CN210529058U - Waveguide assembly and microwave plasma chemical vapor deposition device - Google Patents
Waveguide assembly and microwave plasma chemical vapor deposition device Download PDFInfo
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- CN210529058U CN210529058U CN201920997386.6U CN201920997386U CN210529058U CN 210529058 U CN210529058 U CN 210529058U CN 201920997386 U CN201920997386 U CN 201920997386U CN 210529058 U CN210529058 U CN 210529058U
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 36
- 239000000110 cooling liquid Substances 0.000 claims abstract description 93
- 239000002826 coolant Substances 0.000 claims abstract description 64
- 239000007788 liquid Substances 0.000 abstract description 57
- 230000008676 import Effects 0.000 abstract description 8
- 230000003245 working effect Effects 0.000 description 7
- 239000012809 cooling fluid Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model relates to a microwave plasma chemical vapor deposition technical field especially relates to a waveguide component and microwave plasma chemical vapor deposition device, the waveguide component includes the waveguide body, the waveguide body is used for arranging between tuner and mode converter in order to conduct the microwave; the cooling liquid groove has been seted up on the lateral wall of waveguide body, and sealed mounting has the slotted apron in order to form the coolant liquid chamber on the cooling liquid groove, and the waveguide subassembly still includes the coolant liquid import and the coolant liquid export with the coolant liquid chamber intercommunication, through pour into the coolant liquid into in the coolant liquid intracavity in order to cool off the waveguide body. The waveguide body with lower temperature can cool the distributor in a heat transfer mode, so that the distributor is ensured to keep higher working performance, and meanwhile, the microwave plasma chemical vapor deposition device using the waveguide component keeps higher working performance.
Description
Technical Field
The utility model relates to a microwave plasma chemical vapor deposition technical field especially relates to a waveguide subassembly and microwave plasma chemical vapor deposition device.
Background
Microwave Plasma Chemical Vapor Deposition (MPCVD) is the most effective method for preparing high-quality diamond products, and is the preferred method for preparing high-speed, large-area and high-quality diamond films. According to international regulations, there are mainly two industrial MPCVD apparatuses, which are: a low-power MPCVD device with microwave frequency of 2.45GHz and 6-8kW and a high-power MPCVD device with microwave frequency of 915MHz and 60-100 kW. Structurally, along the transmission route of microwaves, the MPCVD apparatus includes a microwave generator for generating microwaves, a tuner, a waveguide for transmitting microwaves, a mode converter, a resonant cavity, and the like.
For example, the chinese patent publication No. CN104726850B discloses a microwave plasma chemical vapor deposition apparatus, which can generate microwaves with a frequency of 915MHz during operation, and has the characteristics of large deposition area and high production efficiency. However, in the operation process of the high-power MPCVD equipment with the microwave frequency of 915MHz, the transmitted microwave energy is large, which can cause the temperature of the tuner to be higher, influence the working performance of the tuner and further influence the efficiency of the whole MPCVD equipment for preparing the diamond film.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a waveguide assembly to solve the technical problem that its tuner temperature is higher and influences its working property among the microwave plasma chemical vapor deposition device operation among the prior art. An object of the utility model is to provide a microwave plasma chemical vapor deposition device to its tuner temperature is higher and influences whole microwave plasma chemical vapor deposition device performance in solving the microwave plasma chemical vapor deposition device operation among the prior art, and leads to the technical problem that microwave plasma chemical vapor deposition device work efficiency is low.
In order to achieve the above object, the utility model discloses well waveguide assembly adopts following technical scheme:
a waveguide assembly, comprising: a waveguide body for being arranged between the tuner and the mode converter to conduct microwaves; the waveguide assembly comprises a waveguide body, a cooling liquid tank, a groove cover plate, a cooling liquid cavity, a cooling liquid inlet and a cooling liquid outlet, wherein the outer side wall of the waveguide body is provided with the cooling liquid tank, the groove cover plate is hermetically mounted on the cooling liquid tank to form the cooling liquid cavity, the waveguide assembly further comprises the cooling liquid inlet and the cooling liquid outlet which are communicated with the cooling liquid cavity, and cooling liquid is injected into the cooling liquid cavity to cool the waveguide body.
The beneficial effects of the utility model reside in that: set up the coolant liquid chamber on the lateral wall of waveguide body, can cool off the waveguide body through injecting the coolant liquid in the coolant liquid chamber, reduce the temperature of waveguide body self, because the waveguide body sets up between tuner and mode converter, so, the lower waveguide body of temperature just can cool down the tuner through the mode of heat-conduction, avoids the tuner to influence its working property because of the temperature is higher.
Furthermore, the waveguide body is a rectangular pipe and comprises an upper waveguide plate, a lower waveguide plate, a left waveguide plate and a right waveguide plate which are assembled together in a split mode, wherein at least one waveguide plate is provided with the cooling liquid groove.
Has the advantages that: the waveguide body comprises an upper waveguide plate, a lower waveguide plate, a left waveguide plate and a right waveguide plate which are assembled together in a split mode, and therefore in the production process, the cooling liquid groove can be machined for each single waveguide body, and the cooling liquid groove on the waveguide body is machined more conveniently.
Furthermore, the assembling overlapping positions of the two waveguide plates which are assembled randomly are provided with correspondingly through bolt mounting holes, and the waveguide plates are fixedly assembled together through fastening bolts which are fastened and assembled in the bolt mounting holes so as to form the waveguide body.
Has the advantages that: the corresponding through bolt mounting holes are formed in the assembling overlapping positions of the two waveguide plates which are assembled at will, so that the structure of the whole waveguide body is more compact, and meanwhile, the waveguide plates are fixed together by fastening bolts, so that the waveguide plates are convenient to disassemble and assemble.
Furthermore, a plurality of bolt mounting holes are uniformly distributed on the two waveguide plates which are randomly assembled together in sequence along the axial direction of the waveguide body.
Has the advantages that: for any two waveguide plates which are assembled together, a plurality of bolt mounting holes are axially arranged along the waveguide body, so that the two waveguide plates can be assembled together more stably and firmly.
Further, the cooling fluid inlet and the cooling fluid outlet are disposed on the tank deck.
Has the advantages that: the cooling liquid inlet and the cooling liquid outlet are arranged on the groove cover plate with a relatively simple structure, so that the cooling liquid inlet and the cooling liquid outlet are convenient to install.
Further, the cooling liquid groove is a U-shaped groove which is provided with two branch groove sections which extend in parallel along the extending direction of the waveguide body.
Has the advantages that: the cooling liquid tank is arranged to be a U-shaped tank, so that the distribution density of the cooling liquid tank on the outer wall surface of the waveguide body can be increased, and the waveguide body is cooled by contact of cooling liquid with the waveguide body as much as possible at the same time.
Further, the groove cover plate is a U-shaped cover plate matched with the U-shaped groove in shape.
Has the advantages that: the groove cover plate is arranged to be the U-shaped cover plate matched with the U-shaped groove in shape, so that the material of the support groove cover plate is saved, and the production cost of the waveguide assembly is reduced.
Furthermore, the U-shaped cover plate is provided with two branch plate sections corresponding to the two branch groove sections of the U-shaped groove, the two branch plate sections are provided with opening ends used for forming U-shaped openings, and the cooling liquid inlet and the cooling liquid outlet are correspondingly arranged at the opening ends of the two branch plate sections.
Has the advantages that: set up the open end at two branch board sections with coolant liquid import and coolant liquid outlet correspondingly, to the coolant liquid groove of this board closing cap of U-shaped, coolant liquid import and coolant liquid outlet set up the both ends at the coolant liquid groove respectively, when the coolant liquid by coolant liquid import entering coolant liquid groove and by the coolant liquid outlet discharge, the whole coolant liquid groove of coolant liquid flow through, avoid the dead angle that the coolant liquid is difficult for flowing to appear in the coolant liquid intracavity, improve the utilization ratio of coolant liquid, make the coolant liquid chamber have more efficient cooling efficiency to the waveguide body.
The utility model provides a microwave plasma chemical vapor deposition device's technical scheme as follows:
the utility model provides a microwave plasma chemical vapor deposition device, includes microwave generator, tuner, mode converter, forms the outer cavity and the reacting chamber of resonant cavity, still including arranging the waveguide subassembly in order to conduct microwave between tuner and the mode converter, the waveguide subassembly includes the waveguide body, has seted up the cooling fluid groove on the lateral wall of waveguide body, and sealed mounting has the groove apron on the cooling fluid groove in order to form the coolant liquid chamber, the waveguide subassembly still include with coolant liquid import and the coolant liquid export of coolant liquid chamber intercommunication, through pour into the coolant liquid in the coolant liquid intracavity in order to cool off the waveguide body.
The beneficial effects of the utility model reside in that: set up the coolant liquid chamber on the lateral wall of waveguide body, can cool off the waveguide body through injecting the coolant liquid in the coolant liquid chamber, reduce the temperature of waveguide body self, because the waveguide body sets up between tuner and mode converter, so, the lower waveguide body of temperature just can cool down the tuner through heat-conducting mode, avoid the tuner to influence its working property because of the temperature is higher, and then ensure that the microwave plasma chemical vapor deposition device who is provided with this waveguide assembly has stable working property, produce with high efficiency.
Furthermore, the waveguide body is a rectangular pipe and comprises an upper waveguide plate, a lower waveguide plate, a left waveguide plate and a right waveguide plate which are assembled together in a split mode, wherein at least one waveguide plate is provided with the cooling liquid groove.
Has the advantages that: the waveguide body comprises an upper waveguide plate, a lower waveguide plate, a left waveguide plate and a right waveguide plate which are assembled together in a split mode, and therefore in the production process, the cooling liquid groove can be machined for each single waveguide body, and the cooling liquid groove on the waveguide body is machined more conveniently.
Furthermore, the assembling overlapping positions of the two waveguide plates which are assembled randomly are provided with correspondingly through bolt mounting holes, and the waveguide plates are fixedly assembled together through fastening bolts which are fastened and assembled in the bolt mounting holes so as to form the waveguide body.
Has the advantages that: the corresponding through bolt mounting holes are formed in the assembling overlapping positions of the two waveguide plates which are assembled at will, so that the structure of the whole waveguide body is more compact, and meanwhile, the waveguide plates are fixed together by fastening bolts, so that the waveguide plates are convenient to disassemble and assemble.
Furthermore, a plurality of bolt mounting holes are uniformly distributed on the two waveguide plates which are randomly assembled together in sequence along the axial direction of the waveguide body.
Has the advantages that: for any two waveguide plates which are assembled together, a plurality of bolt mounting holes are axially arranged along the waveguide body, so that the two waveguide plates can be assembled together more stably and firmly.
Further, the cooling fluid inlet and the cooling fluid outlet are disposed on the tank deck.
Has the advantages that: the cooling liquid inlet and the cooling liquid outlet are arranged on the groove cover plate with a relatively simple structure, so that the cooling liquid inlet and the cooling liquid outlet are convenient to install.
Further, the cooling liquid groove is a U-shaped groove which is provided with two branch groove sections which extend in parallel along the extending direction of the waveguide body.
Has the advantages that: the cooling liquid tank is arranged to be a U-shaped tank, so that the distribution density of the cooling liquid tank on the outer wall surface of the waveguide body can be increased, and the waveguide body is cooled by contact of cooling liquid with the waveguide body as much as possible at the same time.
Further, the groove cover plate is a U-shaped cover plate matched with the U-shaped groove in shape.
Has the advantages that: the groove cover plate is arranged to be the U-shaped cover plate matched with the U-shaped groove in shape, so that the material of the support groove cover plate is saved, and the production cost of the waveguide assembly is reduced.
Furthermore, the U-shaped cover plate is provided with two branch plate sections corresponding to the two branch groove sections of the U-shaped groove, the two branch plate sections are provided with opening ends used for forming U-shaped openings, and the cooling liquid inlet and the cooling liquid outlet are correspondingly arranged at the opening ends of the two branch plate sections.
Has the advantages that: set up the open end at two branch board sections with coolant liquid import and coolant liquid outlet correspondingly, to the coolant liquid groove of this board closing cap of U-shaped, coolant liquid import and coolant liquid outlet set up the both ends at the coolant liquid groove respectively, when the coolant liquid by coolant liquid import entering coolant liquid groove and by the coolant liquid outlet discharge, the whole coolant liquid groove of coolant liquid flow through, avoid the dead angle that the coolant liquid is difficult for flowing to appear in the coolant liquid intracavity, improve the utilization ratio of coolant liquid, make the coolant liquid chamber have more efficient cooling efficiency to the waveguide body.
Drawings
FIG. 1 is a schematic structural view of a microwave plasma CVD apparatus according to the present invention;
FIG. 2 is a schematic structural diagram of a waveguide body of the microwave plasma CVD apparatus according to the present invention;
fig. 3 is a schematic structural view of the upper waveguide plate in the present invention;
FIG. 4 is a schematic structural view of the left waveguide plate of the present invention without installing a groove cover plate;
FIG. 5 is a schematic structural view of the left waveguide plate of the present invention with a slot cover plate mounted thereon;
in the figure: 1-a microwave generator; 2-a circulator; 3-three-pin adapter; a 4-mode converter; 5-a sliding piston; 6-a waveguide assembly; 61-a waveguide body; 611-an upper waveguide plate; 6111-threaded hole; 6112-rectangular boss; 6113-upper waveguide plate body; 612-left waveguide plate; 6121-slot cover plate; 6122-coolant inlet; 6123-coolant outlet; 6124-cooling liquid bath; 6125-left waveguide board body; 6126-beam; 6127-counter bore; 613-lower waveguide plate; 614-right waveguide plate; 7-a resonant cavity; 8-a reaction chamber.
Detailed Description
When the microwave plasma chemical vapor deposition device works, the microwave plasma chemical vapor deposition device can be divided into a low-power microwave plasma chemical vapor deposition device and a high-power microwave plasma chemical vapor deposition device according to the power of the microwave plasma chemical vapor deposition device, wherein the low-power microwave plasma chemical vapor deposition device is used for 6-8kW of power, and the high-power microwave plasma chemical vapor deposition device is used for 60-100kW of power. The utility model discloses the microwave plasma chemical vapor deposition device of well waveguide subassembly mainly used high power to solve the microwave plasma chemical vapor deposition device of high power and easily appear the high temperature and influence the technical problem of working property at the during operation tuner. Of course, if the low-power microwave plasma chemical vapor deposition device also needs to cool its tuner under some operating conditions, the waveguide assembly of the present invention can also be used in the low-power microwave plasma chemical vapor deposition device. The microwave plasma chemical vapor deposition apparatus provided with the waveguide assembly of the present invention will be described first.
The utility model discloses well microwave plasma chemical vapor deposition device's embodiment 1 in this embodiment to adopt three pin tuners as the microwave plasma chemical vapor deposition device of tuner to introduce as the example. As shown in fig. 1 to 4, the microwave plasma chemical vapor deposition apparatus mainly includes a microwave generator 1, a circulator 2, a three-pin dispenser 3, a mode converter 4, a sliding piston 5, and a reaction chamber 8 located in a resonant cavity 7.
During specific work, microwaves generated in the microwave generator 1 enter the resonant cavity 7 after passing through the circulator 2, the three-pin tuner 3, the mode converter 4 and the sliding piston 5, so that gas in the reaction chamber 8 reacts and deposits on a corresponding substrate to obtain a diamond film. The three-pin tuner 3 is based on the principle of stub tuning valves, can realize the matching of load admittance in a larger range, and the structure and the working principle thereof belong to the prior art and are not described again. As to the dispenser options, in other embodiments, other models of dispensers may be used, such as a three E-T dispenser, a dual T dispenser, and so forth.
In order to avoid at the during operation, lead to self working property to descend because of three pin tuners 3 high temperature, and influence microwave plasma chemical vapor deposition device's working property, the utility model discloses in, set up the waveguide subassembly 6 of conduction microwave between mode converter 4 and three pin tuners 3, adopt waveguide subassembly 6 to carry out cooling to three pin tuners 3.
Specifically, the waveguide assembly 6 includes a waveguide body 61, in this embodiment, the waveguide body 61 has a specific structure as shown in fig. 2, and the waveguide body 61 has a rectangular tube structure, and includes an upper waveguide plate 611, a left waveguide plate 612, a lower waveguide plate 613, and a right waveguide plate 614, which are separately assembled together. In other embodiments, the waveguide body may also be a structure with more than four cross-sectional edges, for example, the cross-section of the waveguide body is hexagonal, octagonal, or the like, or the waveguide body may be a tube with less than four cross-sectional edges, for example, the cross-section of the waveguide body is triangular. Of course, the waveguide body may also be a circular tubular structure.
In order to enable the waveguide body 61 to cool the three-pin tuner 3 arranged adjacent to the waveguide body 61, a cooling liquid groove is formed on the outer side wall of the waveguide body 61. Taking the left waveguide plate 612 as an example, as shown in fig. 4 and 5, a cooling liquid groove 6124 is formed on the outer wall surface of the left waveguide plate 612, a groove cover plate 6121 is hermetically mounted on the cooling liquid groove 6124 to form a cooling liquid cavity for containing cooling liquid, and a cooling liquid inlet 6122 and a cooling liquid outlet 6123 are formed on the groove cover plate 6121.
In this embodiment, the left waveguide plate 612, the lower waveguide plate 613, and the right waveguide plate 614 are all provided with cooling liquid tanks, the waveguide body is provided with a split structure, and independent cooling liquid tank processing can be conveniently performed on each waveguide plate. Of course, on the premise of meeting the cooling requirement, in order to reduce the production cost, a cooling liquid cavity can be arranged on a certain waveguide plate. When the upper waveguide plate also has a space on its outer side wall in which a cooling liquid tank can be opened, the upper waveguide plate may also have a cooling liquid tank.
In this embodiment, as shown in fig. 4, the cooling liquid groove 6124 is a U-shaped groove, the U-shaped groove has two branch groove sections that both extend in parallel along the extending direction of the waveguide body 61, correspondingly, as shown in fig. 5, the groove cover plate 6121 is also a U-shaped cover plate, the U-shaped cover plate has two branch plate sections that correspond to the two branch groove sections of the U-shaped groove, the two branch plate sections have open ends for forming a U-shaped opening, and the cooling liquid inlet 6122 and the cooling liquid outlet 6123 are tubular structures that are respectively disposed on the open ends of the two branch plate sections of the U-shaped cover plate. The cooling liquid enters the cooling liquid cavity through the cooling liquid inlet 6122 and flows out of the cooling liquid outlet 6123 after flowing through the whole cooling liquid cavity, so that dead corners, which are difficult to flow, of the cooling liquid in the cooling liquid cavity are avoided, the waveguide body 61 is effectively cooled, the waveguide body 61 has lower temperature, and meanwhile, the waveguide body 61 with lower temperature cools the three-pin tuner 3 in a heat conduction mode.
In other embodiments, the coolant inlet and the coolant outlet may be located at any position on the channel cover plate, while ensuring acceptable cooling. The cooling liquid inlet and the cooling liquid outlet can be orifices arranged on corresponding positions of the tank cover plate, and when in use, corresponding pipes for supplying and recovering the cooling liquid are inserted into the cooling liquid cavity through the corresponding orifices. Of course, the cooling liquid inlet and the cooling liquid outlet may also be tubular structures arranged on the bottom of the cooling liquid tank, the bottom end of the tubular structure is fixed at the bottom of the cooling liquid tank, meanwhile, through holes for the cooling liquid to pass through are formed in the circumferential side wall of the tubular structure close to the bottom end, and correspondingly, the tank cover plate is provided with avoiding holes for avoiding the tubular structure.
In this embodiment, the upper waveguide plate 611 includes an upper waveguide plate body 6113, rectangular bosses 6112 are disposed at the front and rear ends of the upper surface of the upper waveguide plate body 6113, the left and right ends of the rectangular bosses 6112 are flush with the left and right end surfaces corresponding to the upper waveguide plate body 6113, the front end surface of the rectangular boss 6112 located at the front end of the upper waveguide plate body 6113 is flush with the front end surface of the upper waveguide plate body 6113, and the rear end surface of the rectangular boss 6112 located at the rear end of the upper waveguide plate body 6113 is flush with the rear end surface of the upper waveguide plate body 6113. Threaded holes 6111 are formed in the left side surface and the right side surface of the upper waveguide plate body 6113 and the rectangular boss 6112. The structure of the lower waveguide body corresponds to the structure of the upper waveguide body 6113.
The structure of the left waveguide plate 612 is as shown in fig. 4 and 5, the left waveguide plate 612 includes a left waveguide plate body 6125, two ends of the left waveguide plate body are provided with beams 6126, upper and lower ends of the beams 6126 overhang the upper and lower sides of the left waveguide plate body 6125, and the overhang length is equal to the thickness of the rectangular boss 6112 on the upper waveguide plate body 6113. The left waveguide plate 612 is provided with counter bores 6127 corresponding to the threaded holes 6111 of the upper waveguide plate 611 and the lower waveguide plate 613. The structure of the right waveguide plate 614 is the same as the structure of the left waveguide plate 612, so that the left waveguide plate 612 and the right waveguide plate 614 may be interchanged.
During assembly, the upper waveguide plate 611, the lower waveguide plate 613, the left waveguide plate 612 and the right waveguide plate 614 are overlapped at corresponding positions for assembly, corresponding threaded holes 6111 and counter bores 6127 correspondingly penetrate to form bolt mounting holes, and the waveguide bodies are fixedly assembled together to form the waveguide body 61 by mounting fixing bolts in the bolt mounting holes. In this embodiment, the threaded holes on the upper waveguide plate and the lower waveguide plate are uniformly distributed in sequence along the axial direction of the waveguide body, correspondingly, the counter bores on the left waveguide plate and the right waveguide plate are also uniformly distributed in sequence along the axial direction of the waveguide body, so that the bolt mounting holes on the two waveguide plates which are assembled together at will are uniformly distributed in sequence along the axial direction of the waveguide body, and the waveguide plates can be stably fixed together through a plurality of bolts. In other embodiments, the number of bolt mounting holes may be determined according to actual circumstances.
After the assembly is completed, the rectangular bosses at the front ends of the upper waveguide plate and the lower waveguide plate are correspondingly connected with the cross beams at the front ends of the left waveguide plate and the right waveguide plate to form a front frame of the waveguide body 61, the rectangular bosses at the rear ends of the upper waveguide plate and the lower waveguide plate are correspondingly connected with the cross beams at the rear ends of the left waveguide plate and the right waveguide plate to form a rear frame of the waveguide body 61, and mounting holes for mounting the waveguide body 61 on the device are formed in the front frame and the rear frame of the waveguide body 61.
In other embodiments, the upper waveguide plate, the lower waveguide plate, the left waveguide plate and the right waveguide plate may be only configured as a plate-shaped structure, the four waveguide plates are partially overlapped and clamped together by two rectangular ring frames to form a waveguide body, and meanwhile, the two ring frames are provided with corresponding mounting holes to serve as a front frame and a rear frame to facilitate the installation of the waveguide assembly on a corresponding device.
The utility model provides a microwave plasma chemical vapor deposition device is at the during operation, and the coolant liquid is imported by the coolant liquid and is got into the coolant liquid chamber, flows from the coolant liquid export, and in this embodiment, the coolant liquid is the cooling water, and in other embodiments, coolant oil, automobile-used coolant liquid etc. can also be chooseed for use to the coolant liquid.
The utility model discloses well waveguide assembly's embodiment: the waveguide assembly comprises a waveguide body, the waveguide body is used for being arranged between mode converters of the tuner to conduct the waveguide, a cooling liquid groove is formed in the outer side wall of the waveguide body, a groove cover plate is sealed on the cooling liquid groove to form a cooling liquid cavity, and the waveguide assembly further comprises a cooling liquid inlet and a cooling liquid outlet which are communicated with the cooling liquid cavity. The structures of the cooling liquid tank and the tank cover plate, and the arrangement positions and the mode of the cooling liquid inlet and the cooling liquid outlet are the same as those of the waveguide component in the microwave plasma chemical vapor deposition device, and are not described again.
Claims (9)
1. A waveguide assembly, comprising: a waveguide body for being arranged between the tuner and the mode converter to conduct microwaves;
the waveguide component is characterized in that a cooling liquid groove is formed in the outer side wall of the waveguide body, a groove cover plate is hermetically mounted on the cooling liquid groove to form a cooling liquid cavity, the waveguide component further comprises a cooling liquid inlet and a cooling liquid outlet which are communicated with the cooling liquid cavity, and cooling liquid is injected into the cooling liquid cavity to cool the waveguide body.
2. The waveguide assembly of claim 1, wherein the waveguide body is a rectangular tube, the waveguide body includes an upper waveguide plate, a lower waveguide plate, a left waveguide plate and a right waveguide plate, which are assembled together, and at least one of the waveguide plates has the cooling liquid slot.
3. The waveguide assembly of claim 2, wherein: the assembly overlapping positions of the two waveguide plates which are assembled randomly are provided with correspondingly through bolt mounting holes, and the waveguide plates are fixedly assembled together through fastening bolts which are fastened and assembled in the bolt mounting holes to form the waveguide body.
4. A waveguide assembly according to claim 3, wherein: a plurality of bolt mounting holes are uniformly distributed on the two waveguide plates which are assembled together randomly along the axial direction of the waveguide body.
5. A waveguide assembly according to any one of claims 1 to 4, wherein: the cooling liquid inlet and the cooling liquid outlet are arranged on the tank cover plate.
6. A waveguide assembly according to any one of claims 1 to 4, wherein: the cooling liquid groove is a U-shaped groove which is provided with two branch groove sections which extend in parallel along the extension direction of the waveguide body.
7. The waveguide assembly of claim 6, wherein the slot cover plate is a U-shaped cover plate that conforms to the shape of the U-shaped slot.
8. The waveguide assembly of claim 7, wherein the U-shaped cover plate has two leg sections corresponding to the two leg sections of the U-shaped channel, the two leg sections having open ends for forming the U-shaped openings, the coolant inlet and the coolant outlet being disposed at the open ends of the two leg sections, respectively.
9. A microwave plasma chemical vapor deposition device comprises a microwave generator, a tuner, a mode converter, an outer cavity forming a resonant cavity and a reaction chamber,
characterized in that a waveguide assembly according to any one of claims 1-8 is arranged between the tuner and the mode converter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201920997386.6U CN210529058U (en) | 2019-06-28 | 2019-06-28 | Waveguide assembly and microwave plasma chemical vapor deposition device |
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| CN201920997386.6U CN210529058U (en) | 2019-06-28 | 2019-06-28 | Waveguide assembly and microwave plasma chemical vapor deposition device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114784478A (en) * | 2022-04-12 | 2022-07-22 | 中国科学院近代物理研究所 | Semi-hollow microwave resonant cavity and manufacturing method and mold thereof |
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2019
- 2019-06-28 CN CN201920997386.6U patent/CN210529058U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114784478A (en) * | 2022-04-12 | 2022-07-22 | 中国科学院近代物理研究所 | Semi-hollow microwave resonant cavity and manufacturing method and mold thereof |
| CN114784478B (en) * | 2022-04-12 | 2024-03-26 | 中国科学院近代物理研究所 | Semi-hollow microwave resonant cavity and manufacturing method and mold thereof |
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Effective date of registration: 20231127 Address after: 450000, Building 9, Qidi Zhengdong Science and Technology City (Qichuangyuan), Longhu Zhonghuan North Road, Zhengdong New District, Zhengzhou City, Henan Province, China Patentee after: Jinggong Ruiyi Technology (Henan) Co.,Ltd. Address before: 450000 No. 121, Wu Tong Street, hi tech Zone, Zhengzhou, Henan Patentee before: ZHENGZHOU RESEARCH INSTITUTE FOR ABRASIVES & GRINDING Co.,Ltd. |