CN210866132U

CN210866132U - Sealing structure of heat treatment annealing furnace

Info

Publication number: CN210866132U
Application number: CN202020021078.2U
Authority: CN
Inventors: 颜志铨
Original assignee: Suzhou Changji Machinery Co ltd
Current assignee: Suzhou Changji Machinery Co ltd
Priority date: 2020-01-07
Filing date: 2020-01-07
Publication date: 2020-06-26
Anticipated expiration: 2030-01-07

Abstract

The utility model belongs to the technical field of annealing furnace is sealed, especially, be a heat treatment annealing furnace's seal structure, including annealing furnace main part, one side of annealing furnace main part is provided with the mounting bracket, and one side of mounting bracket is provided with first closing plate, the inside of mounting bracket one side is provided with the spout, one side of first closing plate is provided with the slider of mutually supporting with the spout, double-shaft motor is installed to the bottom of mounting bracket. The utility model discloses a set up first closing plate and cooperate with annealing stove main part, accomplish the one-level sealed, the second closing plate of setting is under reset spring's effect, the cardboard is laminated each other with the inner wall of annealing stove main part, accomplish the second grade sealed, sealed effect has been improved greatly, double-shaft motor drives first closing plate entry and rises and descend, the servo motor of setting drives the double-screw bolt and rotates, drive second closing plate side-to-side movement under the effect of double-screw bolt and second closing plate mutually supporting, operating procedure has been simplified greatly.

Description

Sealing structure of heat treatment annealing furnace

Technical Field

The utility model relates to an annealing furnace sealing technical field specifically is a heat treatment annealing furnace's seal structure.

Background

An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties, heat treatment is designed for different effects, the wafers can be heated to activate dopants, convert thin films into thin films or into wafer substrate interfaces, densely deposit thin films, change the state of grown thin films, repair implanted damage, move dopants or transfer dopants from one thin film to another or from a thin film into a wafer substrate, but today's annealing furnaces are hermetically sealed structures.

There are the following problems:

1. the annealing furnace cannot be sealed well, resulting in a rapid heat loss.

2. The manual operation of the annealing furnace is inconvenient, so that the application range of the annealing furnace is greatly reduced.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough to prior art, the utility model provides a heat treatment annealing stove's seal structure has solved and can not carry out good sealing to the annealing stove, leads to calorific loss very fast and the manual operation of inconvenient annealing stove, leads to the problem that its application range dwindles greatly.

In order to achieve the above object, the utility model provides a following technical scheme: a sealing structure of a heat treatment annealing furnace comprises an annealing furnace main body, wherein one side of the annealing furnace main body is provided with a mounting frame, and one side of the mounting rack is provided with a first sealing plate, the inside of one side of the mounting rack is provided with a chute, one side of the first sealing plate is provided with a sliding block which is matched with the sliding groove, the bottom of the mounting rack is provided with a double-shaft motor, and the output end of the double-shaft motor is fixed with a winding wheel, the middle position of one side of the first sealing plate is provided with a servo motor through a fixing frame, a second sealing plate is arranged in the first sealing plate, a stud penetrating into the second sealing plate is fixed at the output end of the servo motor, and the inside of second closing plate is provided with the cavity, and the inside bottom of cavity is fixed with reset spring, reset spring's end is fixed with the traveller, and one side of traveller is provided with the cardboard.

As a preferred technical scheme of the utility model, the figure of rolling wheel is two sets of, two sets of the outside knot winding of rolling wheel has the stay cord, and the end and the first closing plate fixed connection of stay cord.

As an optimal technical scheme of the utility model, the figure of cardboard is four groups, four groups the cross section of cardboard head end is semi-circular, and the even adhesion in the outside of cardboard has the felts.

As a preferred technical scheme of the utility model, the inside intermediate position department of second closing plate is provided with the through-hole, and the through-hole passes through the screw thread to be connected with the double-screw bolt rotation.

As an optimal technical scheme of the utility model, the both sides of cavity all are provided with the spacing groove, the both sides of traveller all are fixed with the stopper of mutually supporting with the spacing groove.

As an optimized technical proposal of the utility model, the bottom inside the annealing furnace main body is evenly rotated and connected with the roller.

As an optimized technical scheme of the utility model, the inside bottom of spout is provided with the shock pad, annealing stove main part closely laminates with first closing plate.

Compared with the prior art, the utility model provides a heat treatment annealing furnace's seal structure possesses following beneficial effect:

1. this kind of heat treatment annealing furnace's seal structure cooperatees with annealing furnace main part through setting up first closing plate, accomplishes the one-level and seals, and the second closing plate of setting is under reset spring's effect, and the cardboard is laminated each other with the inner wall of annealing furnace main part, accomplishes the second grade and seals, has improved sealed effect greatly.

2. This kind of heat treatment annealing furnace's seal structure, through setting up that the biax motor drives first closing plate entry and rises and descend, the servo motor of setting drives the double-screw bolt and rotates, drives second closing plate side-to-side movement under double-screw bolt and the effect of second closing plate mutually supporting, has simplified the operating procedure greatly, makes things convenient for workman's operation.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a partial structure of the present invention;

FIG. 3 is an enlarged view of the present invention A;

fig. 4 is a schematic view of the internal structure of the second sealing plate of the present invention.

In the figure: 1. an annealing furnace main body; 2. a mounting frame; 3. a chute; 4. a first sealing plate; 5. a second sealing plate; 6. a servo motor; 7. a double-shaft motor; 8. a through hole; 9. clamping a plate; 10. a slider; 11. a winding wheel; 12. pulling a rope; 13. a cavity; 14. a traveler; 15. a limiting groove; 16. a limiting block; 17. a return spring; 18. a stud.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, in this embodiment: a sealing structure of a heat treatment annealing furnace comprises an annealing furnace main body 1, one side of the annealing furnace main body 1 is provided with a mounting frame 2, one side of the mounting frame 2 is provided with a first sealing plate 4, the inside of one side of the mounting frame 2 is provided with a chute 3, one side of the first sealing plate 4 is provided with a slider 10 which is matched with the chute 3, the bottom of the mounting frame 2 is provided with a double-shaft motor 7, the output end of the double-shaft motor 7 is fixed with a winding wheel 11, the middle position of one side of the first sealing plate 4 is provided with a servo motor 6 through a fixing frame, the inside of the first sealing plate 4 is provided with a second sealing plate 5, the output end of the servo motor 6 is fixed with a stud 18 which penetrates through the inside of the second sealing plate 5, the inside of the second sealing plate 5 is provided with a cavity 13, the bottom end inside, and the catch plate 9 is provided on one side of the slide column 14.

The utility model discloses a set up first closing plate 4 and cooperate with annealing stove main part 1, accomplish the one-level sealed, the second closing plate 5 of setting is under reset spring 17's effect, and cardboard 9 is laminated each other with annealing stove main part 1's inner wall, accomplishes the second grade and seals, has improved sealed effect greatly.

Please refer to fig. 2 and 3, the number of the winding wheels 11 is two, the outer sides of the two winding wheels 11 are wound with the pulling rope 12, the end of the pulling rope 12 is fixedly connected with the first sealing plate 4, the middle position inside the second sealing plate 5 is provided with the through hole 8, and the through hole 8 is rotatably connected with the stud 18 through a thread.

This kind of heat treatment annealing furnace's seal structure drives two sets of wind-up wheels 11 through the biax motor 7 that sets up and rotates to accomplish tightening up and relaxing of stay cord 12, thereby drive the rising and the decline of first closing plate 4, the through-hole 8 and the double-screw bolt 18 of setting mutually support, drive second closing plate 5 and carry out horizontal migration.

Please refer to fig. 1 and 2, the number of the clamping plates 9 is four, the cross section of the head end of each of the four clamping plates 9 is semicircular, wool felt is uniformly adhered to the outer side of each of the clamping plates 9, a shock pad is arranged at the bottom end inside the chute 3, and the annealing furnace main body 1 is tightly attached to the first sealing plate 4.

This kind of heat treatment annealing furnace's seal structure sets up four groups of cardboard 9 to under the effect of wool felt, laminate each other with the inner wall of annealing furnace main part 1, accomplish the second grade and seal, and the first closing plate 4 that sets up closely laminates with annealing furnace main part 1, accomplishes the one-level and seals, and the shock pad of setting avoids first closing plate 4 falling speed to cause the damage to the device at the excessive speed.

Please refer to fig. 1 and 4, both sides of the cavity 13 are provided with a limiting groove 15, both sides of the sliding column 14 are fixed with a limiting block 16 cooperating with the limiting groove 15, and the bottom end inside the annealing furnace main body 1 is uniformly and rotatably connected with rollers.

This kind of running roller that heat treatment annealing furnace's seal structure set up, the removal of the goods of being convenient for, the stopper 16 and the spacing groove 15 of setting mutually support for cardboard 9 removes more stably.

The utility model discloses a theory of operation and use flow: firstly, an instrument to be returned is placed into the annealing furnace main body 1, then the double-shaft motor 7 is started, the double-shaft motor 7 drives the winding wheel 11 to rotate, the winding wheel 11 puts down the pull rope 12, so that the first sealing plate 4 moves downwards to seal one side of the annealing furnace main body 1, then the servo motor 6 is started, the servo motor 6 drives the stud 18 to rotate, the stud 18 pushes the inside of the annealing furnace main body 1 of the second sealing plate 5 under the action of the screw thread, meanwhile, the clamping plate 9 protrudes outwards under the action of the reset spring 17, the clamping plate 9 with the wool felt is mutually attached to the inner wall of the annealing furnace main body 1, further secondary sealing is completed, the sealing effect is greatly improved, after the work is finished, the servo motor 6 drives the stud 18 to rotate reversely, the second sealing plate 5 is reset, the double-shaft motor 7 rotates reversely to drive the first sealing plate 4 to move upwards through the pull rope 12, the annealing furnace body 1 is opened to facilitate the next work.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a heat treatment annealing furnace's seal structure, includes annealing furnace main part (1), its characterized in that: one side of the annealing furnace main body (1) is provided with a mounting frame (2), one side of the mounting frame (2) is provided with a first sealing plate (4), a sliding groove (3) is arranged inside one side of the mounting frame (2), one side of the first sealing plate (4) is provided with a sliding block (10) matched with the sliding groove (3), a double-shaft motor (7) is installed at the bottom of the mounting frame (2), a winding wheel (11) is fixed at the output end of the double-shaft motor (7), a servo motor (6) is installed at the middle position of one side of the first sealing plate (4) through a fixing frame, a second sealing plate (5) is arranged inside the first sealing plate (4), a stud (18) penetrating through the second sealing plate (5) is fixed at the output end of the servo motor (6), and a cavity (13) is arranged inside the second sealing plate (5), and a return spring (17) is fixed at the bottom end inside the cavity (13), a sliding column (14) is fixed at the tail end of the return spring (17), and a clamping plate (9) is arranged on one side of the sliding column (14).

2. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: the number of the winding wheels (11) is two, the outer sides of the winding wheels (11) are wound with pull ropes (12), and the tail ends of the pull ropes (12) are fixedly connected with the first sealing plate (4).

3. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: the number of the clamping plates (9) is four, the cross sections of the head ends of the four clamping plates (9) are semicircular, and wool felts are uniformly adhered to the outer sides of the clamping plates (9).

4. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: the middle position inside the second sealing plate (5) is provided with a through hole (8), and the through hole (8) is rotatably connected with the stud (18) through threads.

5. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: both sides of cavity (13) all are provided with spacing groove (15), the both sides of traveller (14) all are fixed with stopper (16) of mutually supporting with spacing groove (15).

6. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: the bottom end inside the annealing furnace main body (1) is uniformly and rotatably connected with rollers.

7. The sealing structure of the heat treatment annealing furnace according to claim 1, characterized in that: the bottom in the spout (3) is provided with the shock pad, annealing stove main part (1) and first closing plate (4) closely laminate.