be understood in combination with the specific situation. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
Referring to fig. 1, the pulsed laser deposition three-dimensional heating stage of this embodiment includes a heating platform 1, a bellows 2, a maintenance knob 3, a horizontal displacement mechanism 4, a vertical displacement mechanism 5, a rotation mechanism 6, a control motor 7, a sample holder 8, a first lead screw 12, a second lead screw 19, a first support rod 22, a second support rod 32, a support table 17, a vertical displacement table 41, a rotary displacement table 31, and a horizontal displacement table 21.
In this embodiment, heating platform 1 is the cuboid, sample holds in the palm 8 settings and is in heating platform 1 bottom and through control motor 7 control reciprocates to the drive is placed sample on the sample holds in the palm 8 moves up and heat 1 contacts of platform, thereby realizes the heating.
The heating platform 1 is arranged inside the vacuum chamber 11 and fixed by a central shaft 16. Bellows 2 sets up directly over heating platform 1, be provided with maintenance flange 14 and maintenance flange 15 in the middle of heating platform 1 and the bellows 2, maintenance flange 15 is fixed on vacuum chamber 11, and maintenance flange 14 is fixed on bellows 2. The maintenance knob 3 is movably connected with a maintenance flange 14 below the corrugated pipe 2 through a first screw rod 12, and the first screw rod 12 is vertically connected with the vacuum cavity 11 through a fixed mounting base 13 at the bottom. The top of the first screw rod 12 is fixedly connected with a support table 17. The maintenance knob 3 can rotate the first lead screw 12 to move the maintenance flange 14 upwards and compress the corrugated pipe 2, so as to pull the heating platform 1 out of the vacuum cavity 11 for maintenance or replacement.
A first supporting rod 22 is fixed on the vacuum cavity 11, and the top end of the first supporting rod 22 is fixed on the horizontal displacement table 21. The support table 17 is fixedly connected with the first support rod 22. The horizontal displacement table 21 is provided with horizontal displacement mechanisms 4 in the horizontal X direction and the horizontal Y direction, and the horizontal displacement mechanisms 4 are driven by two stepping motors fixed on the horizontal displacement table 21. A second support rod 32 and a second screw rod 19 are fixed on the horizontal displacement mechanism 4, a vertical displacement table 41 is fixed on the second support rod 32 and the second screw rod 19, and a stepping motor is fixed on the vertical displacement table 41 to drive the second screw rod 19 to rotate. The second support rod 32 and the second screw rod 19 are movably connected with a rotary displacement table 31. The rotary displacement table 31 is driven by the second screw rod 19 to move up and down. The rotary displacement table 31 is fixed with a central shaft 16, and the rotary displacement table 31 drives the central shaft to move up and down. A flange 20 is fixed below the central shaft 16, and a flange 21 is fixed on the central shaft 16. The flange 20 can be driven by the up-and-down movement of the rotary displacement table 31, the flange 21 can be driven by the up-and-down movement of the heating table 1, and at the moment, the corrugated pipe 2 can stretch along with the up-and-down movement. The motor on the rotary displacement table 31 drives the inner shaft of the central shaft 16 to rotate, thereby rotating the heating table 1. The horizontal displacement mechanism 4 on the horizontal displacement table 21 is driven by the stepping motor to move left and right or back and forth so as to drive the vertical displacement table 41 and the rotary displacement table 31, and the second support rod 32 and the second screw rod 19 are integrally moved left and right or back and forth so as to drive the heating table 1 to move left and right or back and forth, and at the moment, the corrugated pipe 2 is horizontally or back and forth stretched. The upper end of the flange 21 is provided with a control motor 7 which can drive the sample holder 8 to move up and down.
A horizontal displacement table 21 is arranged right above the vacuum cavity 11 through a first supporting rod 22, and the first supporting rod 22 is perpendicularly fixed on the vacuum cavity 11. The horizontal displacement mechanism 4 is arranged on the horizontal displacement table 21, the horizontal displacement mechanism 4 can select a slide block guide rail structure and a servo driving motor which are commonly used in the field, and the moving speed and the moving time can be controlled to drive the heating platform 1 at the bottom to horizontally move forward, backward, leftward and rightward for a preset distance.
A rotary displacement table 31 is arranged right above the horizontal displacement table 21 through a second screw rod 19 and a second support rod 32, and the second screw rod 19 and the second support rod 32 are vertically fixed on the horizontal displacement mechanism 4. The rotating mechanism 6 is arranged on the rotary displacement table 31, the rotating mechanism 6 can select a rotating shaft gear meshing structure and a servo driving motor which are commonly used in the field, and the rotating speed and the rotating time can be controlled to drive the heating platform 1 at the bottom to rotate around the axis by a preset angle.
A vertical displacement table 41 is arranged right above the horizontal displacement table 21 through a second screw rod 19 and a second support rod 32, and the second screw rod 19 and the second support rod 32 are perpendicular to the heating platform 1. The vertical displacement mechanism 5 is arranged on the vertical displacement table 41, the vertical displacement mechanism 5 can select a slide block guide rail structure and a servo driving motor which are commonly used in the field, and the moving speed and the moving time can be controlled to drive the heating platform 1 at the bottom to move up and down for a preset distance.
In this embodiment, the vertical displacement table 41, the rotary displacement table 31 and the horizontal displacement table 21 are arranged in this order from top to bottom. Of course, the position relationship among the three can be flexibly adjusted according to actual needs. The general servo drive motor in this field can be selected for use to step motor, in order to control respectively horizontal displacement mechanism 41, vertical displacement mechanism 6 and rotary mechanism 5 drive heating platform 1 carries out horizontal displacement, vertical displacement and rotation to realize the three-dimensional heating function of warm table, promoted the use convenience and the work efficiency of warm table. The controllable drive of control motor 7 sample holds in the palm 8 and reciprocates to pack into, take out and fixed sample heats, has also promoted the convenience in use and the work efficiency of warm table.
In summary, the three-dimensional pulse laser deposition heating table of the present embodiment includes a heating platform, a corrugated pipe, a maintenance knob, a horizontal displacement mechanism, a vertical displacement mechanism, a rotation mechanism, a sample holder and a control motor, the corrugated pipe is disposed directly above the heating platform, the maintenance knob is movably connected to a flange under the corrugated pipe through a first lead screw for rotating to compress the corrugated pipe upwards, the horizontal displacement table is disposed directly above the heating platform through a second support rod, the horizontal displacement mechanism is disposed on the horizontal displacement table, a rotation displacement table is disposed directly above the horizontal displacement mechanism through a second support rod, the rotation mechanism is disposed on the rotation displacement table, the vertical displacement table is disposed directly above the horizontal displacement table through a second support rod, the vertical displacement mechanism is disposed on the vertical displacement table, the sample support is arranged at the bottom of the heating platform and is controlled to move up and down through the control motor. Drive heating platform through horizontal displacement mechanism, vertical displacement mechanism and rotary mechanism and carry out horizontal displacement, vertical displacement and rotation to realize the three-dimensional heating function of warm table, reciprocate in order to pack into, take out and fixed sample heats through control sample support simultaneously, promoted the use convenience and the work efficiency of warm table. Through the combined structure of the corrugated pipe and the maintenance knob, the heating platform can be conveniently and quickly pulled out of the cavity for maintenance or replacement.
It should be understood that portions of the present invention may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
In the description herein, references to the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (8)
1. A pulse laser deposition three-dimensional heating table is characterized by comprising a heating platform, a corrugated pipe, a maintenance knob, a horizontal displacement mechanism, a vertical displacement mechanism, a rotating mechanism, a sample holder and a control motor, wherein the corrugated pipe is arranged right above the heating platform, the maintenance knob is movably connected with a flange under the corrugated pipe through a first lead screw and is used for rotating to compress the corrugated pipe upwards, the horizontal displacement table is arranged right above the heating platform through a first supporting rod, the horizontal displacement mechanism is arranged on the horizontal displacement table, the rotary displacement table is movably connected right above the horizontal displacement mechanism through a second supporting rod and a second lead screw, the rotating mechanism is arranged on the rotary displacement table, the vertical displacement table is arranged right above the horizontal displacement table through a second supporting rod, and the vertical displacement mechanism is arranged on the vertical displacement table, the sample support is arranged at the bottom of the heating platform and is controlled to move up and down through the control motor.
2. The pulsed laser deposition three-dimensional heating stage of claim 1, wherein a maintenance flange is provided intermediate the heating platform and the bellows.
3. The pulsed laser deposition three-dimensional heating stage of claim 1, wherein the first support bar, the second support bar, the first lead screw, and the second lead screw are disposed perpendicular to the heating stage.
4. The pulsed laser deposition three-dimensional heating stage of claim 1, wherein the service knob is disposed on top of the first lead screw.
5. A pulsed laser deposition three-dimensional heating stage according to claim 1, wherein the control motor is provided on a top support of the bellows.
6. The pulsed laser deposition three-dimensional heating stage of claim 1, wherein the horizontal displacement mechanism and vertical displacement mechanism comprise a slider rail structure.
7. The pulsed laser deposition three-dimensional heating stage of claim 1, wherein the rotation mechanism comprises a spindle gear mesh configuration.
8. The pulsed laser deposition three-dimensional heating stage according to claim 1, wherein the vertical displacement stage, the rotary displacement stage and the horizontal displacement stage are arranged in sequence from top to bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921802768.5U CN211142143U (en) | 2019-10-24 | 2019-10-24 | Pulse laser deposition three-dimensional heating table |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921802768.5U CN211142143U (en) | 2019-10-24 | 2019-10-24 | Pulse laser deposition three-dimensional heating table |
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| CN211142143U true CN211142143U (en) | 2020-07-31 |
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| CN201921802768.5U Active CN211142143U (en) | 2019-10-24 | 2019-10-24 | Pulse laser deposition three-dimensional heating table |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125502A (en) * | 2022-03-17 | 2022-09-30 | 安徽外延科技有限公司 | Infrared laser heating sample platform with adjustable multi-axis motion heating area |
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2019
- 2019-10-24 CN CN201921802768.5U patent/CN211142143U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125502A (en) * | 2022-03-17 | 2022-09-30 | 安徽外延科技有限公司 | Infrared laser heating sample platform with adjustable multi-axis motion heating area |
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