CN211102021U

CN211102021U - Soldering device of splicing-free rotary target

Info

Publication number: CN211102021U
Application number: CN201922041670.9U
Authority: CN
Inventors: 林志河; 陈钦忠
Original assignee: Fujian Acetron New Materials Co ltd
Current assignee: Fujian Acetron New Materials Co ltd
Priority date: 2019-11-22
Filing date: 2019-11-22
Publication date: 2020-07-28
Anticipated expiration: 2029-11-22

Abstract

The utility model relates to a soldering device of splicing-free rotary target, which comprises an electric heating constant temperature blast drying oven, wherein a hot air channel and a heating chamber are formed in the electric heating constant temperature blast drying oven through a clapboard, a temperature controller, a heating switch and a blast switch are arranged on the electric heating constant temperature blast drying oven, an air blower is arranged on the electric heating constant temperature blast drying oven, and an air supply outlet of the air blower is communicated with the hot air channel of the electric heating constant temperature blast drying oven; a positioning base for fixing the target tube and the back tube and a brazing filler metal disc for adding brazing solder are arranged in the electric heating constant temperature blast drying box; and a heating resistor is arranged in the electric heating constant-temperature air blowing drying box and is electrically connected with a heating switch. The brazing device of the utility model has simple structure and high brazing efficiency, and is suitable for mass production; the problem of large temperature difference between the target tube and the back tube in the heating process in the target brazing process can be solved; the heating rate is easy to control, and the problem that the target material is cracked due to too fast heating can be avoided.

Description

Soldering device of splicing-free rotary target

Technical Field

The utility model relates to a target preparation technical field especially relates to a brazing device of rotatory target of no concatenation.

Background

The rotating target is a key material used in the sputtering coating process. The rotary target needs to be arranged on a film plating machine for use, so a structure connected with the film plating machine needs to be processed for installation, the target material needs to be brazed on a stainless steel back tube or a titanium back tube because some materials are difficult to process complex structures, and the connecting structure is processed on the back tube to enable the back tube to be normally installed.

The prior art disclosed at present is a method for heating and brazing a target material and a back tube by using different heating modes; for example, CN109352109A, entitled apparatus and method for rotary target bonding, describes a method for target bonding by heating a backing tube with an oil bath. The method can solve the problem of heating uniformity, but only heats the back tube, so that the problem of overlarge temperature difference between the target tube and the back tube exists, and the welding device has a complex structure, high cost and high operation difficulty.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

In order to solve the above-mentioned problem of prior art, the utility model provides a device of brazing of rotatory target of no concatenation utilizes the blast air heating to carry out the heating and the process of brazing of target, back of the body pipe and brazing solder material in electric heat constant temperature blast air drying cabinet, has solved intensification speed and heating homogeneity problem, and target, back of the body pipe and brazing solder three do not have the difference in temperature, and the inner chamber size can be selected according to the specification of target to the controllable and can, and the rotatory target within the single section 3m can be bound to the longest.

(II) technical scheme

In order to achieve the above object, the utility model discloses a main technical scheme include:

a brazing device for a splicing-free rotary target comprises an electric heating constant-temperature blast drying box, wherein a hot air channel and a heating chamber are formed in the electric heating constant-temperature blast drying box through a partition plate, a temperature controller, a heating switch and a blast switch are arranged on the electric heating constant-temperature blast drying box, the temperature controller is used for setting a heating temperature-rise curve, a blower is arranged on the electric heating constant-temperature blast drying box, an air supply outlet of the blower is communicated with the hot air channel of the electric heating constant-temperature blast drying box, air inlet holes and air return holes are formed in the partition plate at intervals, and a circulating hot air channel is formed among the air inlet holes, the heating chamber, the air return holes; the blower is electrically connected with the blower switch; a positioning base for fixing the target tube and the back tube and a brazing filler metal disc for adding brazing filler metal are arranged in the electric heating constant temperature blast drying box, and the positioning base is positioned in the heating chamber; when the target tube and the back tube are connected to the positioning base, the brazing filler metal disc is connected to the upper end part of the target tube, and a brazing filler metal discharge hole in the brazing filler metal disc is communicated with a brazing gap formed between the target tube and the back tube and used for supplying brazing filler metal; and a heating resistor is arranged in the electric heating constant-temperature air blowing drying box and is electrically connected with a heating switch.

Furthermore, a thermocouple is arranged on the heating chamber and is electrically connected with the temperature controller.

Further, the inner wall of the electric heating constant-temperature air blowing drying box is provided with a heat insulation layer.

Furthermore, the positioning base is provided with a fixing groove for fixing the target tube and the back tube, and the size of the fixing groove is matched and fixed with the outer diameter of the target tube and the outer diameter of the back tube at intervals.

Furthermore, the brazing filler metal plate is provided with a middle hole matched with the target tube and the back tube, and the size of the middle hole is matched and fixed with the outer diameter of the target tube and the outer diameter of the back tube at intervals.

(III) advantageous effects

The utility model has the advantages that: 1. the brazing device is simple in structure, high in brazing efficiency and suitable for mass production.

2. The brazing device can solve the problem of large temperature difference between the target tube and the back tube in the target brazing (binding) process.

3. The brazing device is easy to control the temperature rising rate, and can avoid the problem that the target material is cracked due to the over-fast temperature rising.

Drawings

FIG. 1 is a schematic structural view of a brazing apparatus of the present invention;

fig. 2 is the utility model discloses location base and brazing filler metal dish mounted state decompose the schematic diagram.

Detailed Description

For a better understanding of the present invention, reference will now be made in detail to the present invention, examples of which are illustrated in the accompanying drawings.

A brazing device of a splicing-free rotary target material is shown in figures 1 and 2 and comprises an electric heating constant-temperature air-blowing drying box 1, wherein the electric heating constant-temperature air-blowing drying box 1 is of a door-type structure, a hot air channel 6 and a heating chamber 14 are formed in the electric heating constant-temperature air-blowing drying box 1 through a partition plate, a temperature controller 2, a heating switch 3 and an air-blowing switch 4 are arranged on the electric heating constant-temperature air-blowing drying box 1, the temperature controller 2 is used for setting a heating temperature-rising curve, an air blower 7 is arranged on the electric heating constant-temperature air-blowing drying box 1, an air supply outlet of the air blower 7 is communicated with the hot air channel 6 of the electric heating constant-temperature air-blowing drying box 1, an air inlet 61 and an air return 62 are arranged on the partition plate at intervals, and; the blower 7 is electrically connected with the blower switch 4; a positioning base 9 for fixing a target tube 10 and a back tube 12 and a brazing filler metal disc 11 for adding brazing filler metal are arranged in the electric heating constant temperature blast drying box 1, and the positioning base 9 is positioned in a heating chamber 14; when the target tube 10 and the back tube 12 are connected on the positioning base 9, the brazing filler metal plate 11 is connected with the upper end part of the target tube 10, and a brazing filler metal discharge hole on the brazing filler metal plate 11 is communicated with a brazing gap formed between the target tube 10 and the back tube 12 and used for supplying brazing filler metal; and a heating resistor 8 is arranged in the electric heating constant-temperature air blowing drying box 1, and the heating resistor 8 is electrically connected with the heating switch 3.

Furthermore, in order to know the temperature in the heating chamber 14 in real time, a thermocouple 13 is arranged on the heating chamber 14, and the thermocouple 13 is electrically connected with the temperature controller 2.

Further, in order to ensure the heat preservation effect of the electric heating constant temperature air-blast drying box 1, a heat preservation layer 5 is arranged on the inner wall of the electric heating constant temperature air-blast drying box 1.

Specifically, the positioning base 9 is provided with fixing grooves for fixing the target tube 10 and the back tube 12, and the size of the fixing grooves is matched and fixed with the outer diameter of the target tube 10 and the outer diameter of the back tube 12 at intervals.

Specifically, the brazing disc 11 is provided with a middle hole matched with the target tube 10 and the back tube 12, and the size of the middle hole is matched and fixed with the outer diameter of the target tube 10 and the outer diameter of the back tube 12 at intervals.

The temperature controller 2, the thermocouple 13, the blower 7, the blast switch 4, the heating switch 3 and the heating resistor 8 are purchased in the market, so that the design cost is low, and the cost is saved.

The above is only the preferred embodiment of the present invention, and all the equivalent changes and modifications made according to the claims of the present invention should be covered by the present invention.

Claims

1. A soldering device of a splicing-free rotary target is characterized by comprising an electric heating constant-temperature air blowing drying box (1), a hot air channel (6) and a heating chamber (14) are formed in the electric heating constant temperature blast drying box (1) through a clapboard, the electric heating constant temperature blast drying box (1) is provided with a temperature controller (2), a heating switch (3) and a blast switch (4), the temperature controller (2) is used for setting a heating temperature-rising curve, the electric heating constant-temperature air-blowing drying box (1) is provided with an air blower (7), the air supply outlet of the blower (7) is communicated with a hot air channel (6) of the electric heating constant temperature blast drying box (1), an air inlet hole (61) and an air return hole (62) are arranged on the partition board at intervals, and a circulating hot air channel is formed among the air inlet hole (61), the heating chamber (14), the air return hole (62) and the hot air channel (6); the blower (7) is electrically connected with the blower switch (4); a positioning base (9) for fixing a target tube (10) and a back tube (12) and a brazing filler metal disc (11) for adding brazing filler metal are arranged in the electric heating constant-temperature air-blowing drying box (1), and the positioning base (9) is positioned in a heating chamber (14); when the target pipe (10) and the back pipe (12) are connected to the positioning base (9), the brazing filler metal plate (11) is connected to the upper end part of the target pipe (10), and a brazing filler metal discharge hole on the brazing filler metal plate (11) is communicated with a brazing gap formed between the target pipe (10) and the back pipe (12) and used for supplying brazing filler metal; and a heating resistor (8) is arranged in the electric heating constant-temperature air blowing drying box (1), and the heating resistor (8) is electrically connected with the heating switch (3).

2. The soldering apparatus for the splicing-free rotary target according to claim 1, wherein a thermocouple (13) is arranged on the heating chamber (14), and the thermocouple (13) is electrically connected with the temperature controller (2).

3. The soldering device for the splicing-free rotary target material according to claim 1, wherein the inner wall of the electrothermal constant-temperature air-blowing drying box (1) is provided with an insulating layer (5).

4. The brazing device for the splicing-free rotary target material according to claim 1, wherein the positioning base (9) is provided with fixing grooves for fixing the target tube (10) and the backing tube (12), and the sizes of the fixing grooves are respectively matched and fixed with the outer diameters of the target tube (10) and the backing tube (12) at intervals.

5. The brazing device for the splicing-free rotary target material according to claim 1, wherein the brazing disc (11) is provided with a middle hole matched with the target tube (10) and the back tube (12), and the size of the middle hole is respectively matched and fixed with the outer diameter size of the target tube (10) and the outer diameter size of the back tube (12) at intervals.