CN211103018U - Air-floatation main shaft rotation error detection and compensation device based on sine conical surface reflection method - Google Patents
Air-floatation main shaft rotation error detection and compensation device based on sine conical surface reflection method Download PDFInfo
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- CN211103018U CN211103018U CN201922093737.3U CN201922093737U CN211103018U CN 211103018 U CN211103018 U CN 211103018U CN 201922093737 U CN201922093737 U CN 201922093737U CN 211103018 U CN211103018 U CN 211103018U
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Abstract
The utility model discloses an air supporting main shaft gyration error detection and compensation arrangement based on sinusoidal conical surface reflection method. At present, the rotation error compensation of a weight type or spring type air bearing can not realize real-time detection and accurate compensation. The radial air bearing of the utility model is fixed in the bearing fixing sleeve and sleeved on the air bearing main shaft; the bearing fixing sleeve is fixed on the device fixing plate; the device fixing plate is fixed on a machine tool, and the auxiliary measuring reflecting table is fixed on the air floatation main shaft; the auxiliary measuring reflecting table consists of a circular table section and a sinusoidal conical surface section which are integrally formed; optical axes of the n laser transmitters are all positioned on a plane where wave crests of the sinusoidal conical surface section are positioned; the n air inlet pressure control valves are communicated with the n air inlet holes of the bearing fixing sleeve through vent pipes respectively; the air inlet pressure control valves are controlled by a controller, and the signal output ends of the measurement sensitive elements are connected with the controller. The utility model discloses an optical measurement principle realizes real-time, the detection on throne of main shaft gyration error.
Description
Technical Field
The utility model belongs to the technical field of the precision finishing, concretely relates to air supporting main shaft gyration error detection and compensation arrangement based on sinusoidal conical surface reflection method.
Background
With the development of science and technology, the air bearing has the advantages of extremely small friction coefficient, higher rotation precision, no pollution and the like, and is widely applied to precision machinery and measuring instruments. The air-float hydrostatic bearing intensively reflects the processing performance of high speed, high efficiency and high precision, and is one of the main development directions of the main shaft of the high-precision machine tool.
In the working process of the air-floating main shaft, the rotation error of the main shaft is easily increased due to the feeding of a tool bit, the cutting force, the high-speed rotation of the main shaft and the like, so that the machining precision of a machine tool is difficult to guarantee.
At present, the rotation error of the air bearing caused by vibration or cutter feeding in the working process is mainly carried and compensated by adopting a weight type or a spring type. However, the connection mode of the loader and the bearing of the compensation mode is generally rigid connection, the magnitude of the loading force cannot be accurately ensured, and real-time detection and accurate error compensation cannot be realized.
Disclosure of Invention
The utility model aims at providing an air supporting main shaft gyration error detection and compensation arrangement based on sinusoidal conical surface reflection method to the not enough of current air supporting main shaft gyration error detection and precision compensation mode, can accurately, detect and motion precision compensation air supporting main shaft gyration error in real time.
The utility model adopts the technical proposal that:
the utility model comprises a device fixing plate, a vent pipe, an air inlet pressure control valve, a measuring device fixing support, an aligning knob, an auxiliary measuring reflection table, a measuring sensitive element mounting base, a laser emitter, a bearing fixing sleeve, a radial air bearing and a measuring sensitive element; the bearing fixing sleeve is fixed on the device fixing plate; n measuring device fixed supports are uniformly distributed and fixed on the device fixed plate along the circumferential direction of the bearing fixed sleeve, and n is more than or equal to 4. An air inlet pressure control valve, a measuring sensitive element mounting base and a laser emitter mounting base are fixed on each measuring device fixing support; the laser emitter is fixed on the laser emitter mounting base, and the optical axis of the laser emitter is parallel to the mounting plane of the device fixing plate; the optical axes of all the laser transmitters are arranged in a coplanar manner and intersect at the same point, and the point is positioned on the central axis of the bearing fixing sleeve; a measurement sensitive element is fixed on the measurement sensitive element mounting base; on the same measuring device fixing support, an included angle A between the normal of a measuring plane of a measuring sensitive element and the mounting plane of a device fixing plate is 45-75 degrees; the auxiliary measuring reflection table consists of a circular table section and a sinusoidal conical surface section which are integrally formed, and the sinusoidal conical surface section is connected with the large end face of the circular table section; the sine conical surface section is a revolving body which takes a sine curve section with 5/4 periods as a generatrix and rotates around the central axis of the circular table section; the included angle between the connecting line of the two peak points of the sinusoidal section and the central axis of the circular truncated cone section is A/2, and the two peak points of the sinusoidal section are both positioned on the side surface extension surface of the circular truncated cone section; the side of the circular table section is provided with n knob connecting threaded holes which are uniformly distributed along the circumferential direction, and each knob connecting threaded hole is in threaded connection with one aligning knob. Each air inlet pressure control valve is communicated with one air inlet hole corresponding to the bearing fixing sleeve through a vent pipe; the radial air bearing is fixedly sleeved in the bearing fixing sleeve; the radial air bearing is provided with n air inlet areas; each air inlet area of the radial air bearing is communicated with one air inlet hole at the corresponding position of the bearing fixing sleeve; each air inlet area of the radial air bearing is provided with a throttling hole; each air inlet pressure control valve is connected with an air pump; the air inlet pressure control valves are controlled by a controller, and the signal output ends of the measurement sensitive elements are connected with the controller.
Preferably, n thread hole groups uniformly distributed along the circumferential direction of the bearing fixing sleeve are arranged on the mounting plane of the device fixing plate; the threaded hole group consists of three threaded holes I which are arranged in a triangular shape or four threaded holes I which are arranged in an array; when the threaded hole group consists of three threaded holes I, three through holes of each measuring device fixing support are respectively connected with the three threaded holes I of the corresponding threaded hole group through bolts; when the threaded hole group consists of four threaded holes I, the four through holes of each measuring device fixing support are respectively connected with the four threaded holes I of the corresponding threaded hole group through bolts.
Preferably, a main shaft through hole is formed in the center of the mounting plane of the device fixing plate; the mounting plane of the device fixing plate is also provided with n through holes which are uniformly distributed along the circumferential direction of the main shaft through hole; and the second n threaded holes of the bearing fixing sleeve are respectively connected with the n through holes of the device fixing plate through bolts.
Preferably, every two laser emitters are grouped into one group, and the optical axes of the two laser emitters in the same group are coaxially arranged.
Preferably, the laser emitter adopts a collimation laser emitter.
Preferably, the included angle a is 60 degrees.
Preferably, the fixing mode of the radial air bearing and the bearing fixing sleeve is as follows: the radial air bearing is arranged in the annular groove of the bearing fixing sleeve, and two end faces of the radial air bearing are axially limited by the bearing end blocking cover and the bottom of the annular groove respectively; the bearing end blocking cover is fixed on the bearing fixing sleeve through a screw, and a gap adjusting gasket is arranged between the bearing end blocking cover and the end face of the radial air bearing.
Preferably, two orifices are arranged in each air inlet area of the radial air bearing at intervals.
Preferably, the optical axis of the laser emitter is perpendicular to and intersects with the central axis of the radial air bearing; the optical axis of each laser emitter is positioned in the middle of two throttling holes in one air inlet area corresponding to the radial air bearing; the optical axes of all laser emitters and the central axes of all orifices are coplanar.
Preferably, adjacent air intake regions of the radial air bearing are separated by a seal spacer.
The utility model has the advantages that:
1. the utility model adopts the sine-shaped conical surface section as the reflecting surface, under the direct laser irradiation emitted by n laser transmitters which are evenly distributed in the circumferential direction, when one measuring sensitive element detects the error of the rotary motion of the main shaft, other measuring sensitive elements can also detect the corresponding change, thereby controlling n air inlet pressure control valves to respectively make compensation reaction; because the utility model discloses an optical measurement principle can realize detecting main shaft gyration error real-time, in situ, and the gyration motion error to the main shaft detects more accurately, comprehensively, and the compensation is more accurate, timely.
2. The utility model discloses a sinusoidal conical surface section be with the solid of revolution that the sinusoidal section is the generating line, and two crest point connecting lines and air supporting main shaft axis of this sinusoidal section become a contained angle for after the error motion takes place for the main shaft, reflection method plane change is great, can enlarge the error, the detection of the main shaft error of being more convenient for.
3. The utility model discloses a sinusoidal conical surface section have sinusoidal characteristic, and the amplitude homoenergetic of each point department is different, can better reflect the error motion of main shaft, especially can more accurately reflect the axial motion error of main shaft.
4. The utility model discloses a radial air supporting bearing is when giving main shaft motion error compensation, for the non-contact form, can not produce factors that influence main shaft motion precision such as friction, vibration, does not also interfere the rotary motion of air supporting main shaft.
5. The utility model discloses a plurality of directional control, the even multipoint mode compensation of circumference not only can compensate main shaft motion precision evenly, gently, can compensate main shaft motion error by the omnidirectional moreover.
6. The utility model discloses a measure the closed-loop control mode of sensing element, admission pressure control valve and controller, can carry out real-time detection and compensation to main shaft rotary motion error, make the precision of compensation higher.
Drawings
FIG. 1 is a perspective view of the overall structure of the device of the present invention;
FIG. 2 is a side view of the apparatus of the present invention in a partial structure (the line with the arrow is the laser path);
FIG. 3 is a gas path diagram of the radial gas bearing of the present invention;
FIG. 4 is an assembly diagram of the auxiliary measurement reflection table and the air-float spindle of the present invention;
in the figure: 1-device fixing plate, 2-vent pipe, 3-air inlet pressure control valve, 4-measuring device fixing support, 5-aligning knob, 6-auxiliary measuring reflection table, 7-measuring sensitive element mounting base, 8-laser emitter mounting base, 9-laser emitter, 10-bearing fixing sleeve, 11-radial air bearing, 12-clearance adjusting washer, 13-bearing end stop cover and 14-measuring sensitive element.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
As shown in fig. 1, 2 and 4, the air-floatation spindle rotation error detection and compensation device based on the sinusoidal cone reflection method includes a device fixing plate 1, a vent pipe 2, an air inlet pressure control valve 3, a measuring device fixing support 4, a centering knob 5, an auxiliary measuring reflection table 6, a measuring sensitive element mounting base 7, a laser emitter mounting base 8, a laser emitter 9, a bearing fixing sleeve 10, a radial air-floatation bearing 11 and a measuring sensitive element 14; the bearing fixing sleeve 10 is fixed on the device fixing plate 1; n measuring device fixing brackets 4 are uniformly distributed and fixed on the device fixing plate 1 along the circumferential direction of the bearing fixing sleeve 10, wherein n is more than or equal to 4 (as a preferred embodiment, n is 4). Each measuring device fixing support 4 is fixedly provided with an air inlet pressure control valve 3, a measuring sensitive element mounting base 7 and a laser emitter mounting base 8; a laser emitter 9 (as a preferred embodiment, a collimation laser emitter is adopted as the laser emitter) is fixed on the laser emitter mounting base 8, and the optical axis of the laser emitter 9 is parallel to the mounting plane of the device fixing plate 1; the optical axes of all the laser transmitters 9 are arranged in a coplanar manner and intersect at the same point, and the point is positioned on the central axis of the bearing fixing sleeve 10; as a preferred embodiment, every two laser emitters 9 are grouped into one group, and the optical axes of the two laser emitters 9 in the same group are coaxially arranged; a measurement sensitive element 14 is fixed on the measurement sensitive element mounting base 7; on the same measuring device fixing support 4, an included angle A between a normal of a measuring plane of the measuring sensitive element 14 and an installation plane of the device fixing plate 1 is 45-75 degrees (as a preferred embodiment, 60 degrees is taken); the auxiliary measuring reflection table 6 consists of a circular table section and a sinusoidal conical surface section which are integrally formed, and the sinusoidal conical surface section is connected with the large-end face of the circular table section; the sine conical surface section is a revolving body which takes a sine curve section with a complete period as a bus and rotates around the central axis of the circular table section; the included angle between the connecting line of the two peak points of the sinusoidal section and the central axis of the circular truncated cone section is A/2, and the two peak points of the sinusoidal section are both positioned on the side surface extension surface of the circular truncated cone section; the side of the round platform section is provided with n knob connecting threaded holes which are uniformly distributed along the circumferential direction, and each knob connecting threaded hole is connected with one aligning knob 5 through threads. Each air inlet pressure control valve 3 is communicated with one air inlet hole corresponding to the bearing fixing sleeve 10 through a vent pipe 2, and the vent pipe 2 plays a role in air guiding; the radial air bearing 11 is fixedly sleeved in the bearing fixing sleeve 10, and as a preferred embodiment, the fixing mode of the radial air bearing 11 and the bearing fixing sleeve 10 is as follows: the radial air bearing 11 is arranged in the annular groove of the bearing fixing sleeve 10, and two end faces of the radial air bearing 11 are axially limited by the bearing end retaining cover 13 and the bottom of the annular groove respectively; the bearing end blocking cover 13 is fixed on the bearing fixing sleeve 10 through a screw, and a gap adjusting gasket 12 is arranged between the bearing end blocking cover 13 and the end face of the radial air bearing 11; the radial air bearing 11 is provided with n air inlet areas (as a preferred embodiment, adjacent air inlet areas are separated by a sealing isolation block), and the n air inlet areas correspond to the measurement directions of the n measurement device fixing brackets 4 respectively; each air inlet area of the radial air bearing 11 is communicated with an air inlet hole at the corresponding position of the bearing fixing sleeve 10; as shown in fig. 3, each air intake area of the radial air bearing 11 is provided with an orifice; each air inlet pressure control valve 3 is connected with an air pump; the air pumped by the air pump enters the corresponding air inlet area of the radial air bearing 11 from the vent pipe 2 after passing through the air inlet pressure control valve 3, and flows into the gap between the radial air bearing 11 and the air floatation main shaft through the throttling hole of the air inlet area to form an air film, so that the effect of supporting the air floatation main shaft is realized; each air inlet pressure control valve 3 is controlled by a controller, the detected rotary motion error of the air floatation main shaft is transmitted to the controller by the measuring sensitive element 14, the controller sends a compensation signal to the air inlet pressure control valve 3 when judging that the rotary motion error of the air floatation main shaft exceeds a threshold value, and the air inlet pressure control valve 3 changes the air inlet pressure to perform motion precision compensation on the air floatation main shaft.
As a preferred embodiment, n thread hole groups uniformly distributed along the circumferential direction of the bearing fixing sleeve 10 are arranged on the mounting plane of the device fixing plate 1; the threaded hole group consists of three threaded holes I which are arranged in a triangular shape or four threaded holes I which are arranged in an array; when the threaded hole group consists of three threaded holes I, three through holes of each measuring device fixing bracket 4 are respectively connected with the three threaded holes I of the corresponding threaded hole group through bolts; when the threaded hole group consists of four threaded holes, four through holes of each measuring device fixing bracket 4 are respectively connected with the four threaded holes of the corresponding threaded hole group through bolts.
As a preferred embodiment, a main shaft through hole is formed in the center of the installation plane of the device fixing plate 1; the mounting plane of the device fixing plate 1 is also provided with n through holes which are uniformly distributed along the circumferential direction of the main shaft through hole; the second n threaded holes of the bearing fixing sleeve 10 are respectively connected with the n through holes of the device fixing plate 1 through bolts.
In the preferred embodiment, there are two orifices spaced apart in each intake zone of the radial air bearing 11.
As a preferred embodiment, the optical axis of the laser emitter 9 is perpendicular to and intersects with the central axis of the radial air bearing 11; the optical axis of each laser transmitter 9 is positioned in the middle of two throttle holes in one air inlet area corresponding to the radial air bearing 11; the optical axes of all laser emitters 9 and the central axes of all orifices are coplanar to improve the accuracy of the measurement and compensation.
The air floatation main shaft rotation error detection and compensation device based on the sine conical surface reflection method has the following working principle:
1) the method comprises the steps of sleeving a radial air bearing 11 on an air bearing main shaft, fixedly installing a device fixing plate 1 on a machine tool, ensuring that the rotation axis of the air bearing main shaft is coincident with the central axis of the radial air bearing, drawing a circular auxiliary measuring line at the peak position of a sinusoidal conical surface section of an auxiliary measuring reflection table 6, sleeving the auxiliary measuring reflection table 6 on the air bearing main shaft, rotating aligning knobs 5 in connecting threaded holes of the aligning knobs to enable the tail ends of the aligning knobs 5 to be tightly pressed on the air bearing main shaft, ensuring two points after the auxiliary measuring reflection table 6 is fixed to improve the measuring and compensating accuracy, ① the intersecting scales of the aligning knobs 5 and the circular table sections of the auxiliary measuring reflection table 6 are consistent, ensuring that the auxiliary measuring reflection table 6 and the air bearing main shaft are coaxially arranged, and ② the optical axes of laser emitters 9 are intersected with the circular auxiliary measuring line of the auxiliary measuring reflection table 6.
2) The controller numbers each measurement sensitive element 14 (each measurement sensitive element 14 can be numbered sequentially along the circumferential direction); the auxiliary measuring reflection table 6 rotates synchronously with the air-floating main shaft. When the laser emitted by each laser emitter 9 is reflected at a preset position (which indicates that the rotary motion error of the air floatation spindle does not exceed the threshold value) corresponding to the measurement sensitive element 14 through the sinusoidal conical surface section of the auxiliary measurement reflecting table 6, the laser emitted by each laser emitter 9 is inevitably directly emitted at the position of the circular auxiliary measurement line of the auxiliary measurement reflecting table 6, the controller determines that the air floatation spindle is in a zero rotary motion error rotating state, the air inlet pressure control valve 3 does not change the pressure of the entering air, and therefore the air inlet pressure of the radial air floatation bearing 11 is kept unchanged. When the laser emitted by the laser emitter 9 is reflected by the sinusoidal conical surface section of the auxiliary measurement reflecting table 6 and is not at the preset position on the corresponding measurement sensing element 14, it is indicated that the laser emitted by the laser emitter 9 does not fall at the position of the circular auxiliary measurement line when being irradiated on the sinusoidal conical surface section of the auxiliary measurement reflecting table 6, because the sinusoidal conical surface section of the auxiliary measurement reflecting table 6 is influenced by the motion error of the air floatation spindle to change the angle, and the incident angle of the laser on the sinusoidal conical surface section is also changed, at this time, the controller determines that the rotation motion error of the air floatation spindle occurs, records the number of each measurement sensing element 14 which does not receive the laser at the preset position, controls each air inlet pressure control valve 3 on the same measurement device fixing support 4 as the measurement sensing element 14 which does not receive the laser to adjust the air inlet pressure, and further adjusts the air pressure of the radial air floatation bearing 11 on the corresponding air inlet area, and compensating the motion precision of the air floatation main shaft in the corresponding direction. When the motion precision compensation is carried out on the air floatation main shaft, the measurement sensitive element 14 is adopted for real-time feedback, and the controller controls the air inlet pressure control valve 3 to continuously adjust the air inlet pressure in a preset step length mode.
Claims (10)
1. Air supporting main shaft gyration error detection and compensation arrangement based on sinusoidal conical surface reflection method, including device fixed plate, breather pipe, air inlet pressure control valve, measuring device fixed bolster, bearing fixed sleeve and radial air supporting bearing, its characterized in that: the device also comprises a centering knob, an auxiliary measuring reflection table, a measuring sensitive element mounting base, a laser emitter and a measuring sensitive element; the bearing fixing sleeve is fixed on the device fixing plate; n measuring device fixing supports are uniformly distributed and fixed on the device fixing plate along the circumferential direction of the bearing fixing sleeve, and n is more than or equal to 4; an air inlet pressure control valve, a measuring sensitive element mounting base and a laser emitter mounting base are fixed on each measuring device fixing support; the laser emitter is fixed on the laser emitter mounting base, and the optical axis of the laser emitter is parallel to the mounting plane of the device fixing plate; the optical axes of all the laser transmitters are arranged in a coplanar manner and intersect at the same point, and the point is positioned on the central axis of the bearing fixing sleeve; a measurement sensitive element is fixed on the measurement sensitive element mounting base; on the same measuring device fixing support, an included angle A between the normal of a measuring plane of a measuring sensitive element and the mounting plane of a device fixing plate is 45-75 degrees; the auxiliary measuring reflection table consists of a circular table section and a sinusoidal conical surface section which are integrally formed, and the sinusoidal conical surface section is connected with the large end face of the circular table section; the sine conical surface section is a revolving body which takes a sine curve section with a complete period as a bus and rotates around the central axis of the circular table section; the included angle between the connecting line of the two peak points of the sinusoidal section and the central axis of the circular truncated cone section is A/2, and the two peak points of the sinusoidal section are both positioned on the side surface extension surface of the circular truncated cone section; the side surface of the circular table section is provided with n knob connecting threaded holes which are uniformly distributed along the circumferential direction, and each knob connecting threaded hole is connected with one aligning knob through threads; each air inlet pressure control valve is communicated with one air inlet hole corresponding to the bearing fixing sleeve through a vent pipe; the radial air bearing is fixedly sleeved in the bearing fixing sleeve; the radial air bearing is provided with n air inlet areas; each air inlet area of the radial air bearing is communicated with one air inlet hole at the corresponding position of the bearing fixing sleeve; each air inlet area of the radial air bearing is provided with a throttling hole; each air inlet pressure control valve is connected with an air pump; the air inlet pressure control valves are controlled by a controller, and the signal output ends of the measurement sensitive elements are connected with the controller.
2. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: n thread hole groups uniformly distributed along the circumferential direction of the bearing fixing sleeve are arranged on the mounting plane of the device fixing plate; the threaded hole group consists of three threaded holes I which are arranged in a triangular shape or four threaded holes I which are arranged in an array; when the threaded hole group consists of three threaded holes I, three through holes of each measuring device fixing support are respectively connected with the three threaded holes I of the corresponding threaded hole group through bolts; when the threaded hole group consists of four threaded holes I, the four through holes of each measuring device fixing support are respectively connected with the four threaded holes I of the corresponding threaded hole group through bolts.
3. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: a main shaft through hole is formed in the center of the mounting plane of the device fixing plate; the mounting plane of the device fixing plate is also provided with n through holes which are uniformly distributed along the circumferential direction of the main shaft through hole; and the second n threaded holes of the bearing fixing sleeve are respectively connected with the n through holes of the device fixing plate through bolts.
4. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: every two laser transmitters are grouped into a group, and the optical axes of the two laser transmitters in the same group are coaxially arranged.
5. The air-bearing spindle rotation error detection and compensation device based on the sinusoidal cone reflection method according to any one of claims 1 to 4, wherein: the laser emitter adopts a collimation laser emitter.
6. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: the included angle A is 60 degrees.
7. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: the fixing mode of the radial air bearing and the bearing fixing sleeve is as follows: the radial air bearing is arranged in the annular groove of the bearing fixing sleeve, and two end faces of the radial air bearing are axially limited by the bearing end blocking cover and the bottom of the annular groove respectively; the bearing end blocking cover is fixed on the bearing fixing sleeve through a screw, and a gap adjusting gasket is arranged between the bearing end blocking cover and the end face of the radial air bearing.
8. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, wherein: and two throttling holes are arranged in each air inlet area of the radial air bearing at intervals.
9. The apparatus for detecting and compensating for air bearing spindle rotation error based on sinusoidal cone reflection as set forth in claim 8, wherein: the optical axis of the laser emitter is perpendicular to and intersected with the central axis of the radial air bearing; the optical axis of each laser emitter is positioned in the middle of two throttling holes in one air inlet area corresponding to the radial air bearing; the optical axes of all laser emitters and the central axes of all orifices are coplanar.
10. The apparatus for detecting and compensating rotation error of air-floating spindle based on sinusoidal cone reflection method as claimed in claim 1, 8 or 9, wherein: and adjacent air inlet areas of the radial air bearing are separated by a sealing and isolating block.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922093737.3U CN211103018U (en) | 2019-11-28 | 2019-11-28 | Air-floatation main shaft rotation error detection and compensation device based on sine conical surface reflection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922093737.3U CN211103018U (en) | 2019-11-28 | 2019-11-28 | Air-floatation main shaft rotation error detection and compensation device based on sine conical surface reflection method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI750023B (en) * | 2021-02-03 | 2021-12-11 | 上銀科技股份有限公司 | Workpiece directional mechanism |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI750023B (en) * | 2021-02-03 | 2021-12-11 | 上銀科技股份有限公司 | Workpiece directional mechanism |
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