CN210974862U

CN210974862U - Fast-cooling workpiece disc device for film plating machine

Info

Publication number: CN210974862U
Application number: CN201921875473.0U
Authority: CN
Inventors: 吴伟; 周立庆; 宁提; 张坚
Original assignee: Chengdu Rankuum Machinery Co ltd
Current assignee: Chengdu Rankuum Machinery Co ltd
Priority date: 2019-10-31
Filing date: 2019-10-31
Publication date: 2020-07-10
Anticipated expiration: 2029-10-31

Abstract

The utility model discloses a but quick refrigerated work piece dish device for coating machine relates to coating machine technical field, the utility model discloses a revolving axle on the coating machine, revolving axle bottom are connected with the work piece dish, have seted up the coolant liquid passageway in the revolving axle, have seted up the circulative cooling passageway with coolant liquid passageway intercommunication in the work piece dish, the utility model has the advantages of simple structure, can be directly to the work piece dish rapid cooling, in order to satisfy special coating process demand.

Description

Fast-cooling workpiece disc device for film plating machine

Technical Field

The utility model relates to a coating machine technical field, more specifically relate to a but quick refrigerated work piece dish device for coating machine.

Background

The vacuum coating machine mainly refers to a coating machine needing to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, P L D laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.

At present, when a workpiece disc is clamped and fixed by a coating machine, the temperature control of a coating process is mostly realized through a cooling box body or a heating box body, but the heat is transmitted slowly under a high vacuum environment, so that the effect is not obvious, the reaction is delayed, and the workpiece disc cannot be cooled quickly and effectively to meet the requirement of a special coating process.

Therefore, it is a realistic meaning for those skilled in the art how to solve the above technical problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: in order to solve the technical problem that the temperature of a workpiece disc can not be rapidly cooled in the existing film plating machine, the utility model provides a workpiece disc device capable of being rapidly cooled for a film plating machine.

The utility model discloses a realize above-mentioned purpose and specifically adopt following technical scheme:

a workpiece disc device capable of being rapidly cooled for a film coating machine comprises a rotating shaft on the film coating machine, wherein the bottom of the rotating shaft is connected with a workpiece disc, a cooling liquid channel is formed in the rotating shaft, and a circulating cooling channel communicated with the cooling liquid channel is formed in the workpiece disc.

Furthermore, the top of the cooling liquid channel is connected with a liquid inlet pipe, and the tail end of the circulating cooling channel is connected with a liquid outlet pipe.

Furthermore, a temperature detection probe is arranged on the liquid outlet pipe.

Further, the circulating cooling channel is vortex-shaped.

Furthermore, L type plates which are symmetrical are arranged on two sides of the bottom of the workpiece tray, a spring pressing mechanism is arranged on a horizontal plate at the lower end of the L type plate, a plurality of workpieces are fixed on the bottom of the workpiece tray through the spring pressing mechanism, and the workpieces are located between the two L type plates.

Further, spring hold-down mechanism is including setting up the spring holder on L template lower extreme horizontal plate, has seted up the recess on the spring holder, is provided with compression spring in the recess, and the compression spring top is provided with cushion, and cushion laminates in the work piece bottom.

The utility model has the advantages as follows:

1. the utility model discloses directly set up circulative cooling passageway in the work piece dish, the coolant liquid is poured into to the rethread cooling liquid passageway, can directly cool off the work piece dish when making the coolant liquid flow through circulative cooling passageway, and the cooling effect is good, plays rapid cooling effect to satisfy the demand of special coating process.

2. The bottom of the workpiece disc can be fixed with a plurality of workpieces through the two L shaping plates and the spring pressing mechanism, after film coating processing is completed, after the bottommost workpiece is taken down, the buffer cushion block automatically abuts against the last workpiece under the action of the compression spring, then film coating processing is continuously performed on the workpiece, the traditional processing mode that the workpiece is updated after one workpiece is processed once is changed, the replacement frequency is reduced, and the processing efficiency is improved.

Drawings

FIG. 1 is a schematic structural view of a fast-cooling workpiece tray device for a coating machine according to the present invention;

fig. 2 is a schematic sectional view at a-a in fig. 1.

The reference numbers of the device are 1-a rotating shaft, 2-a workpiece disc, 3-a cooling liquid channel, 4-a circulating cooling channel, 5-a liquid inlet pipe, 6-a liquid outlet pipe, 7-a temperature detection probe, 8-L type plates, 9-a spring pressing mechanism, 9.1-a spring seat, 9.2-a compression spring and 9.3-a buffer cushion block.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.

The features and properties of the present invention are described in further detail below with reference to examples.

Example 1

As shown in fig. 1 to 2, the present embodiment provides a fast-cooling workpiece disk device for a film coating machine, which includes a rotating shaft 1 on the film coating machine, a workpiece disk 2 connected to the bottom of the rotating shaft 1, a cooling liquid channel 3 formed in the rotating shaft 1, and a circulating cooling channel 4 formed in the workpiece disk 2 and communicated with the cooling liquid channel 3.

Directly after setting up circulative cooling passageway 4 in work piece dish 2, the cooling liquid is poured into to rethread cooling liquid passageway 3, can directly cool off work piece dish 2 when making the cooling liquid flow through circulative cooling passageway 4, and the cooling effect is good, plays rapid cooling effect to satisfy the demand of special coating process.

As an optimal technical solution of the utility model:

the 3 tops of coolant liquid passageway are connected with feed liquor pipe 5, 4 end-to-end connection of circulative cooling passageway has drain pipe 6, be provided with temperature detect probe 7 on the drain pipe 6, add the coolant liquid in toward revolving axle 1 through feed liquor pipe 5, the coolant liquid flows through and discharges from drain pipe 6 behind the circulative cooling passageway 4 to constantly let in the coolant liquid, guarantee the cooling effect, can conveniently grasp the temperature variation condition through temperature detect probe 7 simultaneously, thereby the accurate control is cooled down to suitable temperature.

As an optimal technical solution of the utility model:

the circulating cooling channel 4 is vortex-shaped, so that the stroke and the cooling area of the cooling liquid on the workpiece disc 2 are increased, and the cooling effect is improved.

As an optimal technical solution of the utility model:

2 bottom both sides of workpiece tray are provided with L templates 8 of symmetry, be provided with spring hold-down mechanism 9 on the horizontal plate of L template 8 lower extreme, 2 bottom of workpiece tray is through the fixed a plurality of work pieces of spring hold-down mechanism 9, the work piece is located between two L templates 8, spring hold-down mechanism 9 is including setting up spring holder 9.1 on L template 8 lower extreme horizontal plate, set up flutedly on the spring holder 9.1, be provided with compression spring 9.2 in the recess, compression spring 9.2 top is provided with cushion 9.3, cushion 9.3 laminates in the work piece bottom.

After the film coating treatment of the workpiece at the bottommost layer is completed, the workpiece is directly taken out, then the buffer cushion block 9.3 is enabled to automatically abut against the workpiece under the action of the compression spring 9.2, the buffer cushion block 9.3 is used for avoiding damage to the workpiece, and then the film coating treatment of the workpiece is continuously carried out.

The above description is only for the preferred embodiment of the present invention, and the present invention is not limited thereto, the protection scope of the present invention is defined by the claims, and all structural changes equivalent to the contents of the description and drawings of the present invention should be included in the protection scope of the present invention.

Claims

1. A workpiece disc device capable of being cooled rapidly for a film plating machine comprises a rotating shaft (1) on the film plating machine, wherein the bottom of the rotating shaft (1) is connected with a workpiece disc (2), and is characterized in that a cooling liquid channel (3) is formed in the rotating shaft (1), and a circulating cooling channel (4) communicated with the cooling liquid channel (3) is formed in the workpiece disc (2).

2. The fast-cooling workpiece plate device for the coating machine according to claim 1, wherein the top of the cooling liquid channel (3) is connected with a liquid inlet pipe (5), and the tail end of the circulating cooling channel (4) is connected with a liquid outlet pipe (6).

3. The rapid-cooling workpiece tray device for coating machine according to claim 2, wherein the liquid outlet pipe (6) is provided with a temperature detecting probe (7).

4. The rapidly coolable work piece tray device for coating machine according to claim 1 or 2, wherein the circulating cooling channel (4) is spiral.

5. The fast-cooling workpiece disc device for the coating machine according to claim 1, characterized in that the workpiece disc (2) is provided with L shaped plates (8) symmetrically on both sides of the bottom, a spring pressing mechanism (9) is provided on the horizontal plate at the lower end of L shaped plates (8), the bottom of the workpiece disc (2) is used for fixing a plurality of workpieces through the spring pressing mechanism (9), and the workpieces are located between the two L shaped plates (8).

6. The workpiece disc device capable of being rapidly cooled for the coating machine according to claim 5, wherein the spring pressing mechanism (9) comprises a spring seat (9.1) arranged on a horizontal plate at the lower end of the L-shaped plate (8), a groove is formed in the spring seat (9.1), a compression spring (9.2) is arranged in the groove, a cushion block (9.3) is arranged at the top of the compression spring (9.2), and the cushion block (9.3) is attached to the bottom of the workpiece.