CN211063516U - XY-axis linear motor platform for high-precision attachment - Google Patents

XY-axis linear motor platform for high-precision attachment Download PDF

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Publication number
CN211063516U
CN211063516U CN201922269376.3U CN201922269376U CN211063516U CN 211063516 U CN211063516 U CN 211063516U CN 201922269376 U CN201922269376 U CN 201922269376U CN 211063516 U CN211063516 U CN 211063516U
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China
Prior art keywords
axis
linear motor
sliding seat
linear
guide rail
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Active
Application number
CN201922269376.3U
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Chinese (zh)
Inventor
甘景福
宋坤达
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Shenzhen Shenghexin Automation Equipment Co ltd
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Shenzhen Shenghexin Automation Equipment Co ltd
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Abstract

The utility model relates to an XY axis linear motor platform for high precision fitting, belonging to the electromechanical device field, comprising a marble base, a linear guide rail, an X axis sliding seat and a linear motor Y axis which are arranged on the marble base; the two linear guide rails are arranged on the upper surface of the marble base in parallel from left to right, guide rail sliding blocks are arranged at corresponding positions of the bottom of the X-axis sliding seat, the X-axis sliding seat slides on the linear guide rails through the guide rail sliding blocks, and a linear motor X-axis is formed along the sliding direction; the utility model discloses linear electric motor based on multiaxis motion uses, high accuracy marble and high accuracy machined part and high accuracy indium steel chi for can realize the application of high accuracy.

Description

XY-axis linear motor platform for high-precision attachment
Technical Field
The utility model relates to a the utility model belongs to the electromechanical device field especially relates to a high accuracy is XY axle linear electric motor platform for laminating.
Background
The linear motor is a rotary servo motor which is unfolded simply by unfolding a closed magnetic field into an open magnetic field and directly converting electric energy into mechanical energy for linear motion without any transmission device of an intermediate conversion mechanism. A rotary induction motor is conceived to be cut open in a radial direction and to expand the circumferences of a stator and a rotor into a straight line, which results in the simplest iron-cored linear induction motor.
In the field of the existing linear motor, an XY platform for high-precision laminating application is almost blank, is limited by processing capacity, is difficult to achieve the precision below 1 micron, and the application requires that the straightness and the operation flatness are within 2 microns. Most of these applications are platforms that are purchased directly from original equipment, but are very expensive.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problem of insufficient grinding in the prior art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an XY-axis linear motor platform for high-precision attachment comprises a marble base, and a linear guide rail, an X-axis sliding seat and a linear motor Y-axis which are arranged on the marble base;
the two linear guide rails are arranged on the upper surface of the marble base in parallel from left to right, guide rail sliding blocks are arranged at corresponding positions of the bottom of the X-axis sliding seat, the X-axis sliding seat slides on the linear guide rails through the guide rail sliding blocks, and a linear motor X-axis is formed along the sliding direction;
the Y axis of the linear motor is arranged on the X axis sliding seat, and an XY platform is formed on the X axis of the linear motor;
the marble machine further comprises a linear motor stator and a linear motor rotor, wherein the linear motor stator is arranged between the two linear guide rails on the marble base, and the linear motor rotor is arranged at the corresponding position below the X-axis sliding seat.
The marble base is fixedly provided with a grating ruler, the side of the grating ruler is attached to the inner side surface of the marble base and is parallel to the linear guide rail, a reading head of the grating ruler is fixed below the X-axis sliding seat, and the reading head of the grating ruler faces the grating ruler.
And an encoder is arranged below the X-axis sliding seat and is arranged opposite to the grating ruler.
The limiting mechanism comprises a sensor support arranged on the side face of the marble base and a photoelectric limiting device arranged on the sensor support, and is used for limiting and controlling the X-axis sliding seat guide rail sliding block.
End plates are further arranged on the outer sides of the linear guide rails and fixedly mounted at two ends of the marble base; and a cover plate is also arranged on the two end plates.
The grating ruler is made of indium steel.
X axle base is the marble material, has guaranteed high plane degree.
The utility model discloses the high accuracy is guaranteed to the coefficient of expansion that is minimum, including distinctive assembly production technology, satisfies the high accuracy laminating and uses.
The utility model discloses a marble base, its vibration absorbing performance is far superior to the metal machined part, guarantees the stationarity of platform when high-speed motion and lower shock, and easy to assemble, easy to detach, easy operation, the flexibility is big, and the reliability is high, and the commonality is strong. The utility model discloses linear electric motor based on multiaxis motion uses, high accuracy marble and high accuracy machined part and high accuracy indium steel chi for can realize the application of high accuracy.
Drawings
FIG. 1 is a schematic structural diagram of an XY-axis linear motor platform for high-precision attachment;
fig. 2 is an assembly diagram of the present invention.
In the figure: the device comprises a marble base, 2 linear guide rails, 3 guide rail sliding blocks, 4 linear motor stators, 5 linear motor rotors, 6 encoders, 7 grating rulers, 8 end plates, 9 cover plates, 10 sensor supports, 11 photoelectric limiting devices, 12X-axis sliding seats and 13 linear motor Y-axes.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1, an XY axis linear motor platform for high precision bonding comprises a marble base 1, and a linear guide rail 2, an X axis sliding seat 12 and a linear motor Y axis 13 which are arranged on the marble base 1;
the two linear guide rails 2 are arranged on the upper surface of the marble base 1 in parallel from left to right, a guide rail sliding block 3 is arranged at a corresponding position at the bottom of the X-axis sliding seat 12, the X-axis sliding seat 12 slides on the linear guide rails 2 through the guide rail sliding block 3, and a linear motor X axis is formed along the sliding direction;
the linear motor Y shaft 13 is arranged on the X shaft sliding seat 12, and an XY platform is formed on the linear motor X shaft;
the marble base is characterized by further comprising a linear motor stator 4 and a linear motor rotor 5, wherein the linear motor stator 4 is arranged between the two linear guide rails 2 on the marble base 1, and the linear motor rotor 5 is arranged at a corresponding position below the X-axis sliding seat 12.
Fixed mounting has grating chi 7 on the marble base 1, grating chi 7 side paste in marble base 1 medial surface and with linear guide 2 parallel arrangement, grating chi 7's reading head is fixed in X axle sliding seat 12 below, grating chi 7 reading head faces grating chi 7.
An encoder 6 is arranged below the X-axis sliding seat 12, and the encoder 6 and the grating ruler 7 are oppositely arranged.
The limiting mechanism comprises a sensor support 10 arranged on the side face of the marble base 1 and a photoelectric limiting device 11 arranged on the sensor support 10 and is used for limiting and controlling the X-axis sliding seat 12 guide rail sliding block.
The outer side of the linear guide rail 2 is also provided with end plates 8 which are fixedly arranged at two ends of the marble base 1; a cover plate 9 is also mounted on the two end plates 8.
The grating ruler 7 is made of indium steel.
The X-axis base is made of marble, so that extremely high flatness and extremely low expansion coefficient are guaranteed, high precision is guaranteed, and the application of high-precision laminating is met due to the special assembly production process.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. An XY-axis linear motor platform for high-precision adhesion is characterized by comprising a marble base, and a linear guide rail, an X-axis sliding seat and a linear motor Y-axis which are arranged on the marble base;
the two linear guide rails are arranged on the upper surface of the marble base in parallel from left to right, guide rail sliding blocks are arranged at corresponding positions of the bottom of the X-axis sliding seat, the X-axis sliding seat slides on the linear guide rails through the guide rail sliding blocks, and a linear motor X-axis is formed along the sliding direction;
the Y axis of the linear motor is arranged on the X axis sliding seat, and an XY platform is formed on the X axis of the linear motor;
the marble machine further comprises a linear motor stator and a linear motor rotor, wherein the linear motor stator is arranged between the two linear guide rails on the marble base, and the linear motor rotor is arranged at the corresponding position below the X-axis sliding seat.
2. The XY-axis linear motor platform for high-precision fitting according to claim 1, wherein a grating ruler is fixedly mounted on the marble base, the grating ruler is laterally attached to the inner side surface of the marble base and is arranged in parallel with the linear guide rail, a reading head of the grating ruler is fixed below the X-axis sliding seat, and the reading head of the grating ruler faces the grating ruler.
3. An XY-axis linear motor platform for high-precision fitting according to claim 2, wherein an encoder is arranged below the X-axis sliding seat, and the encoder is arranged opposite to the grating ruler.
4. An XY-axis linear motor platform for high-precision fitting according to claim 3, further comprising a limiting mechanism, wherein the limiting mechanism comprises a sensor bracket arranged on the side surface of the marble base and a photoelectric limiting device arranged on the sensor bracket, and is used for limiting and controlling the X-axis sliding seat guide rail slide block.
5. The XY-axis linear motor platform for high-precision fitting according to claim 4, wherein end plates are further arranged outside the linear guide rail and fixedly installed at two ends of the marble base; and a cover plate is also arranged on the two end plates.
6. The XY-axis linear motor platform for high-precision fitting according to claim 5, wherein the grating ruler is made of indium steel.
CN201922269376.3U 2019-12-17 2019-12-17 XY-axis linear motor platform for high-precision attachment Active CN211063516U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922269376.3U CN211063516U (en) 2019-12-17 2019-12-17 XY-axis linear motor platform for high-precision attachment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922269376.3U CN211063516U (en) 2019-12-17 2019-12-17 XY-axis linear motor platform for high-precision attachment

Publications (1)

Publication Number Publication Date
CN211063516U true CN211063516U (en) 2020-07-21

Family

ID=71593892

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922269376.3U Active CN211063516U (en) 2019-12-17 2019-12-17 XY-axis linear motor platform for high-precision attachment

Country Status (1)

Country Link
CN (1) CN211063516U (en)

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