CN210604689U - Slide glass antiskid based on probe station - Google Patents
Slide glass antiskid based on probe station Download PDFInfo
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- CN210604689U CN210604689U CN201921102352.2U CN201921102352U CN210604689U CN 210604689 U CN210604689 U CN 210604689U CN 201921102352 U CN201921102352 U CN 201921102352U CN 210604689 U CN210604689 U CN 210604689U
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- antiskid
- strip
- slide
- wafer
- probe station
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Abstract
The utility model discloses a slide glass antiskid based on probe platform, including the slide holder, fixed first antiskid and the second antiskid that is equipped with on the slide holder roof, first antiskid includes that the edge inwards fixes in proper order from the slide holder hinders strip, second and the third hinders the strip. When the wafer is placed on the wafer carrying table for testing, the first anti-skid device and the second anti-skid device are matched to play a role in blocking anti-skid on the wafer, so that the wafer is prevented from sliding and breaking, and production loss is avoided.
Description
Technical Field
The utility model relates to a probe station equipment field specifically is slide glass antiskid based on probe station.
Background
In the processes of research and development, production manufacturing and actual effect analysis of semiconductor industry, photoelectric industry, integrated circuit and packaging test, electrical parameters inside a wafer are often measured, because the size of a wafer is smaller and smaller, a test device on the wafer is also smaller and smaller, and a simple multimeter and a stylus of an oscilloscope are not used for detecting signals, so that a probe station is widely applied to precise electrical measurement of complex and high-speed devices, the quality and reliability of products are ensured, the research and development time and the cost of a product manufacturing process are reduced, and the conventional probe station device generally comprises: the device comprises a microscope, a probe seat and a slide holder, wherein the slide holder is used for holding a wafer to be tested.
At present, the upper surface of the existing wafer carrying table is a smooth plane and does not have a limiting and blocking effect, and wafers easily slide off the wafer carrying table in the test operation process, so that the risk of fragments is caused, and the production loss is caused.
Disclosure of Invention
The utility model aims to provide a: to above-mentioned current slide glass bench surface be smooth plane, do not have spacing effect of stopping, and the wafer is easy from slide glass bench landing in test operation process, causes the risk of piece, causes the problem of loss to production, the utility model provides a slide glass antiskid based on probe platform.
The utility model adopts the technical scheme as follows:
the slide glass anti-skidding device based on the probe station comprises a slide glass station, wherein a first anti-skidding device and a second anti-skidding device are fixedly arranged on the top wall of the slide glass station, and the first anti-skidding device comprises a first blocking strip, a second blocking strip and a third blocking strip which are sequentially fixed inwards from the edge of the slide glass station.
The working principle is as follows: when the wafer is placed on the wafer carrying table for testing, the first anti-skid device and the second anti-skid device are matched to play a role in blocking anti-skid on the wafer, so that the wafer is prevented from sliding and breaking, and production loss is avoided.
Further, the first resistance strip, the second resistance strip and the third resistance strip are in a concentric ring structure.
Further, the height of the first resistance strip is 1-3 mm higher than that of the second resistance strip and that of the third resistance strip.
Further, the first blocking strip, the second blocking strip and the third blocking strip are made of rubber materials.
Further, the second anti-skid device is an anti-skid convex point fixed among the first resistance strip, the second resistance strip and the third resistance strip.
Furthermore, the antiskid salient points are all made of rubber materials.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses a fixed first antiskid and the second antiskid that is equipped with on slide holder roof, first antiskid and the cooperation of second antiskid play the effect of hindering the antiskid to the wafer, avoid the wafer landing broken, avoid production to cause the loss.
Drawings
FIG. 1 is a cross-sectional view of the slide anti-skid device based on a probe station;
fig. 2 is a top view of the slide anti-skid device based on the probe station.
Labeled as: 1-slide holder, 2-first antiskid device, 201-first resistance strip, 202-second resistance strip, 203-third resistance strip, 3-second antiskid device and 301-antiskid salient point.
Detailed Description
All features disclosed in this specification may be combined in any combination, except features and/or steps that are mutually exclusive.
The present invention will be described in detail with reference to fig. 1 and 2.
Example 1
The structure of the embodiment, as shown in fig. 1, is a probe station-based slide glass anti-skid device, which includes a slide glass table 1, a first anti-skid device 2 and a second anti-skid device 3 are fixedly disposed on a top wall of the slide glass table 1, and the first anti-skid device 2 includes a first blocking strip 201, a second blocking strip 202 and a third blocking strip 203 which are sequentially fixed from an edge of the slide glass table 1 to an inside.
When the wafer is placed on the wafer carrying table 1 for testing, the first anti-skid device 2 and the second anti-skid device 3 are matched to block the wafer from skidding, so that the wafer is prevented from falling and being broken, and the loss caused by production is avoided.
Example 2
In this embodiment, on the basis of embodiment 2, further, the first blocking strip 201, the second blocking strip 202, and the third blocking strip 203 are concentric circular structures, and have a strong anti-slip effect.
Example 3
In this embodiment, based on embodiment 3, further, the height of the first barrier bar 201 is 1 to 3mm higher than that of the second barrier bar 202 and the third barrier bar 203, and the first barrier bar 201 can block the edge of the wafer, so as to prevent the wafer from sliding off the edge.
Example 4
On the basis of embodiment 3, further, the first blocking strip 201, the second blocking strip 202 and the third blocking strip 203 are made of rubber, so that the anti-slip effect is strong, and the wafer is not easily scratched.
Example 5
In this embodiment, on the basis of embodiment 1, further, the second anti-skid device 3 is an anti-skid convex point 301 fixed among the first blocking strip 201, the second blocking strip 202 and the third blocking strip 203, and is matched with the first anti-skid device 2, so that a stronger anti-skid effect is achieved.
Example 6
In this embodiment, on the basis of embodiment 5, further, the anti-slip bumps 301 are made of rubber, so as to prevent the wafer from being scratched.
Claims (6)
1. Slide glass antiskid based on probe platform, including slide holder (1), its characterized in that, fixed first antiskid (2) and second antiskid (3) of being equipped with on slide holder (1) roof, first antiskid (2) are including hindering strip (201), second and hindering strip (202) and third from slide holder (1) edge inwards fixed in proper order hinder strip (203).
2. The probe station based slide antiskid device of claim 1, wherein the first resistive bar (201), the second resistive bar (202), and the third resistive bar (203) are concentric circular ring structures.
3. The probe station based slide anti-skid device as claimed in claim 1, wherein the first resistive bar (201) is 1-3 mm higher than the height of the second resistive bar (202) and the third resistive bar (203).
4. The probe station based slide antiskid device of claim 3, wherein the first resistive strip (201), the second resistive strip (202), and the third resistive strip (203) are rubber.
5. The probe station based slide anti-skid device as claimed in claim 1, wherein the second anti-skid device (3) is an anti-skid bump (301) fixed between the first resistance bar (201), the second resistance bar (202) and the third resistance bar (203).
6. The probe station based slide anti-skid device as claimed in claim 5, wherein the anti-skid bumps (301) are rubber material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921102352.2U CN210604689U (en) | 2019-07-15 | 2019-07-15 | Slide glass antiskid based on probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921102352.2U CN210604689U (en) | 2019-07-15 | 2019-07-15 | Slide glass antiskid based on probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210604689U true CN210604689U (en) | 2020-05-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921102352.2U Active CN210604689U (en) | 2019-07-15 | 2019-07-15 | Slide glass antiskid based on probe station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210604689U (en) |
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2019
- 2019-07-15 CN CN201921102352.2U patent/CN210604689U/en active Active
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