CN210678600U - 一种微动台及具有该微动台的运动装置 - Google Patents
一种微动台及具有该微动台的运动装置 Download PDFInfo
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CN110587554A (zh) * | 2019-10-24 | 2019-12-20 | 上海隐冠半导体技术有限公司 | 一种微动台及具有该微动台的运动装置 |
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Assignee: Suzhou yinguan Semiconductor Technology Co.,Ltd. Assignor: Shanghai Yinguan Semiconductor Technology Co.,Ltd. Contract record no.: X2023980038370 Denomination of utility model: A micro motion table and a motion device with the same Granted publication date: 20200605 License type: Common License Record date: 20230724 |
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Inventor after: Wu Huoliang Inventor after: Meng Hui Inventor after: Qu Xiaochen Inventor after: Huang Chuan Inventor before: Wu Huoliang Inventor before: Meng Hui Inventor before: Qu Xiaochen Inventor before: Wang Yue Inventor before: Huang Chuan |