CN211645369U - Local cooling mechanism for target material thermal spraying - Google Patents
Local cooling mechanism for target material thermal spraying Download PDFInfo
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- CN211645369U CN211645369U CN201922413519.3U CN201922413519U CN211645369U CN 211645369 U CN211645369 U CN 211645369U CN 201922413519 U CN201922413519 U CN 201922413519U CN 211645369 U CN211645369 U CN 211645369U
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Abstract
The utility model relates to a local cooling mechanism for target material thermal spraying, which comprises a spray gun and a cooling device, wherein the spray gun and the cooling device are respectively positioned at two sides of a target material; the cooling mechanism comprises a spacing adjuster, spacing adjusting holes, a pipeline support frame and an inert gas pipe; the pipeline supporting frame is fixedly arranged on the ground, an interval adjuster is arranged on the pipeline supporting frame, and a plurality of interval adjusting holes which are uniformly distributed are formed in the interval adjuster along the length direction of the interval adjuster; the inert gas tube is inserted into the corresponding distance adjusting hole, a front end gas outlet of the inert gas tube is exposed out of the hole, and the front end gas outlet of the inert gas tube is arranged towards the target material; the gas inlet of the inert gas pipe is connected with an inert gas source through a pipeline; the utility model discloses simple structure, cooling are even, but automatically regulated cooling gas flow, very big improvement production efficiency.
Description
Technical Field
The utility model relates to a local cooling mechanism is used in target hot spraying belongs to target hot spraying technical field.
Background
The coating target is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions. The target material has a thermal spraying process in the production process, and in the thermal spraying operation of the rotating target material, the target material is easy to crack or locally overheat due to the high temperature of plasma flame, so the target material needs to be cooled in the thermal spraying process. At present, the cooling mode commonly used mainly has natural cooling and cools off two kinds through cooling device, wherein natural cooling inefficiency, and current cooling device sets up the cooling water route on target rotary tooling usually, lets in the coolant liquid in the cooling water route to realize the cooling of target, in cooling operation, current cooling device is difficult to realize the even of temperature, leads to the yield to descend, and current device still can lead to high-speed target bonding strength low simultaneously, leads to manufacturing cost higher.
Disclosure of Invention
An object of the utility model is to overcome above-mentioned not enough, provide a local cooling body is used in target hot spraying, the device simple structure, the cooling is even, but automatically regulated cooling gas flow precools the target, in time reduces target surface temperature, eliminates unnecessary heat, reduces the probability of fracture, avoids some influences that overheated leading to simultaneously.
The purpose of the utility model is realized like this:
a local cooling mechanism for target material thermal spraying comprises a spray gun and a cooling device, wherein the spray gun and the cooling device are respectively positioned on two sides of a target material; the cooling mechanism comprises a spacing adjuster, spacing adjusting holes, a pipeline support frame and an inert gas pipe; the pipeline supporting frame is fixedly arranged on the ground, an interval adjuster is arranged on the pipeline supporting frame, and a plurality of interval adjusting holes which are uniformly distributed are formed in the interval adjuster along the length direction of the interval adjuster; the inert gas tube is inserted into the corresponding distance adjusting hole, a front end gas outlet of the inert gas tube is exposed out of the hole, and the front end gas outlet of the inert gas tube is arranged towards the target material; and the air inlet of the inert gas pipe is connected with an inert gas source through a pipeline.
The utility model relates to a local cooling body is used in target hot spraying, be provided with the fast connector of inserting on the interval regulator, the fast connector of inserting sets up in corresponding interval control hole department, and the inert gas pipe is pegged graft in corresponding fast connector of inserting.
The utility model relates to a local cooling body is used in target hot spraying, the inert gas pipe is the accurate pipe of stainless steel, the inert gas pipe is provided with two sets ofly.
The utility model relates to a local cooling mechanism for hot spraying of target materials, a gas flow controller is arranged on a pipeline between an air inlet of an inert gas pipe and an inert gas source; and a temperature sensor is arranged at the front end of the pipeline support frame close to the target.
The utility model relates to a local cooling body is used in target hot spraying, above-mentioned gas flow controller and temperature sensor are connected with the PLC controller through communication cable respectively.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a set up external cooling mechanism, use the inert gas pipe to carry out local cooling to the pairing rotation target, through setting up the interval regulator that contains a plurality of interval regulation holes, adopt the mode of adjusting the distance between two way cooling gas pipe pitches and the pitch, come to cool off the sedimentary coating of target, make it realize the cooling function to different products, set up gas flow controller and temperature sensor and be connected with external PLC controller simultaneously, through the automatic regulation gas flow size after contrasting with the settlement temperature, realize automatic extension; this device combines together through outside precooling mechanism and inside cooling device, in time reduces target surface temperature, eliminates unnecessary heat, reduces the probability of fracture, avoids some influences that overheated leading to simultaneously, and simple structure, cooling are even, have greatly improved production efficiency, have reduced the defective index.
Drawings
Fig. 1 is a side view of the local cooling mechanism for hot spraying of the target of the present invention.
Fig. 2 is a top view of the local cooling mechanism for thermal spraying of the target of the present invention.
Fig. 3 is a schematic structural view of the spacing adjuster of the local cooling mechanism for hot spraying of the target material.
Fig. 4 is a schematic diagram of the action trajectory of the cooling gas of the local cooling mechanism for hot spraying the target material.
Wherein:
the device comprises a target 101, a spray gun 1, a spray gun mounting frame 2, a spacing regulator 3, spacing regulating holes 4, a pipeline supporting frame 5, a quick plug connector 6, an inert gas pipe 7, a gas flow controller 8 and a temperature sensor 9.
Detailed Description
Referring to fig. 1 to 4, the local cooling mechanism for target thermal spraying according to the present invention includes a spray gun 1 and a cooling device, wherein the spray gun 1 and the cooling device are respectively located at two sides of a target 101, that is, the target 101 is located between the spray gun 1 and the cooling mechanism; a spray gun mounting rack 2 is fixedly mounted on the ground, a spray gun 1 is arranged on the spray gun mounting rack 2, and the spray gun 1 faces the target 101; the cooling device comprises a spacing adjuster 3, spacing adjusting holes 4, a pipeline support frame 5 and an inert gas pipe 7; the pipeline supporting frame 5 is fixedly arranged on the ground, an interval adjuster 3 is arranged on the pipeline supporting frame 5, and a plurality of interval adjusting holes 4 which are uniformly distributed are formed in the interval adjuster 3 along the length direction of the interval adjuster; the inert gas tube 7 is inserted into the corresponding distance adjusting hole 4, and the front end gas outlet of the inert gas tube 7 is exposed outside the hole and is arranged towards the target 101; the air inlet of the inert gas pipe 7 is connected with an inert gas source through a pipeline;
furthermore, the space adjuster 3 is provided with a quick-plug connector 6, the quick-plug connector 6 is arranged at the corresponding space adjusting hole 4, the inert gas pipe 7 is plugged into the corresponding quick-plug connector 6, and the quick installation and disassembly of the inert gas pipe 7 are realized through the quick-plug connector 5;
preferably, two groups of inert gas pipes 7 are arranged, and the inert gas pipes 7 are stainless steel precision pipes; the two groups of inert gas pipes 7 cool the coating deposited on the target by adjusting the positions of corresponding distance adjusting holes 4 on the distance adjuster 3 according to the spraying requirements of the targets 101 of different models;
further, a gas flow controller 8 is arranged on a pipeline between the gas inlet of the inert gas pipe 7 and the inert gas source, and the flow of the cooling gas is automatically adjusted through the gas flow controller 8; a temperature sensor 9 is arranged at the front end of the pipeline support frame 5 close to the target 101 and used for monitoring the local temperature of the target 101 in real time;
preferably, the gas flow controller 8 and the temperature sensor 9 are respectively connected with a PLC controller through communication cables, the temperature sensor 9 monitors the local temperature of the target 101 in real time, converts the monitored temperature into a signal and transmits the signal to the PLC controller, the PLC controller compares the fed back temperature with a set temperature, if the local temperature is higher than the set temperature, the PLC controller transmits the signal to the gas flow controller 8, otherwise, the flow rate is increased, and if the local temperature is not higher than the set temperature, the flow rate is decreased;
the working principle of the mechanism is as follows:
after the model of the target material to be sprayed is determined, two groups of inert gas pipes 7 are inserted on the spacing regulator 3 at intervals according to the spraying track, the target material 101 rotates and moves forwards through a rotary tool, the spray gun 1 starts thermal spraying, meanwhile, the cooling device is started, inert cooling gas is sprayed and cooled to the target material 101 from the two groups of inert gas pipes 7, the temperature sensor 9 monitors the local temperature of the target material 101 in real time, the monitored temperature is converted into a signal and is transmitted to the PLC controller, the PLC controller compares the fed-back temperature with the set temperature, if the local temperature is higher than the set temperature, the PLC controller transmits the signal to the gas flow controller 8, the flow is increased, otherwise, the flow is decreased.
In addition: it should be noted that the above-mentioned embodiment is only a preferred embodiment of the present patent, and any modification or improvement made by those skilled in the art based on the above-mentioned conception is within the protection scope of the present patent.
Claims (5)
1. The utility model provides a local cooling body is used in target thermal spraying, contains spray gun (1) and cooling device, and above-mentioned spray gun (1) and cooling device are located the both sides of target (101) respectively, its characterized in that: a spray gun mounting rack (2) is fixedly mounted on the ground, a spray gun (1) is arranged on the spray gun mounting rack (2), and the spray gun (1) faces towards a target material (101); the cooling device comprises a spacing adjuster (3), spacing adjusting holes (4), a pipeline support frame (5) and an inert gas pipe (7); the pipeline supporting frame (5) is fixedly arranged on the ground, an interval regulator (3) is arranged on the pipeline supporting frame (5), and a plurality of interval regulating holes (4) which are uniformly distributed are formed in the interval regulator (3) along the length direction of the interval regulator; the inert gas pipe (7) is inserted into the corresponding distance adjusting hole (4), the front end gas outlet of the inert gas pipe (7) is exposed out of the hole, and the front end gas outlet of the inert gas pipe is arranged towards the target (101); and the air inlet of the inert gas pipe (7) is connected with an inert gas source through a pipeline.
2. The local cooling mechanism for target thermal spraying according to claim 1, characterized in that: the fast inserting type gas pipe is characterized in that a fast inserting connector (6) is arranged on the interval regulator (3), the fast inserting connector (6) is arranged at the corresponding interval regulating hole (4), and an inert gas pipe (7) is inserted into the corresponding fast inserting connector (6).
3. The local cooling mechanism for target thermal spraying according to claim 2, characterized in that: the inert gas pipes (7) are stainless steel precision pipes, and two groups of inert gas pipes (7) are arranged.
4. The local cooling mechanism for target thermal spraying according to claim 1, characterized in that: a gas flow controller (8) is arranged on a pipeline between the gas inlet of the inert gas pipe (7) and the inert gas source; and a temperature sensor (9) is arranged at the front end of the pipeline support frame (5) close to the target (101).
5. The local cooling mechanism for target thermal spraying according to claim 4, characterized in that: the gas flow controller (8) and the temperature sensor (9) are respectively connected with the PLC through communication cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922413519.3U CN211645369U (en) | 2019-12-27 | 2019-12-27 | Local cooling mechanism for target material thermal spraying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922413519.3U CN211645369U (en) | 2019-12-27 | 2019-12-27 | Local cooling mechanism for target material thermal spraying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211645369U true CN211645369U (en) | 2020-10-09 |
Family
ID=72700270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922413519.3U Active CN211645369U (en) | 2019-12-27 | 2019-12-27 | Local cooling mechanism for target material thermal spraying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211645369U (en) |
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2019
- 2019-12-27 CN CN201922413519.3U patent/CN211645369U/en active Active
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