CN112017989A - Coating device for processing solar cell and using method thereof - Google Patents
Coating device for processing solar cell and using method thereof Download PDFInfo
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- CN112017989A CN112017989A CN201910467856.2A CN201910467856A CN112017989A CN 112017989 A CN112017989 A CN 112017989A CN 201910467856 A CN201910467856 A CN 201910467856A CN 112017989 A CN112017989 A CN 112017989A
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- 238000012545 processing Methods 0.000 title claims abstract description 121
- 239000011248 coating agent Substances 0.000 title claims abstract description 32
- 238000000576 coating method Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 37
- 239000010703 silicon Substances 0.000 claims description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 241000220317 Rosa Species 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000003754 machining Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 14
- 239000010408 film Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000035784 germination Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H01L31/1804—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Photovoltaic Devices (AREA)
Abstract
The invention discloses a coating device for processing a solar cell and a using method thereof. Has the advantages that: rational in infrastructure, the device adopts the assembly line mode, can the interval nature processing, improves work efficiency, easy operation, and the device adopts full automatic processing mode, improves the machining precision simultaneously, and later maintenance is convenient, utilizes removable filter core mounting bracket, carries out the change of filter core fast, improves the cleaning efficiency.
Description
Technical Field
The invention relates to the field of solar cell processing, in particular to a coating device for solar cell processing and a using method thereof.
Background
A solar cell is also called a "solar chip" or a "photovoltaic cell", and is a photoelectric semiconductor sheet that directly generates electricity by using sunlight. It can output voltage and generate current under the condition of loop as long as it is illuminated by light meeting a certain illumination condition. Solar cells are devices that directly convert light energy into electrical energy by the photoelectric or photochemical effect. Crystalline silicon solar cells working with the photoelectric effect are the mainstream, while thin film solar cells working with the photochemical effect are still in the germination stage. In the process of producing the solar cell, the solar cell needs to be plated with an antireflection film so as to improve the performance of the solar cell.
Traditional solar cell coating film sets up, can not carry out fine cleanness and preheating to the battery piece at the coating film in-process, and then influences the coating film effect to machining efficiency is also not high, and later maintenance is also very troublesome.
Disclosure of Invention
The invention aims to solve the problems and provide a coating device for processing a solar cell, which improves the working efficiency of processing the solar cell.
The invention realizes the purpose through the following technical scheme:
the coating device for processing the solar cell comprises a processing box, a support box, a transmission box and a motor, wherein a nitrogen inlet pipe is arranged at the upper end of the processing box, an oxygen inlet pipe is arranged at one side of the nitrogen inlet pipe, the support box is arranged at the lower end of the processing box, a support seat is arranged at the lower end of the support box, filter boxes are arranged at the inner sides of the support seats and one side of the oxygen inlet pipe, a fan is arranged on each filter box, a filter element mounting frame is arranged in each filter box, a handle is arranged at the front end of each filter element mounting frame, and a filter element is arranged on each filter element;
the front end of the processing box is provided with a controller, the model of the controller is FX3G, a control panel is arranged on the controller, a cleaning chamber is arranged on the inner side of the processing box, a preheating chamber is arranged on one side of the cleaning chamber, a first processing chamber is arranged on one side of the preheating chamber, a second processing chamber is arranged on one side of the first processing chamber, telescopic doors are arranged among the cleaning chamber, the preheating chamber, the first processing chamber and the second processing chamber, one side of the cleaning chamber and the other side of the second processing chamber, observation windows are arranged at the front ends of the cleaning chamber, the preheating chamber, the first processing chamber and the second processing chamber, and sealing strips are arranged between the observation windows and the processing box;
a temperature sensor is arranged on the inner side of the preheating chamber, the model of the temperature sensor is DS18B20, a circulating fan is arranged on the rear side of the temperature sensor, and a heating pipe is arranged on the rear side of the circulating fan;
the supporting box inboard is provided with the transmission roller, the supporting seat upper end is provided with the silicon chip, the supporting box rear end is provided with the transmission case, the transmission case lower extreme is provided with the motor, the inside worm that is provided with of transmission case, be provided with the gear train on the worm, the gear train with be provided with the motor shaft between the motor, the worm upper end is provided with the worm wheel, the worm wheel with be provided with the connecting rod between the transmission roller, processing case rear end is provided with the connecting pipe, the connecting pipe oxygen intake pipe all be provided with the solenoid valve in the nitrogen gas intake pipe, the connecting pipe lower extreme is provided with the vacuum pump.
Preferably: the vacuum pump is connected with the connecting pipe through threads, and the electromagnetic valve is connected with the connecting pipe through threads.
So set up, the vacuum pump plays the energy supply effect, has guaranteed the leakproofness through threaded connection.
Preferably: the filter core pass through the buckle connect in the filter core mounting bracket, the handle through the welding with the filter core mounting bracket is connected, the fan pass through bolted connection in the rose box.
So set up, the filter core plays the filter effect, connects convenient the washing through the buckle.
Preferably: the transmission roller the worm wheel key-type connect in the connecting rod, the worm wheel with the worm meshing.
So set up, the transmission roller plays the linkage effect, has guaranteed the transmission effect through the key-type connection.
Preferably: the temperature sensor is connected with the processing box through a screw, and the heating pipe is connected with the processing box through a pipe hoop.
So set up, temperature sensor plays the monitoring temperature effect, has guaranteed joint strength through screwed connection.
Preferably: the telescopic door is connected to the processing box through a bolt.
So set up, flexible door plays the locking effect, has guaranteed stability through bolted connection.
Preferably: the observation window passes through the sealing strip with the processing case is connected, the sealing strip through sticky with the processing case is connected.
So set up, the observation window plays the observation effect, the sealing strip plays sealed effect, has veritably sealed nature through adhesive bonding.
Preferably: the transmission roller is rotatably connected to the support box.
So set up, the transmission roller plays support and transmission effect, and it is good to rotate connection stability.
Preferably: the controller is connected with the fan, the electromagnetic valve, the control panel, the motor, the vacuum pump, the temperature sensor, the circulating fan and the heating pipe through leads.
So set up, the controller plays control and processing effect, has guaranteed information processing's ageing through the wire connection.
The invention also provides a use method of the coating device for processing the solar cell, which is applied to the coating device for processing the solar cell and comprises the following specific use methods:
a. the controller is controlled by the control panel, the controller controls equipment to start, the controller controls the motor to start, the motor drives the gear set, the worm wheel, the connecting rod and the transmission roller, and the transmission roller transmits the silicon wafer to move on the transmission roller;
b. the controller controls the first retractable door to retract and lift. The silicon wafer) arrives at the inside of the cleaning chamber, the telescopic door is closed, the fan starts an air funnel to filter through the filter element, the surface of the silicon wafer is blown clean, and then the second telescopic door is contracted and lifted;
c. the silicon wafer reaches the preheating chamber, the second retractable door is closed, the circulating fan and the heating pipe in the preheating chamber are started to preheat the silicon wafer, the temperature sensor monitors the temperature, and when the temperature reaches a certain required time, the third retractable door is retracted and lifted;
d. the silicon wafer arrives at the first processing chamber, a third telescopic door is closed, the electromagnetic valve on the oxygen gas inlet pipe is opened to perform oxidation processing on the silicon wafer, a fourth telescopic door is contracted and lifted, the silicon wafer arrives at the second processing chamber, the fourth telescopic door is closed, the electromagnetic valve on the nitrogen gas inlet pipe is opened to process the silicon wafer, and after a certain time, the fifth telescopic door is contracted and lifted, and the silicon wafer penetrates out;
e. and after the silicon wafer reaches the preheating chamber, the first processing chamber and the second processing chamber, the vacuum pump is started to evacuate the preheating chamber, the first processing chamber and the second processing chamber so as to ensure the cleanness.
Compared with the prior art, the invention has the following beneficial effects:
1. the structure is reasonable, the device adopts a flow line mode, and can perform intermittent processing, so that the working efficiency is improved;
2. the operation is simple, the device adopts a full-automatic processing mode, and the processing precision is improved;
3. later maintenance is convenient, utilizes removable filter core mounting bracket, carries out the change of filter core fast, improves the cleaning efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a first structure of a coating device for processing a solar cell according to the present invention;
FIG. 2 is a schematic view of a second structure of the coating device for processing a solar cell according to the present invention;
FIG. 3 is a schematic view of the internal structure of a processing box of the coating device for processing solar cells according to the invention;
FIG. 4 is a schematic diagram of the internal structure of a transmission case of the coating device for processing solar cells according to the present invention;
FIG. 5 is a schematic view of the internal structure of a filter box of the coating device for processing the solar cell according to the invention;
fig. 6 is a circuit structure flow diagram of the coating device for processing the solar cell according to the invention.
The reference numerals are explained below:
1. a processing box; 2. a fan; 3. a support box; 4. a filter box; 5. a filter element mounting frame; 6. a handle; 7. a retractable door; 8. a sealing strip; 9. an observation window; 10. an oxygen inlet pipe; 11. a nitrogen inlet pipe; 12. an electromagnetic valve; 13. a controller; 14. a control panel; 15. a silicon wafer; 16. a transfer roller; 17. a supporting seat; 18. an electric motor; 19. a vacuum pump; 20. a connecting pipe; 21. a filter element; 22. a temperature sensor; 23. a clean room; 24. a preheating chamber; 25. a first processing chamber; 26. a second processing chamber; 27. a circulating fan; 28. heating a tube; 29. a worm gear; 30. a motor shaft; 31. a worm; 32. a gear set; 33. a connecting rod; 34. a transmission case.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The invention will be further described with reference to the accompanying drawings in which:
example 1
As shown in fig. 1-6, the coating device for processing solar cells comprises a processing box 1, a supporting box 3, a transmission box 34 and a motor 18, wherein the upper end of the processing box 1 is provided with a nitrogen inlet pipe 11, the processing box 1 plays a role in processing, the nitrogen inlet pipe 11 plays a role in connection, one side of the nitrogen inlet pipe 11 is provided with an oxygen inlet pipe 10, the oxygen inlet pipe 10 plays a role in connection, the lower end of the processing box 1 is provided with the supporting box 3, the supporting box 3 plays a role in supporting, the lower end of the supporting box 3 is provided with a supporting seat 17, the supporting seat 17 plays a role in supporting, the inner side of the supporting seat 17 and one side of the oxygen inlet pipe 10 are both provided with a filter box 4, the filter box 4 plays a role in filtering, the filter box 4 is provided with a fan 2, the fan 2 plays a role in energy supply, a filter element mounting rack 5, the filter element mounting rack 5 is provided with a filter element 21;
the front end of the processing box 1 is provided with a controller 13, the controller 13 is provided with a control panel 14, the inner side of the processing box 1 is provided with a cleaning chamber 23, one side of the cleaning chamber 23 is provided with a preheating chamber 24, one side of the preheating chamber 24 is provided with a first processing chamber 25, one side of the first processing chamber 25 is provided with a second processing chamber 26, the cleaning chamber 23, the preheating chamber 24, the first processing chamber 25 and the second processing chamber 26, one side of the cleaning chamber 23 and the other side of the second processing chamber 26 are respectively provided with a telescopic door 7, the front ends of the cleaning chamber 23, the preheating chamber 24, the first processing chamber 25 and the second processing chamber 26 are respectively provided with an observation window 9, and a sealing strip 8 is arranged between the observation window 9 and the processing box 1;
a temperature sensor 22 is arranged on the inner side of the preheating chamber 24, a circulating fan 27 is arranged on the rear side of the temperature sensor 22, and a heating pipe 28 is arranged on the rear side of the circulating fan 27;
the inner side of the supporting box 3 is provided with a transmission roller 16, the upper end of the supporting seat 17 is provided with a silicon wafer 15, the rear end of the supporting box 3 is provided with a transmission box 34, the lower end of the transmission box 34 is provided with a motor 18, a worm 31 is arranged inside the transmission box 34, the worm 31 is provided with a gear set 32, a motor shaft 30 is arranged between the gear set 32 and the motor 18, the upper end of the worm 31 is provided with a worm wheel 29, a connecting rod 33 is arranged between the worm wheel 29 and the transmission roller 16, the rear end of the processing box 1 is provided with a connecting pipe 20, the oxygen inlet pipe 10 and the nitrogen.
The vacuum pump 19 is connected to the connecting pipe 20 through threads, the electromagnetic valve 12 is connected to the connecting pipe 20 through threads, the vacuum pump 19 plays a role in energy supply, and the tightness is guaranteed through threaded connection; the filter element 21 is connected to the filter element mounting frame 5 through a buckle, the handle 6 is connected with the filter element mounting frame 5 through welding, the fan 2 is connected to the filter box 4 through a bolt, the filter element 21 plays a role in filtering, and the filter element is convenient to clean through the buckle connection; the transmission roller 16 and the worm wheel 29 are connected with the connecting rod 33 in a key mode, the worm wheel 29 is meshed with the worm 31, the transmission roller 16 plays a linkage role, and the transmission effect is guaranteed through key connection; the temperature sensor 22 is connected to the processing box 1 through a screw, the heating pipe 28 is connected with the processing box 1 through a pipe hoop, the temperature sensor 22 plays a role in monitoring temperature, and the connection strength is guaranteed through screw connection; the retractable door 7 is connected to the processing box 1 through bolts, the retractable door 7 plays a role in locking, and the stability is ensured through bolt connection; the observation window 9 is connected with the processing box 1 through a sealing strip 8, the sealing strip 8 is connected with the processing box 1 through adhesion, the observation window 9 plays an observation role, the sealing strip 8 plays a sealing role, the sealing performance is guaranteed through adhesion connection, the transmission roller 16 is rotationally connected with the supporting box 3, the transmission roller 16 plays a supporting and transmission role, the rotational connection stability is good, and the controller 13 is connected with the fan 2, the electromagnetic valve 12, the control panel 14, the motor 18, the vacuum pump 19, the temperature sensor 22, the circulating fan 27 and the heating pipe 28 through leads; the controller 13 plays a role in control and processing, and the timeliness of information processing is guaranteed through the wire connection.
The invention also provides a use method of the coating device for processing the solar cell, which is applied to the coating device for processing the solar cell and comprises the following specific use methods:
a. the controller 13 is controlled by the control panel 14, the controller 13 controls the start of equipment, the controller 13 controls the start of the motor 18, the motor 18 drives the gear set 32, the worm 31, the worm wheel 29, the connecting rod 33 and the transmission roller 16, and the transmission roller 16 transmits the silicon wafer 15 to move on the transmission roller 16;
b. the controller 13 controls the first retractable door 7 to retract and raise. When the silicon wafer 15 reaches the inside of the cleaning chamber 23, the retractable door 7 is closed, the fan 2 starts the air receiver to filter through the filter element 21, the surface of the silicon wafer 15 is blown clean, and then the second retractable door 7 is retracted and lifted;
c. when the silicon wafer 15 reaches the preheating chamber 24, the second retractable door 7 is closed, the circulating fan 27 and the heating pipe 28 in the preheating chamber 24 are started to preheat the silicon wafer 15, the temperature sensor 22 monitors the temperature, and when the temperature reaches a certain required time, the third retractable door 7 is retracted and lifted;
d. the silicon wafer 15 reaches the first processing chamber 25, the third retractable door 7 is closed, the electromagnetic valve 12 on the oxygen inlet pipe 10 is opened, the silicon wafer 15 is subjected to oxidation treatment, the fourth retractable door 7 is contracted and lifted, the silicon wafer 15 reaches the second processing chamber 26, the fourth retractable door 7 is closed, the electromagnetic valve 12 on the nitrogen inlet pipe 11 is opened, the silicon wafer 15 is processed, and after a certain time, the fifth retractable door 7 is contracted and lifted, and the silicon wafer 15 penetrates out;
e. after the silicon wafer 15 reaches the preheating chamber 24, the first processing chamber 25, and the second processing chamber 26, the vacuum pump 19 is started to evacuate the preheating chamber 24, the first processing chamber 25, and the second processing chamber 26, thereby ensuring cleanliness.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. Coating device is used in solar wafer processing, its characterized in that: the processing box comprises a processing box (1), a supporting box (3), a transmission box (34) and a motor (18), wherein a nitrogen inlet pipe (11) is arranged at the upper end of the processing box (1), an oxygen inlet pipe (10) is arranged on one side of the nitrogen inlet pipe (11), the supporting box (3) is arranged at the lower end of the processing box (1), a supporting seat (17) is arranged at the lower end of the supporting box (3), a filter box (4) is arranged on the inner side of the supporting seat (17) and one side of the oxygen inlet pipe (10), a fan (2) is arranged on the filter box (4), a filter element mounting frame (5) is arranged in the filter box (4), a handle (6) is arranged at the front end of the filter element mounting frame (5), and a filter element (21) is arranged on;
the front end of the processing box (1) is provided with a controller (13), the controller (13) is provided with a control panel (14), a cleaning chamber (23) is arranged at the inner side of the processing box (1), a preheating chamber (24) is arranged at one side of the cleaning chamber (23), a first treatment chamber (25) is arranged on one side of the preheating chamber (24), a second treatment chamber (26) is arranged on one side of the first treatment chamber (25), telescopic doors (7) are arranged among the cleaning chamber (23), the preheating chamber (24), the first processing chamber (25) and the second processing chamber (26), one side of the cleaning chamber (23) and the other side of the second processing chamber (26), the front ends of the cleaning chamber (23), the preheating chamber (24), the first processing chamber (25) and the second processing chamber (26) are all provided with an observation window (9), a sealing strip (8) is arranged between the observation window (9) and the processing box (1);
a temperature sensor (22) is arranged on the inner side of the preheating chamber (24), a circulating fan (27) is arranged on the rear side of the temperature sensor (22), and a heating pipe (28) is arranged on the rear side of the circulating fan (27);
a transmission roller (16) is arranged on the inner side of the supporting box (3), a silicon chip (15) is arranged at the upper end of the supporting seat (17), the rear end of the supporting box (3) is provided with the transmission box (34), the lower end of the transmission box (34) is provided with the motor (18), a worm (31) is arranged in the transmission case (34), a gear set (32) is arranged on the worm (31), a motor shaft (30) is arranged between the gear set (32) and the motor (18), a worm wheel (29) is arranged at the upper end of the worm (31), a connecting rod (33) is arranged between the worm wheel (29) and the transmission roller (16), processing case (1) rear end is provided with connecting pipe (20), connecting pipe (20) oxygen intake pipe (10) all be provided with solenoid valve (12) on nitrogen gas intake pipe (11), connecting pipe (20) lower extreme is provided with vacuum pump (19).
2. The coating device for processing the solar cell according to claim 1, wherein: the vacuum pump (19) is connected to the connecting pipe (20) through threads, and the electromagnetic valve (12) is connected to the connecting pipe (20) through threads.
3. The coating device for processing the solar cell according to claim 2, wherein: the filter core (21) pass through the buckle connect in filter core mounting bracket (5), handle (6) through the welding with filter core mounting bracket (5) are connected, fan (2) pass through bolted connection in rose box (4).
4. The coating device for processing the solar cell according to claim 3, wherein: the transmission roller (16) and the worm wheel (29) are connected with the connecting rod (33) in a key mode, and the worm wheel (29) is meshed with the worm (31).
5. The coating device for processing the solar cell according to claim 4, wherein: the temperature sensor (22) is connected to the processing box (1) through a screw, and the heating pipe (28) is connected with the processing box (1) through a pipe hoop.
6. The coating device for processing the solar cell according to claim 5, wherein: the telescopic door (7) is connected to the processing box (1) through a bolt.
7. The coating device for processing the solar cell according to claim 6, wherein: the observation window (9) is connected with the processing box (1) through the sealing strip (8), and the sealing strip (8) is connected with the processing box (1) through adhesion.
8. The coating device for processing the solar cell according to claim 7, wherein: the conveying roller (16) is rotatably connected to the supporting box (3).
9. The coating device for processing the solar cell according to claim 8, wherein: the controller (13) is connected to the fan (2), the electromagnetic valve (12), the control panel (14), the motor (18), the vacuum pump (19), the temperature sensor (22), the circulating fan (27) and the heating pipe (28) through leads.
10. The method of using the coating apparatus for solar cell processing according to claim 9, applied to the coating apparatus for solar cell processing according to any one of claims 1 to 9, wherein: the use method of the coating device for processing the solar cell comprises the following steps:
a. the controller (13) is controlled by the control panel (14), the controller (13) controls equipment to be started, the controller (13) controls the motor (18) to be started, the motor (18) drives the gear set (32), the worm (31), the worm wheel (29), the connecting rod (33) and the transmission roller (16), and the transmission roller (16) transmits the silicon wafer (15) to move on the transmission roller (16);
b. the controller (13) controls the first telescopic door (7) to contract and lift. The silicon wafer (15)) arrives at the inside of the cleaning chamber (23), the telescopic door (7) is closed, the fan (2) starts an air funnel to filter through the filter element (21) to blow the surface of the silicon wafer (15) clean, and then the second telescopic door (7) is contracted and lifted;
c. the silicon wafer (15) arrives at the preheating chamber (24), the second retractable door (7) is closed, the circulating fan (27) and the heating pipe (28) in the preheating chamber (24) are started to preheat the silicon wafer (15), the temperature sensor (22) monitors the temperature, and when the temperature reaches a certain required time, the third retractable door (7) is retracted and lifted;
d. the silicon wafer (15) reaches the first processing chamber (25), the third retractable door (7) is closed, the electromagnetic valve (12) on the oxygen inlet pipe (10) is opened to oxidize the silicon wafer (15), the fourth retractable door (7) is retracted and lifted, the silicon wafer (15) reaches the second processing chamber (26), the fourth retractable door (7) is closed, the electromagnetic valve (12) on the nitrogen inlet pipe (11) is opened to process the silicon wafer (15), after a certain time, the fifth retractable door (7) is retracted and lifted, and the silicon wafer (15) penetrates out;
e. after the silicon wafer (15) reaches the preheating chamber (24), the first processing chamber (25) and the second processing chamber (26), the vacuum pump (19) is started to evacuate the preheating chamber (24), the first processing chamber (25) and the second processing chamber (26) to ensure cleanness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910467856.2A CN112017989A (en) | 2019-05-31 | 2019-05-31 | Coating device for processing solar cell and using method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910467856.2A CN112017989A (en) | 2019-05-31 | 2019-05-31 | Coating device for processing solar cell and using method thereof |
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| CN112017989A true CN112017989A (en) | 2020-12-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910467856.2A Withdrawn CN112017989A (en) | 2019-05-31 | 2019-05-31 | Coating device for processing solar cell and using method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114156365A (en) * | 2021-11-23 | 2022-03-08 | 江苏华恒新能源有限公司 | Thermal oxidation treatment device for crystalline silicon SE battery piece |
| CN114914173A (en) * | 2022-04-11 | 2022-08-16 | 江苏晟驰微电子有限公司 | Coating source device for manufacturing power device |
-
2019
- 2019-05-31 CN CN201910467856.2A patent/CN112017989A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114156365A (en) * | 2021-11-23 | 2022-03-08 | 江苏华恒新能源有限公司 | Thermal oxidation treatment device for crystalline silicon SE battery piece |
| CN114914173A (en) * | 2022-04-11 | 2022-08-16 | 江苏晟驰微电子有限公司 | Coating source device for manufacturing power device |
| CN114914173B (en) * | 2022-04-11 | 2023-09-19 | 江苏晟驰微电子有限公司 | Source coating device for manufacturing power device |
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Application publication date: 20201201 |