CN211088235U

CN211088235U - Continuous feeding device for wafer processing

Info

Publication number: CN211088235U
Application number: CN201921864868.0U
Authority: CN
Inventors: 王岳峰
Original assignee: Shenzhen Yingfushi Technology Co ltd
Current assignee: Shenzhen Yingfushi Technology Co ltd
Priority date: 2019-11-01
Filing date: 2019-11-01
Publication date: 2020-07-24
Anticipated expiration: 2029-11-01

Abstract

The utility model relates to the field of semiconductor processing, in particular to a continuous feeding device for wafer processing, which comprises a substrate, wherein a stepping motor is arranged in the middle of the substrate, the output end of the stepping motor is provided with a turntable, a plurality of groups of installation positions are uniformly arranged on the surface of the turntable, material boxes are uniformly clamped in the installation positions, a lifting plate is driven by a driving assembly at the lower right side of the substrate, a clamping block is connected to the upper side of the middle part of the lifting plate through a supporting rod, T-shaped chutes are respectively arranged at the front and the rear parts of the clamping block, T-shaped sliders matched with the T-shaped chutes are respectively arranged in the T-shaped chutes, the upper parts of the T-shaped sliders, which are far away from one ends of; the utility model discloses a two sets of arcs are to the clamping effect of magazine, improve the stability of magazine and joint piece, reduce to appear taking out brilliant in-process magazine and break away from joint spare, avoid appearing the interrupt of material loading, and then guarantee the continuity and the success rate of follow-up material loading.

Description

Continuous feeding device for wafer processing

Technical Field

The utility model relates to a semiconductor processing field, concretely relates to wafer processing is with continuous loading attachment.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions. In order to improve the lithography efficiency of the lithography machine, a loading device is generally used to load the wafer. The wafers are typically loaded into a special magazine having a plurality of wafer receiving locations therein, each wafer receiving location being a slot. The slots are sequentially arranged along the length direction of the material box, and a wafer can be inserted into each slot, so that the wafers are layered in the material box.

At present, a unloader on wafer and use its lithography machine of patent number "CN 201811097650.7", its structure includes the frame, be equipped with carousel and first actuating mechanism in the frame, be equipped with the magazine installation position on the carousel, the carousel is used for driving the magazine on the magazine installation position to move in proper order to the position that can supply the drive of first actuating mechanism when rotating, first actuating mechanism is used for driving the magazine motion to make the wafer in the magazine be located the material loading station in proper order when the material loading, or make the wafer in the magazine accomodate the position and be located the unloading station in proper order when the unloading. The utility model discloses a can reduce the change frequency of magazine, improve work efficiency, realize automated production.

But the utility model has the following defects and shortcomings in the application process:

when first drive magazine rose, the connected mode stability of first drive end and magazine was relatively poor to when the manipulator took out the wafer from the magazine, made easily, the magazine breaks away from first drive end, and then caused follow-up material loading failure.

SUMMERY OF THE UTILITY MODEL

Solves the technical problem

To the above-mentioned shortcoming that prior art exists, the utility model provides a wafer processing is with continuous loading attachment, when first drive magazine rises, first drive end is relatively poor with the connected mode stability of magazine that can solve prior art effectively to when the manipulator takes out the wafer from the magazine, make easily, the magazine breaks away from first drive end, and then causes the problem of follow-up material loading failure.

Technical scheme

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes:

the utility model provides a wafer processing is with continuous loading attachment, includes the base plate, and the base plate middle part is provided with step motor, and the step motor output is provided with the carousel, and a plurality of groups installation position have evenly been seted up to the carousel quotation, and equal joint has the magazine in the installation position, and there is the lifter plate base plate right side downside passes through the drive assembly drive, lifter plate middle part upside is connected with the joint piece through the bracing piece, and T type spout has all been seted up to joint piece front and back portion, all is provided with complex T type slider with it in the T type spout, and the upper portion that joint piece one end was kept away from to T type slider all is provided with the arc, and the lower part that joint piece one side was kept away from to T type slider all is provided with first wedge piece, and T type slider is close all to be connected with the spring between T type spout one.

Furthermore, the upper right side of the substrate is connected with a detection assembly through a connecting piece, the detection assembly comprises a sensor and a processing unit connected with the sensor through an electrical property, the detection assembly is used for detecting the loading condition of the wafer in the material box, and the wafer which is located in the loading station in the material box and is detected during loading is taken away to generate a driving signal to be transmitted to the P L C.

Furthermore, the magazine bottom side is provided with the fixture block that matches with the installation position, and the fixture block bottom side is seted up with joint piece joint complex draw-in groove, and the bottom side all is provided with the arc backup pad around the magazine, through the cooperation of draw-in groove and joint piece, realizes the joint of joint piece and fixture block, improves the stability that the joint is connected with the magazine soon, through the cooperation of arc backup pad and fixture block, after the sunken card of fixture block goes into the installation position, the arc backup pad props in the both sides of installation position to make the magazine lay on the installation position.

Furthermore, the driving assembly comprises a servo motor and a screw rod arranged at the output end of the servo motor, a screw rod auxiliary member matched with the screw rod is arranged in the middle of the screw rod, the lifting plate is fixedly connected to the left side of the screw rod auxiliary member through screws, guide rods are arranged on the front side and the rear side of the right lower side of the base plate, a supporting plate is arranged on the bottom side of each guide rod, guide holes in clearance fit with the guide rods are formed in the front of and the rear side of the screw rod auxiliary member, the servo motor drives the screw rod to rotate, and the guide rods can guide the screw rod auxiliary member to move, so that the.

Furthermore, all be provided with the auxiliary rod around between base plate right side and the backup pad, all set up around the lifter plate left side with auxiliary rod intermittent type complex through-hole, improve the stability that the lifter plate reciprocated.

Advantageous effects

Adopt the utility model provides a technical scheme compares with known public technique, has following beneficial effect:

the utility model discloses a two sets of arcs are to the clamping effect of magazine, improve the stability of magazine and joint piece, reduce to appear taking out brilliant in-process magazine and break away from joint spare, avoid appearing the interrupt of material loading, and then guarantee the continuity and the success rate of follow-up material loading.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.

Fig. 1 is a schematic view of a depression structure of the present invention;

fig. 2 is a schematic view of the front view structure of the present invention;

FIG. 3 is a schematic view of the turntable structure of the present invention;

fig. 4 is a schematic view of the bottom view structure of the magazine of the present invention;

FIG. 5 is a schematic structural view of the clamp block and the second wedge member of the present invention;

FIG. 6 is a cross-sectional view of the clamp block and the second wedge member of the present invention;

the reference numerals in the drawings denote: 1-a substrate; 2-a step motor; 3, rotating the disc; 4-mounting position; 5-a material box; 6-lifting plate; 7-a clamping block; 8-T type chute; 9-T type slide block; 10-an arc-shaped plate; 11-a first wedge-shaped piece; 12-a spring; 13-a second wedge-shaped piece; 14-a detection assembly; 15-a fixture block; 16-an arc-shaped support plate; 17-a servo motor; 18-a screw rod; 19-screw pair; 20-a guide rod; 21-a support plate; 22-auxiliary rod.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The present invention will be further described with reference to the following examples.

Examples

The continuous feeding device for wafer processing in this embodiment refers to fig. 1 to 6: comprises a base plate 1, a stepping motor 2 is arranged in the middle of the base plate 1, a rotary table 3 is arranged at the output end of the stepping motor 2, a plurality of groups of installation positions 4 are uniformly arranged on the surface of the rotary table 3, material boxes 5 are clamped in the installation positions 4, a lifting plate 6 is driven by a driving component at the lower right side of the base plate 1, a clamping block 7 is connected with the upper side of the middle part of the lifting plate 6 through a support rod, T-shaped chutes 8 are arranged at the front and the rear parts of the clamping block 7, T-shaped sliding blocks 9 matched with the T-shaped chutes 8 are arranged in the T-shaped chutes 8, and arc plates 10 are, and T type slider 9 all is provided with first wedge piece 11 far away from the lower part of joint piece 7 one side, and T type slider 9 is close and all is connected with spring 12 between 8 one end of T type spout and the 8 inner walls of T type spout, all is provided with around 1 upper right portion of base plate with first wedge piece 11 complex second wedge piece 13.

The upper right side of base plate 1 is connected with detection component 14 through the connecting piece, and detection component includes the sensor and the processing unit who is connected through electrical property and sensor, is used for detecting the material loading condition of wafer in magazine 5 through detection component 14, and the wafer that is located the material loading station in detecting magazine 5 when will feeding is taken away and is generated drive signal transmission to P L C, and then P L C control drive assembly.

5 bottom sides of magazine are provided with the fixture block 15 that matches with installation position 4, fixture block 15 bottom sides are seted up with 7 joint complex draw-in grooves of joint piece, the bottom side all is provided with arc backup pad 16 around magazine 5, cooperation through draw-in groove and joint piece 7, realize the joint of joint piece 7 and fixture block 15, and improve the stability that the joint is connected with the magazine soon, cooperation through arc backup pad 16 and fixture block 15, go into installation position 4 back when the sunken card of fixture block 15, arc backup pad props 16 supports the upside left and right parts at installation position 4 this moment, thereby realize that magazine 5 lays on installation position 4.

The driving assembly comprises a servo motor 17 and a screw rod 18 arranged at the output end of the servo motor 17, a screw rod auxiliary 19 matched with the screw rod 18 is arranged in the middle of the screw rod 18, the lifting plate 6 is fixedly connected to the left side of the screw rod auxiliary 19 through a screw, guide rods 20 are arranged on the front side and the rear side of the lower right side of the base plate 1, a supporting plate 21 is arranged on the bottom side of each guide rod 20, guide holes in clearance fit with the guide rods 20 are formed in the front side and the rear side of the screw rod auxiliary 19, the servo motor 17 drives the screw rod 18 to rotate, and the guide rod 20 plays a role in guiding the movement of the screw rod auxiliary 19, so.

All be provided with auxiliary rod 22 around between base plate 1 right side and the backup pad 21, all seted up around 6 left sides of lifter plate with auxiliary rod 22 intermittent type complex through-hole, improve the stability that lifter plate 6 reciprocated.

The operation principle of the detection unit 14 and the driving unit can be referred to as "CN 201811097650.7", and detailed description thereof is omitted here.

When the device is used, a plurality of groups of material boxes 5 loaded with wafers are uniformly placed on the installation position 4, the device is started, the driving assembly drives the lifting plate 6 to move upwards and slowly to drive the clamping block 7 to ascend slowly, after the clamping block 7 is contacted with the bottom of the material box 5 and is connected with the material box 5 in a clamping mode, as the clamping block 7 continues to ascend, the first wedge piece 11 begins to separate from the second wedge piece 13, under the elastic contraction action of the spring 12, the T-shaped sliding block 9 is pulled to move towards the T-shaped sliding groove 8, so that the two groups of arc-shaped plates 10 shrink mutually, the material box 5 is clamped between the two groups of arc-shaped plates 10, the connection stability of the clamping piece 7 and the material box 5 is improved, the phenomenon that the material box 5 separates from the clamping piece 7 in the crystal taking-out process is reduced, the interruption of material feeding is avoided, the continuity and the success rate of subsequent material feeding are ensured, after the detection assembly 14 detects the wafers in the material box 5, the driving signals generated by the detection assembly 14 are transmitted to the P L, the P L C controls the driving assembly to drive the lifting plate 6 to descend to drive the material box 5 to return to the mounting position, and descend along with the first group of the first wedge piece 6, so that the first wedge piece 11 and the first wedge piece 7 move towards the lower sliding chute 12, so as the lifting slide mechanism, the first wedge piece, the clamping block 11, the clamping block.

The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. The utility model provides a wafer processing is with continuous loading attachment, includes base plate (1), and base plate (1) middle part is provided with step motor (2), and step motor (2) output is provided with carousel (3), and a plurality of groups installation position (4) have evenly been seted up to carousel (3) quotation, and equal joint has magazine (5) in installation position (4), and base plate (1) right downside has lifter plate (6), its characterized in that through the drive assembly drive: lifting plate (6) middle part upside is connected with joint piece (7) through the bracing piece, T type spout (8) have all been seted up to joint piece (7) front and back portion, all be provided with complex T type slider (9) with it in T type spout (8), the upper portion that joint piece (7) one end was kept away from in T type slider (9) all is provided with arc (10), and the lower part of keeping away from joint piece (7) one side in T type slider (9) all is provided with first wedge piece (11), all is connected with spring (12) between T type spout (8) one end and T type spout (8) inner wall in T type slider (9) being close, all be provided with around base plate (1) upper right portion with first wedge piece (11) complex second wedge piece (13).

2. The continuous loading device for wafer processing as claimed in claim 1, wherein the upper right side of the substrate (1) is connected with a detection assembly (14) through a connector, the detection assembly comprises a sensor and a processing unit electrically connected with the sensor.

3. The continuous feeding device for wafer processing as claimed in claim 1, wherein a clamping block (15) matched with the mounting position (4) is arranged at the bottom side of the magazine (5), a clamping groove matched with the clamping block (7) in a clamping manner is formed at the bottom side of the clamping block (15), and arc-shaped supporting plates (16) are arranged at the front bottom side and the rear bottom side of the magazine (5).

4. The continuous feeding device for wafer processing as claimed in claim 1, wherein the driving assembly comprises a servo motor (17) and a lead screw (18) disposed at an output end of the servo motor (17), a lead screw sub-assembly (19) engaged with the lead screw (18) is disposed in the middle of the lead screw (18), the lifting plate (6) is fixedly connected to the left side of the lead screw sub-assembly (19) through screws, guide rods (20) are disposed at the front and back of the right lower side of the substrate (1), a support plate (21) is disposed at the bottom side of the guide rods (20), and guide holes in clearance fit with the guide rods (20) are disposed at the front and back of the lead screw sub-assembly (19).

5. The continuous feeding device for wafer processing as claimed in claim 4, wherein auxiliary rods (22) are arranged between the right side of the base plate (1) and the supporting plate (21) at the front and back sides, and through holes intermittently matched with the auxiliary rods (22) are arranged at the front and back sides of the left side of the lifting plate (6).