CN210665818U - Switching device for semiconductor testing machine - Google Patents
Switching device for semiconductor testing machine Download PDFInfo
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- CN210665818U CN210665818U CN201921462452.6U CN201921462452U CN210665818U CN 210665818 U CN210665818 U CN 210665818U CN 201921462452 U CN201921462452 U CN 201921462452U CN 210665818 U CN210665818 U CN 210665818U
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Abstract
The utility model discloses a switching device for semiconductor test machine, include: the test device comprises at least two oppositely arranged supporting positioning parts, a supporting plate and an adapter plate, wherein the adapter plate is positioned on the surface of one side of the supporting plate, which is far away from a test machine, and the adapter plate comprises a test socket for placing a chip to be tested; the supporting plate comprises a hollow groove, and the hollow groove is configured to electrically connect and conduct the loader board of the testing machine with the testing socket. The utility model provides a switching device can realize when Handler and test machine dock in order to test the chip, and the effort of butt joint is not whole directly to be applyed on the keysets including the test socket between Handler and the test machine, and this switching device can transfer the effort that Handler was applyed to the test socket to the Loadboard fixed plate on, has protected the Loadboard on the test machine to make its non-deformable damage, has guaranteed chip testing.
Description
Technical Field
The utility model relates to a semiconductor test technical field. And more particularly, to a changeover device for a semiconductor testing machine.
Background
Along with the development of science and technology, more and more electronic products using chips are used, and the demand of corresponding chip test systems is gradually increased in order to ensure the quality and the performance of the chips. At present, ate (automatic test equipment) chip test equipment is generally adopted as chip test equipment, which includes a tester and a handler matched with the tester, and chip products are sequentially loaded and grouped by the handler and placed in a test socket of the tester for testing various logic functions, and the like.
At present, the common connection mode of the tester and the Handler can be divided into a direct connection mode and a line connection mode. The direct connection mode is usually a mode in which the test socket is in contact connection with the electronic circuit board, and the wire connection mode is usually a mode in which the test socket is in contact connection with the electronic circuit board through the adapter plate. Compared with a direct connection mode, the chip signal in the test socket in the line connection mode is more stable. However, the wire connection mode has drawbacks, and most importantly, the test socket and the electronic circuit board are easy to be in direct contact, which may cause the loadboard to deform and affect the service life thereof.
The adapter plate between the testing machine and the Handler is positioned only by means of pin guiding, so that the installation and operation are inconvenient, the occupied time is long during butt installation, maintenance and debugging, and the method is not suitable for a mass production quick response mode. In addition, when the tester is connected with the Handler, the loadboard fixing plate on the tester is easily affected by the excessive force of the butt joint force, and the Handler fixing plate is easily bent and deformed, so that the loadboard is deformed, and the chip test signal is affected.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention provides an adapter device for a semiconductor testing machine. Utilize this switching device can effectively avoid the Handler to test the chip with the butt joint of test machine, the problem of the easy deformation damage of receiving pressure of Loadboard on the test machine.
In order to solve the technical problem, the utility model adopts the following technical scheme:
a transition device for a semiconductor testing machine, the transition device comprising:
at least two oppositely arranged supporting positioning parts which are positioned on two opposite side parts of a loader fixed plate of the testing machine;
the testing machine comprises a supporting plate, a testing machine and a testing machine, wherein at least two opposite end parts of the supporting plate are fixedly pressed on the inner side edge of a fixing plate of the testing machine; and
the adapter plate is positioned on the surface of one side of the support plate, which is far away from the testing machine, and the adapter plate comprises a testing socket for placing a chip to be tested;
the support plate is provided with a hollow groove penetrating through the upper plate surface and the lower plate surface of the support plate, and the hollow groove is configured to electrically connect and conduct the loader board of the testing machine with the testing socket so as to realize the detection of a chip to be tested.
In addition, preferably, the adapter device further comprises a connection fixing plate located above the adapter plate; two opposite end parts of the connecting and fixing plate are correspondingly fixed on the supporting and positioning part.
In addition, preferably, the connection fixing plate includes a hollow portion capable of exposing the test socket from an upper plate surface of the connection fixing plate.
In addition, preferably, the two opposite ends of the support plate, which are pressed and fixed on the inner side edge of the Loadboard fixing plate of the testing machine, are the ends adjacent to the support positioning piece.
In addition, preferably, a spacing distance is left between the part of the support plate corresponding to the tester Loadboard and the tester Loadboard.
In addition, preferably, the supporting plate comprises a positioning hole; the locating hole is configured to be passed through by the locating protrusion on the Loadboard so as to locate the relative position between the supporting plate and the Loadboard.
In addition, the preferable scheme is that the support plate comprises a pin shaft vertically extending out of the upper plate surface of the support plate, and the adapter plate comprises a pin shaft hole for the pin shaft to penetrate through.
In addition, preferably, the adapter plate includes a pin extending vertically from an upper plate surface of the adapter plate, and the connection fixing plate includes a pin hole for the pin to penetrate through.
In addition, preferably, the supporting and positioning part comprises a positioning column vertically extending from the top surface of the supporting and positioning part, and the connecting and fixing plate comprises a positioning hole corresponding to the positioning column and allowing the positioning column to penetrate.
In addition, preferably, the support plate comprises a pin vertically extending from the upper plate surface of the support plate, the connecting and fixing plate comprises a pin hole for the pin to penetrate through, and the adapter plate through which the pin penetrates through the pin hole.
The utility model has the advantages as follows:
compared with the prior art, the utility model discloses a connect the fixed plate and support the cooperation of setting element, can with test machine and the most dispersion of the produced effort of handle butt joint to the limit portion edge of Loadboard fixed plate, remaining cooperation between less part effort accessible backup pad tip and the Loadboard fixed plate edge continues to disperse Loadboard fixed plate limit portion edge by the backup pad on, make test machine and the produced effort of handle butt joint shift to both sides by the middle zone, the effectual test machine Loadboard that has protected.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Fig. 1 shows a schematic view of a matching structure of the switching device and the testing machine provided by the present invention.
Fig. 2 shows the utility model provides a cooperation structure schematic diagram between switching device and test machine Loadboard and the Loadboard fixed plate.
Fig. 3 shows the utility model provides a supporting location piece and the cooperation structure sketch between test machine Loadboard and the Loadboard fixed plate among the switching device.
Fig. 4 shows the utility model provides a cooperation structure schematic diagram between backup pad and test machine Loadboard and the Loadboard fixed plate among the switching device.
Fig. 5 shows the utility model provides a cooperation structure schematic diagram between adapter plate and test machine Loadboard and the Loadboard fixed plate in the switching device.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be considered a part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In order to solve the defects of the prior art, the present invention provides an adapter device for a semiconductor testing machine, which is shown in fig. 1 to 5, specifically, the adapter device at least comprises:
at least two oppositely arranged supporting and positioning pieces 1 which are positioned on two opposite side parts of the loader fixing plate 200 of the testing machine 100;
the supporting plate 2, at least two opposite ends of the supporting plate 2 are pressed and fixed on the inner side edge of the Loadboard fixing plate 200 of the testing machine 100; and
the adapter plate 3 is positioned on the surface of one side of the support plate 2, which is far away from the testing machine, and the adapter plate 3 comprises a testing socket 31 for placing a chip to be tested;
the supporting plate 2 is provided with a hollow-out groove 21 penetrating through the upper and lower plate surfaces of the supporting plate 2, and the hollow-out groove 21 is configured to electrically connect and conduct the Loadboard 300 of the testing machine 100 with the testing socket 31 so as to realize the detection of a chip to be tested.
The switching device provided by the embodiment is positioned between the Handler and the tester, and can realize that when the Handler is butted with the tester to test a chip, all butt joint acting force between the Handler and the tester is not directly applied to the switching plate 3 comprising the test socket 31, and the switching device can transfer the acting force applied by the Handler to the test socket 31 to the Loadboard fixed plate 200, thereby protecting the Loadboard 300 on the tester 100 from being deformed and damaged.
More specifically, when the existing tester is in butt joint with the Handler, the loadboard fixing plate on the tester is influenced by the excessive force of the butt joint force, and the Handler fixing plate is easy to bend and deform, so that the loadboard is deformed, and a chip test signal is influenced. With the structure shown in the figure, in the adapter device provided by the present embodiment, the design that at least two opposite ends of the supporting plate 2 are pressed and fixed on the inner edge of the Loadboard fixing plate 200 of the testing machine 100 can disperse the butt joint force generated when the Handler is butted with the testing machine to the edge of the Loadboard fixing plate 200 through the supporting plate 2, so that the acting force generated when the testing machine is butted with the Handler is transferred from the middle area to the two sides, thereby effectively protecting the Loadboard of the testing machine.
In one embodiment, as shown in fig. 1 and 2, the adapter device further includes a connection fixing plate 4 located above the adapter plate 3; two opposite ends of the connecting and fixing plate 4 are correspondingly fixed on the supporting and positioning member 1.
Connecting fixed plate 4's effect lies in, when Handler and test machine butt joint, connecting fixed plate 4 can receive the butt joint power with supporting positioning piece 1 earlier than backup pad 2, and then with the produced most butt joint effort of test machine and Handler butt joint through connecting fixed plate 4 and supporting positioning piece 1 dispersion to the limit edge of Loadboard fixed plate 200, and then remaining fractional effort is again through the cooperation between backup pad 2 tip and Loadboard fixed plate 200 edge, continue dispersing to the limit edge of Loadboard fixed plate 200 by backup pad 2 on, utilize the aforesaid to the multistage dispersion of the produced butt joint effort of test machine and Handler butt joint, can make the butt joint effort transfer to both sides smoothly by middle zone, better play the guard action to the Loadboard of test machine, the stability of chip test signal has been guaranteed.
In one embodiment, to facilitate Handler sorting of chips placed in the test sockets 31. The connection fixing plate 4 includes a hollow portion 41 capable of exposing the test socket 31 from the upper surface of the connection fixing plate 4.
Because many designs of the Loadboard fixed plate including the Loadboard board of current test machine are for can with the inside device detachable of test machine and pull out the separation, the Loadboard fixed plate is including relative wide limit portion and the narrow limit portion that sets up, it sets up corresponding subassembly of pulling out to correspond on the wide limit portion more, for the convenience of installation and setting up support setting element and backup pad, the Loadboard fixed plate limit portion that corresponds with the fixed tip of test machine Loadboard fixed plate pressure of backup pad is same Loadboard fixed plate wide limit portion with support setting element fixed Loadboard limit portion. Further, in a preferred embodiment, the two opposite ends of the support plate 2 are fixed to the inner edge of the Loadboard fixing plate 200 of the testing machine 100 at the ends adjacent to the support positioning member 1.
In addition, the advantage of the above design is still that, when the Loadboard fixing plate 200 and the internal device of the testing machine 100 are detachable to be pulled out and separated, the supporting positioning member 1, the supporting plate 2 and the corresponding Loadboard fixing plate edge can simultaneously receive the acting force of the pulling assembly, it is avoided that the supporting positioning member 1 and the supporting plate 2 correspond to the Loadboard fixing plate when the Loadboard fixing plate is different in edge, when the Loadboard fixing plate is pulled out, the Loadboard fixing plate is stressed unevenly, the middle part is easy to collapse, thereby easily causing the situation that the Loadboard fixing plate deforms and leads to the deformation of the Loadboard plate to appear.
However, in some specific testing machine structures, for example, the widths of the edges of the Loadboard fixing plate are the same, and the pulling assembly and the supporting positioning member are respectively located on different edges of the Loadboard fixing plate of the testing machine, for the testing machine with such a structure, the two opposite ends of the supporting plate that are pressed and fixed on the inner edge of the Loadboard fixing plate of the testing machine may also be different from the edges of the Loadboard fixing plate that are fixed by the supporting positioning member, which is not further limited in this embodiment.
In one embodiment, the portion of support plate 2 corresponding to Loadboard 300 of testing machine 100 is spaced from Loadboard 300 of testing machine 100. This interval distance can play the cushioning effect, avoids appearing test machine and handle butt joint back in place, and the butt joint effort that continues to produce directly makes keysets and loadboard excessive pressure contact, influences the condition of chip test signal.
In order to ensure the position between the support plate 2 and the Loadboard 300 in the horizontal direction, the support plate 2 includes a positioning hole 22; the positioning holes 22 are configured to allow the positioning protrusions 301 on the Loadboard 300 to pass through, so as to position the relative position between the support plate 2 and the Loadboard 300.
In a preferred embodiment, the supporting plate 2 includes a pin 23 extending vertically from an upper plate surface of the supporting plate 2, the adapter plate 3 includes a pin hole (not shown) for the pin 23 to penetrate through, and the pin 23 and the pin hole on the adapter plate 3 are matched to be able to butt-joint and fix the supporting plate 2 and the adapter plate 3, so as to ensure a relative position and stable matching between the supporting plate 2 and the adapter plate 3 in a horizontal direction.
In addition, it is further preferable that the adapter plate 3 includes a pin 32 vertically extending from an upper plate surface of the adapter plate 3, and the connection fixing plate 4 includes a pin hole 42 through which the pin 32 penetrates. Can butt joint the keysets and connect the fixed plate fixedly through the cooperation of pin 32 with pinhole 42, can make the fine positioning calibration between keysets and the Loadboard, ensured Handler and test machine butt joint positioning accuracy, reduce because of the damage risk that the equipment influences the connector.
In another embodiment, a structure may also be adopted, for example, the support plate includes a pin extending vertically from an upper plate surface of the support plate, the connection fixing plate includes a pin hole for the pin to penetrate through, and the adapter plate through which the pin penetrates through the pin hole. The support plate, the adapter plate and the connecting and fixing plate can be fixedly butted by matching the pin and the pin hole, and the assembly process and the flow can be simplified under the condition that the relative positions of the support plate, the adapter plate and the connecting and fixing plate in the horizontal direction and the stable matching among the support plate, the adapter plate and the connecting and fixing plate are ensured. And also can realize accurate positioning calibration between keysets and the Loadboard through the location of pin, ensured Handler and test machine butt joint positioning accuracy, reduce because of the damage risk that the equipment influences the connector.
In addition, in an example, the supporting and positioning member 1 includes a positioning column 11 vertically extending from a top surface of the supporting and positioning member 1, and the connection fixing plate 4 includes a positioning hole 43 corresponding to the positioning column 11 for the positioning column 11 to penetrate through. The positioning post 11 is matched with the positioning hole 43 to limit the position between the connecting fixing plate 4 and the supporting positioning member 1, so as to prevent the deviation in the horizontal direction, facilitate the butt positioning of the tester and the Handler, and enable the butt acting force generated by the butt joint of the tester and the Handler to be uniformly and stably transferred to the Loadboard fixing plate.
Compared with the prior art, the utility model provides a convenient installation counterpoint between realization handle of switching device and the test machine utilizes the initial positioning direction of connecting the fixed plate and supporting the setting element earlier promptly, recycles the accurate location calibration between keysets and the Loadboard, has ensured handle and test machine butt joint positioning accuracy, reduces because of the equipment influences the damage risk of connector. Furthermore, utilize the utility model provides a switching device, when Handler and test machine dock, the effort of butt joint is not all directly applyed on the keysets including test socket between Handler and the test machine, connect fixed plate and backup pad separable with the Handler on shifting the loader effort to test socket and applyed to the Loadboard fixed plate, the unstable factor of Loadboard output signal is influenced because of the Loadboard warp to the significantly reduced, the chip test has been guaranteed, accord with the volume production state, the space has been saved, any operating personnel docks test machine and Handler successfully on the convenient production line, the make full use of manpower.
Obviously, the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention, and it is obvious for those skilled in the art to make other variations or changes based on the above descriptions, and all the embodiments cannot be exhausted here, and all the obvious variations or changes that belong to the technical solutions of the present invention are still in the protection scope of the present invention.
Claims (10)
1. An interface device for a semiconductor testing machine, the interface device comprising:
at least two oppositely arranged supporting positioning parts which are positioned on two opposite side parts of a loader fixed plate of the testing machine;
the testing machine comprises a supporting plate, a testing machine and a testing machine, wherein at least two opposite end parts of the supporting plate are fixedly pressed on the inner side edge of a fixing plate of the testing machine; and
the adapter plate is positioned on the surface of one side of the support plate, which is far away from the testing machine, and the adapter plate comprises a testing socket for placing a chip to be tested;
the support plate is provided with a hollow groove penetrating through the upper plate surface and the lower plate surface of the support plate, and the hollow groove is configured to electrically connect and conduct the loader board of the testing machine with the testing socket so as to realize the detection of a chip to be tested.
2. The adapter device of claim 1, further comprising a connection securing plate positioned above the adapter plate; two opposite end parts of the connecting and fixing plate are correspondingly fixed on the supporting and positioning part.
3. The adapter device according to claim 2, wherein the connection fixing plate comprises a hollow portion for exposing the test socket from the upper surface of the connection fixing plate.
4. The adapter device of claim 1, wherein the two opposite ends of the support plate that are pressed against the inner edge of the Loadboard mounting plate of the testing machine are ends adjacent to the support locations.
5. The adapter of claim 1, wherein the portion of the support plate corresponding to the tester Loadboard is spaced apart from the tester Loadboard.
6. The adapter of claim 1, wherein the support plate comprises a positioning hole; the locating hole is configured to be passed through by the locating protrusion on the Loadboard so as to locate the relative position between the supporting plate and the Loadboard.
7. The adapter device according to claim 1, wherein the support plate comprises a pin shaft vertically extending from an upper plate surface of the support plate, and the adapter plate comprises a pin shaft hole for the pin shaft to penetrate through.
8. The adapter device according to claim 2, wherein the adapter plate comprises a pin vertically extending from an upper plate surface of the adapter plate, and the connecting and fixing plate comprises a pin hole for the pin to penetrate through.
9. The adapter device according to claim 2, wherein the supporting and positioning member includes a positioning post vertically extending from a top surface of the supporting and positioning member, and the connecting and fixing plate includes a positioning hole corresponding to the positioning post for the positioning post to penetrate therethrough.
10. The adapter device according to claim 2, wherein the support plate comprises a pin vertically extending from an upper plate surface of the support plate, the connecting and fixing plate comprises a pin hole for the pin to penetrate through, and the adapter plate through which the pin penetrates through the pin hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462452.6U CN210665818U (en) | 2019-09-04 | 2019-09-04 | Switching device for semiconductor testing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921462452.6U CN210665818U (en) | 2019-09-04 | 2019-09-04 | Switching device for semiconductor testing machine |
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| CN210665818U true CN210665818U (en) | 2020-06-02 |
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| CN201921462452.6U Active CN210665818U (en) | 2019-09-04 | 2019-09-04 | Switching device for semiconductor testing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112285534A (en) * | 2020-10-20 | 2021-01-29 | 上海华岭集成电路技术股份有限公司 | Chip testing device |
-
2019
- 2019-09-04 CN CN201921462452.6U patent/CN210665818U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112285534A (en) * | 2020-10-20 | 2021-01-29 | 上海华岭集成电路技术股份有限公司 | Chip testing device |
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