CN210620199U - Filling internal cleaning device of photoresist filling machine - Google Patents

Filling internal cleaning device of photoresist filling machine Download PDF

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Publication number
CN210620199U
CN210620199U CN201921368645.5U CN201921368645U CN210620199U CN 210620199 U CN210620199 U CN 210620199U CN 201921368645 U CN201921368645 U CN 201921368645U CN 210620199 U CN210620199 U CN 210620199U
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China
Prior art keywords
water
connecting block
brush
control box
filling machine
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CN201921368645.5U
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Chinese (zh)
Inventor
宋里千
陈武档
周国波
赖艺珠
梁荣增
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Fujian Shuguang Semiconductor Materials Co ltd
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Fujian Shuguang Semiconductor Materials Co ltd
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Abstract

The utility model provides a photoresist filling machine filling interior cleaning device, which comprises a control box, a water tank, a motor box, a connecting device, a connecting block, a brush and a water spraying device, wherein the bottom of the control box is provided with a handle, the outer side of the control box is provided with a control button, the water tank is arranged in the control box, the upper end of the water tank is provided with four water pipes, the other ends of the water pipes are connected with the inside of the connecting device, the upper end of the control box is provided with the motor box, the inside of the motor box is provided with a rotating motor, the front end of the rotating motor is provided with a connecting rod, the connecting rod is connected with the connecting device, one end of the connecting device is connected with the motor box, the connecting block is fixedly connected with the other end of the connecting device, the brush and the water spraying device are detachably connected with the connecting block, the service life is long, the device can go deep into the pipeline of a plurality of sizes and the inside is cleaned in the hole, and application scope is wide.

Description

Filling internal cleaning device of photoresist filling machine
Technical Field
The utility model relates to a photoresist technical field specifically is a inside clean device of photoresist liquid filling machine filling.
Background
The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist. The printing industry is another important area of photoresist application. In 1954, the polyvinyl alcohol cinnamate which is successfully researched by Mingsk et al is used in the printing industry and is used in the electronic industry later, and the photoresist has complex technology and more varieties. According to the chemical reaction mechanism and the developing principle, the method can be divided into two types of negative glue and positive glue. The insoluble matter formed after illumination is negative glue; on the contrary, the positive glue is insoluble in some solvents and becomes a soluble substance after being irradiated by light.
The existing photoresist filling machine is easy to generate raw material accumulation in the photoresist filling machine after being used for a long time, and the inside cleaning of the filling machine becomes very troublesome because the inside of the filling machine is difficult to go deep, and the cleaning effect by using cleaning liquid is not good.
SUMMERY OF THE UTILITY MODEL
The utility model provides a technical problem provide an inside clean device of photoresist liquid filling machine filling to solve the problem that proposes in the above-mentioned background art.
The utility model provides a technical problem adopt following technical scheme to realize:
the utility model provides an inside clean device of photoresist liquid filling machine filling, includes control box, water tank, motor box, connecting device, connecting block, brush and water jet equipment, control box bottom is equipped with the handle, and the control box outside is equipped with control button, the inside water tank of installing of control box, and the water tank upper end is equipped with four water pipes, the water pipe other end and connecting device internal connection, and control box upper end is equipped with the motor box, the inside rotating electrical machines that is equipped with of motor box, and the rotating electrical machines front end is equipped with the connecting rod, and the connecting rod is connected with connecting device, and connecting device one end is connected with the motor box, and the connecting block is connected with connecting device other end fixed connection, and brush and.
Furthermore, the control box external control button is connected with the water tank and the rotating motor through lines, and a plurality of grooves are formed in the handle at the bottom of the control box.
Furthermore, a micro water pump is arranged at the top end inside the water tank and controlled by a control button, a water pipe is arranged at the upper end of the micro water pump, and a water filling opening is formed in the right side of the water tank.
Further, connecting device is inside to be equipped with four pipes, four pipes distribute in four directions about connecting device is inside, pipe one end and water piping connection, the pipe other end is connected with the connecting block, is equipped with the bull stick in the middle of connecting device is inside, bull stick one end and spiral shaft fixed connection, the spiral shaft is connected with the inside rotation of connecting device, the outside and the connecting rod fixed connection of spiral shaft, the bull stick other end and connecting axle fixed connection.
Furthermore, a rotating rod is arranged in the middle of the connecting block, the outside of the rotating rod is fixedly connected with the connecting shaft, the connecting shaft is rotatably connected with the connecting block, a connecting hole is formed in the connecting shaft, guide pipes are arranged in the vertical and horizontal directions of the connecting block, a guide pipe connecting block is arranged on the outer side of each guide pipe, and a guide pipe connecting hole is formed in the guide pipe connecting block.
Furthermore, a brush hair connecting block is arranged on the outer side of the brush, brush hair is arranged on the brush hair connecting block, a brush connecting rod is arranged on the inner side of the brush, a brush connecting block is arranged at the other end of the brush connecting rod, and a plurality of connecting holes corresponding to the connecting holes in the connecting shaft are formed in the brush connecting block.
Furthermore, four spray heads are arranged on the outer side of the water spraying device, a plurality of spray holes are formed in the spray heads, the spray heads are connected with a water spraying chamber inside the water spraying device, the water spraying chamber is connected with a water spraying device outer side insertion pipe, a water spraying device connecting block is arranged on the outer side of the insertion pipe, a water spraying device connecting hole is formed in the water spraying device connecting block, and the water spraying device connecting hole is formed in the gap between the spray heads.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the device convenient to use, through control button to whole device control can, convenient to use.
2. The device detachable construction is convenient for the part and is changed and clear up, and the clearance is convenient, long service life.
3. The device can go deep into to inside clean in pipeline and the hole of a plurality of sizes, and application scope is wide.
Drawings
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a structural view of the connecting device of the present invention;
FIG. 3 is a block diagram of the present invention;
FIG. 4 is a view showing an internal structure of the water spraying device of the present invention;
fig. 5 is a structural view of the brush of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the specific drawings.
As shown in FIGS. 1-5,
the utility model provides an inside cleaning device of photoresist liquid filling machine filling, includes control box 1, water tank 2, motor box 3, connecting device 4, connecting block 5, brush 6 and water jet equipment 7, 1 bottom of control box is equipped with handle 11, 1 outside of control box is equipped with control button 12, 1 internally mounted water tank 2 of control box, 2 upper ends of water tank are equipped with four water pipe 21, the water pipe 21 other end and 4 internally connected of connecting device, 1 upper end of control box is equipped with motor box 3, the inside rotating electrical machines 31 that is equipped with of motor box 3, the rotating electrical machines 31 front end is equipped with connecting rod 32, connecting rod 32 is connected with connecting device 4, 4 one end of connecting device is connected with motor box 3, connecting block 5 and 4 other end fixed connection of connecting device, brush 6 and water jet equipment 7 all can be dismantled with connecting block 5 and be connected.
The external control button 12 of the control box 1 is connected with the water tank 2 and the rotating motor 13 through lines, and the handle 11 at the bottom of the control box 1 is provided with a plurality of grooves.
The top end in the water tank 2 is provided with a micro water pump, the micro water pump is controlled by a control button 12, the upper end of the micro water pump is provided with a water pipe 21, and the right side of the water tank 2 is provided with a water filling opening 22.
Connecting device is as shown in fig. 3, fig. 3 is the utility model discloses a connecting device structure chart, connecting device 4 is inside to be equipped with four pipe 42, four pipe 42 distribute in four directions about connecting device 4 is inside, pipe 42 one end is connected with water pipe 21, the pipe 42 other end is connected with connecting block 5, be equipped with bull stick 41 in the middle of connecting device 4 is inside, bull stick 41 one end and spiral shaft 44 fixed connection, spiral shaft 44 is connected with connecting device 4 internal rotation, spiral shaft 44 outside and connecting rod 32 fixed connection, the bull stick 41 other end and connecting axle 42 fixed connection.
Connecting block 5 is as shown in fig. 2, and fig. 2 is the utility model discloses a connecting block structure chart is the swing arm 41 in the middle of the connecting block 5, swing arm 41 outside and connecting axle 43 fixed connection, connecting axle 43 rotates with connecting block 5 to be connected, is equipped with connecting hole 431 on connecting axle 43, and connecting block 5 is controlled the direction from top to bottom and is equipped with pipe 42, and the pipe 42 outside is equipped with pipe connecting block 51, is equipped with pipe connecting hole 52 on the pipe connecting block 51.
Brush 6 is as shown in fig. 5, and fig. 5 is the utility model discloses a brush structure chart, the brush 6 outside is equipped with brush hair connecting block 62, is equipped with brush hair 61 on the brush hair connecting block 62, and 6 inboards of brush are equipped with brush connecting rod 63, and the brush connecting rod 63 other end is equipped with brush connecting block 64, is equipped with a plurality of connecting holes that correspond with connecting hole 431 on the connecting axle 43 on the brush connecting block 64.
Water jet equipment is as shown in fig. 4, and fig. 4 is the utility model discloses an inside structure chart of water jet equipment, the 7 outside of water jet equipment is equipped with four shower nozzles 71, is equipped with a plurality of orifices 72 on the shower nozzle 71, and shower nozzle 71 is connected with the inside spray chamber 73 of water jet equipment, and spray chamber 73 is connected with water jet equipment outside intubate 76, and the intubate 76 outside is equipped with water jet equipment connecting block 74, is equipped with water jet equipment connecting hole 75 on the water jet equipment connecting block 74, and water jet equipment connecting hole 75 establishes space department between shower nozzle 71.
The connection method comprises the following steps:
1. after aligning the brush attachment block 64 of the brush 6 with the attachment shaft 43, the brush 6 is fixedly attached to the attachment shaft 43 by inserting nails or the like through the attachment holes.
2. The outer insertion tube 76 of the water spraying device 7 is inserted into the inner conduit 42 of the connecting block 5, and the water spraying device 7 is fixedly connected with the connecting block 5 by screws penetrating through the water spraying device connecting hole 75 and the conduit connecting hole 52.
The working process is as follows:
1. after the components are installed, the connecting device is inserted into the gap to be cleaned.
2. The operation of the water tank 2 is controlled by the control button 12, and the cleaning liquid in the water tank 2 is conveyed into the guide pipe 42 through the water pipe 21 and then is sprayed out through the external spray head 71 of the water spraying device 7.
3. The control button 12 controls the rotating motor 31 to rotate to drive the connecting rod 32 to rotate, the connecting rod 32 drives the rotating rod 41 to rotate, the rotating rod 41 drives the brush 6 to rotate, and the bristles on the brush 6 clean the inside of the gap.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (7)

1. The utility model provides an inside clean device of photoresist liquid filling machine filling, includes control box, water tank, motor box, connecting device, connecting block, brush and water jet equipment, its characterized in that: the control box bottom is equipped with the handle, and the control box outside is equipped with control button, the inside water tank of installing of control box, and the water tank upper end is equipped with four water pipes, the water pipe other end and connecting device internal connection, and the control box upper end is equipped with the motor box, and the inside rotating electrical machines that is equipped with of motor box, rotating electrical machines front end are equipped with the connecting rod, and the connecting rod is connected with connecting device, and connecting device one end is connected with the motor box, connecting block and connecting device other end fixed connection, and brush and water jet equipment all can be dismantled with the connecting block.
2. The apparatus of claim 1, wherein the photoresist filling machine comprises: the external control button of the control box is connected with the water tank and the rotating motor through lines, and a handle at the bottom of the control box is provided with a plurality of grooves.
3. The apparatus of claim 1, wherein the photoresist filling machine comprises: the top end in the water tank is provided with a micro water pump, the micro water pump is controlled by a control button, the upper end of the micro water pump is provided with a water pipe, and the right side of the water tank is provided with a water filling opening.
4. The apparatus of claim 1, wherein the photoresist filling machine comprises: the connecting device is internally provided with four guide pipes, the four guide pipes are distributed in four directions of the connecting device, namely, the upper direction, the lower direction, the left direction and the right direction, one end of each guide pipe is connected with a water pipe, the other end of each guide pipe is connected with the connecting block, the rotating rod is arranged in the middle of the inside of the connecting device, one end of each rotating rod is fixedly connected with the rotating shaft, the rotating shaft is rotatably connected with the inside of the connecting device, the outside of the rotating shaft is fixedly connected with.
5. The apparatus of claim 1, wherein the photoresist filling machine comprises: the middle of the connecting block is provided with a rotating rod, the outside of the rotating rod is fixedly connected with a connecting shaft, the connecting shaft is rotatably connected with the connecting block, the connecting shaft is provided with a connecting hole, the connecting block is provided with a guide pipe in the vertical and horizontal directions, the outer side of the guide pipe is provided with a guide pipe connecting block, and the guide pipe connecting block is provided with a guide pipe connecting hole.
6. The apparatus of claim 1, wherein the photoresist filling machine comprises: the brush outside is equipped with the brush hair connecting block, is equipped with the brush hair on the brush hair connecting block, and the brush inboard is equipped with the brush connecting rod, and the brush connecting rod other end is equipped with the brush connecting block, is equipped with a plurality of connecting holes that correspond with the connecting epaxial connecting hole of connecting on the brush connecting block.
7. The apparatus of claim 1, wherein the photoresist filling machine comprises: the outer side of the water spraying device is provided with four spray heads, a plurality of spray holes are formed in the spray heads, the spray heads are connected with a water spraying chamber in the water spraying device, the water spraying chamber is connected with a water spraying device outer side insertion pipe, a water spraying device connecting block is arranged on the outer side of the insertion pipe, a water spraying device connecting hole is formed in the water spraying device connecting block, and the water spraying device connecting hole is formed in the gap between the spray.
CN201921368645.5U 2019-08-22 2019-08-22 Filling internal cleaning device of photoresist filling machine Active CN210620199U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921368645.5U CN210620199U (en) 2019-08-22 2019-08-22 Filling internal cleaning device of photoresist filling machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921368645.5U CN210620199U (en) 2019-08-22 2019-08-22 Filling internal cleaning device of photoresist filling machine

Publications (1)

Publication Number Publication Date
CN210620199U true CN210620199U (en) 2020-05-26

Family

ID=70755022

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921368645.5U Active CN210620199U (en) 2019-08-22 2019-08-22 Filling internal cleaning device of photoresist filling machine

Country Status (1)

Country Link
CN (1) CN210620199U (en)

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